KR101080500B1 - Mask box for keeping blank mask - Google Patents

Abstract

The present invention relates to a mask box for storing a blank mask, the lower case of which is formed in the form of an open top of the box and the receiving portion provided in a form facing each other inside the lower case, a plurality of blank masks arranged to be spaced apart And a partition formed between the respective accommodating parts so that the plurality of blank masks can be accommodated in separate spaces, and an upper case and the lower case coupled to an upper part of the lower case to close the accommodating part of the lower case. And a fixing part which is formed in engagement with each other on the side wall of the upper case and the side wall of the upper case, to hold the lower case and the upper case in an engaged state, and to seal the independent space formed by the partition. Partition covers are formed in the upper portion of the respective accommodating portion By further including, the foreign matter is not attached to the blank mask during transport and storage of the blank mask, the blank mask can be protected from external impact as well as to facilitate the carrying of the blank mask will be.

Description

Mask box for the blank mask storing {MASK BOX FOR KEEPING BLANK MASK}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mask box for storing a blank mask, and more particularly to a technique for packaging a plurality of blank masks to facilitate transportation and storage, and to facilitate protection from foreign matter.

Blank masks are widely used as raw materials for photo masks used in photolithography processes. Such blank masks are generally classified into a binary blank mask and a phase inversion blank mask.

The binary blank mask is formed by sequentially laminating a light blocking film, an antireflection film and a resist film on a transparent substrate, and the phase inverting blank mask is formed by sequentially laminating a phase inversion film, a light blocking film, an antireflection film and a resist film on a transparent substrate.

The blank mask is generally manufactured by the blank mask manufacturer and then transferred to the photo mask manufacturer for use in the manufacture of the photo mask. Therefore, in order to manufacture a high quality photo mask, the blank mask, which is a raw material, must be transported and stored to maintain a high quality state.

For example, the transport of the blank mask should prevent foreign matter from adhering to the blank mask and protect the blank mask from damage from the impact of carrying.

In particular, in order to form a fine pattern, minimizing adhesion of foreign matter to the blank mask, which is a raw material of the photo mask, is essential in the manufacturing process as well as the transport process of the blank mask.

For the reasons described above, there is a need to develop a blank mask storage mask box suitable for transporting the blank mask in a high quality state, but a satisfactory level of products has not yet come out.

1 is a perspective view schematically showing a mask box according to the prior art, and FIG. 2 is a plan view schematically showing a mask box according to the prior art.

1 and 2, the mask box is provided with an upper portion of the mask box and a lower case 10 including an accommodating portion 15. In this case, the plurality of blank masks 30 having a rectangular plate shape are disposed to be spaced apart from each other by the receiving part 15 in the thickness direction of each blank mask.

Next, an upper case 40 coupled to the upper portion of the lower case 10 is provided to completely close the housing 15 of the lower case 10.

Next, a lower clasp 20 and an upper clasp 50 are provided to maintain the sealed state of the lower case 10 and the upper case 40.

Here, in the case of the existing 5 inch or 6 inch mask box, as shown above, five blank masks 30 are put together in one box. In this case, when the box is opened, the foreign matter enters the mask box due to environmental influence or handling miss.

In addition, when the five blank masks 30 are taken out one by one after the mask box is opened, foreign matters are very likely to be introduced because the maximum number of blank masks 30 should be opened and closed five times as necessary.

Looking at the actual production application example, such a problem occurs very frequently, especially the fourth or fifth blank masks appear to be more than 70% failure occurs.

As described above, in the process of forming a fine pattern on the blank mask, if the size of the foreign matter introduced to the blank mask surface is small, it can be removed by a repair process. It is classified as a killing defect, resulting in large economic and time loss.

According to the present invention, a blank mask is stored in which the foreign material is not attached to the blank mask during transport and storage of the blank mask, and the blank mask can be protected from external shocks and the structure of the blank mask can be easily transported. It is an object to provide a mask box for the purpose.

According to another aspect of the present invention, a mask box for storing a blank mask includes a lower case formed in a box shape having an open upper portion, a receiving portion provided in a form facing each other inside the lower case, and allowing a plurality of blank masks to be spaced apart from each other; Partitions formed between the respective accommodating parts so that the plurality of blank masks may be stored in separate spaces, and an upper case coupled to an upper part of the lower case to close the accommodating part of the lower case, and sidewalls of the lower case. And a fixing part which is formed in the form of engaging with each other on the side wall of the upper case, to maintain the coupling state of the lower case and the upper case.

Here, the partition cover is formed on the upper portion of each of the accommodating portion so as to seal the independent space formed by the partition further comprises.

According to the present invention having the above-described configuration, it is possible to prevent external foreign matters from entering the mask box and contaminate the blank mask, and further, to prevent the surface of the blank mask from being damaged during the storing of the blank mask. In addition, it is possible to prevent the impact is applied to the case during the coupling and separation of the case, it is possible to prevent the foreign matter is attached to the blank mask by the impact even if the foreign matter remains in the case. Therefore, the present invention can maximize the efficiency of the mask manufacturing process, and provides an effect that can increase the economic benefits of reducing defects.

The present invention does not adhere to foreign matters on the blank mask during transport and storage of the blank mask, and the top of the blank mask is not only to be protected from external impact but also to facilitate carrying of the blank mask. A lower case formed in the form of a box, facing each other inside the lower case, and having a plurality of blank masks spaced apart from each other, and a plurality of blank masks to be stored in separate spaces, respectively. Partitions are formed between the receiving portion and the upper case coupled to the upper portion of the lower case to close the receiving portion of the lower case and formed in the form of engaging with each other on the side wall of the lower case and the side wall of the upper case, respectively, the lower case and the upper case It includes a fixed part to maintain the state of engagement And it provides a mask box further comprising a partition cover formed on each of the receiving portion to seal the independent space formed by the partition.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Advantages and features of the present invention and methods for achieving them will be apparent with reference to the embodiments described below in detail with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in various forms, and only the present embodiments are intended to complete the disclosure of the present invention, and the general knowledge in the art to which the present invention pertains. It is provided to fully convey the scope of the invention to those skilled in the art, and the present invention is defined only by the scope of the claims. Like reference numerals refer to like elements throughout.

3 is a perspective view schematically showing a mask box according to the present invention, Figure 4 is a plan view schematically showing a lower case of the mask box according to the present invention.

In addition, Figure 5 is a plan view schematically showing a partition and a partition cover formed on the lower case of the mask box according to the present invention, hereinafter will be described collectively without distinction.

First, the blank mask storage mask box is largely provided with a lower case 100, an upper case 140, and fixing parts 120 and 150 capable of maintaining a combined state thereof.

The lower case 100 is formed in a box shape with an open upper portion, and basically includes an accommodating part 115 for placing the blank mask 130 in a thickness direction therein.

Here, the accommodating part 115 is provided with a 'c' shaped guide rail into which the blank mask 130 may be inserted so as to face each other on the inner sidewall of the lower case 100. Here, the storage unit 115 refers to a pair of guide rails facing each other, and the storage unit 115 has a plurality of blank masks 130 formed in a square plate shape so as to be spaced apart from each other in a thickness direction. It is desirable to be provided to be arranged. Although the illustrated shape is formed on the long side of the rectangular lower case 100, the lower case 100 may be a square shape, the present invention is not limited by the positional relationship in which the housing 115 is formed.

In addition, when the blank mask 130 is fitted to the groove inner wall constituting the guide rail, the blank mask 130 is supported so as not to move, and the shock transmitted from the lower case 100 to the blank mask 130 is alleviated. Protruding portions (not shown) may be formed. The protrusion is formed in a convex upward shape, it is preferable to form so that the area in contact with the surface of the blank mask 130 can be minimized. The reason for minimizing the area in contact with the protrusions is that the friction is generated between the blank mask 130 and the protrusions are not easy to receive or minimize the problem that the surface of the blank mask 130 is damaged, the impact relief This is to ensure that the function is fully performed.

Next, handling portions (not shown) may be further formed on both outer sides of the lower case 100 to carry the carrier. As an embodiment according to the present invention, the handling part may be formed in a groove shape into which the carrier's finger can be inserted, but the present invention is not limited thereto.

Next, the present invention further includes a partition 160 in the lower case 100 having the above structure, so that each of the blank masks 130 may be stored in an independent space. In this case, the partition 160 is formed between each receiving portion 115, and preferably provided in a form capable of completely sealing the inner wall of the lower case 100.

By forming the partitions 160 as described above, foreign matters such as dust do not enter the lower case 100, and even if some foreign matters inevitably enter the other blank mask 130 by the partitions 160. A problem that may be transferred to contaminate the entire blank mask 130 may be solved.

Next, a cushion member (not shown) made of a shock absorbing material may be further formed on the inner front surface of the lower case 100. In FIG. 4, the outer case of the lower case 100 is provided with a thickness to indirectly represent the cushioning member. Such a cushioning member is a bottom surface of the lower case 100, the storage unit 115, and a partition ( The same may be applied to 160).

Here, the lower case 100, the housing 115, the partition 160 and the cushion members are preferably made of any one of polypropylene, polycarbonate, polyester and polyamide. In particular, the cushion members are preferably formed of a shock absorbing material such as polyester, and the lower case 100, the receiving unit 115 and the partition 160 itself is formed to act as a cushion member, or each It can be formed to act as a cushioning member by allowing further layers to be formed on the surface of the construction.

In addition, an absorbing member (not shown) may be further formed on the surfaces of the lower case 100, the housing 115, the partition 160, and the cushion members. The absorbing member is made of a hydrophilic zeolite or silica gel, and is formed to absorb moisture and outgas. Therefore, even when the blank mask 130 is stored in the mask box for a long time, the quality of the blank mask can be maintained at the best state.

Finally, a partition cover 170 may be further formed to seal each independent space formed by the partition 160 so as to maximize the above-described effects of preventing dust, shock absorption, and hygroscopicity.

Here, the partition cover 170 may be formed at a position corresponding to the housing 115 and the blank mask 130 as can be seen by comparing FIGS. 4 and 5, and the storage of the blank mask 130 is performed. It should be formed in a shape that does not disturb in consideration of the consideration.

The partition cover 170 may be formed of a sliding type sliding type or a sliding type cap type, and all of the above-described cushioning members or absorbing members may be applied thereto.

Next, the upper case 140 which can cover all the members associated with the lower case 100 and seal the lower case 100 is provided, the lower case 100 and the upper case 140 Fixing parts 120 and 150 are provided to maintain the coupled state.

Here, both the cushion member or the moisture absorbing member may be applied to the inner wall of the upper case 140, and a sealing member such as an O-ring may be further formed at a portion where the lower case 100 and the upper case 140 are coupled to each other. . In addition, the fixing parts 120 and 150 are provided with a lower clasp 120 and an upper clasp 150 that can be engaged with each other, but the present invention is not limited to the clasp method, but minimizes vibration during coupling such as a sliding method. By making it possible, it is preferable to prevent foreign substances inevitably introduced into the lower case 100 from moving and being attached to the blank mask 130.

In the following, a preferred embodiment of the present invention according to the above description and a comparative example according to the prior art will be used to compare the effects.

Example 1

Five blank masks each having a length of 6 inches on one side are formed in the lower case so as to accommodate each of the blank masks in an independent space, and a partition cover is formed thereon.

Next, the upper case is combined to completely seal the lower case.

After that, the mask case combined with the lower case and the upper case was moved 10m, and the contamination state of each blank mask was examined while sequentially opening the upper case and the partition cover. At this time, each blank mask was numbered sequentially from 1 to 5 times, the results are shown in Table 1 below.

Comparative Example 1

The same process as in Example 1 was performed except that no partition and partition cover were formed on the mask box, and the results of the investigation are shown in Table 1 below.

TABLE 1

number 1 No.2 number 3 4 times 5 times Example 1 Good Good Good Good Anho Comparative Example 1 Good Good Good Bad Bad

As described above, in the case of Example 1 according to the present invention, it can be seen that no foreign matter contamination appeared when compared with Comparative Example 1 according to the prior art. As described above, the present invention can prevent foreign substances from entering the mask box and contaminate the blank mask, and further, prevent the surface of the blank mask from being damaged during the storing of the blank mask.

In addition, it is possible to prevent the impact applied to the case during the bonding and detachment of the case, even if foreign matter remains inside the case it is possible to prevent the foreign matter is attached to the blank mask by the impact, blank mask Can be easily processed, and manufacturing cost can be saved.

Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but may be modified in various forms, and having ordinary skill in the art to which the present invention pertains. It will be understood by those skilled in the art that the present invention may be embodied in other specific forms without changing the technical spirit or essential features of the present invention. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive.

1 is a perspective view schematically showing a mask box according to the prior art.

Figure 2 is a plan view schematically showing a mask box according to the prior art.

3 is a perspective view schematically showing a mask box according to the present invention;

Figure 4 is a plan view schematically showing a lower case of the mask box according to the present invention.

Figure 5 is a plan view schematically showing a partition and a partition cover formed on the lower case of the mask box according to the present invention.

Claims (11)

A lower case formed of a box shape having an upper portion open; An accommodation part provided in a form facing each other inside the lower case to allow a plurality of blank masks to be spaced apart from each other; A partition formed between the respective accommodating parts so that the plurality of blank masks can be accommodated in separate spaces, respectively; An upper case coupled to an upper portion of the lower case to close the receiving part of the lower case; Fixing parts formed in engagement with each other on sidewalls of the lower case and sidewalls of the upper case to maintain a coupling state of the lower case and the upper case; And And a partition cover formed on each of the accommodating portions so as to seal the independent space formed by the partition. delete The method of claim 1, The partition cover is a mask box for storing the blank mask, characterized in that provided in the sliding or cap type. The method of claim 1, The accommodating part is a mask box for storing a blank mask, characterized in that the pair is provided with a pair of '' 'guide rail that can be inserted into the blank mask. The method of claim 4, wherein A mask box for storing a blank mask, characterized in that the inner wall of the guide rail is further provided with a projection for supporting the blank mask. The method of claim 1, A mask box for storing a blank mask, characterized in that a cushion member is further provided on an inner wall, a receiving portion, and a partition of the lower case. The method of claim 1, A mask box for storing a blank mask, characterized in that the inner wall, the accommodating part and the partition of the lower case are further provided with an absorbing member made of hydrophilic zeolite or silica gel. The method of claim 1, Mask box for storing the blank mask, characterized in that the outer wall of the lower case is further provided with a handling portion. The method of claim 1, The lower case, the accommodating part and the partition are each a blank mask storage mask box, characterized in that made of one of polypropylene, polycarbonate, polyester and polyamide. The method of claim 1, And the fixing part comprises a lower clasp formed on the sidewall of the lower case and an upper clasp formed on the sidewall of the upper case in engagement with the lower clasp. The method of claim 1, The mask box for storing the blank mask, characterized in that it further comprises a sealing member of the O-ring shape formed in the portion coupled to the lower case and the upper case.

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