JP2020535306A - CuxCryO2での正孔キャリア濃度の調整 - Google Patents
CuxCryO2での正孔キャリア濃度の調整 Download PDFInfo
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- 238000000034 method Methods 0.000 claims abstract description 38
- 238000000137 annealing Methods 0.000 claims abstract description 23
- 239000004065 semiconductor Substances 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 13
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- 239000000463 material Substances 0.000 claims description 17
- 239000011521 glass Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000004151 rapid thermal annealing Methods 0.000 claims description 3
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 2
- 238000000059 patterning Methods 0.000 claims description 2
- 229910052594 sapphire Inorganic materials 0.000 claims description 2
- 239000010980 sapphire Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 abstract 1
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- 238000010438 heat treatment Methods 0.000 description 7
- 230000007547 defect Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
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- 229910052760 oxygen Inorganic materials 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 238000000026 X-ray photoelectron spectrum Methods 0.000 description 2
- GXDVEXJTVGRLNW-UHFFFAOYSA-N [Cr].[Cu] Chemical compound [Cr].[Cu] GXDVEXJTVGRLNW-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
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- 238000011160 research Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 206010010957 Copper deficiency Diseases 0.000 description 1
- LLQPHQFNMLZJMP-UHFFFAOYSA-N Fentrazamide Chemical compound N1=NN(C=2C(=CC=CC=2)Cl)C(=O)N1C(=O)N(CC)C1CCCCC1 LLQPHQFNMLZJMP-UHFFFAOYSA-N 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
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- 238000004458 analytical method Methods 0.000 description 1
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Abstract
Description
log(p)=αT2+βT−γ
α=−0.0001
β=+0.1356
γ=−24.914。
Claims (16)
- 半導体の製造方法であって、
(a)基板上にCuxCryO2の膜を成膜するステップと、
(b)成膜したCuxCryO2の膜を温度Tでアニーリングするステップであって、
式中、下付き文字x及びyは、合計が2以下の正の数であるステップを含み、
前記温度Tは、式log(p)=αT2+βT+γから得られ、
前記温度Tは摂氏で表され、
pは、CuxCryO2中の電荷キャリアpの望ましい濃度であり、
αは、−0.00011〜−0.009の範囲の第1のパラメータであり、
βは、+0.12〜+0.14の範囲の第2のパラメータであり、
γは、−27.40〜−22.42の範囲の第3のパラメータであることを特徴とする、方法。 - xが0.6〜0.8の範囲である、請求項1に記載の方法。
- xが0.66に等しく、yが1.33に等しいことを特徴とする、請求項1または2に記載の方法。
- αが−0.0001に等しく、βが、+0.1356に等しく、γが、−24.914に等しい、請求項1〜3のいずれか一項に記載の方法。
- 前記ステップ(b)が、600℃〜1000℃の温度で行われる、請求項1〜4のいずれか一項に記載の方法。
- 前記ステップが、1秒〜4500秒間に、好ましくは20秒〜1800秒間に行われる、請求項1〜5のいずれか一項に記載の方法。
- 前記ステップ(a)が、前記基板上でパターン化するステップである、請求項1〜6のいずれか一項に記載の方法。
- 前記基板がガラス、サファイア、Si、Si/Si3N4、ITO、SiO2または任意のプラスチック材料、好ましくはガラスである、請求項1〜7のいずれか一項に記載の方法。
- 前記ステップ(b)が、オーブン、好ましくは急速熱アニールリアクタ内で行われる、請求項1〜8のいずれか一項に記載の方法。
- 前記ステップ(b)が、レーザービームによって達成される、請求項1〜8のいずれか一項に記載の方法。
- 前記ステップ(b)が、前記アニーリング温度T及び前記電荷キャリアpの前記濃度を変調するように前記レーザー出力を変調しながら、前記レーザービームによりCuxCryO2の膜を局所的に走査することを含む、請求項10に記載の方法。
- CuxCryO2がドープされていない、請求項1〜11のいずれか一項に記載の方法。
- 前記ステップ(a)が少なくとも400℃の温度である、請求項1〜12のいずれか一項に記載の方法。
- 前記ステップ(a)のCuxCryO2の前記膜が結晶化される、請求項1〜13のいずれか一項に記載の方法。
- 前記y/x比が1以上、好ましくは2以上である、請求項1〜14のいずれか一項に記載の方法。
-
請求項1〜15のいずれか一項に記載の方法により得ることができる、基板上に成膜させたCuxCryO2を含む半導体。
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PCT/EP2018/076349 WO2019063732A1 (en) | 2017-09-27 | 2018-09-27 | ADAPTATION OF THE TRANSPORT CONCENTRATION OF HOLES IN CUXCRYO2 |
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PETRU LUANCA PAPA ET AL.: "Invisible electronics:Metastable Cu-vacancies chain defects for highly conductive p-type transparent", APPLIED MATERIALS TODAY, JPN6022028832, 2017, pages 184 - 191, XP055474321, ISSN: 0004823899, DOI: 10.1016/j.apmt.2017.07.004 * |
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