JP7090135B2 - レーザ装置 - Google Patents
レーザ装置 Download PDFInfo
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- JP7090135B2 JP7090135B2 JP2020178067A JP2020178067A JP7090135B2 JP 7090135 B2 JP7090135 B2 JP 7090135B2 JP 2020178067 A JP2020178067 A JP 2020178067A JP 2020178067 A JP2020178067 A JP 2020178067A JP 7090135 B2 JP7090135 B2 JP 7090135B2
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- 238000012545 processing Methods 0.000 claims description 53
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- 238000012937 correction Methods 0.000 claims description 32
- 230000010287 polarization Effects 0.000 claims description 29
- 239000004973 liquid crystal related substance Substances 0.000 claims description 27
- 230000001678 irradiating effect Effects 0.000 claims description 5
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
- H01S3/0085—Modulating the output, i.e. the laser beam is modulated outside the laser cavity
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/705—Beam measuring device
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
- G02B27/0068—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration having means for controlling the degree of correction, e.g. using phase modulators, movable elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/13306—Circuit arrangements or driving methods for the control of single liquid crystal cells
- G02F1/13318—Circuits comprising a photodetector
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/137—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/0014—Monitoring arrangements not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/50—Phase-only modulation
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Liquid Crystal (AREA)
- Laser Beam Processing (AREA)
Description
Claims (7)
- レーザ光を出射するレーザ光源と、
前記レーザ光源から出射された前記レーザ光を入力し、前記レーザ光の一部の光の空間位相を制御して制御光として出射すると共に、前記レーザ光の別の一部の光を非制御光として出射するための位相制御部と、
前記位相制御部から出射された前記制御光を対象物に照射するための第1光学系と、
前記位相制御部から出射された前記非制御光を検出するための検出器と、
前記位相制御部から出射された前記非制御光を前記検出器の検出面に向けて集光するための第2光学系と、
前記検出器からの前記非制御光の検出結果に基づいて、前記位相制御部での前記制御光の空間位相の制御状態を補正するように前記位相制御部を制御するための補正処理を実行する制御部と、
を備えるレーザ装置。 - 前記制御部は、
前記検出結果に基づいて、前記非制御光の光軸方向に交差する面内での前記非制御光の位置のズレ量である第1ズレ量を取得する第1取得処理と、
前記補正処理として、前記第1ズレ量に基づいて、前記制御光の光軸方向に交差する面内での前記制御光の位置ずれを補正するように、前記位相制御部を制御する第1補正処理と、
を実行する、
請求項1に記載のレーザ装置。 - 前記制御部は、
前記検出結果に基づいて、前記非制御光の広がり角を取得する第2取得処理と、
前記補正処理として、前記広がり角に基づいて、前記制御光の広がり角を補正するように、前記位相制御部を制御する第2補正処理と、
を実行する、
請求項1又は2に記載のレーザ装置。 - 前記制御部は、前記第2取得処理では、前記非制御光を検出しながら前記非制御光の光軸方向に沿って前記検出器の前記検出面を移動させることにより、前記非制御光が前記検出面上で最も集光される位置の初期位置からのズレ量である第2ズレ量を取得すると共に、前記第2ズレ量に基づいて前記広がり角を取得する、
請求項3に記載のレーザ装置。 - 前記位相制御部は、
入力された前記レーザ光がS偏光成分とP偏光成分とを含むように前記レーザ光の偏光方向を変えて出射する偏光制御素子と、
前記偏光制御素子から出射された前記レーザ光のS偏光成分及びP偏光成分のうちの一方の空間位相を制御して前記制御光として出射すると共に、前記レーザ光のS偏光成分及びP偏光成分のうちの他方を非制御光として出射する液晶型空間位相変調器と、を含み、
前記制御部は、前記補正処理では、前記非制御光の検出結果に基づいて、前記液晶型空間位相変調器に表示する位相変調パターンを調整することによって、前記位相制御部での前記制御光の空間位相の制御状態を補正する、
請求項1~4のいずれか一項に記載のレーザ装置。 - 前記位相制御部は、入力された前記レーザ光を回折することにより複数の回折光に分岐して出射するための位相変調パターンを表示することにより、前記レーザ光の0次光を前記非制御光として出射すると共に、前記レーザ光の他の次数の回折光を前記制御光として出射するための液晶型空間位相変調器を含み、
前記制御部は、前記補正処理では、前記非制御光の検出結果に基づいて、前記液晶型空間位相変調器に表示する位相変調パターンを調整することによって、前記位相制御部での前記制御光の空間位相の制御状態を補正する、
請求項1~4のいずれか一項に記載のレーザ装置。 - 前記位相制御部から出射された前記制御光を検出するための別の検出器を備え、
前記制御部は、前記別の検出器からの前記制御光の検出結果に基づいて、前記位相制御部での前記制御光の空間位相の制御状態を調整するための位相変調パターンを生成すると共に、当該位相変調パターンを、前記補正処理により調整された位相変調パターンに重畳して前記液晶型空間位相変調器に表示させる、
請求項5又は6に記載のレーザ装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020178067A JP7090135B2 (ja) | 2020-10-23 | 2020-10-23 | レーザ装置 |
US18/032,403 US11942751B2 (en) | 2020-10-23 | 2021-09-29 | Laser device |
CN202180071970.9A CN116490318A (zh) | 2020-10-23 | 2021-09-29 | 激光装置 |
KR1020237015894A KR20230091924A (ko) | 2020-10-23 | 2021-09-29 | 레이저 장치 |
EP21882526.3A EP4197685A1 (en) | 2020-10-23 | 2021-09-29 | Laser device |
PCT/JP2021/035955 WO2022085385A1 (ja) | 2020-10-23 | 2021-09-29 | レーザ装置 |
TW110138894A TW202224822A (zh) | 2020-10-23 | 2021-10-20 | 雷射裝置 |
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JP2020178067A JP7090135B2 (ja) | 2020-10-23 | 2020-10-23 | レーザ装置 |
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JP7090135B2 true JP7090135B2 (ja) | 2022-06-23 |
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US (1) | US11942751B2 (ja) |
EP (1) | EP4197685A1 (ja) |
JP (1) | JP7090135B2 (ja) |
KR (1) | KR20230091924A (ja) |
CN (1) | CN116490318A (ja) |
TW (1) | TW202224822A (ja) |
WO (1) | WO2022085385A1 (ja) |
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DE102017203655B4 (de) * | 2017-03-07 | 2019-08-22 | Robert Bosch Gmbh | Verfahren und Vorrichtung zur Formung von Strahlung für die Laserbearbeitung |
US20190389002A1 (en) * | 2018-03-27 | 2019-12-26 | Xiao-Dong Xiang | Micro-zone laser heating apparatus and method |
JP2022517985A (ja) * | 2019-01-28 | 2022-03-11 | スタンレー電気株式会社 | 霧を介した画像強調のための弾道光変調 |
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2020
- 2020-10-23 JP JP2020178067A patent/JP7090135B2/ja active Active
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2021
- 2021-09-29 KR KR1020237015894A patent/KR20230091924A/ko active Search and Examination
- 2021-09-29 US US18/032,403 patent/US11942751B2/en active Active
- 2021-09-29 EP EP21882526.3A patent/EP4197685A1/en active Pending
- 2021-09-29 CN CN202180071970.9A patent/CN116490318A/zh active Pending
- 2021-09-29 WO PCT/JP2021/035955 patent/WO2022085385A1/ja active Application Filing
- 2021-10-20 TW TW110138894A patent/TW202224822A/zh unknown
Patent Citations (10)
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