JP7135297B2 - 検査装置、検査システム、および検査方法 - Google Patents

検査装置、検査システム、および検査方法 Download PDF

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JP7135297B2
JP7135297B2 JP2017208362A JP2017208362A JP7135297B2 JP 7135297 B2 JP7135297 B2 JP 7135297B2 JP 2017208362 A JP2017208362 A JP 2017208362A JP 2017208362 A JP2017208362 A JP 2017208362A JP 7135297 B2 JP7135297 B2 JP 7135297B2
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test object
unit
illumination
inspection
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JP2019082333A (ja
JP2019082333A5 (enExample
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泰啓 坂田
真嘉 井上
雅昭 徳永
成孝 柳屋
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Nikon Corp
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JP2017208362A 2017-10-27 2017-10-27 検査装置、検査システム、および検査方法 Active JP7135297B2 (ja)

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JP2019082333A5 JP2019082333A5 (enExample) 2020-11-12
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KR102268909B1 (ko) * 2020-04-10 2021-06-23 코그넥스코오포레이션 Edge Field와 딥러닝 기반 검사 방법
KR102292547B1 (ko) 2020-04-10 2021-08-20 코그넥스코오포레이션 가변 확산판을 이용한 광학 시스템
US20240087105A1 (en) * 2021-01-26 2024-03-14 Abb Schweiz Ag Systems and Methods for Paint Defect Detection Using Machine Learning
JP7188821B1 (ja) 2021-12-17 2022-12-13 バイスリープロジェクツ株式会社 検査システム

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004191070A (ja) 2002-12-06 2004-07-08 Daihatsu Motor Co Ltd 塗装面の検査装置
JP2005148047A (ja) 2003-10-21 2005-06-09 Daihatsu Motor Co Ltd 被検査面の検査方法及び装置
JP2010197391A (ja) 2009-02-24 2010-09-09 Corning Inc 鏡面反射面の形状測定
JP2012032174A (ja) 2010-07-28 2012-02-16 Toyota Central R&D Labs Inc 光源装置及び評価方法
JP2013527925A (ja) 2010-05-06 2013-07-04 アルタテック・セミコンダクター 移動中半導体ウエハの検査装置およびその方法
JP2013253903A (ja) 2012-06-08 2013-12-19 Mutual Corp 検査装置および検査方法
JP2019002762A (ja) 2017-06-14 2019-01-10 キヤノン株式会社 画像処理装置及び方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4158227B2 (ja) * 1998-04-27 2008-10-01 旭硝子株式会社 微小凹凸の検査方法および検査装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004191070A (ja) 2002-12-06 2004-07-08 Daihatsu Motor Co Ltd 塗装面の検査装置
JP2005148047A (ja) 2003-10-21 2005-06-09 Daihatsu Motor Co Ltd 被検査面の検査方法及び装置
JP2010197391A (ja) 2009-02-24 2010-09-09 Corning Inc 鏡面反射面の形状測定
JP2013527925A (ja) 2010-05-06 2013-07-04 アルタテック・セミコンダクター 移動中半導体ウエハの検査装置およびその方法
JP2012032174A (ja) 2010-07-28 2012-02-16 Toyota Central R&D Labs Inc 光源装置及び評価方法
JP2013253903A (ja) 2012-06-08 2013-12-19 Mutual Corp 検査装置および検査方法
JP2019002762A (ja) 2017-06-14 2019-01-10 キヤノン株式会社 画像処理装置及び方法

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