JP7090716B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP7090716B2 JP7090716B2 JP2020540933A JP2020540933A JP7090716B2 JP 7090716 B2 JP7090716 B2 JP 7090716B2 JP 2020540933 A JP2020540933 A JP 2020540933A JP 2020540933 A JP2020540933 A JP 2020540933A JP 7090716 B2 JP7090716 B2 JP 7090716B2
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- resin
- semiconductor device
- scaly
- lead frame
- scale
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Description
本願の上記以外の目的、特徴、観点及び効果は、図面を参照する以下の詳細な説明から、さらに明らかになるであろう。
以下に、実施の形態1に係る半導体装置について、図面に基づいて説明する。図1は、実施の形態1に係る半導体装置を示す断面図、図2は、実施の形態1に係る半導体装置のトランスファー成形工程を示す断面図である。実施の形態1に係る半導体装置100は、半導体素子1、リードフレーム2、配線部材であるワイヤ5及びインナーリード6、外部端子7、及びモールド樹脂8等を含んで構成される。なお、各図において、同一、相当部分には同一符号を付している。
図17は、実施の形態2に係る半導体装置を示す断面図、図18は、実施の形態2に係る半導体装置の1回目のトランスファー成形工程を示す断面図、図19は、実施の形態2に係る半導体装置の2回目のトランスファー成形工程を示す断面図である。実施の形態2に係る半導体装置101は、第1の樹脂(以下、モールド樹脂8)と第2の樹脂(以下、第2のモールド樹脂9)を備えている。
実施の形態3では、リードフレーム2の放熱部2B側に絶縁接着部材を備えた半導体装置について、図21から図23を用いて説明する。図21に示す半導体装置102は、リードフレーム2の実装部2Aをモールド樹脂8によって封止され、放熱部2Bには絶縁接着部材10が設けられている。また、図22に示す半導体装置103は、リードフレーム2の放熱部2Bに、絶縁接着部材10を介してヒートシンク11が設けられている。
Claims (14)
- 半導体素子を搭載する金属製のリードフレームと、前記リードフレームの少なくとも前記半導体素子が搭載された面を封止する樹脂とを備えた半導体装置であって、
前記リードフレームは、鱗片状突起が連続的に形成された鱗状部を有し、
前記鱗状部は、前記鱗片状突起が連続的に配置された鱗片部と、前記鱗片部の両側に配置され前記鱗片部よりも高く盛り上がった隆起部とを含み、前記リードフレームの前記樹脂によって封止された領域の内部と外部の境界である樹脂境界部を挟んで両側に配置されていることを特徴とする半導体装置。 - 複数の前記鱗状部が互いに間隔を置いて配置されることを特徴とする請求項1記載の半導体装置。
- 前記鱗状部は直線上に配置され、前記鱗状部の長手方向と前記樹脂境界部が垂直であることを特徴とする請求項1または請求項2に記載の半導体装置。
- 前記鱗状部は直線上に配置され、前記鱗状部の長手方向と前記樹脂境界部が平行であることを特徴とする請求項1または請求項2に記載の半導体装置。
- 前記樹脂は、側面の一部にゲートブレイク跡を有し、前記鱗状部は、前記ゲートブレイク跡から最も直線距離が長い前記樹脂境界部に配置されることを特徴とする請求項1から請求項4のいずれか一項に記載の半導体装置。
- 前記樹脂は、側面の一部にゲートブレイク跡を有し、前記鱗状部は、前記ゲートブレイク跡を有する前記側面と対向する側の前記樹脂境界部に配置されることを特徴とする請求項1から請求項4のいずれか一項に記載の半導体装置。
- 前記鱗状部は、前記樹脂境界部の全域に配置されることを特徴とする請求項1から請求項4のいずれか一項に記載の半導体装置。
- 前記リードフレームの表面を部分的または全体的に被覆する金属めっきを備え、前記鱗状部は、前記金属めっきに形成されていることを特徴とする請求項1から請求項7のいずれか一項に記載の半導体装置。
- 前記リードフレームの表面を部分的または全体的に被覆する金属めっきを備え、前記鱗状部は、前記金属めっきと前記リードフレームに形成されていることを特徴とする請求項1から請求項7のいずれか一項に記載の半導体装置。
- 前記リードフレームは、前記半導体素子が搭載された実装部と、前記実装部に対向する放熱部とを有し、
前記樹脂は、前記実装部を封止する第1の樹脂と、前記放熱部を封止する第2の樹脂とを含み、前記放熱部は前記第2の樹脂により形成された薄肉成形部を有しており、
前記鱗状部は、前記放熱部の前記第2の樹脂によって封止された領域の前記樹脂境界部を挟んで両側に配置されていることを特徴とする請求項1から請求項9のいずれか一項に記載の半導体装置。 - 前記鱗状部は、前記実装部の前記第1の樹脂によって封止された領域の前記樹脂境界部を挟んで両側に配置されていることを特徴とする請求項10記載の半導体装置。
- 前記リードフレームは、前記半導体素子が搭載された実装部と、前記実装部に対向する放熱部とを有し、前記放熱部に絶縁接着部材が設けられ、
前記鱗状部は、前記リードフレームの前記絶縁接着部材で覆われた領域の内部と外部の境界である絶縁接着部材境界部を挟んで両側に配置されていることを特徴とする請求項1から請求項9のいずれか一項に記載の半導体装置。 - 前記リードフレームは、前記半導体素子が搭載された実装部と、前記実装部に対向する放熱部とを有し、前記放熱部及び前記放熱部と同一面をなしている前記樹脂に絶縁接着部材が設けられ、
前記鱗状部は、前記絶縁接着部材で覆われた前記放熱部から前記樹脂の端部まで連続して配置されていることを特徴とする請求項1から請求項9のいずれか一項に記載の半導体装置。 - 前記リードフレームの前記放熱部に、前記絶縁接着部材を介してヒートシンクが設けられていることを特徴とする請求項12または請求項13に記載の半導体装置。
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