JP7132130B2 - 透明相関金属電極を形成するための方法 - Google Patents
透明相関金属電極を形成するための方法 Download PDFInfo
- Publication number
- JP7132130B2 JP7132130B2 JP2018561679A JP2018561679A JP7132130B2 JP 7132130 B2 JP7132130 B2 JP 7132130B2 JP 2018561679 A JP2018561679 A JP 2018561679A JP 2018561679 A JP2018561679 A JP 2018561679A JP 7132130 B2 JP7132130 B2 JP 7132130B2
- Authority
- JP
- Japan
- Prior art keywords
- sheet resistance
- metal film
- flexible transparent
- resistance value
- correlated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/088—Oxides of the type ABO3 with A representing alkali, alkaline earth metal or Pb and B representing a refractory or rare earth metal
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/409—Oxides of the type ABO3 with A representing alkali, alkaline earth metal or lead and B representing a refractory metal, nickel, scandium or a lanthanide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
- H10K77/111—Flexible substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/10—Transparent electrodes, e.g. using graphene
- H10K2102/101—Transparent electrodes, e.g. using graphene comprising transparent conductive oxides [TCO]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/311—Flexible OLED
Description
Claims (7)
- 10nm~100nmの厚さを有する相関金属膜を可撓性透明基板に積層する工程、
紫外光パルスにより前記相関金属膜を焼鈍する工程、並びに
前記積層する工程及び前記焼鈍する工程において前記可撓性透明基板の温度を80℃未満に維持する工程を含み、
前記焼鈍する工程では、前記相関金属膜の第1の領域が第1の所定のシート抵抗値を有するまで前記第1の領域を焼鈍し、さらに前記相関金属膜の第2の領域が第2の所定のシート抵抗値を有するまで前記第2の領域を焼鈍し、
前記第1の領域は、第1の所定の形状を有し、
前記第2の領域は、第2の所定の形状を有し、
前記第1の所定のシート抵抗値は10Ω/□よりも低く、
前記第2の所定のシート抵抗値は1~100Ω/□であり、
前記第1の所定のシート抵抗値と前記第2の所定のシート抵抗値は異なる値であり、
前記第1の所定のシート抵抗値及び前記第2の所定のシート抵抗値を、前記紫外光パルスの出力値及び/又は焼鈍持続時間を調節することで調整する、可撓性透明導電性電極層を製造する方法。 - 前記相関金属膜を前記可撓性透明基板に積層する前記工程にロールツーロール積層処理を用いる、請求項1に記載の方法。
- 前記相関金属膜はABO3の形態であり、Aは第IIA族材料の単体又は混合物であり、Bは第VB族材料の単体又は混合物である、請求項1又は2に記載の方法。
- 前記相関金属膜はSrVO3又はCaVO3である、請求項1~3のいずれか一項に記載の方法。
- 有機発光ダイオード層を前記可撓性透明導電性電極層に積層して可撓性有機発光ダイオード照明パネルを製造する工程をさらに含む、請求項1~4のいずれか一項に記載の方法。
- 前記相関金属膜及び可撓性透明基板は、タッチスクリーン装置、又はセンサーに含まれる、請求項1~5のいずれか一項に記載の方法。
- 前記相関金属膜は10nm~50nmの厚さを有する、請求項1~6のいずれか一項に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201662340253P | 2016-05-23 | 2016-05-23 | |
US62/340,253 | 2016-05-23 | ||
PCT/US2017/033830 WO2017205285A1 (en) | 2016-05-23 | 2017-05-22 | Method of forming transparent correlated metal electrode |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019519919A JP2019519919A (ja) | 2019-07-11 |
JP7132130B2 true JP7132130B2 (ja) | 2022-09-06 |
Family
ID=60411625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018561679A Active JP7132130B2 (ja) | 2016-05-23 | 2017-05-22 | 透明相関金属電極を形成するための方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10862062B2 (ja) |
JP (1) | JP7132130B2 (ja) |
WO (1) | WO2017205285A1 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004134677A (ja) | 2002-10-11 | 2004-04-30 | Japan Science & Technology Agency | 光照射により物質相を変化させる方法及びその方法を用いたトンネル障壁型磁気抵抗素子の製造方法並びに金属配線方法 |
JP2010219207A (ja) | 2009-03-16 | 2010-09-30 | Sony Corp | 金属−絶縁体相転移材料を用いた機能要素の形成方法及びこれによって形成された機能要素、並びに機能デバイスの製造方法及びこれによって製造された機能デバイス |
JP2011513846A (ja) | 2008-02-28 | 2011-04-28 | スリーエム イノベイティブ プロパティズ カンパニー | タッチスクリーンセンサ |
WO2016019327A1 (en) | 2014-08-01 | 2016-02-04 | The Penn State Research Foundation | Transparent conducting films including complex oxides |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3917698B2 (ja) | 1996-12-12 | 2007-05-23 | 株式会社半導体エネルギー研究所 | レーザーアニール方法およびレーザーアニール装置 |
JPH11106935A (ja) * | 1997-09-30 | 1999-04-20 | Fuji Photo Film Co Ltd | 金属酸化物薄膜の製造方法及び金属酸化物薄膜 |
US6824898B2 (en) * | 1999-11-19 | 2004-11-30 | Taiyo Yuden Co., Ltd. | Dielectric thin film, method for making the same and electric components thereof |
US6811815B2 (en) | 2002-06-14 | 2004-11-02 | Avery Dennison Corporation | Method for roll-to-roll deposition of optically transparent and high conductivity metallic thin films |
US20060197092A1 (en) | 2005-03-03 | 2006-09-07 | Randy Hoffman | System and method for forming conductive material on a substrate |
JP5343330B2 (ja) * | 2007-06-28 | 2013-11-13 | 住友化学株式会社 | 薄膜形成方法、有機エレクトロルミネッセンス素子の製造方法、半導体素子の製造方法及び光学素子の製造方法 |
EP2260366B1 (en) | 2008-02-28 | 2018-09-19 | 3M Innovative Properties Company | Touch screen sensor having varying sheet resistance |
US9211611B2 (en) * | 2010-05-24 | 2015-12-15 | Purdue Research Foundation | Laser crystallization of thin films on various substrates at low temperatures |
EP2840590A4 (en) | 2012-04-16 | 2015-09-02 | Korea Electronics Technology | PROCESS FOR PRODUCING LOW TEMPERATURE PROCESSING OXIDE FILM, OXIDE FILM, AND ELECTRONIC DEVICE |
TWI499647B (zh) | 2012-04-26 | 2015-09-11 | Univ Osaka | 透明導電性油墨及透明導電圖型之形成方法 |
CN103526165A (zh) * | 2013-10-21 | 2014-01-22 | 京东方科技集团股份有限公司 | 透明导电薄膜及其制备方法、显示基板和显示装置 |
KR102099970B1 (ko) * | 2013-11-01 | 2020-04-10 | 삼성전자주식회사 | 투명 전도성 박막 |
-
2017
- 2017-05-22 JP JP2018561679A patent/JP7132130B2/ja active Active
- 2017-05-22 US US16/086,522 patent/US10862062B2/en active Active
- 2017-05-22 WO PCT/US2017/033830 patent/WO2017205285A1/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004134677A (ja) | 2002-10-11 | 2004-04-30 | Japan Science & Technology Agency | 光照射により物質相を変化させる方法及びその方法を用いたトンネル障壁型磁気抵抗素子の製造方法並びに金属配線方法 |
JP2011513846A (ja) | 2008-02-28 | 2011-04-28 | スリーエム イノベイティブ プロパティズ カンパニー | タッチスクリーンセンサ |
JP2010219207A (ja) | 2009-03-16 | 2010-09-30 | Sony Corp | 金属−絶縁体相転移材料を用いた機能要素の形成方法及びこれによって形成された機能要素、並びに機能デバイスの製造方法及びこれによって製造された機能デバイス |
WO2016019327A1 (en) | 2014-08-01 | 2016-02-04 | The Penn State Research Foundation | Transparent conducting films including complex oxides |
Non-Patent Citations (1)
Title |
---|
Lei Zhang et al.,"Correlated metals as transparent conductors",Nature Materials,2015年12月14日,vol. 15,p.204-210 |
Also Published As
Publication number | Publication date |
---|---|
WO2017205285A1 (en) | 2017-11-30 |
US10862062B2 (en) | 2020-12-08 |
US20190103577A1 (en) | 2019-04-04 |
JP2019519919A (ja) | 2019-07-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Palneedi et al. | Laser irradiation of metal oxide films and nanostructures: applications and advances | |
EP3539166B1 (en) | Quantum dots light emitting diode and fabricating method thereof, display panel and display apparatus | |
US8288776B2 (en) | Hybrid electric device using piezoelectric polymer substrate | |
CN100362635C (zh) | 激光辐照方法、激光辐照装置和半导体器件制造方法 | |
JP5331382B2 (ja) | 半導体素子の製造方法 | |
JP4849292B2 (ja) | 機能性デバイスおよびその製造方法 | |
US9257695B2 (en) | Localized heat treatment of battery component films | |
US9056424B2 (en) | Methods of transferring graphene and manufacturing device using the same | |
JP2012178439A (ja) | 半導体デバイス及びその製造方法 | |
JP4892844B2 (ja) | 透明導電膜の形成方法、並びにこれを用いた透明導電基板及び有機el素子基板 | |
EP2086014B1 (en) | Method for producing conductive oxide-deposited substrate and MIS laminated structure | |
JP7132130B2 (ja) | 透明相関金属電極を形成するための方法 | |
JP6666530B2 (ja) | フレキシブルoledデバイス及びその製造方法並びに支持基板 | |
US20120073640A1 (en) | Pulsed photothermal phase transformation control for titanium oxide structures and reversible bandgap shift for solar absorption | |
JP4949126B2 (ja) | 透光性薄膜太陽電池の製造方法。 | |
JP2007258468A (ja) | 可視光透過半導体素子およびその製造方法 | |
JP2005510757A (ja) | プラスチック基板の製造方法 | |
KR100523990B1 (ko) | 플라스틱 디스플레이 기판의 제조방법 | |
CN108831894A (zh) | 低温多晶硅薄膜的制作方法、低温多晶硅薄膜及低温多晶硅tft基板 | |
WO2014089689A1 (en) | Spacecraft smart thermal radiator based on thermochromic coatings deposited on aluminum panel | |
KR102186882B1 (ko) | 저온 용액 공정 산화물 박막 트랜지스터 및 그 제조 방법 | |
KR101451926B1 (ko) | 전자 소자 및 그 제조 방법, 그리고 박막 트랜지스터 제조 방법 | |
JP2017079276A (ja) | 分極装置、分極方法 | |
JP2020080322A (ja) | フレキシブルoledデバイス及びその製造方法並びに支持基板 | |
JP2008130590A (ja) | 複合処理装置、及び、複合処理方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190204 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200318 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210304 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210525 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210816 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20220201 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220525 |
|
C60 | Trial request (containing other claim documents, opposition documents) |
Free format text: JAPANESE INTERMEDIATE CODE: C60 Effective date: 20220525 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20220603 |
|
C21 | Notice of transfer of a case for reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C21 Effective date: 20220607 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220816 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220825 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7132130 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |