JP7101882B2 - 半導体装置、電力変換装置および半導体装置の製造方法 - Google Patents
半導体装置、電力変換装置および半導体装置の製造方法 Download PDFInfo
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- JP7101882B2 JP7101882B2 JP2021519985A JP2021519985A JP7101882B2 JP 7101882 B2 JP7101882 B2 JP 7101882B2 JP 2021519985 A JP2021519985 A JP 2021519985A JP 2021519985 A JP2021519985 A JP 2021519985A JP 7101882 B2 JP7101882 B2 JP 7101882B2
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Description
図1~図3を参照して、本発明の実施の形態1に係る半導体装置50の構成について説明する。図1は、実施の形態1に係る半導体装置50の構成を概略的に示す断面図である。図2は、実施の形態1に係る半導体装置50の構成を概略的に示す平面図である。図3は、実施の形態1に係る半導体装置50の構成を概略的に示す図1のIII部分の拡大斜視図である。ただし、説明の便宜のため、図3においては、封止樹脂7は、図示されていない。図1および図2に示されるように、半導体装置50は、主として、第1回路1と、第2回路2と、配線部材3と、接合材4と、合金層5と、半導体素子6と、封止樹脂7と、を備えている。半導体装置50は、電力用のパワー半導体装置である。半導体素子6は、電力用のパワー半導体素子である。図1および図2においては、半導体装置50に2つのパワー半導体素子を有するパワーモジュールが1個備えられているが、半導体装置50に複数のパワーモジュールが備えられていてもよい。
本実施の形態に係る半導体装置50によれば、配線部材3の頂点3Cが接合材4を介して第2回路2に接続されている。配線部材3の頂点3Cが接合材4に入り込んでいるため、配線部材3の頂点3Cと接合材4との接合部の接触面積が大きい。このため、接合部に熱的または機械的な疲労が繰り返し負荷された際の、接合部でのクラックの進展に対する許容量は大きい。したがって、接合部の耐熱性を高くすることができる。
実施の形態2は、特に説明しない限り、上記の実施の形態1と同一の構成、製造方法および作用効果を有している。したがって、上記の実施の形態1と同一の構成には同一の符号を付し、説明を繰り返さない。
本実施の形態に係る接続工程S12では、第1回路1に配線部材3の第1端3Aおよび第2端3Bが接続される。配線部材3の第1端3Aおよび第2端3Bは、第1回路1に直接接合される。また、半導体素子6のパッド61に配線部材3の第1端3Aおよび第2端3Bが接続される。配線部材3の第1端3Aおよび第2端3Bは、半導体素子6のパッド61に直接接合される。
本実施の形態に係る半導体装置50によれば、配線部材3の頂点3Cが第2回路2上に配置された接合材4を介して第2回路2に接続されている。このため、配線部材3の頂点3Cと第2回路2上に配置された接合材4との接合部の耐熱性を高くすることができる。
実施の形態3は、特に説明しない限り、上記の実施の形態1と同一の構成、製造方法および作用効果を有している。したがって、上記の実施の形態1と同一の構成には同一の符号を付し、説明を繰り返さない。
本実施の形態に係る半導体装置50によれば、冷却器8が第1回路1に接続されているため、半導体装置50の冷却性能を向上させることができる。これにより、高い放熱性が得られる。
本実施の形態は、上述した実施の形態1~3にかかる半導体装置を電力変換装置に適用したものである。本発明は電力変換装置に限定されるものではないが、以下、実施の形態4として、三相のインバータに本発明を適用した場合について説明する。
今回開示された実施の形態はすべての点で例示であって制限的なものではないと考えられるべきである。本発明の範囲は上記した説明ではなくて請求の範囲によって示され、請求の範囲と均等の意味および範囲内でのすべての変更が含まれることが意図される。
Claims (9)
- 第1回路と、
第2回路と、
前記第1回路および前記第2回路のいずれか一方に接続された配線部材と、
前記第1回路および前記第2回路のいずれか他方に接続された接合材とを備え、
前記配線部材は、前記第1回路および前記第2回路のいずれか一方に接続された第1端および第2端と、前記第1端と前記第2端との間に位置する頂点とを含み、
前記頂点は、前記接合材を介して前記第1回路および前記第2回路のいずれか他方に接続されており、
半導体素子をさらに備え、
前記半導体素子は、パッドを含み、
前記接合材は、前記半導体素子の前記パッド上に配置されており、
前記第1端および前記第2端は、前記第2回路に直接接合されており、
前記頂点は、前記接合材と前記半導体素子とを介して、前記第1回路に接続されている、半導体装置。 - 前記頂点は、前記接合材と合金層を形成しており、
前記合金層の主たる構成要素は、前記配線部材と同一の金属元素および融点降下元素である、請求項1に記載の半導体装置。 - 前記配線部材は、ワイヤである、請求項1または請求項2に記載の半導体装置。
- 前記配線部材は、板状部材である、請求項1または請求項2に記載の半導体装置。
- 前記半導体素子はパワー半導体素子である、請求項1~4のいずれか1項に記載の半導体装置。
- 封止樹脂をさらに備え、
前記封止樹脂は、前記第1回路、前記第2回路、前記配線部材、前記接合材および前記半導体素子を覆っている、請求項1~5のいずれか1項に記載の半導体装置。 - 冷却器をさらに備え、
前記冷却器は、前記第1回路に接続されており、かつ前記第1回路に対して前記半導体素子と反対側に配置されている請求項1~6のいずれか1項に記載の半導体装置。 - 請求項1~7のいずれか1項に記載の前記半導体装置を有し、入力される電力を変換して出力する主変換回路と、
前記主変換回路を制御する制御信号を前記主変換回路に出力する制御回路とを備えた、電力変換装置。 - 第1回路と、第2回路と、第1端および第2端と前記第1端と前記第2端との間に位置する頂点を含む配線部材とを準備する準備工程と、
前記第1回路および前記第2回路のいずれか一方に前記配線部材の前記第1端および前記第2端が接続される接続工程と、
前記第1回路および前記第2回路のいずれか他方に前記配線部材の前記頂点が接合材を介して接続され、前記頂点と前記接合材とが液相拡散接合により接合される液相拡散接合工程とを備え、
前記準備工程では、パッドを含む半導体素子がさらに準備され、
前記接続工程では、前記第1端および前記第2端は、前記第2回路に直接接合され、
前記液相拡散接合工程では、前記接合材は、前記半導体素子の前記パッド上に配置される、半導体装置の製造方法。
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JP2014175511A (ja) | 2013-03-11 | 2014-09-22 | Aisin Aw Co Ltd | 半導体装置及び半導体装置の製造方法 |
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