JP5160206B2 - Carrying tool - Google Patents

Description

  The present invention relates to a transporting device, and more particularly to a transporting device including a container for transporting a wound-shaped transported object having a recess.

  2. Description of the Related Art Conventionally, when a package (conveyed object) is transported, the transported object is accommodated in various containers and packed. At the time of packing, in order to avoid damage to the load due to shaking or vibration during transportation, a foaming plastic, a cushioning material such as sponge, a shock absorbing material having a honeycomb structure, or the like is used.

  If the material to be transported is a sheet-like film or paper, it can be packed in a stacked state if it is up to a certain size, but if it is long or large, it is wound into a roll and accommodated in a container It is common to be done. When a wound film or the like is stored so as to come into contact with the inner surface of the container, the surface of the film or the like that contacts the inner surface of the container will be damaged due to shaking during transportation. May be deformed. If a cushioning material or the like is used to avoid these, the surface of the film or the like may be damaged by contact with the cushioning material or the like.

  Moreover, in the case of a wound object to be transported, winding slack or end face displacement occurs during transportation, and therefore it is necessary to fix it in the container. If a winding core is used during winding, both ends of the winding core can be fixed in the container. For example, a technique is disclosed in which a holder is held on opposing inner wall surfaces of a container, and a holder is supported by the holder (see Patent Document 1).

JP 2006-103785 A

  However, in the technique of Patent Document 1, it is necessary to use a winding core at the time of winding, which requires trouble such as holding the holder in the container, and increases the number of parts for packing. Moreover, it becomes impossible to apply when the core is not used. The polishing cloth and holding cloth used in the polishing process to flatten the surface of the object to be polished, such as glass substrates for liquid crystal displays and silicon wafers for semiconductor devices, use soft materials that are easily deformed by external forces. It has been. In order to improve the flatness of the object to be polished, the flatness of the surface of the polishing cloth or the holding cloth is important. For this reason, polishing cloths and holding cloths, especially large and long polishing cloths, are wound when transported. However, since they do not like firewood, they are usually not used. In addition, a polishing cloth or the like wound without a winding core has a problem that a concave shape (dent) is likely to occur due to external force or due to its own weight, and the wound shape tends to collapse. When the wound shape collapses, the flatness of the polishing cloth or the like is impaired, and a wound trace is left, so that the object to be polished may be insufficiently flattened.

  This invention makes it a subject to provide the conveyance tool which can be conveyed, without producing a recess in a winding-shaped to-be-conveyed object in view of the said case.

In order to solve the above-mentioned problems, a first aspect of the present invention is a carrying device including a container for carrying a wound-like carried object having a concave property, wherein the carried object is used for polishing. The container has a partition wall facing in the longitudinal direction, and a flexible and non-stretchable polyethylene terephthalate sheet member is stretched between the partition walls, The sheet member has a slack portion between the partition walls.

In the first aspect, the container has flexibility and a non-stretchable polyethylene terephthalate sheet member is stretched between the partition walls facing in the longitudinal direction, and the sheet member has a slack portion between the partition walls. Therefore, the strength is such that the sheet member is not deformed when it is carried on a slack portion of the sheet member, which is a polishing cloth or holding cloth used for polishing processing, and is placed on the slack portion of the sheet member. Since the object to be transported is supported by the sheet member along the lower side of the winding shape, it is possible to suppress the depression of the object to be transported even if shaking or vibration is applied during transportation.

Further, according to a second aspect of the present invention, there is provided a transporting device including a container for transporting a wound-shaped transported object having a concave property, wherein the transported object is a polishing cloth or a holding cloth used for polishing processing. The container has a plurality of partition walls arranged at substantially equal intervals in the longitudinal direction, and one sheet member made of polyethylene terephthalate that is flexible and non-stretchable between the plurality of partition walls. The sheet member is stretched, and the sheet member has a slack portion between the adjacent partition walls.

In the first and second aspects, if the sheet member is spanned so that the object to be transported is positioned below the upper end of the partition wall, a plurality of transport tools can be stacked without damaging the object to be transported. it can. Moreover, it is preferable that the lower surface of the slack portion of the sheet member is separated from the inner bottom surface of the container. At this time, it is preferable that the surface of the sheet member is substantially flat . The material of the container can be a flat paper material. If the container has protrusions on the upper surface of at least two of the partition walls and a fitting hole is formed at a position corresponding to the protrusion on the bottom surface, the container will be displaced when a plurality of transporting devices are stacked. Can be suppressed. Moreover , you may have a resin-made film or a nonwoven fabric as a conveyed product. Moreover, you may make it further provide the cover material which covers the upper part of a container.

According to the present invention, a sheet member made of polyethylene terephthalate that is flexible and non-stretchable is stretched between partition walls facing the longitudinal direction of the container, and the sheet member has a slack portion between the partition walls. Therefore, the strength is such that the sheet member is not deformed when it is carried on a slack portion of the sheet member, which is a polishing cloth or holding cloth used for polishing processing, and is placed on the slack portion of the sheet member. And the object to be conveyed is supported by the sheet member along the lower side of the winding shape, so that it is possible to suppress the depression of the object to be conveyed even if shaking or vibration is applied during conveyance. be able to.

  Hereinafter, an embodiment in which the present invention is applied to a carrying tool for carrying a holding pad for holding an object to be polished will be described with reference to the drawings.

  As shown in FIG. 1, the carrying device 10 of this embodiment includes a rectangular parallelepiped container 1 that can accommodate a wound holding pad (conveyed object) 20. The container 1 is formed of a flat paper material and has six partition walls 2. The partition walls 2 are arranged at substantially equal intervals in the longitudinal direction of the container 1.

  A film 3 as a single sheet member having flexibility is stretched between the partition walls 2 of the container 1. The film 3 has a slack portion 4 between the adjacent partition walls 2. That is, in the container 1, the slack portions 4 are formed at five locations, and the five holding pads 20 can be accommodated by placing the holding pads 20 on the slack portions 4. The film 3 is stretched so that the upper end of the holding pad 20 is positioned below the upper end of the partition wall 2 when the holding pad 20 is placed on the slack portion 4. In other words, the height of the partition wall 2 (depth of the container 1) is formed larger than the outer diameter of the wound holding pad 20.

  Further, the slack portion 4 of the film 3 has a lower surface separated from the inner bottom surface of the container 1. The film 3 is fixed to the upper end of each partition 2 with a double-sided tape whose illustration is omitted. The film 3 is made of a non-stretchable material and has a rectangular shape. In this example, a film made of polyethylene terephthalate (hereinafter abbreviated as PET) is used as the film 3, and the thickness of the film 3 is set to about 0.05 to 2.0 mm. At least the surface of the film 3 that contacts the holding pad 20 is formed in a flat shape.

  The holding pad 20 is used to hold the object to be polished on a surface plate of a polishing apparatus when polishing the surface of the object to be polished such as a silicon wafer for a semiconductor device or a glass substrate for a liquid crystal display. It is. As shown in FIG. 2, the holding pad 20 has a polyurethane sheet 22 formed of a polyurethane resin having a 100% modulus (tension when pulled twice) of 20 MPa or less. The polyurethane sheet 22 has a holding surface P that comes into contact with the object to be polished when the object to be polished is held on the surface plate. The surface (the lower surface in FIG. 2) opposite to the holding surface P of the polyurethane sheet 22 is buffed so that the thickness of the polyurethane sheet 22 (the length in the vertical direction in FIG. 2) is uniform. Yes. For this reason, the holding surface P of the polyurethane sheet 22 becomes substantially flat.

  The polyurethane sheet 22 is provided with a skin layer (surface layer) 24 having fine flatness and a flatness not shown in the drawing on the holding surface P side by a wet film forming method. In the lower layer of the skin layer 24 (inside the skin layer 24 of the polyurethane sheet 22), a foam 23 having a substantially triangular cross section rounded along the thickness direction of the polyurethane sheet 22 is formed. The size of the foam 23 is formed smaller on the holding surface P side than on the surface opposite to the holding surface P. In the polyurethane resin between the foams 23, a foam (not shown) larger than the microporous formed in the skin layer 24 and smaller than the foam 23 is formed. The foam 23 and the foam (not shown) are connected in a three-dimensional network via communication holes (not shown). Since the surface side opposite to the holding surface P is buffed, the foam 23 and a part of the foam (not shown) are opened on the surface side opposite to the holding surface P. Further, the holding pad 20 has a release paper 27 on one surface side (the bottom surface side in FIG. 2) on the surface side (buffed surface side) opposite to the holding surface P, and the holding pad 20 is attached to the polishing apparatus. The other side of the double-sided tape 26 is attached. The double-sided tape 26 has a base material 26a made of PET film, and an adhesive layer 26b is formed on both surfaces of the base material 26a.

  The holding pad 20 is manufactured by forming a polyurethane resin into a sheet shape by a wet film forming method. That is, after a polyurethane resin solution in which a polyurethane resin is dissolved in an organic solvent is continuously applied to a film-forming substrate and immersed in an aqueous coagulating liquid, the polyurethane resin is coagulated and regenerated into a sheet shape, washed and dried. Cut and bonded with double-sided tape for fixing to the surface plate. Specifically, the holding pad 20 is manufactured as follows.

  The polyurethane resin solution is prepared by mixing a polyurethane resin, a water-miscible organic solvent capable of dissolving the polyurethane resin, and an additive, removing aggregates and the like by filtration, and degassing under vacuum. In this example, N, N-dimethylformamide (hereinafter abbreviated as DMF) is used as the organic solvent. As the polyurethane resin, a polyester resin, a polyether resin, a polycarbonate resin, or the like is selected and used. As additives, pigments, hydrophilic activators, hydrophobic activators, and the like can be used to control the size and amount (number) of foaming. The prepared polyurethane resin solution is applied substantially uniformly to the belt-shaped film-forming substrate with a knife coater or the like at room temperature. A flexible film, a nonwoven fabric, a woven fabric, etc. can be used for the film-forming substrate. In this example, a PET film that does not have liquid permeability is used as the film formation substrate.

  The film-forming substrate coated with the polyurethane resin solution is immersed in a coagulation liquid containing water as a main component, which is a poor solvent for the polyurethane resin. In the coagulation liquid, first, a skin layer 24 having a thickness of about several μm is formed on the surface side of the applied polyurethane resin solution. Thereafter, the polyurethane resin coagulates and regenerates in a sheet form on one side of the film forming substrate by the progress of substitution between the DMF in the polyurethane resin solution and the coagulating liquid. With the replacement of the DMF with the coagulation liquid by removing the solvent from the polyurethane resin solution, the foam 23 and the foam (not shown) are formed in the polyurethane resin inside the skin layer 24, and the foam 23 and the foam (not shown) are communicated in a three-dimensional network. A communication hole (not shown) is formed. At this time, since the PET film of the film formation substrate does not permeate water, the solvent is removed on the skin layer 24 side, and the foam 23 having a larger film formation substrate side than the surface side is formed.

  The solidified and regenerated polyurethane resin (hereinafter referred to as film-forming resin) is peeled off from the film-forming substrate and washed in a cleaning liquid such as water to remove DMF remaining in the film-forming resin. After cleaning, the film forming resin is dried with a cylinder dryer or the like. The dried film-forming resin is buffed on the surface of the film-forming resin opposite to the skin layer 24 so as to have a uniform thickness and wound into a roll. The other surface side of the double-sided tape 26 having the release paper 27 attached on one side is bonded to the buffed surface side of the polyurethane sheet 22 with an adhesive layer 26b. After cutting into a desired shape and size such as a circular shape, the holding pad 20 is completed by performing inspections such as confirming that there is no adhesion of dirt or foreign matter.

  When the obtained holding pad 20 is transported, although it depends on the shape and size, it is formed in a cylindrical shape wound 3 to 20 times, preferably 5 to 10 times, that is, a wound shape. At this time, in order not to damage the holding surface P, the holding surface P is used as an inner side without using a winding core, and the inner surface has a diameter of about 100 to 200 mm, preferably 120 to 180 mm. If the inner diameter is smaller than 100 mm, winding traces are formed and the performance of the holding pad is impaired. On the contrary, if it exceeds 200 mm, the volume becomes large, so that the transport efficiency is lowered. A tape or the like may be affixed to the winding end portion so that no rewinding or wobbling occurs. Since the holding pad 20 is formed with the polyurethane sheet 22, when the wound pad is wound without using a wick, it has a recess property that is likely to cause a recess (dent) when external pressure is applied or under its own weight. doing. The holding pad 20 is housed and transported in the transport tool 10. At this time, the holding pad 20 is placed on the slack portion 4 of the film 3.

(Action etc.)
Next, the operation and the like of the transport tool 10 of the present embodiment will be described.

  In the carrying device 10 of the present embodiment, the film 3 is stretched between the partition walls 2 of the container 1, and the film 3 has a slack portion 4 between the adjacent partition walls 2. For this reason, the winding-like holding pad 20 having a concave property can be placed on the slack portion 4 and accommodated in the carrying device 10. During transportation, the holding pad 20 is supported by the film 3 along the outer periphery of the lower side (bottom side of the container 1). Therefore, even if shaking or vibration (rolling or pitch) is applied during transportation, the holding pad 20 is recessed. Can be suppressed.

  Further, since the holding pad 20 is used for polishing, if the wound shape is damaged during transportation, or if the wound shape collapses and the holding surface P has a wound mark, the object to be polished is polished. The flatness of the film will be impaired. In the transporting device 10 of this embodiment, the film 3 is separated from the inner bottom surface of the container 1, and the film 3 is stretched so that the upper end of the holding pad 20 is located below the upper end of the partition wall 2. For this reason, the holding pad 20 placed on the slack portion 4 is suspended in a position where it does not come into contact with the inner wall surface or the inner bottom surface of the container 1. Accordingly, since the holding pad 20 is transported while being supported by the film 3 without being in direct contact with the inner wall surface or inner bottom surface of the container 1, even if shaking is applied during transportation, The flatness of the holding pad 20 can be ensured by preventing the rotated shape from collapsing.

  Furthermore, in the carrying tool 10 of this embodiment, the film 3 is spanned between each partition 2 of the container 1 formed with the flat paper material. For this reason, compared to the case where a core fixing member or the like is incorporated in a container in order to transport the object to be transported using the core, the core is more susceptible to deformation due to external force or its own weight. The carrying tool for carrying the article to be carried wound around can be configured with a small number of parts, and the structure of the container 1 can be simplified. In the case of the holding pad 20 or a polishing cloth used for polishing, for example, if the side of a rectangular shape or the diameter of a circle is up to about 1000 mm, it can be packed in a stacked state, for example, In the case of a rectangular shape with one side exceeding 1400 mm or a circular shape with a diameter exceeding 1400 mm, packaging in a stacked state takes time during packing or transportation. On the other hand, in the carrying tool 10 of this embodiment, since it can be accommodated and packed by placing it on the slack portion 4 of the film 3, it can be used to carry an article to be carried on which a large holding pad 20 or the like is wound. It can be preferably used.

  In addition, in this embodiment, although the flat paper material was illustrated as the material of the container 1, this invention is not limited to this. For example, it may be made of resin or wood, but is preferably made of cardboard in consideration of light weight, robustness, cost, and the like. Moreover, although the example which makes the container 1 a rectangular parallelepiped shape was shown in this embodiment, this invention is not limited to this, The several partition 2 should just be arrange | positioned in the longitudinal direction at substantially equal intervals. .

  Moreover, in this embodiment, although the film made from PET was illustrated as the film 3, this invention is not limited to this, The surface should just be non-stretchable and substantially flat. In other words, any material may be used as long as it has a certain degree of strength so as not to be deformed when the object to be transported is placed on the slack portion 4 and transported. Examples of such a material include resins such as nylon and polyester. On the other hand, if the thickness of the film 3 is less than 0.05 mm, the film 3 itself may be damaged due to shaking during transportation. On the contrary, if it exceeds 2.0 mm, it becomes difficult to softly support the object to be transported. For this reason, it is preferable to set the thickness of the film 3 to 0.05 to 2.0 mm.

  Further, although not mentioned in the present embodiment, the carrying device 10 may include a lid member that covers the upper portion of the container 1. In this case, the lid member may be a separate member and placed on the upper side of the container 1, or the container 1 and the lid member may be integrally formed. In this way, it is possible to prevent foreign matter from being mixed in from the outside during transportation or the like, and hence foreign matter adhesion to the transported object such as the holding pad 20. The shape of the lid is not particularly limited as long as it can cover the container 1.

  Furthermore, although the container 1 has shown the example which has the six partition walls 2 in this embodiment, this invention is not limited to the number of the partition walls 2. For example, as shown in FIG. 3, the number of the partition walls 2 may be two, and in this case, the objects to be transported are accommodated one by one. On the contrary, by increasing the number of the partition walls 2, it is possible to transport more than five objects to be transported. Further, as shown in FIG. 3, at least two partition walls 2 of the partition walls 2 have protrusions 7 on the upper surface, and fitting holes that can be engaged with the protrusions 7 at positions corresponding to the protrusions 7 on the bottom surface of the container 1. 8 may be formed. By stacking the plurality of transporting tools 10 vertically so that the protrusions 7 are fitted in the fitting holes 8, it is possible to suppress the collapse of the load due to shaking during transport and the shift of the transporting tool 10. When the transporting tools 10 are stacked, the upper container 1 covers the upper part of the lower container 1, so that only the container 1 positioned at the top should be covered with the lid.

  Furthermore, in this embodiment, although the holding pad 20 was illustrated as a to-be-conveyed object, this invention is not limited to this, It uses suitably for conveyance of the wound-shaped to-be-conveyed object which has a concave property. be able to. Examples of such objects to be transported include a polishing cloth having a resin film or a nonwoven fabric. In the present embodiment, an example in which the holding pad 20 includes the polyurethane sheet 22 and the double-sided tape 26 manufactured by the wet film forming method has been described, but the present invention is not limited to this. For example, you may have the resin sheet produced by the dry method, and may have only a resin sheet, without having a double-sided tape. Further, the material of the holding pad and the polishing cloth and the internal foam structure are not particularly limited. Further, in the present embodiment, an example in which the holding surface P is set to the inner side when the holding pad 20 is wound is shown, but the present invention is not limited to this, and the holding surface P may be set to the outer side. Good.

  The present invention contributes to the manufacture and sale of transporting tools in order to provide a transporting tool that can be transported without causing recesses in the wound object to be transported, and thus has industrial applicability.

It is sectional drawing which shows the carrying tool of embodiment to which this invention is applied. It is sectional drawing which shows the holding pad conveyed with the conveying tool of embodiment. It is sectional drawing which shows another aspect of a carrying tool.

Explanation of symbols

1 container 2 partition 3 film (sheet member)
4 Slack part 10 Carrying tool 20 Holding pad (conveyed object)

Claims (9)

In the carrying device provided with a container for carrying a wound object to be wound having recesses, the object to be carried is an abrasive cloth or a holding cloth used for polishing, and the container is opposed to the longitudinal direction. A sheet member made of polyethylene terephthalate that is flexible and non-stretchable is stretched between the partition walls, and the sheet member has a slack portion between the partition walls. Characteristic transport tool. In the carrying device provided with a container for carrying a wound carrying object having recesses, the carrying object is an abrasive cloth or a holding cloth used for polishing processing, and the container is substantially in the longitudinal direction. A plurality of partition walls arranged at equal intervals, and a sheet member made of polyethylene terephthalate that is flexible and non-stretchable is stretched between the plurality of partition walls, and the sheet members are adjacent to each other. A transporting device characterized by having a slack portion between the matching partition walls.   The transporting device according to claim 1 or 2, wherein the sheet member is stretched so that the object to be transported is positioned below the upper end of the partition wall.   The transporting device according to claim 3, wherein the lower surface of the slack portion of the sheet member is separated from the inner bottom surface of the container. The sheet member, the moving device of claim 4, wherein the front surface is substantially flat.   The transporting device according to claim 1 or 2, wherein the container is made of a flat paper material.   The said container has a processus | protrusion on the upper surface of at least 2 partition among the said partition, and the fitting hole is formed in the position corresponding to the said processus | protrusion on the bottom. 2. The carrying device according to 2. The transporting device according to claim 1 or 2 , wherein the transported object includes a resin film or a non-woven fabric.   The transport device according to claim 1, further comprising a lid material covering an upper portion of the container.

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