JP7125787B2 - チャネルでの電気導電率の完全制御を伴う電界効果トランジスタ - Google Patents
チャネルでの電気導電率の完全制御を伴う電界効果トランジスタ Download PDFInfo
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
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- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/24—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only semiconductor materials not provided for in groups H01L29/16, H01L29/18, H01L29/20, H01L29/22
- H01L29/242—AIBVI or AIBVII compounds, e.g. Cu2O, Cu I
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/16—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising cuprous oxide or cuprous iodide
- H01L21/161—Preparation of the foundation plate, preliminary treatment oxidation of the foundation plate, reduction treatment
- H01L21/165—Reduction of the copper oxide, treatment of the oxide layer
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78696—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the structure of the channel, e.g. multichannel, transverse or longitudinal shape, length or width, doping structure, or the overlap or alignment between the channel and the gate, the source or the drain, or the contacting structure of the channel
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Thin Film Transistor (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Electrodes Of Semiconductors (AREA)
Description
Claims (12)
- 電界効果ゲートトランジスタ(1)であって、
a)基板(2)と、
b)ソース端子(12)と、
c)ドレイン端子(14)と、
d)前記ソース端子(12)と前記ドレイン端子(14)との間のチャネル(10)であって、y/x比が1を超えるCuxCryO2の層であるチャネルと、を備え、
CuxCryO2の前記チャネルが、正電荷キャリア濃度の勾配を示し、
前記勾配が、前記ドレイン端子から前記チャネルに向かって減少し、かつ前記チャネルから前記ソース端子に向かって増加する勾配であることを特徴とする、トランジスタ。 - 前記電界効果ゲートトランジスタが、CuxCryO2の結晶構造中に銅空乏を含むことを特徴とする、請求項1に記載の電界効果ゲートトランジスタ(1)。
- CuxCryO2の前記結晶構造における前記銅空乏が、2~20の量のCu空乏を含むことを特徴とする、請求項2に記載の電界効果ゲートトランジスタ(1)。
- 前記y/x比が2を超えることを特徴とする、請求項1~3のいずれか一項に記載の電界効果ゲートトランジスタ(1)。
- 前記チャネルが、Cu0.66Cr1.33O2の層からなることを特徴とする、請求項1~4のいずれか一項に記載の電界効果ゲートトランジスタ(1)。
- 前記CuxCryO2が真性透明半導体であることを特徴とする、請求項1~5のいずれか一項に記載の電界効果ゲートトランジスタ(1)。
- 前記基板がガラス、Si、Si/Si3N4、ITO、SiO2または任意の誘電体層または任意のプラスチック材料であることを特徴とする、請求項1~6のいずれか一項に記載の電界効果ゲートトランジスタ(1)。
- 前記チャネル(10)に電気的に接続され、前記基板を覆い、誘電体層によりコーティングされたゲート端子(16)をさらに備える、請求項1~7のいずれか一項に記載の電界効果ゲートトランジスタ(1)。
- 電界効果ゲートトランジスタをレーザーでアニールする方法(1)であって、
a)前記電界効果ゲートトランジスタの外部表面としてチャネル(10)を備えた電界効果ゲートトランジスタ(1)を提供するステップであって、前記チャネルは、y/x比が1を超えるCuxCryO2で作製されているステップと、
b)前記チャネルにレーザービームを照射するステップとを含み、
ステップ(b)において、前記チャネルは、局所アニーリング温度及び/またはアニーリング時間に関して前記チャネルの前記表面を不均一に走査することによって照射され、かつ前記チャネル(10)は、正電荷キャリア濃度がドレイン端子から前記チャネルに向かって減少し、前記チャネルからソース端子に向かって増加する勾配に従って照射される方法。 - 前記レーザービームが、7W/cm2~10W/cm2の最大出力密度、及び1W/cm2~3W/cm2の最小出力密度を有する、請求項9に記載の方法。
- ステップ(b)が、1秒~1800秒の時間、600℃~1000℃の温度で行われる、請求項9または10に記載の方法。
- 前記方法が、ステップ(b)の後に実行される冷却ステップ(c)をさらに含む、請求項9~11のいずれか一項に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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LULU100461 | 2017-09-27 | ||
LU100461A LU100461B1 (en) | 2017-09-27 | 2017-09-27 | Field-effect transistor with a total control of the electrical conductivity on its channel |
PCT/EP2018/076285 WO2019063703A1 (en) | 2017-09-27 | 2018-09-27 | FIELD EFFECT TRANSISTOR HAVING TOTAL CONTROL OF ELECTRICAL CONDUCTIVITY ON ITS CHANNEL |
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JP2020535638A JP2020535638A (ja) | 2020-12-03 |
JP7125787B2 true JP7125787B2 (ja) | 2022-08-25 |
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JP2020515775A Active JP7125787B2 (ja) | 2017-09-27 | 2018-09-27 | チャネルでの電気導電率の完全制御を伴う電界効果トランジスタ |
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US (1) | US11316017B2 (ja) |
EP (1) | EP3688812B1 (ja) |
JP (1) | JP7125787B2 (ja) |
KR (1) | KR102561978B1 (ja) |
LU (1) | LU100461B1 (ja) |
WO (1) | WO2019063703A1 (ja) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2005183984A (ja) | 2003-12-17 | 2005-07-07 | Hewlett-Packard Development Co Lp | トランジスタ素子 |
JP2009290113A (ja) | 2008-05-30 | 2009-12-10 | Fujifilm Corp | 半導体素子とその製造方法、センサおよび電気光学装置 |
JP2012216780A (ja) | 2011-03-31 | 2012-11-08 | Ricoh Co Ltd | p型酸化物、p型酸化物製造用組成物、p型酸化物の製造方法、半導体素子、表示素子、画像表示装置、及びシステム |
JP2014520396A (ja) | 2011-06-08 | 2014-08-21 | シーブライト・インコーポレイテッド | 改善されたソース/ドレイン接点を有する金属酸化物薄膜トランジスタ |
JP2016025256A (ja) | 2014-07-22 | 2016-02-08 | 株式会社Flosfia | 半導体装置 |
JP2017126607A (ja) | 2016-01-12 | 2017-07-20 | 株式会社リコー | 酸化物半導体 |
JP2020535306A (ja) | 2017-09-27 | 2020-12-03 | ルクセンブルク インスティトゥート オブ サイエンス アンド テクノロジー(リスト) | CuxCryO2での正孔キャリア濃度の調整 |
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EP3519606A1 (en) | 2016-09-27 | 2019-08-07 | Luxembourg Institute of Science and Technology (LIST) | Uv detector comprising a rectifying p-n junction |
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- 2017-09-27 LU LU100461A patent/LU100461B1/en active IP Right Grant
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2018
- 2018-09-27 WO PCT/EP2018/076285 patent/WO2019063703A1/en unknown
- 2018-09-27 EP EP18773216.9A patent/EP3688812B1/en active Active
- 2018-09-27 KR KR1020207008670A patent/KR102561978B1/ko active IP Right Grant
- 2018-09-27 US US16/651,553 patent/US11316017B2/en active Active
- 2018-09-27 JP JP2020515775A patent/JP7125787B2/ja active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005183984A (ja) | 2003-12-17 | 2005-07-07 | Hewlett-Packard Development Co Lp | トランジスタ素子 |
JP2009290113A (ja) | 2008-05-30 | 2009-12-10 | Fujifilm Corp | 半導体素子とその製造方法、センサおよび電気光学装置 |
JP2012216780A (ja) | 2011-03-31 | 2012-11-08 | Ricoh Co Ltd | p型酸化物、p型酸化物製造用組成物、p型酸化物の製造方法、半導体素子、表示素子、画像表示装置、及びシステム |
JP2014520396A (ja) | 2011-06-08 | 2014-08-21 | シーブライト・インコーポレイテッド | 改善されたソース/ドレイン接点を有する金属酸化物薄膜トランジスタ |
JP2016025256A (ja) | 2014-07-22 | 2016-02-08 | 株式会社Flosfia | 半導体装置 |
JP2017126607A (ja) | 2016-01-12 | 2017-07-20 | 株式会社リコー | 酸化物半導体 |
JP2020535306A (ja) | 2017-09-27 | 2020-12-03 | ルクセンブルク インスティトゥート オブ サイエンス アンド テクノロジー(リスト) | CuxCryO2での正孔キャリア濃度の調整 |
Non-Patent Citations (1)
Title |
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Petru Lunca Popaa et al.,Invisible electronics: Metastable Cu-vacancies chain defects for highlyconductive p-type transparent oxide,Applied Materials Today,NL,Elsevier,2017年07月17日,Vol. 9,PP. 184-191,DOI: 10.1016/j.apmt.2017.07.004 |
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US20200266277A1 (en) | 2020-08-20 |
LU100461B1 (en) | 2019-03-29 |
EP3688812B1 (en) | 2023-08-02 |
EP3688812A1 (en) | 2020-08-05 |
WO2019063703A1 (en) | 2019-04-04 |
KR102561978B1 (ko) | 2023-07-31 |
KR20200057008A (ko) | 2020-05-25 |
JP2020535638A (ja) | 2020-12-03 |
US11316017B2 (en) | 2022-04-26 |
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