JP7116154B2 - 高解像度の電子ビーム装置 - Google Patents
高解像度の電子ビーム装置 Download PDFInfo
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
- G03F7/2059—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a scanning corpuscular radiation beam, e.g. an electron beam
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/145—Combinations of electrostatic and magnetic lenses
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70325—Resolution enhancement techniques not otherwise provided for, e.g. darkfield imaging, interfering beams, spatial frequency multiplication, nearfield lenses or solid immersion lenses
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
- G03F7/70708—Chucks, e.g. chucking or un-chucking operations or structural details being electrostatic; Electrostatically deformable vacuum chucks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/418—Imaging electron microscope
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/611—Specific applications or type of materials patterned objects; electronic devices
- G01N2223/6116—Specific applications or type of materials patterned objects; electronic devices semiconductor wafer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06308—Thermionic sources
- H01J2237/06316—Schottky emission
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06325—Cold-cathode sources
- H01J2237/06341—Field emission
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/065—Source emittance characteristics
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/10—Lenses
- H01J2237/14—Lenses magnetic
- H01J2237/1405—Constructional details
- H01J2237/1415—Bores or yokes, i.e. magnetic circuit in general
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
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- Immunology (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Description
Claims (18)
- 電子ビーム装置であって、
電子を放出するように構成されたチップと、サプレッサと、エクストラクタとを含む電子ソースと、
接地された第1の静電アノードと、
前記静電アノードと前記電子ソースの間に配置されたビーム制限アパーチャと、
複数の磁極片とコイルを含む磁気銃レンズであって、前記電子ソース、前記第1の静電アノードおよび前記ビーム制限アパーチャの両側に配置された磁気銃レンズと、
前記第1の静電アノードから前記ビーム制限アパーチャの反対側に配置された静電銃レンズと、
接地された第2の静電アノードであって、前記第1の静電アノードから前記静電銃レンズの反対側に配置された第2の静電アノードと、を備える電子ビーム装置。 - ウェハを保持するように構成されたチャックと、
集束レンズと、
前記チャックと前記集束レンズの間に配置された対物レンズと、
前記第2の静電アノードと前記集束レンズの間に配置されたコラムアパーチャと、
をさらに備えた請求項1に記載の電子ビーム装置。 - 前記電子ビーム装置は、前記電子ビームを、前記静電銃レンズと前記コラムアパーチャの間の第1のクロスオーバと、前記集束レンズと前記対物レンズの間の第2のクロスオーバを有するように整形するよう構成されている請求項2に記載の電子ビーム装置。
- 前記電子ソースは冷電界放出ソースである請求項1に記載の電子ビーム装置。
- 前記電子ソースは熱電界放出ソースである請求項1に記載の電子ビーム装置。
- 請求項1に記載の電子ビーム装置を含む走査電子顕微鏡。
- 電子ソースで電子ビームを生成し、
エクストラクタで前記電子ビームを抽出し、
前記電子ソースと接地された第1の静電アノードとの間にビーム制限アパーチャが配置され、前記電子ソース、ビーム制限アパーチャ及び前記静電アノードの両側に配置され、複数の磁極片およびコイルを含む磁気銃レンズを用いて、前記ビーム制限アパーチャを通してウェハに電子ビームを向け、
前記電子ビームが前記ビーム制限アパーチャを通過した後で前記電子ビームを静電銃レンズ及び接地された第2の静電アノードを通して通過させることを含む方法。 - 前記電子ビームを用いて前記ウェハの画像を生成することをさらに含む請求項7に記載の方法。
- 前記磁気銃レンズが作動され、前記静電銃レンズは作動されないことを含む請求項7に記載の方法。
- 前記磁気銃レンズは、ビーム電流のスイッチング速度の高低に応じた大きさのビーム電流を選択するように構成されている請求項7に記載の方法。
- 前記電子ビームがウェハに到達する前に前記電子ビームをコラムアパーチャ、集束レンズおよび対物レンズを通って通過させることをさらに含む請求項7に記載の方法。
- 前記電子ビームは前記ビーム制限アパーチャと前記コラムアパーチャの間の第1のクロスオーバと、前記集束レンズと前記対物レンズの間の第2のクロスオーバを有するように構成される請求項11に記載の方法。
- 前記静電銃レンズは、ビーム電流の大きさをビーム電流のスイッチング速度の高低に応じて選択するように構成されている請求項7に記載の方法。
- 前記磁気銃レンズと前記静電銃レンズは、ビーム電流のスイッチング速度の高低に応じた大きさのビーム電流を選択するように構成されている請求項7に記載の方法。
- 前記電子ソースは冷電界放出ソースである請求項14に記載の方法。
- 前記電子ビームのビーム電流は0.001nA~500nAである請求項7に記載の方法。
- 前記電子ビームの分解能は20nm~80nmである請求項16に記載の方法。
- ビーム電流のスイッチングは1秒以下で発生する請求項7に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US15/666,666 | 2017-08-02 | ||
US15/666,666 US10096447B1 (en) | 2017-08-02 | 2017-08-02 | Electron beam apparatus with high resolutions |
PCT/US2018/043353 WO2019027714A1 (en) | 2017-08-02 | 2018-07-24 | HIGH RESOLUTION ELECTRON BEAM APPARATUS |
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JP2020529702A JP2020529702A (ja) | 2020-10-08 |
JP2020529702A5 JP2020529702A5 (ja) | 2021-08-26 |
JP7116154B2 true JP7116154B2 (ja) | 2022-08-09 |
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US (1) | US10096447B1 (ja) |
EP (1) | EP3662326A4 (ja) |
JP (1) | JP7116154B2 (ja) |
KR (1) | KR102363263B1 (ja) |
CN (1) | CN111051985B (ja) |
IL (1) | IL272051A (ja) |
SG (1) | SG11202000608VA (ja) |
TW (1) | TWI751362B (ja) |
WO (1) | WO2019027714A1 (ja) |
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US20200194223A1 (en) * | 2018-12-14 | 2020-06-18 | Kla Corporation | Joint Electron-Optical Columns for Flood-Charging and Image-Forming in Voltage Contrast Wafer Inspections |
US11664186B1 (en) * | 2022-08-07 | 2023-05-30 | Borries Pte. Ltd. | Apparatus of electron beam comprising pinnacle limiting plate and method of reducing electron-electron interaction |
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JP2006216396A (ja) | 2005-02-04 | 2006-08-17 | Hitachi High-Technologies Corp | 荷電粒子線装置 |
JP2015531984A (ja) | 2012-09-14 | 2015-11-05 | ケーエルエー−テンカー コーポレイション | 高ビーム電流および低ビーム電流の両方を用いた、高解像度イメージングのための二重レンズ銃電子ビーム装置および方法 |
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KR20200027042A (ko) | 2020-03-11 |
EP3662326A4 (en) | 2021-07-07 |
US10096447B1 (en) | 2018-10-09 |
CN111051985B (zh) | 2022-05-03 |
WO2019027714A1 (en) | 2019-02-07 |
SG11202000608VA (en) | 2020-02-27 |
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