JP7046358B2 - Polishing equipment - Google Patents

Description

The present invention relates to a polishing device for polishing the surface of a work such as a silicon wafer.

Conventionally, a polishing device including an upper surface plate, a lower surface plate, a sun gear, an internal gear, and a carrier plate, and polishing the surface of a work such as a silicon wafer held on the carrier plate has been known. For example, see Patent Document 1). This polishing device has a measuring instrument that measures the thickness of the work being polished in real time through the through hole formed in the upper surface plate, and the polishing process is performed based on the measurement result of the work thickness by this measuring instrument. Judge the stop timing of.

JP-A-2015-47656

By the way, in the conventional polishing apparatus, the stop timing of the polishing process is determined based on the measurement result of the work thickness. However, it is difficult to predict the future transition of the shape change of the work when the polishing process is continued from the temporary measurement result of the work thickness. Therefore, it is not possible to grasp whether or not the work shape approaches a desired shape when the polishing process is continued, and there arises a problem that it is difficult to stop polishing the work at the timing when the desired work shape is reached. Further, it is considered that the difference in various conditions related to the polishing process does not affect only the work shape after polishing, but also affects the transition of the work shape during polishing. However, until now, the transition of the work shape change over time due to the polishing process largely depends on the skill of the user, which has been an obstacle to improving the efficiency of process improvement.

The present invention has been made by paying attention to the above problem, and based on the transition of the shape change of the work during polishing, the polishing process of the work is stopped at the timing when the desired work shape is obtained or the desired work shape is obtained. The challenge is to provide a polishing device that can be used.

In order to achieve the above object, the polishing apparatus of the present invention includes a polishing machine that grinds a work by a rotating surface plate, a shape measuring device that measures the shape of the work through a measuring hole formed in the surface plate, and a shape. It is equipped with a memory that stores the shape information of the work measured by the measuring instrument, a display that displays the shape information of the work measured by the shape measuring instrument, and a control unit that controls the display contents of the display. ..
Then, the control unit generates a first drawing in which the shape drawing of the work being polished, which is the work currently being polished measured by the shape measuring instrument, is arranged in chronological order, and displays this first drawing on the display.

As a result, based on the transition of the shape change of the work during polishing, the polishing process of the work can be stopped at the timing when the desired work shape is obtained or the timing when the desired work shape is obtained.

It is explanatory drawing which shows schematic the whole structure of the polishing apparatus of Example 1. FIG. It is explanatory drawing which shows the positional relationship of the sun gear, the internal gear, and a carrier plate of Example 1. FIG. It is explanatory drawing which shows the passing locus when a measuring hole passes over a work in the polishing apparatus of Example 1. FIG. It is explanatory drawing which shows the cross-sectional shape line which showed the cross-sectional shape of the work in the polishing apparatus of Example 1. FIG. It is explanatory drawing which shows the 1st drawing generated by the polishing apparatus of Example 1. FIG. It is explanatory drawing which shows the 2nd drawing generated by the polishing apparatus of Example 1. FIG. It is a flowchart which shows the flow of the polishing stop determination process which is executed in Example 1. FIG. It is a flowchart which shows the flow of the 2nd drawing generation processing which is executed in Example 1. FIG. It is explanatory drawing which shows the screen of the display in the polishing apparatus of Example 1. FIG. It is explanatory drawing which arranged the shape drawing when the 1st work was polished in chronological order. It is explanatory drawing which arranged the shape drawing when the 2nd work was polished in chronological order. It is explanatory drawing which arranged the shape drawing when the 3rd work was polished in chronological order. It is explanatory drawing which arranged the shape drawing at the time of polishing the 4th work in chronological order. It is explanatory drawing which shows the whole structure of the polishing apparatus of Example 2 schematicly. It is a flowchart which shows the flow of the polishing stop determination process which is executed in Example 2. FIG. It is explanatory drawing which arranged the shape drawing when the 5th work was polished in chronological order. It is explanatory drawing which arranged the shape drawing when the 6th work was polished in chronological order. It is explanatory drawing which shows the relationship between the work polishing time and the flatness of a work central part. It is explanatory drawing which shows the relationship between the work polishing time and the flatness of the work outer peripheral area.

Hereinafter, embodiments for carrying out the polishing apparatus of the present invention will be described with reference to Examples 1 and 2 shown in the drawings.

(Example 1)
Hereinafter, the configurations of the polishing apparatus 1 of the first embodiment are described as "overall configuration", "detailed configuration of polishing machine", "detailed configuration of shape measuring instrument", "detailed configuration of memory", "detailed configuration of display", and "detailed configuration of display". The detailed configuration of the control unit, the polishing stop determination processing configuration, and the second drawing generation processing configuration will be described separately.

[overall structure]
The polishing device 1 of the first embodiment is a double-sided polishing device that polishes both the front and back surfaces of a thin plate-shaped work W such as a semiconductor wafer, a crystal wafer, a sapphire wafer, a glass wafer, or a ceramic wafer. As shown in FIG. 1, the polishing device 1 includes a polishing machine 10, a shape measuring device 20, a memory 30, a display 40, and a control unit 50.

[Detailed configuration of grinding machine]
The polishing machine 10 grinds the work W by the rotating lower surface plate 11 and upper surface plate 12. The polishing machine 10 includes a disk-shaped lower surface plate 11 and an upper surface plate 12 concentrically arranged with the axis L1 at the center, a sun gear 13 rotatably arranged at the center of the lower surface plate 11, and a lower surface plate 11. It has an internal gear 14 arranged on the outer peripheral side of the surface plate, and a carrier plate 15 arranged between the lower surface plate 11 and the upper surface plate 12 and having a work holding hole 15a (see FIG. 2) formed therein. .. Further, a polishing pad 11a is attached to the upper surface of the lower surface plate 11, and a polishing pad 12a is attached to the lower surface of the upper surface plate 12. Further, the upper surface plate 12 is provided with a supply hole (not shown) for supplying the polishing slurry.

Here, as shown in FIG. 2, the carrier plate 15 meshes with the sun gear 13 and the internal gear 14. Then, the carrier plate 15 rotates (revolves) around the axis L1 while rotating by rotating the sun gear 13 and the internal gear 14.

The work W is arranged in the work holding hole 15a of the carrier plate 15. Then, the carrier plate 15 rotates and revolves while being sandwiched between the polishing pad 11a attached to the rotating lower surface plate 11 and the polishing pad 12a attached to the rotating upper surface plate 12, so that the work W is a polishing pad. It is polished by the 11a and the polishing pad 12a. That is, the surfaces of the polishing pad 11a and the polishing pad 12a are the polishing surfaces for polishing the work W.

The upper surface plate 12 is fixed to the rod 16 via a support stud 16a and a mounting member 16b mounted on the upper surface. The rod 16 is expanded and contracted in the vertical direction by the fifth drive device M5. That is, the upper surface plate 12 moves up and down as the rod 16 expands and contracts.

In the center of the polishing machine 10, a first drive shaft 17a standing up along the axis L1 is arranged. The first drive shaft 17a is a shaft rotated by the first drive device M1. A driver 18 is fixed to the upper end of the first drive shaft 17a. As a result, the driver 18 is integrally rotated with the first drive shaft 17a by the first drive device M1.

In the driver 18, a groove portion (not shown) with which the hook 12b provided on the upper surface plate 12 is engaged is formed on the outer peripheral surface. Then, the rod 16 extends and the upper surface plate 12 moves downward, and the hook 12b engages with the groove portion of the driver 18, so that the driver 18 and the upper surface plate 12 rotate integrally. That is, the upper surface plate 12 is integrally rotated with the first drive shaft 17a by the first drive device M1.

The second drive shaft 17b is fixed in the hole 13a at the center of the sun gear 13 in a penetrating state. The second drive shaft 17b is a hollow tube having both ends open, and the first drive shaft 17a rotatably penetrates the second drive shaft 17b. Further, the second drive shaft 17b is rotated by the second drive device M2. As a result, the sun gear 13 is integrally rotated with the second drive shaft 17b by the second drive device M2.

A third drive shaft 17c is formed in the lower part of the central portion of the lower platen 11. The third drive shaft 17c is a hollow tube having both ends open, and the second drive shaft 17b rotatably penetrates the third drive shaft 17c. Further, the third drive shaft 17c is rotated by the third drive device M3. As a result, the lower platen 11 is integrally rotated with the third drive shaft 17c by the third drive device M3.

A fourth drive shaft 17d is formed on the internal gear 14. The fourth drive shaft 17d is a hollow tube having both ends open, and the third drive shaft 17c rotatably penetrates the third drive shaft 17d. Further, the fourth drive shaft 17d is rotated by the fourth drive device M4. As a result, the internal gear 14 is integrally rotated with the fourth drive shaft 17d by the fourth drive device M4.

Further, the upper surface plate 12 is formed with a measuring hole 19 at a position separated by a predetermined distance along the radial direction from the center. The measuring hole 19 is fitted with a window member 19a that penetrates the upper surface plate 12 and the polishing pad 12a and transmits the laser light that is the measurement light.

[Detailed configuration of shape measuring instrument]
The shape measuring instrument 20 irradiates the work W with the measurement light, receives the measurement light reflected by the work W, and measures the thickness of the work W being polished. Further, the shape measuring instrument 20 obtains the cross-sectional shape of the work W from the measured thickness of the work W. The shape measuring instrument 20 includes a measuring unit 21, a thickness measuring unit 22, and a shape calculation unit 23.

The measuring unit 21 is attached to the upper surface plate 12 and rotates integrally with the upper surface plate 12. Further, the measurement unit 21 is reflected by the work W and a laser light source (not shown) that irradiates the work W with the laser light which is the measurement light through the window member 19a of the measurement hole 19 of the upper platen 12. It has a light receiving unit (not shown) that receives reflected light. The light receiving signal received by the light receiving unit is transmitted to the thickness measuring unit 22 by the transmitting unit 21a.

The thickness measuring unit 22 measures the thickness of the work W by, for example, a light reflection interference method. The thickness measuring unit 22 has a receiving unit 22a that receives a light receiving signal transmitted from the measuring unit 21, and obtains the thickness of the work W based on the light receiving signal received by the receiving unit 22a.

Here, due to the rotation of the upper surface plate 12, as shown in FIG. 3A, the laser beam from the measuring unit 21 continues on the surface of the work W while the measuring hole 19 passes over the surface of the work W. Is irradiated. Therefore, the thickness measuring unit 22 continuously measures the thickness of each in-plane position of the work W on the passage trajectories Na to Nc of the measuring hole 19. Then, the thickness measuring unit 22 is used while the measuring holes 19 pass through the respective passage trajectories Na to Nc (during the passing period of the measuring holes 19 from one end W1a to W3a to the other end W1b to W3b of the work W). , A data string consisting of a large number of continuous thickness data is output for each passage. As a result, the thickness measuring unit 22 outputs a data string consisting of a plurality of continuous data for measuring the thickness of each in-plane position of the work W each time the measuring hole 19 passes over the surface of the work W. .. The data string output from the thickness measuring unit 22 is stored in the memory 30.

The shape calculation unit 23 obtains the cross-sectional shape of the work W. The interval for obtaining the cross-sectional shape of the work W can be arbitrarily set. In the first embodiment, for example, the cross-sectional shape of the work W is obtained based on the data string acquired in 15 seconds, and the cross-sectional shape of the work W is newly obtained at intervals of 15 seconds. Further, the shape information such as the cross-sectional shape of the work created by the shape calculation unit 23, the work shape pattern obtained by performing the calculation processing of the shape information, the conditional attributes when the work W is polished, and the shape of the work W. The work shape pattern or the like generated based on the learning result of the degree of correlation with the information is stored in the memory 30.

Further, the shape calculation unit 23 obtains the cross-sectional shape line T1 as shown in FIG. 3B. The cross-sectional shape line T1 is a shape drawing showing the cross-sectional shape of the work W. The cross-sectional shape line T1 is obtained every time the thickness of the work W is measured by the thickness measuring unit 22. As a result, by arranging the cross-sectional shape lines T1 obtained for the same work W in chronological order, the transition of the shape change of the work W is shown. Further, the cross-sectional shape line T1 at the end of polishing of the work W indicates processing result information which is the final work shape of the work W. The information on the cross-sectional shape line T1 (information on the cross-sectional shape of the work W) obtained by the shape calculation unit 23 is stored in the memory 30.

[Detailed memory configuration]
The memory 30 is a storage device capable of reading and writing data from the shape measuring device 20 and the control unit 50. In this memory 30, information on the thickness of the work W obtained by the thickness measuring unit 22 and information on the cross-sectional shape of the work W obtained by the shape calculation unit 23 (hereinafter referred to as "shape information of the work W"). ) Etc. are memorized.

Further, the memory 30 stores the shape information of the work W in association with the conditional attributes when the work W is polished. Here, the "conditional attribute" is various parameters that affect the polishing process of the work W such as the polishing condition, the polishing environment, and the equipment characteristics, and have a correlation with the polishing state of the work W. The "conditional attributes" include, for example, operating conditions of the polishing machine 10, polishing slurry conditions, polishing pad conditions, carrier plate conditions, work conditions, polishing process conditions, and the like.

The operating conditions of the polishing machine 10 include, for example, the rotation speed of the lower surface plate 11 and the upper surface plate 12, the rotation speed of the sun gear 13 and the internal gear 14, the processing load set value and unit pressure of the upper surface plate 12, and the load slope. , Cooling water temperature of the lower surface plate 11 and the upper surface plate 12, rotation speed of rotation and revolution of the carrier plate 15, vibration state and tilt characteristics of the polishing machine 10. The polishing slurry conditions are, for example, the type / temperature / flow rate of the polishing slurry, the slurry life, the slurry pH value, and the like. The polishing pad conditions are, for example, the type, thickness, groove morphology, surface roughness, polishing pad life, degree of deposition of modified substances, seasoning conditions, etc. of the polishing pad 11a and the polishing pad 12a. The carrier plate conditions are the material and thickness of the carrier plate 15, the shape and bending characteristics of the work holding hole 15a and the discard hole, the carrier plate life, the wear occurrence site, and the like. The work conditions include the type of the work W, the thickness at the start of polishing, the shape at the start of polishing, the variation in the work thickness in the batch, and the like. The polishing process conditions include transition information of shape change in the batch, the number of continuous polishing, the amount of polishing the work, the polishing time, the difference in thickness between the carrier plate 15 and the work W, and the like.

[Detailed configuration of display]
The display 40 is obtained by arithmetically processing the shape information of the work W currently being polished, the shape information of the work W polished in the past, and the shape information of the work W based on the display command from the control unit 50. Arbitrary, such as the work shape pattern, the work shape pattern generated based on the learning result of the degree of correlation between the conditional attributes when the work W is polished and the shape information of the work W, and the judgment of stopping the polishing of the work W. Display information about. The display 40 is attached to, for example, the polishing machine 10. The display 40 has a screen 40a (see FIG. 8) that can be visually recognized by the user of the polishing machine 10.

[Detailed configuration of control unit]
The control unit 50 includes a control calculation unit 51 composed of a CPU (Central Processing Unit), a sub-memory 52, an input device 53, and the like. The control unit 50 is the first from the control calculation unit 51 based on the program stored in the sub memory 52, the machining target of the work W input by the user of the polishing machine 10 via the input device 53, the conditional attributes, and the like. A control command is output to the 1st drive device M1 to the 5th drive device M5 to control the operation of the polishing machine 10.

Further, the control calculation unit 51 displays the first drawing P1 in which the shape drawing of the work W being polished is arranged in chronological order on the display 40, and predicts the transition of the work shape based on the shape information. A polishing stop determination process for determining whether or not to stop the polishing process of the work W is performed according to the prediction result. That is, the control calculation unit 51 includes a first drawing generation unit 54, a second drawing generation unit 55, a display control unit 56, a shape transition prediction unit 57, and a state determination unit 58.

The first drawing generation unit 54 extracts the shape information of the work currently being polished (hereinafter referred to as “polishing work Wα”) measured by the shape measuring device 20 from the memory 30. Here, the shape information extracted from the memory 30 is the shape information obtained from the start of polishing of the work Wα during polishing to the measurement performed immediately before the extraction of the shape information. Then, in the first drawing generation unit 54, the shape drawing (cross-sectional shape line T1) of the work being polished Wα is arranged in chronological order based on the extracted shape information of the work Wα being polished. 4) is generated.
The shape information of the work Wα being polished increases as the number of measurements increases as the polishing process of the work Wα being polished progresses. Therefore, the first drawing P1 gradually changes from the figure shown on the left side of FIG. 4 to the figure shown on the right side of FIG. 4 according to the number of measurements.

The second drawing generation unit 55 acquires the conditional attribute of the work Wα being polished, and then sets it as the conditional attribute of the work Wα being polished among the work Ws that have been polished before the polishing of the work Wα being polished. The shape information of the work associated with the matching conditional attribute (hereinafter referred to as "shape reference work Wβ"), or the typical shape associated with the conditional attribute matching the conditional attribute of the work Wα being polished. Information is extracted from the memory 30.
Here, the shape information extracted from the memory 30 is extracted from a desired range of the shape information stored in the memory 30.

The "typical shape information" is abstract and typical shape information obtained arithmetically as a typical shape transition when the work W is polished, and the work W is polished. It is a work shape pattern generated based on the learning result of the degree of correlation between the conditional attribute and the shape information of the work W. Further, in the following, the shape information of the shape reference work Wβ or the typical shape information is included and referred to as “shape information of the selected master”.

Further, "matching the conditional attribute of the work Wα being polished" means that the conditional attribute at the time of polishing is at least partially the same as the conditional attribute of the work Wα being polished, or the work Wα being polished. Refers to the case where at least a part of the conditional attribute is similar. For example, as the conditional attributes of the work Wα during polishing, "rotational speed of lower surface plate 11 = A", "rotational speed of upper surface plate 12 = B", "slurry type = C", and "carrier material = D" are set. If so, "rotational speed of lower surface plate 11 = A ± x", "rotational speed of upper surface plate 12 = B ± y", "slurry type = C or C'", "carrier material = D or It is determined that a conditional attribute such as "D'" matches the conditional attribute of the work Wα being polished, and the shape information of the selected master associated with these conditional attributes is extracted from the memory 30. It should be noted that the criteria for determining whether or not the conditional attributes match can be arbitrarily set.

Then, in the second drawing generation unit 55, the shape drawing (cross-sectional shape line T1) of the selection master is polished from the start of polishing based on the shape information of the selection master extracted based on the conditional attribute of the work Wα being polished. The second drawing P2 (see FIG. 5) arranged in order in chronological order until the stop is generated. The second drawing generation unit 55 constantly monitors the conditional attribute of the work Wα during polishing while the work W is being polished. Then, for example, when the conditional attribute of the work Wα being polished deviates from the initial setting or the assumed state during the progress of a certain batch due to the occurrence of an abnormal slurry flow rate, the conditional attribute of the work Wα being polished Edit new conditional attribute combinations based on the deviation pattern of. Then, the shape information of the selection master associated with the newly edited combination of conditional attributes is extracted from the memory 30. Then, the second drawing P2 is generated again based on the shape information of the newly extracted selection master. Further, in the second drawing generation unit 55, when the second drawing P2 is regenerated, it may be generated based on the virtual pattern of the shape drawing guided by the learning function.

In the display control unit 56, a control command for displaying the first drawing P1 generated by the first drawing generation unit 54 and the second drawing P2 generated by the second drawing generation unit 55 on the screen 40a of the display unit 40. Is output to the display 40. Further, when the state determination unit 58 determines that the polishing process by the polishing machine 10 is stopped, the display control unit 56 displays a control command for displaying on the screen 40a of the display 40 that the polishing stop determination has been performed. Output to 40.

In the shape transition prediction unit 57, the time-series change of the shape information of the work Wα being polished extracted by the first drawing generation unit 54 and the time-series change of the shape information of the selection master extracted by the second drawing generation unit 55. Is compared. Then, the shape transition prediction unit 57 predicts the future shape transition of the work Wα being polished based on the result of the comparison calculation. The shape transition of the work Wα during polishing predicted by the shape transition prediction unit 57 is a transition of the work shape obtained for each measurement including the final polishing shape.

Then, the comparison calculation of the time-series change of the shape information by the shape transition prediction unit 57 is performed by, for example, the following procedure. That is, the cross-sectional shape lines T1 of the selected master are arranged in chronological order for each conditional attribute. Then, the shape transition pattern of the selection master for each conditional attribute is generated, and a database related to the shape transition pattern is constructed. Here, in the selected master, the conditional attribute at the time of polishing matches the conditional attribute of the work Wα being polished. Therefore, it is considered that the shape transition of the work Wα during polishing is the same as that of the selected master.

Therefore, the shape transition prediction unit 57 compares the cross-sectional shape line T1 of the work Wα being polished by recognizing the shape transition pattern stored in the database. Then, with reference to the shape transition of the selected master, it is estimated which stage the polishing stage of the work Wα currently being polished is from the start of polishing to the stop of polishing. Further, the shape transition prediction unit 57 predicts the future shape transition of the work Wα being polished based on the current polishing stage of the work Wα being polished and the shape transition of the selected master.
The shape transition prediction unit 57 has a machine learning function, and updates the shape transition pattern and the temporal fluctuation pattern at any time by machine learning. Further, as the polishing process progresses, when the conditional attribute monitored during the polishing process of the work Wα during polishing changes beyond a negligible range, the shape transition prediction unit 57 immediately becomes new. Based on the conditional attributes, the shape of the work Wα during subsequent polishing is predicted, calculated, and output.

The state determination unit 58 determines the current polishing state of the polishing work Wα based on the future shape transition of the polishing work Wα predicted by the shape transition prediction unit 57. Here, the "polishing state" includes a polishing stop state in which the work shape of the work Wα during polishing reaches a work shape capable of stopping the polishing process, a polishing continuation state in which the polishing process by the polishing machine 10 needs to be continued, and the like. Is included.

[Polishing stop judgment processing configuration ]
FIG. 6 is a flowchart showing the flow of the polishing stop determination process executed by the control calculation unit 51 of the control unit 50 of the first embodiment. Hereinafter, each step of the polishing stop determination process of the first embodiment will be described with reference to FIG.

In step S1, it is determined whether or not the work W is being polished by the polishing machine 10. If YES (work is being polished), the process proceeds to step S2. If NO (without work polishing), step S1 is repeated.
Here, the determination of the work polishing by the polishing machine 10 is accompanied by a control command from the control calculation unit 51 to the first drive device M1 to the fifth drive device M5, and is based on whether or not the polishing process command flag is set. conduct.

In step S2, following the determination that the work is being polished in step S1, the shape information of the work being polished Wα measured by the shape measuring instrument 20 is extracted from the memory 30, and the process proceeds to step S3.

In step S3, following the extraction of the shape information of the work Wα being polished in step S2, the shape drawing of the work Wα being polished is drawn by the polishing machine 10 based on the shape information of the work Wα being polished extracted in this step S2. The first drawing P1 (see FIG. 4) arranged in order from the start of polishing to the measurement performed immediately before the information extraction is generated, and the process proceeds to step S4.

In step S4, following the generation of the first drawing P1 in step S3, the first drawing P1 generated in this step S3 and the second drawing P2 generated by the second drawing generation process described later (see FIG. 5). ) And proceed to step S5.
Here, the process of generating the second drawing P2 (second drawing generation process) is executed in parallel with each step of the polishing stop determination process shown in FIG. 6, and the second drawing P2 is the polishing work Wα. If the conditional attributes change during polishing, they will be replaced as appropriate.

In step S5, following the reading of the first drawing P1 and the second drawing P2 in step S4, the first drawing P1 generated in step S3 and read in step S4 and the second drawing read in step S4. A control command for simultaneously displaying P2 and P2 on the screen 40a of the display 40 is output to the display 40, and the process proceeds to step S6.
In the first embodiment, as shown in FIG. 8, the display 40 has the same ratio of the X-axis and the Z-axis of the first drawing P1 and the second drawing P2, and the first drawing P1 and the second drawing P1 and the second drawing P2 have the same ratio. The drawing P2 and the drawing P2 are arranged horizontally and displayed on the screen 40a. In addition, the display 40 also displays the conditional attributes (part or all) of the work Wα being polished on the screen 40a at the same time. Whether or not to display all the conditional attributes may be set in consideration of the display space of the screen 40a, the convenience of monitoring the conditional attributes, and the like. Further, the conditional attribute of the work Wα during polishing does not have to be displayed on the screen 40a.

In step S6, following the output of the control command to the display 40 in step S5, the time-series change of the shape information of the selection master extracted when the second drawing P2 is generated, and the polishing extracted in step S2 are being performed. A comparison calculation is performed with the time-series change of the shape information of the work Wα, the future shape transition of the work Wα being polished is predicted from the comparison calculation result, and the process proceeds to step S7.
When the second drawing P2 is replaced, the shape information of the selection master extracted when the second drawing P2 is generated changes according to the replaced second drawing P2.

In step S7, following the prediction of the shape transition of the work Wα being polished in step S6, the polishing state of the work Wα being polished is determined based on the predicted shape transition, and the process proceeds to step S8.
Here, the polishing state of the work Wα being polished is determined to be either a “polishing stopped state” in which the polishing process has reached a work shape that can stop the polishing process, or a “polishing continuation state” in which the polishing process needs to be continued.

In step S8, following the determination of the polishing state of the polishing work Wα in step S7, whether to stop the polishing process of the polishing work Wα by the polishing machine 10 based on the determination of the polishing state performed in this step S7. Judge whether or not. If YES (polishing stopped), the process proceeds to step S9. If NO (continuation of polishing), the process proceeds to step S2.
Here, the determination that the polishing work Wα is stopped during polishing is performed when it is determined in step S7 that the polishing is stopped.

In step S9, following the determination of polishing stop in step S8, a control command for displaying on the screen 40a of the display 40 that the polishing stop of the polishing work Wα has been determined is output to the display 40 to determine the polishing stop. Is notified and the process proceeds to step S10.

In step S10, following the notification of the polishing stop determination in step S9, the polishing process of the work Wα during polishing by the polishing machine 10 is stopped, and the process proceeds to the end.
Here, the polishing process by the polishing machine 10 is stopped by outputting a stop control command from the control calculation unit 51 to the first drive device M1 to the fifth drive device M5.

[Second drawing generation processing configuration]
FIG. 7 is a flowchart showing the flow of the second drawing generation process executed by the second drawing generation unit 55 of the control unit 50 of the first embodiment. Hereinafter, each step of the second drawing generation process of the first embodiment will be described with reference to FIG. 7.

In step S11, it is determined whether or not the work W is being polished by the polishing machine 10. If YES (work is being polished), the process proceeds to step S12. If NO (without work polishing), step S11 is repeated.
Here, the determination of the work polishing by the polishing machine 10 is performed in the same manner as in step S1 in the polishing stop determination process.

In step S12, following the determination that the work is being polished in step S11, the conditional attribute of the work being polished Wα currently being polished is acquired, and the process proceeds to step S13.
Here, the conditional attributes of the work Wα being polished are input by the user of the polishing machine 10 via the input device 53 at the start of polishing of the work Wα being polished, stored in advance in the sub-memory 52, or via the CPU. The change state is monitored by sensors and the like.

In step S13, following the acquisition of the conditional attribute of the work Wα being polished in step S12, the work W that has been polished in the past is associated with the conditional attribute that matches the conditional attribute acquired in step S12. The shape information of the selected master (shape information of the shape reference work Wβ or typical shape information) is extracted from the memory 30, and the process proceeds to step S14.

In step S14, following the extraction of the shape information of the selection master in step S13, the shape drawing of the selection master is drawn from the start to the stop of polishing by the polishing machine 10 based on the shape information of the selection master extracted in this step S13. The second drawing P2 (see FIG. 5) arranged in order in the time series of is generated, and the process proceeds to step S15.

In step S15, it is determined whether or not the polishing of the work Wα during polishing is continued following the generation of the second drawing P2 in step S14. If YES (continuation of polishing), the process proceeds to step S16. In the case of NO (polishing stop), it is considered unnecessary to generate or replace the second drawing P2, the process proceeds to the end, and the second drawing generation process is terminated.
Here, the determination of continuation of polishing of the work Wα during polishing is performed when it is determined that the polishing process needs to be continued based on the polishing state of the work Wα during polishing.

In step S16, following the determination that polishing is continued in step S15, the conditional attribute of the polishing work Wα is acquired again, and the process proceeds to step S17.

In step S17, following the reacquisition of the conditional attribute of the polishing work Wα in step S16, it is determined whether or not the state of the conditional attribute of the polishing work Wα has changed. If YES (changed), the process proceeds to step S18. If NO (no change), the process returns to step S15.
Here, whether or not a state change has occurred in the conditional attribute of the polishing work Wα is determined by the conditional attribute of the polishing work Wα acquired in step S16 and the conditional attribute of the polishing work Wα acquired before that. And make a judgment based on the difference. When the conditional attribute of the work Wα during polishing changes, it means that the conditional attribute deviates significantly from the initially set state as the polishing process progresses, or the conditional attribute is significantly larger than expected. For example, when it fluctuates.

In step S18, following the determination that the state of the conditional attribute has changed in step S17, the conditional attribute of the selected master is determined based on the conditional attribute of the work Wα being polished after the change acquired in step S16. Edit and proceed to step S19.
Here, the editing of the conditional attribute means that the conditional attribute of the selected master is based on the conditional attribute of the work Wα being polished, and the conditional attribute that has a high influence on the polishing process of the work W or a specific condition. To select or replace the corresponding conditional attributes.

In step S19, following the editing of the conditional attribute in step S18, the shape information of the selection master (shape reference work Wβ) associated with the conditional attribute that best matches the conditional attribute edited in step S19. (Shape information or typical shape information) is extracted from the memory 30, and the process proceeds to step S20.

In step S20, following the extraction of the shape information of the selected master in step S19, the second drawing P2 is generated again based on the shape information of the selected master extracted in this step S19. Then, the second drawing P2 generated by the time when the shape information of the selection master is extracted again is replaced with the newly generated second drawing P2, and the process returns to step S15.

The operation will be described below.
First, the "problem when the work polishing is stopped" will be described, and then the operation of the polishing device 1 of the first embodiment will be described separately for the "polishing stopping action" and the "shape transition prediction accuracy improving action".

[Issues when work polishing is stopped]
When both sides of the work W are polished by the polishing machine 10 of the polishing device 1, the thickness and the cross-sectional shape of the work W gradually change as the polishing process progresses. In particular, the cross-sectional shape of the work W is generally determined by the thickness difference between the carrier plate 15 and the work W when other conditional attributes are constant in a desirable state. It changes from "convex / outer peripheral sagging shape" to "flat shape" to "center concave / outer peripheral tachi shape". The "center convex shape" is a shape in which the thickness of the central portion of the work W is larger than that of the outer peripheral region. Further, the "outer peripheral sagging shape" is a shape in which the thickness gradually decreases toward the outer peripheral edge of the work W. The "flat shape" is a shape in which the entire surface of the work W is substantially flat. The "center concave shape" is a shape in which the thickness of the central portion of the work W is smaller than that of the outer peripheral region. Further, the "outer peripheral tachi shape" is a shape in which the thickness gradually increases toward the outer peripheral edge of the work W.

Then, by stopping the polishing process when the thickness of the work W is within the target thickness range (T1 ≦ thickness ≦ T2), the work W becomes a desired thickness. On the other hand, the cross-sectional shape of the work W depends on the setting in the machining process of the subsequent process, but in general, it is often preferable that the cross-sectional shape of the work W is a “flat shape” in which the entire surface of the work W is substantially flat. Therefore, it is desired that the polishing process of the work W is stopped when the thickness falls within the target thickness range and the cross-sectional shape becomes a "flat shape".

On the other hand, the thickness of the work W is measured in real time, and the shape drawing of the work W being polished is generated based on the measurement result each time the measurement is performed. Then, the user of the grinding machine 10 monitors the shape drawing of the work W, and the grinding machine 10 is operated at the timing when the thickness of the work W falls within the target thickness range and the cross-sectional shape reaches the "flat shape". It is done to stop.

However, the process of change in the cross-sectional shape of the work W (shape transition) may differ due to the influence of differences in conditional attributes during polishing of the work W. Further, the cross-sectional shape of the work W may not be a desired shape such as a "flat shape" due to the correlation with the conditional attribute at the time of polishing the work W, in which case it is secondarily acceptable. It becomes necessary to stop the polishing process due to the cross-sectional shape.

On the other hand, it is difficult to predict how the shape of the work will change in the future only by temporarily monitoring the shape drawing of the work W. That is, for example, in the case of the work W having a "weak center convex shape" at present, there are cases where the work W becomes a "flat shape" and a "peripheral tachi shape" by continuing the polishing process. The work shape after that is unknown only by temporarily monitoring the current work shape "weak center convex shape", and as a result of not being able to stop the polishing process at an appropriate timing, the work W becomes "outer circumference tachi shape". This may result in deterioration of SFQR (Site front last squares range) in the outer peripheral region of the work. Further, even though the work W has a "flat shape", the polishing stop timing may be delayed more than appropriate.

That is, it is not possible to grasp the transition of the shape change of the work W during polishing only by temporarily monitoring the shape drawing of the work W. Therefore, there arises a problem that the polishing process of the work W cannot be stopped at the timing when the desired work shape is obtained or the timing when the desired work shape is obtained based on the transition of the shape change of the work W.

[Polishing stop action]
In the polishing apparatus 1 of the first embodiment, the thickness and the cross-sectional shape of the work W are measured by the shape measuring device 20 while the work W is being polished by the polishing machine 10. Then, the polishing device 1 stores the information on the thickness and the cross-sectional shape of the work W measured by the shape measuring device 20 in the memory 30.

On the other hand, when the work W is polished by the polishing machine 10, the control calculation unit 51 of the control unit 50 determines that the work W is being polished, and steps S1 to S2 and S3 shown in the flowchart of FIG. , Each process of step S4 is performed in order. That is, the first drawing generation unit 54 extracts the shape information of the work Wα being polished from the memory 30, and generates the first drawing P1 based on the extracted shape information of the work Wα being polished. Further, the display control unit 56 reads the first drawing P1 generated by the first drawing generation unit 54 and the second drawing P2 generated by the second drawing generation unit 55, and the screen 40a of the display 40a. Outputs a control command for displaying the first drawing P1 and the second drawing P2.

As a result, the first drawing P1 and the second drawing P2 are simultaneously displayed on the screen 40a of the display device 40. As described above, in the polishing device 1 of the first embodiment, when the shape of the work Wα being polished is measured by the shape measuring device 20, the first drawing P1 is displayed on the display device 40.

Here, in the first drawing P1, the shape drawing (cross-sectional shape line T1) of the work Wα being polished is arranged in chronological order. Therefore, the user of the polishing machine 10 can collectively recognize the shape drawing of the continuously drawn work Wα during polishing. As a result, the user can grasp the transition of the shape change of the work Wα during polishing from the start of polishing to the present (time of generation of the first drawing). As a result, the user can predict the future shape change of the polishing work Wα based on the change in the shape of the polishing work Wα. Therefore, even when the polishing machine 10 is manually controlled by the user to stop the polishing process, it is easy to stop the polishing process at the timing when the desired work shape is obtained or the timing when the desired work shape is obtained.

In addition, since the user can collectively recognize the shape drawing of the work Wα being polished in a state linked to the conditional attribute, this user can design the equipment of the polishing machine 10, design auxiliary materials such as slurries, and auxiliary materials. It is possible to easily plan the improvement of conditional attributes at the time of work polishing such as selection and selection of processing conditions. Then, the user can more efficiently plan the process improvement, and by extension, can improve the productivity of the wafer having the desired shape of the final work.

Moreover, in the first embodiment, the first drawing P1 and the second drawing P2 are simultaneously displayed on the screen 40a of the display device 40. Therefore, the user of the polishing machine 10 can simultaneously monitor the first drawing P1 and the second drawing P2 by visually observing the screen 40a.

Here, in the second drawing P2, the shape drawing (cross-sectional shape line T1) of the selected master is arranged in chronological order based on the shape information of the selected master extracted based on the conditional attribute of the work Wα being polished. Is. Therefore, the user of the polishing machine 10 monitors the first drawing P1 and at the same time confirms the second drawing P2, thereby referring to the shape transition of the selection master shown in the second drawing P2, and the polishing work Wα. It is possible to predict the transition of shape changes in the future more accurately. As a result, when the user manually controls the polishing machine 10 to stop the polishing process, the polishing process can be stopped at a more appropriate timing. Further, in some cases, the conditional attributes can be intentionally changed to adjust the final work shape and the timing of the end of polishing.

On the other hand, in the polishing apparatus 1 of the first embodiment, after the first drawing P1 and the second drawing P2 are displayed on the screen 40a of the display 40, steps S6 to S7 and steps S8 shown in the flowchart of FIG. Process in order. That is, the shape transition prediction unit 57 compares and calculates the time-series change of the shape information of the work Wα being polished and the time-series change of the selection master, and predicts the future shape transition of the work Wα being polished based on the result. do. Further, the state determination unit 58 determines the current polishing state of the polishing work Wα based on the shape transition of the polishing work Wα predicted by the shape transition prediction unit 57, and polishes based on the determination result of the polishing state. Determine whether to stop machining.

Then, when the state determination unit 58 determines that the polishing process of the work Wα during polishing is stopped, the process of step S9 shown in the flowchart of FIG. 6 is performed. That is, the display control unit 56 outputs a control command for displaying on the screen 40a of the display 40 that the polishing stop of the work Wα during polishing is determined. Then, on the screen 40a of the display 40, it is displayed that the polishing stop of the polishing work Wα is determined, and the polishing stop determination is notified.

As a result, the user of the polishing machine 10 can grasp that the polishing stop is determined by visually observing the screen 40a. As a result, even when the user manually controls the polishing machine 10 to stop the polishing process, the polishing process can be stopped at an appropriate timing. As will be described later, even when the grinding machine 10 is stopped by a stop control command from the control unit 50, the user can recognize the stop operation of the grinding machine 10.

After that, the process of step S10 shown in the flowchart of FIG. 6 is performed. That is, the control calculation unit 51 of the control unit 50 outputs various outputs such as a stop control command to the first drive device M1 to the fifth drive device M5 to complete the polishing process. As a result, the polishing machine 10 automatically stops after a predetermined sequence, and the polishing process of the work Wα during polishing is completed. As a result, in the polishing apparatus 1 of the first embodiment, it is possible to prevent the polishing process from being stopped later than the appropriate time, and to automatically stop the polishing process at an appropriate timing.

Then, in the polishing device 1 of the first embodiment, the shape transition prediction unit 57 and the state determination unit 58 of the control calculation unit 51 of the control unit 50 change the shape information of the work Wα being polished in time series and the selection master. Compare with time series change. Further, based on the result of this comparison calculation, the transition of the shape change of the work Wα during polishing is predicted. Then, based on the transition of the shape change of the work Wα during polishing, the polishing state of the work Wα during polishing is automatically recognized.

Here, the shape information of the selected master is associated with the conditional attribute that matches the conditional attribute of the work Wα being polished. Therefore, the time-series change of this selection master reflects the correlation between the conditional attribute of the work Wα during polishing and the shape transition. As a result, in this polishing apparatus 1, the accuracy of predicting the shape transition of the work Wα during polishing can be improved, and the state of the work Wα during polishing can be appropriately determined. Then, by appropriately determining the state of the work Wα during polishing, the polishing process is stopped at the optimum timing when the work Wα during polishing has a desired shape or the work Wα during polishing has a desired shape. Can be done.

Further, in the polishing apparatus 1 of the first embodiment, it is determined that the polishing process is stopped or the polishing process is continued according to the polishing state of the work Wα during polishing, and the polishing machine 10 is automatically stopped at the timing determined to be appropriate. By automatically stopping polishing in this way, it is possible to prevent the timing of stopping polishing from being delayed more than appropriate. Further, depending on how the device is controlled, the conditional attribute of the work Wα during polishing can be intentionally changed to adjust the shape of the final work and the timing of the end of polishing.

Further, in the first embodiment, the second drawing generation unit 55 performs the second drawing generation process in parallel with the polishing stop determination process, and polishing is performed from the start to the end of the polishing of the work Wα during polishing. Monitor whether the conditional attribute of the medium work Wα changes. Then, when the conditional attribute of the work Wα during polishing changes, the second drawing P2 is replaced regardless of the step at that time in the polishing stop determination process.

That is, when the work W is polished by the polishing machine 10, the second drawing generation unit 55 determines that the work W is being polished, and steps S11 to S12, steps S13, and steps shown in the flowchart of FIG. Each process of S14 is performed in order. That is, the second drawing generation unit 55 acquires the conditional attribute of the work Wα being polished, and the shape information (shape reference work Wβ) of the selection master associated with the conditional attribute matching the acquired conditional attribute. (Shape information or typical shape information) is extracted from the memory 30. Then, the second drawing generation unit 55 generates the second drawing P2 based on the shape information of the extracted selection master.

After the second drawing P2 is generated, the second drawing generation unit 55 performs the process of step S15 and determines whether or not the polishing process of the work Wα being polished is continued. Then, when the polishing process is continued, each process of step S16 and step S17 is performed in order, the conditional attribute of the work Wα being polished is acquired again, and it is determined whether or not the conditional attribute has changed. do.

When it is determined that the conditional attribute of the work Wα has changed during polishing, it is determined that the conditional attribute has changed during the polishing process, and steps S18 to S19 and step S20 shown in the flowchart of FIG. 7 are determined. Process. That is, the conditional attribute of the selected master is re-edited based on the re-acquired conditional attribute of the work being polished Wα, and the selected master associated with the conditional attribute that best matches the re-edited conditional attribute. A new second drawing P2 is generated based on. Then, the second drawing P2 up to that point is replaced with a new one.

As a result, even if the conditional attribute of the work Wα being polished changes with the progress of the polishing process, the second drawing P2 can be made the latest drawing according to the change of the conditional attribute of the work Wα being polished. After that, the shape of the work Wα during polishing can be appropriately predicted.

A specific example will be described below.
As shown in FIG. 9A, in the polishing stage A at the initial stage of polishing, the first work W1 having a “strongly concave shape” cross-sectional shape in which the central portion is relatively largely dented is polished and the thickness is aimed at. In the polishing step B immediately after reaching the range (T1 ≤ thickness ≤ T2), the cross-sectional shape becomes a "weakly concave shape (a state in which the central portion is slightly dented)". Then, in the polishing step C in which the polishing process is continued and the thickness becomes close to the lower limit (T1) of the target thickness range, the cross-sectional shape of the first work W1 becomes a “flat shape”.

On the other hand, as shown in FIG. 9B, in the polishing stage A at the initial stage of polishing, the second work W2 having a “weakly convex shape” cross-sectional shape in which the central portion protrudes relatively small is polished and the thickness is increased. In the polishing step B immediately after reaching the target thickness range (T1 ≤ thickness ≤ T2), the cross-sectional shape becomes a "weakly concave shape (a state in which the central portion is slightly dented)". However, in the polishing stage C in which the polishing process is continued and the thickness is close to the lower limit (T1) of the target thickness range, the cross-sectional shape of the second work W2 is "strongly concave shape (the central portion is greatly dented). State) ”.

On the other hand, in the polishing apparatus 1 of the first embodiment, the first drawing P1 in which the shape drawings of the first work W1 and the second work W2 are arranged in chronological order is generated, and the first drawing P1 is displayed on the display 40. Display. Therefore, it is possible to grasp the shape transition of each of the first work W1 and the second work W2 from the first drawing P1 and predict the subsequent shape change.

That is, in the polishing apparatus 1 of the first embodiment, at the time of the polishing stage B, it can be determined that "the dent in the central portion is gradually becoming shallower, so it is better to perform the polishing process up to the polishing stage C" in the first work W1. .. On the other hand, in the second work W2, it can be determined that "since the dent in the central portion is gradually deepening, it is better to stop the polishing process in the polishing step B than to polish to the polishing step C". As described above, the polishing apparatus 1 of the first embodiment can appropriately determine the best timing for stopping polishing according to the shape of the work at the start of polishing, and can polish to a desired shape of the work.

Further, in the polishing apparatus 1 of the first embodiment, the time-series change of the shape information of the work Wα during polishing and the time-series change of the selection master are compared and calculated. Therefore, even if it is not possible to predict the future change of the work shape only by the shape change of the current batch, the shape change can be appropriately predicted.

As shown in FIG. 10A, the third work W3, which has a "strongly convex shape" in which the central portion protrudes relatively large at the start of polishing, is polished by the polishing machine 10 having "conditional attributes that prevent the peripheral portion of the work from warping". The case will be described. In the polishing step A at the initial stage of polishing, the cross-sectional shape of the third work W3 having a "strong convex shape" is the polishing step immediately after the polishing process progresses and the thickness reaches the target thickness range (T1 ≤ thickness ≤ T2). In B, it has a "weakly convex shape (a state in which the central portion protrudes small)". Further, in the polishing step C in which the polishing process is continued and the thickness becomes close to the lower limit (T1) of the target thickness range, the cross-sectional shape of the third work W3 becomes a “flat shape”.

On the other hand, as shown in FIG. 10B, the fourth work W4, which has a "strongly convex shape" in which the central portion protrudes relatively large at the start of polishing, is polished by the polishing machine 10 having a "conditional attribute in which the peripheral portion of the work is easily warped". Will be described. In the polishing step A at the initial stage of polishing, the cross-sectional shape of the fourth work W4 having a "strong convex shape" is the polishing step immediately after the polishing process progresses and the thickness reaches the target thickness range (T1 ≤ thickness ≤ T2). In B, it becomes a "weakly convex shape (a state in which the central portion protrudes small)". Further, in the polishing stage C in which the polishing process is continued and the thickness is close to the lower limit (T1) of the target thickness range, the cross-sectional shape of the fourth work W4 is "weakly convex / weakly tachi-shaped (central part and peripheral edge)". Each part is small and protruding) ”.

Here, when the accumulation of data is still insufficient and the shape transition having a strong correlation with the conditional attribute cannot be predicted, for example, the work that has been polished immediately before polishing (for example, one batch before) of the work Wα during polishing. From the shape transition, it is possible to predict the shape transition of the work Wα being polished after a certain point in the current batch, which shows the same tendency as the shape transition of the current batch. That is, in the polishing apparatus 1 of the first embodiment, for example, a work that has been polished one batch before the work Wα being polished is adopted as the selection master. Then, by comparing and calculating the time-series change of the selected master and the time-series change of the shape information of the third work W3 and the fourth work W4, the polishing machine 10 used in the current batch and the batch performed before and after the current batch 10 Conditional attributes can be estimated.

That is, in the polishing apparatus 1 of the first embodiment, when the polishing process is performed by the polishing machine 10 having the "conditional attribute that the peripheral portion of the work is less likely to warp", the outer periphery is "even if the protrusion of the central portion becomes shallow" at the polishing stage B. Since it is difficult for the region to be torn, it is better to polish it up to the polishing stage C. " On the other hand, when the polishing process is performed by the polishing machine 10 having the "conditional attribute that the peripheral portion of the work is easily warped", the "tachi advances to the outer peripheral region as the polishing process progresses" at the polishing stage B, so that the polishing stage It is better to stop the polishing process at the polishing step B than to polish to C. " As described above, the polishing apparatus 1 of the first embodiment appropriately determines the best timing for stopping polishing according to the conditional attribute of the polishing machine 10 selected by the user or the conditional attribute of the given polishing machine 10. , Can be polished to a desired work shape.

[Action to improve the prediction accuracy of shape transition]
In the polishing apparatus 1 of the first embodiment, the shape information of the work W is associated with the conditional attribute at the time of polishing of the work W and stored in the memory 30. Then, the shape information of the selected master associated with the conditional attribute matching the conditional attribute of the work Wα being polished is extracted from the memory 30, and the second drawing P2 is drawn based on the extracted shape information of the selected master. Generate.

Therefore, the shape transition of the selection master indicated by the second drawing P2 reflects the correlation between the conditional attribute and the shape transition in the work Wα during polishing. Then, by displaying such a second drawing P2 at the same time as the first drawing P1, it is possible to improve the prediction accuracy of the shape transition of the work Wα during polishing by the user who monitors these drawings.

Further, as the shape information of the selection master, the work shape pattern (typical shape information) generated based on the learning result of the degree of correlation between the conditional attribute when the work W is polished and the shape information of the work W. When is used, the transition accuracy of the work shape indicated by the second drawing P2 can be improved as compared with the case where the shape information of the shape reference work Wβ is used as the shape information of the selection master. Therefore, it is possible to more accurately predict the shape transition of the work Wα during polishing and to stop polishing at an appropriate timing.

Further, in the first embodiment, the shape transition prediction unit 57 is provided with a machine learning function, and the shape transition prediction pattern stored in the database is updated at any time by machine learning. As a result, the shape transition prediction of the work Wα during polishing from the present time onward becomes more accurate automatically.

Further, by improving the prediction accuracy of the shape transition, it is possible to more appropriately determine the work state when the state of the work Wα being polished is determined based on the prediction of the transition of the work shape. As a result, it becomes possible to stop polishing at the optimum timing with higher accuracy.

Next, the effect will be described.
In the polishing apparatus 1 of the first embodiment, the effects listed below can be obtained.

(1) A polishing machine 10 for polishing the work W with a rotating surface plate (lower surface plate 11 and upper surface plate 12), and
A shape measuring instrument 20 that measures the shape of the work W through a measuring hole 19 formed in the surface plate (upper surface plate 12), and
A memory 30 that stores the shape information of the work W measured by the shape measuring instrument 20 and
A display 40 that displays the shape information of the work W measured by the shape measuring device 20 and
A control unit 50 that controls the display content of the display 40 is provided.
The control unit 50 generates a first drawing P1 in which the shape drawing of the work being polished Wα, which is the work currently being polished measured by the shape measuring device 20, is arranged in chronological order, and the first drawing P1 is displayed on the display 40. It was configured to be displayed in.
Thereby, based on the transition of the shape change of the work Wα during polishing, the polishing process of the work Wα during polishing can be stopped at the timing when the desired work shape is obtained or the timing when the desired work shape is obtained.

(2) The memory 30 stores the shape information of the work W in association with the conditional attributes when the work W is polished.
The control unit 50 changes the shape information of the work Wα during polishing in time series and the shape information (shape information of the selected master) associated with the conditional attribute matching the conditional attribute of the work Wα being polished. Based on the result of the comparison calculation with, the shape transition of the polishing work Wα is predicted, and the state of the polishing work Wα is determined based on the prediction of the shape transition of the polishing work Wα.
As a result, the accuracy of predicting the shape transition of the work Wα during polishing can be improved and the state can be appropriately determined, and the optimum timing when the work Wα during polishing becomes a desired shape or the work Wα during polishing is desired. Polishing can be stopped at the optimum timing for the shape.

(3) A polishing machine 10 for polishing the work W with a rotating surface plate (lower surface plate 11 and upper surface plate 12), and
A shape measuring instrument 20 that measures the shape of the work W through a measuring hole 19 formed in the surface plate (upper surface plate 12), and
A memory 30 that stores the shape information of the work W measured by the shape measuring instrument 20 and
A display 40 that displays the shape information of the work W measured by the shape measuring device 20 and
A control unit 50 that controls the display content of the display 40 is provided.
The control unit 50 is polished before the polishing of the first drawing P1 in which the shape drawing of the work being polished Wα, which is the work currently being polished, measured by the shape measuring instrument 20 is arranged in chronological order, and the work Wα being polished. A second drawing P2 in which the shape drawings of the work (selection master) are arranged in chronological order is generated, and the first drawing P1 and the second drawing P2 are simultaneously displayed on the display 40.
Thereby, based on the transition of the shape change of the work Wα during polishing, the polishing process of the work Wα being polished can be stopped at the timing when the desired work shape is obtained or the timing when the work Wα being polished becomes the desired shape.

(4) The memory 30 stores the shape information of the work W in association with the conditional attributes when the work W is polished.
The control unit 50 is configured to generate the second drawing P2 based on the shape information of the work (selection master) associated with the conditional attribute matching the conditional attribute of the work Wα being polished.
As a result, it is possible to improve the accuracy of predicting the shape transition of the work Wα during polishing.

(5) The control unit 50 draws the second drawing based on the work shape pattern (typical shape information) generated based on the degree of correlation between the conditional attributes when the work W is polished and the shape information of the work W. Generate P2.
As a result, the transition accuracy of the work shape indicated by the second drawing P2 can be improved, and the shape transition of the work Wα during polishing can be predicted more accurately.

(6) The memory 30 stores the shape information of the work W in association with the conditional attributes when the work W is polished.
The control unit 50 changes the shape information of the work Wα during polishing in time series and the shape information (shape information of the selected master) associated with the conditional attribute matching the conditional attribute of the work Wα being polished. Based on the result of the comparison calculation with, the shape transition of the polishing work Wα is predicted, and the state of the polishing work Wα is determined based on the prediction of the shape transition of the polishing work Wα.
As a result, the accuracy of predicting the shape transition of the work Wα during polishing can be improved and the state can be appropriately determined, and the work Wα during polishing has a desired shape, or the work Wα during polishing has a desired shape. Polishing can be stopped at the optimum timing.

(7) When the control unit 50 determines that the polishing process of the polishing work Wα is stopped as a result of determining the state of the polishing work Wα, the control unit 50 stops the polishing process of the polishing work Wα and polishes the polishing work Wα. It is configured to notify that the processing has been stopped.
As a result, the polishing of the work Wα during polishing can be automatically stopped at an appropriate timing, and the user of the polishing machine 10 can be notified of the stop of the polishing process.

(Example 2)
The polishing apparatus of the second embodiment is an example of specifying the responsibility parameter when the final work shape of the work Wα during polishing becomes a second acceptable work shape and notifying the responsibility parameter. Hereinafter, the polishing apparatus of the second embodiment will be described. The same configurations as those of the polishing apparatus 1 of the first embodiment are designated by the same reference numerals as those of the first embodiment, and detailed description thereof will be omitted.

In the polishing apparatus 1A of the second embodiment, as shown in FIG. 11, the control calculation unit 51A of the control unit 50A includes the first drawing generation unit 54, the second drawing generation unit 55, the display control unit 56A, and the shape transition. It has a prediction unit 57A, a state determination unit 58A, a parameter identification unit 59, and a correlation degree data processing unit 60.

The shape transition prediction unit 57A of the second embodiment compares and calculates the time-series change of the shape information of the work Wα being polished and the time-series change of the shape information of the selected master, and is polishing based on the result of this comparison calculation. Predict the future shape transition of the work Wα. Further, the shape transition prediction unit 57A receives the support of the correlation degree data processing unit 60 as necessary based on the prediction of the future shape transition of the work Wα being polished, and the final work shape of the work Wα being polished. It is predicted whether or not (hereinafter, referred to as "final work shape") can be a desired work shape.

Here, the "desired work shape (hereinafter referred to as" desired state ")" is a shape that satisfies the preset first shape condition. On the other hand, when it is predicted that the final work shape cannot be in the desired state, the shape transition prediction unit 57A secondarily changes the final work shape while receiving the support of the correlation degree data processing unit 60 as necessary. Predict whether or not the work shape can be acceptable. The "secondarily acceptable work shape (hereinafter referred to as" secondary allowable state ")" means that the final work shape cannot be in the desired state, that is, the first is that the polishing process is continued. It is a shape that satisfies the second shape condition set when it is determined that the shape condition is not satisfied.

The state determination unit 58A of the second embodiment determines the current polishing state of the polishing work Wα based on the future shape transition of the polishing work Wα predicted by the shape transition prediction unit 57A. Here, in the "polishing state" determined by the state determination unit 58A, the first polishing stop state in which the work shape of the work Wα being polished reaches a desired state and the work shape of the work Wα being polished are secondary. The second polishing stop state that has reached the permissible state, the third polishing stop state that requires immediate polishing stop, the polishing continuation state that requires continuation of the polishing process by the polishing machine 10, and the like are included.

In the parameter specifying unit 59, when the shape transition prediction unit 57A determines that the final work shape can be in the secondary allowable state, the final work shape of the work Wα being polished becomes the secondary allowable state (). Identify conditional attributes (hereinafter referred to as "responsibility parameters") that have a high degree of correlation with respect to (which cannot be in the desired state). Further, in the parameter specifying unit 59, the responsible parameters may be listed in descending order of the strength of correlation.

The responsible parameter is specified by the parameter specifying unit 59, for example, by the following procedure. That is, during polishing, which is searched by the correlation degree data processing unit 60, the abnormal state of the work shape stored in the memory 30, the data of the conditional attribute having high correlation degree strength, and the secondary allowable state can be obtained. Collate with the conditional attribute of work Wα. Then, a conditional attribute having a relatively high correlation strength is specified as a "responsibility parameter". It should be noted that this responsibility parameter may be one or a plurality.

In addition, the parameter specifying unit 59 lists the responsible parameters in order of increasing correlation strength, for example, by the following procedure. That is, the data of the conditional attribute having a high correlation strength with the abnormal state of the work shape is collated with the conditional attribute of the work Wα being polished, which is determined to be in a secondary allowable state. Then, a plurality of conditional attributes are selected in descending order of correlation strength, and responsibility parameters are listed in the selected order. The number of conditional attributes to be selected may be two or more.

It is also possible to analyze the correlation between the abnormality of the state information monitored during polishing of the work W, such as the temperature distribution data on the polishing pad and the vibration and temperature data of the bearing, and the abnormal state of the work shape. It is possible. Therefore, by monitoring the correlation between the trend of the work shape transition across many batches and the transition trend of the conditional attribute, not only the transition of the single work shape, the responsibility parameter and the correlation strength of the responsibility parameter can be monitored. The specific accuracy can be improved. Multivariate analysis, artificial intelligence (machine learning, deep learning), etc. can be used for these correlation analyzes, updating of prediction models based on them, and updating of prediction accuracy at any time.

Then, in the display control unit 56A of the second embodiment, when the control command for displaying the fact that the polishing stop determination has been performed is output to the display 40a, the state determination unit 58A "stops the first polishing". When it is determined as "state", a control command for displaying that the work shape is in a desired state is output. Further, when the state determination unit 58A determines that the "second polishing stop state", the work shape is in the secondary allowable state, and the information of the responsibility parameter specified by the parameter identification unit 59 or the degree of correlation. Outputs a control command that displays the responsibility parameter information listed in descending order of intensity. Further, when the state determination unit 58A determines that the "third polishing stop state" is determined, a control command for displaying that the work shape is an unacceptable shape is output.

The correlation degree data processing unit 60 executes a search for the degree of correlation strength between the conditional attribute of the work W, the shape transition of the work W at the time of polishing, and the final work shape. The search for the correlation degree strength by the correlation degree data processing unit 60 is performed, for example, by the following procedure.

That is, based on the polishing result of the work W performed in the past, the state recognition of the abnormality when an abnormality (for example, discontinuity of the slurry flow rate) occurs for a predetermined conditional attribute and the work shape of the work Wα being polished The relationship with the shape transition (hereinafter referred to as "abnormal state of work shape") when the secondary allowable state is reached is calculated. For example, the state of discontinuity of the slurry flow rate is recognized by comparing the length of time during which the slurry flow rate falls below a predetermined value with the threshold value.

Then, the strength of the degree of correlation with the abnormal state of the work shape is searched for for each conditional attribute when the abnormal state of the work shape occurs, for example, by calculating the correlation coefficient by regression analysis. Further, from the polishing result of the work W performed in the past, the relationship between the predetermined conditional attribute and the shape transition of the work W at that time is obtained. Then, based on the relationship between this predetermined conditional attribute and the work shape transition, it is suspected that the cause of the discrepancy between the desired shape transition or the desired final work shape and the actual shape transition or the final work shape due to the polishing process occurs. By specifying the parameters, the strength of correlation between the conditional attribute and the work shape transition and the final work shape may be searched. This correlation degree intensity data is stored in the memory 30 in association with the recognition of the identified abnormal state and the conditional attribute.

The correlation degree data processing unit 60 is a dedicated calculation unit that exclusively searches for the conditional attribute of the work W, the shape transition of the work W during polishing, and the strength of the correlation with the final work shape. Therefore, the correlation degree data processing unit 60 can execute the calculation of the correlation degree search regardless of whether or not the work W is being polished.

Next, the polishing stop determination process executed by the polishing apparatus 1A of the second embodiment will be described with reference to the flowchart shown in FIG. The same processing as the polishing stop determination processing in the first embodiment is designated by the same reference numerals as those in the first embodiment, and detailed description thereof will be omitted. Also in the polishing apparatus 1A of the second embodiment, the second drawing generation process for generating the second drawing P2 is executed in parallel with the polishing stop determination process shown in FIG. In the polishing stop determination process executed in the second embodiment, the second drawing P2 generated by the second drawing generation process is read at a necessary timing (step S4).

In the polishing stop determination process executed in the second embodiment, the time-series change of the shape information of the selected master and the time-series change of the shape information of the work Wα being polished are compared and calculated in step S6. Then, when the future shape transition of the work Wα being polished is predicted from the result of this comparison calculation, the process proceeds to step S61.

In step S61, it is determined whether or not the final work shape of the work being polished Wα can be a desired work shape based on the prediction of the future shape transition of the work Wα being polished. If YES (possible to reach a desired state), the process proceeds to step S71. If NO (cannot reach the desired state), the process proceeds to step S62.

In step S62, following the determination that the final work shape in step S61 cannot be in the desired state, the final work shape of the polishing work Wα is secondary based on the prediction of the future shape transition of the polishing work Wα. It is determined whether or not the work shape can be acceptable. If YES (possible to be in a secondary permissible state), the polishing process is continued and the process proceeds to step S63. If NO (cannot reach the secondary permissible state), the process proceeds to step S71.

In step S63, following the determination that the final work shape in step S62 can be in the secondary allowable state, the degree of correlation with the fact that the final work shape of the work Wα being polished becomes the secondary allowable state. The responsibility parameter, which is a high conditional attribute, is specified, or the responsibility parameters are listed in descending order of the strength of correlation, and the process proceeds to step S71.

In step S71, it is determined that the final work shape in step S61 can be in a desired state, and it is determined that the final work shape in step S62 cannot be in either a desired state or a secondary allowable state, step S63. Following either the identification of the responsibility parameters in, or the enumeration of the responsibility parameters in descending order of correlation strength, the polishing state of the work Wα being polished is determined based on the prediction of the future shape transition of the work Wα being polished. Proceed to step S81.
Here, the polishing state of the work Wα being polished is the “first polishing stop state” in which the work shape of the work Wα being polished has reached a desired state, and the work shape of the work Wα being polished has reached a secondary allowable state. It is determined to be one of a "second polishing stop state", a "third polishing stop state" in which the polishing process is immediately stopped, and a "polishing continuation state" in which the polishing process needs to be continued.

The determination as to whether or not the "first polishing stop state" is made is performed when it is determined in step S61 that the final work shape can be in a desired state. Further, the determination as to whether or not the "second polishing stop state" is performed is performed when the responsible parameters are specified in step S63 or the responsible parameters are listed in descending order of correlation strength. Further, the determination of the "third polishing stop state" is performed when it is determined in step S62 that the final work shape cannot be in either the desired state or the secondary allowable state. Further, in the determination of "polishing continuous state", although it was determined that the final work shape is in either a desired state or a secondary allowable state, the current work shape of the work Wα being polished is in a desired state or a secondary allowable state. It is done when the state is not reached.

In step S81, following the determination of the polishing state of the polishing work Wα in step S71, whether to stop the polishing process of the polishing work Wα by the polishing machine 10 based on the determination of the polishing state performed in this step S71. Judge whether or not. If YES (polishing stopped), the process proceeds to step S91. If NO (continuation of polishing), the process returns to step S2.
Here, as for the determination that the polishing work Wα is stopped during polishing, any one of “first polishing stopped state”, “second polishing stopped state”, and “third polishing stopped state” was made in step S71. Sometimes done.

In step S91, following the determination of polishing stop in step S81, a control command for displaying the state of the polishing work Wα along with the determination that the polishing stop of the polishing work Wα is determined on the screen 40a of the display 40 is displayed on the display 40a. Is output to, the polishing stop determination is notified, and the process proceeds to step S10.
Here, when the determination of the "first polishing stop state" is made in step S71, a control command for indicating that the polishing work Wα is in the "desired state" is output together with the fact that the polishing stop is determined. do. Further, when the determination of the "second polishing stop state" is made in step S71, a control command for indicating that the polishing work Wα is in the "secondary allowable state" as well as the determination of the polishing stop state is made. Is output. Further, when the determination of the "third polishing stop state" is made in step S71, it is determined that the polishing stop is determined and that the work Wα being polished is neither a desired state nor a secondary allowable state. Outputs a control command to indicate that the shape is "unacceptable shape".

Next, the operation of the polishing device 1A of the second embodiment will be described.
In the polishing apparatus 1A of the second embodiment, when the work W is polished by the polishing machine 10, the first drawing P1 and the second drawing P2 are displayed on the screen 40a of the display 40 as in the first embodiment. After that, each process of step S6 and step S61 shown in the flowchart of FIG. 12 is performed in order. That is, the shape transition prediction unit 57A compares and calculates the time-series change of the shape information of the work Wα being polished and the time-series change of the shape information of the selected master, and based on the result, the future shape of the work Wα being polished Predict the transition. Then, based on the prediction of this shape transition, it is determined whether or not the final work shape can be in a desired state.

When it is determined that the final work shape can be in a desired state, the processes of steps S71 to S81 shown in the flowchart of FIG. 12 are sequentially performed. That is, the state determination unit 58A determines the current polishing state of the polishing work Wα based on the shape transition of the polishing work Wα predicted by the shape transition prediction unit 57A, and polishes based on the determination result of the polishing state. Determine whether to stop machining.

When the state determination unit 58A determines that the polishing state of the work Wα during polishing is the “first polishing stop state”, the process of step S91 shown in the flowchart of FIG. 12 is performed. That is, the display control unit 56A outputs a control command for displaying on the screen 40a of the display 40 that the polishing work Wα is in the “desired state” as well as determining that the polishing work Wα has stopped polishing. Then, on the screen 40a of the display 40a, in addition to the fact that the polishing process of the polishing work Wα is determined to be stopped, it is displayed that the polishing work Wα is in the “desired state”, and the polishing stop determination is notified. ..

As a result, the user of the polishing machine 10 can visually check the screen 40a to know that the polishing stop is determined and the work shape of the work Wα being polished. As a result, even when the user manually controls the polishing machine 10 to stop the polishing process, the polishing process can be stopped at an appropriate timing. Further, even when the grinding machine 10 is stopped by the stop control command from the control unit 50A , the user can recognize the stop operation of the grinding machine 10.

After that, the process of step S10 is performed, and the control calculation unit 51A of the control unit 50A outputs various outputs such as a stop control command to the first drive device M1 to the fifth drive device M5 to complete the polishing process. As a result, the polishing machine 10 automatically stops after a predetermined sequence, and the polishing process of the work Wα during polishing is completed.

On the other hand, when it is determined that the final work shape cannot be in a desired state based on the prediction of the future shape transition of the work Wα being polished, the process of step S62 shown in the flowchart of FIG. 12 is performed. That is, the shape transition prediction unit 57A determines whether or not the final work shape can be in a secondary allowable state based on the prediction of the future shape transition of the work Wα being polished.

When it is determined that the final work shape can be in the secondary allowable state, the process of step S63 shown in the flowchart of FIG. 12 is performed. That is, the parameter specifying unit 59 identifies a responsible parameter having a high degree of correlation with respect to the fact that the final work shape of the work Wα during polishing becomes a secondary allowable state (the final work shape cannot be in a desired state). Or, list the responsibility parameters in descending order of correlation strength.

Then, when the responsibility parameters are specified or listed, the processes of step S71 to step S81 and step S91 shown in the flowchart of FIG. 12 are performed in order. That is, the state determination unit 58A determines the current polishing state of the polishing work Wα based on the shape transition of the polishing work Wα, and determines whether or not to stop the polishing process based on the determination result of the polishing state. do. Then, when the state determination unit 58A determines that the polishing state of the polishing work Wα is the “second polishing stop state”, the display control unit 56A determines that the polishing of the polishing work Wα has stopped. In addition, the screen 40a of the display 40 shows that the work Wα being polished is in the “secondary allowable state” and that the responsible parameters specified by the parameter specifying unit 59 or the responsible parameters listed in descending order of the degree of correlation strength. Outputs the control command to be displayed on. Then, on the screen 40a of the display 40, the polishing stop of the polishing work Wα is determined, the polishing work Wα is in the “secondary allowable state”, and the responsibility parameters or the correlation strengths are listed in descending order. The responsible parameters that have been set are displayed, and the polishing stop determination is notified.

After that, the process of step S10 is performed, and the control calculation unit 51A of the control unit 50A outputs various outputs such as a stop control command to the first drive device M1 to the fifth drive device M5 to complete the polishing process. As a result, the polishing machine 10 automatically stops after a predetermined sequence, and the polishing process of the work Wα during polishing is completed.

As a result, the user of the polishing machine 10 determined that the polishing was stopped by visually observing the screen 40a, and in addition to the work shape of the working work Wα being polished, the work Wα being polished was in a secondary allowable state. It is possible to grasp the responsibility parameter with a high degree of correlation. As a result, even when the user manually controls the polishing machine 10 to stop the polishing process, the polishing process can be stopped at an appropriate timing. Further, even when the grinding machine 10 is stopped by the stop control command from the control unit 50A , the user can recognize the stop operation of the grinding machine 10.

Further, by grasping the responsibility parameter or its candidate, it is possible to rationally formulate necessary measures (improvement of conditional attributes, improvement of the polishing machine 10, etc.) for making the final work shape into a desired state. Then, the work W in a desired state can be efficiently obtained. Then, it is possible to promote the accumulation of empirical data according to the degree of deviation between the desired final work shape and the actual work shape, and improvement proposals for the polishing apparatus 1 for eliminating the deviation.

In the process of step S62 shown in the flowchart of FIG. 12, when it is determined that the final work shape cannot be in the secondary allowable state, the processes of step S62, step S71, step S81, and step S91 are performed in order. .. That is, the state determination unit 58A determines the current polishing state of the work Wα being polished, and determines that the polishing process is stopped when the polishing state of the work Wα being polished is the “third polishing stop state”. Then, the display control unit 56A outputs a control command for displaying on the screen 40a of the display 40 that the polishing work Wα has an “unacceptable shape” in addition to the fact that the polishing stop of the polishing work Wα is determined. do. Then, on the screen 40a of the display 40a, it is displayed that the polishing stop of the polishing work Wα is determined and that the polishing work Wα has an “unacceptable shape”, and the polishing stop determination is notified.

After that, the process of step S10 is performed, and the control calculation unit 51A of the control unit 50A outputs various outputs such as a stop control command to the first drive device M1 to the fifth drive device M5 to complete the polishing process. As a result, the polishing machine 10 automatically stops after a predetermined sequence, and the polishing process of the work Wα during polishing is completed.

As a result, the user of the polishing machine 10 can grasp that the polishing stop is determined and the work shape of the work Wα being polished by visually observing the screen 40a. As a result, even when the user manually controls the polishing machine 10 to stop the polishing process, the polishing process can be stopped immediately. Further, even when the polishing machine 10 is stopped by the stop control command from the control unit 50A , the user can recognize the stopping operation of the polishing machine 10.

Further, when a plurality of responsible parameters are specified by the parameter specifying unit 59 and these responsible parameters are displayed on the screen 40a of the display 40 in descending order of correlation strength, the work Wα being polished is in a secondary allowable state. It makes it easier to understand the conditional attributes that have the greatest impact on things. This makes it possible to more rationally formulate necessary measures (improvement of conditional attributes, improvement of the polishing machine 10, etc.) for making the final work shape into a desired state.

A specific example will be described below.
As shown in FIG. 13A, a case where the fifth work W5, which has a “convex sagging shape” in which the outer peripheral region is relatively polished at the start of the polishing process, is polished by the polishing machine 10 “first batch after dressing” will be described. .. In the polishing step A at the initial stage of polishing, the cross-sectional shape of the fifth work W5 having the "convex sagging shape" is the polishing step immediately after the polishing process progresses and the thickness reaches the target thickness range (T1 ≤ thickness ≤ T2). In B, it has a "flat sagging shape (a state in which the central portion is flat and the outer peripheral region is excessively polished)". After that, in the polishing step C where the polishing process is continued and the thickness becomes close to the lower limit (T1) of the target thickness range, the cross-sectional shape of the fifth work W5 becomes a “flat shape” which is a desired state.

Next, as shown in FIG. 13B, when the sixth work W6, which has a "convex sagging shape" in which the outer peripheral region is relatively polished at the start of the polishing process, is polished by the polishing machine 10 "10th batch after dressing". To explain. In the polishing step A at the initial stage of polishing, the cross-sectional shape of the sixth work W6 having the "convex sagging shape" is the polishing step immediately after the polishing process progresses and the thickness reaches the target thickness range (T1 ≤ thickness ≤ T2). In B, it has a "flat sagging shape (a state in which the central portion is flat and the outer peripheral region is excessively polished)". However, in the polishing stage C where the polishing process was continued and the thickness became close to the lower limit (T1) of the target thickness range, the cross-sectional shape of the sixth work W6 was "concave sagging shape (with a large dent in the central part). The peripheral part is excessively polished) ”.

Here, when polishing is performed by the polishing machine 10 of the "first batch after dressing", the cross-sectional shape of the fifth work W5 becomes a "flat shape" in the polishing stage C, so that the final work shape is in a desired state. It is predicted that it can be. On the other hand, when the polishing process is performed by the polishing machine 10 "10th batch after dressing", the cross-sectional shape of the work does not become "flat shape" at any polishing stage. Therefore, it is predicted that the final work shape cannot be in a desired state when the sixth work W6 is polished. However, since the "flat sagging shape" in the polishing step B corresponds to the secondary allowable state, it is predicted that the final work shape of the sixth work W6 may be in the secondary allowable state.

Further, the conditional attribute (responsibility parameter) having a high degree of correlation with causing an event that the final work shape does not become the desired "flat shape" during polishing of the sixth work W6 is, for example, the number of batches. It is identified as a deterioration of the surface of the polishing pad caused by the increase.

Therefore, in the polishing apparatus 1A of the second embodiment, when the shape transition of the sixth work W6 is predicted during the polishing of the sixth work W6, the final work shape cannot be in the desired state (flat shape) based on this prediction. , It is determined that a secondary permissible state (flat sagging shape) can be achieved. Then, as the polishing process progresses, the polishing stop determination is notified at the timing when the work shape of the sixth work W6 reaches the secondary allowable state (flat sagging shape), and the sixth work W6 is secondarily allowed. "Surface deterioration of the polishing pad" is notified as a parameter with a heavy responsibility for being in a state (flat sagging shape) and becoming a secondary allowable state.

As a result, the best timing for stopping polishing can be appropriately determined, and the final work shape is not in a desired state, but can be contained in a secondary allowable state that satisfies the second shape condition. In addition, since the responsibility parameter or its candidate can be grasped, it contributes to the improvement of the conditional attribute at the time of polishing the work, and the user can plan a more efficient process. In addition, the polishing device 1 itself can make improvement proposals.

Next, the effect will be described.
In the polishing apparatus 1A of the second embodiment, the effects listed below can be obtained.

(8) When the control unit 50A determines that the polishing work Wα cannot be in the desired work state based on the prediction of the shape transition of the polishing work Wα, the polishing work Wα is in a secondary allowable state. At this time, the polishing process of the work Wα during polishing is stopped, and the stop determination of the polishing process is notified.
As a result, even when the final work shape cannot be in the desired state, the polishing process can be stopped at an appropriate timing, and it is possible to prevent the polishing process from being delayed. In addition, it is possible to prevent the polishing process from being stopped later than the appropriate time, and to automatically stop the polishing process at an appropriate timing.

(9) The control unit 50A identifies a conditional attribute (responsibility parameter) having a high degree of correlation with the appearance of the secondary allowable state of the work Wα being polished, or the secondary allowable state of the work Wα being polished. Conditional attributes are listed in descending order of correlation with the appearance, and the specified or listed conditional attributes with high correlation (responsibility parameters or their candidates) are notified.
As a result, the user can grasp the responsibility parameter or its candidate, and can rationally formulate the necessary measures for making the final work shape into a desired state.

Although the polishing apparatus of the present invention has been described above based on the first and second embodiments, the specific configuration is not limited to these examples, and the claims are included in the claims. Design changes and additions are permitted as long as they do not deviate from the gist of the invention.

In the polishing apparatus 1 of the first embodiment, an example is shown in which the memory 30 stores the shape information of the work W in association with the conditional attributes when the work W is polished. However, it is not limited to this. For example, when the shape information of the work W is stored in the memory 30, the conditional attributes generated by learning may be associated with the shape information of the work W and stored. Here, the "learningly generated conditional attribute" is a conditional attribute obtained as a result of learning and calculating the relationship (tendency) between the shape information acquired during the polishing process performed in the past and the conditional attribute. It is an attribute. This "learningly generated conditional attribute" corresponds to the shape information of the work W, for example, based on the conditional attribute associated with the shape information of the work W accumulated in the polishing process performed in the past. The tendency of the conditional attribute is learned, the magnitude of the influence on the polishing result of each parameter of the conditional attribute is automatically calculated in a given complicated conditional system, and the result is used to weight the influence prediction. Conditional attributes, etc. that are output after performing operations such as are conceivable.

Then, in the case where the conditional attribute of the work Wα being polished and the conditional attribute generated by learning are matched to extract the shape information of the selected master and the shape transition of the work Wα being polished is predicted, the user It is possible to make more optimal predictions beyond the prediction patterns and trends that have tended to be taken in the past.

That is, by extracting the shape information of the selection master based on the shape information of the work W associated with the conditional attributes generated by learning, the influence severity of a specific parameter under a certain condition is spontaneously found. Can be presented or compounded with severe influence. In addition, depending on how the learning algorithm is constructed so as to formulate the severity of influence, the output as a pure calculation result expands the prediction range of the shape transition of the work Wα being polished, beyond the range of prediction by the user. Can be done.

As a result, the accuracy of shape prediction of the work Wα during polishing, which has been often overlooked in the past, is significantly improved compared to the prediction accuracy by the user. In addition, it is possible to objectively predict the correlation between the conditional attribute and the work shape accuracy under specific conditions with high accuracy, and the conditional attribute of the conditional attribute before polishing or at the initial stage of polishing of the work Wα during polishing. Preliminary changes can be encouraged as needed, which can contribute to the improvement and stability of non-defective product yields.

Further, in the polishing apparatus 1 of the first embodiment, the memory 30 stores the shape information of the work W in association with the conditional attributes when the work W is polished. Then, the shape transition prediction unit 57 compares and calculates the time-series change of the shape information of the selected master extracted based on the conditional attribute of the work Wα being polished and the time-series change of the shape information of the work Wα being polished. An example of predicting the shape transition of the work Wα during polishing is shown. That is, in Example 1, the work shape pattern generated based on the shape information of the shape reference work Wβ or the learning result of the degree of correlation between the conditional attribute when the work W is polished and the shape information of the work W. The shape transition of the work Wα during polishing is estimated based on the typical shape information. However, it is not limited to this.

As a work shape pattern obtained by arithmetically processing the shape information of the work W, it was obtained by arithmetically processing the information having the shape characteristics of the work W with the support of the correlation degree data processing unit 60 as necessary. A desired work shape pattern may be used. In this case, in the memory 30, all the conditional attributes when the work W is polished are associated with the work shape pattern having the shape characteristics of the work W, and the conditional attributes are grouped as necessary. It is subdivided and memorized as the learning progresses. Then, the shape transition prediction unit 57 may predict the shape transition of the polishing work Wα based on the work shape pattern associated with the conditional attribute matching the conditional attribute of the polishing work Wα.

That is, the information including at least one of the shape information of the work W and the shape information of the work W obtained by arithmetic processing is called "prediction information", and the memory 30 uses the work W as the prediction information. The conditional attributes at the time of polishing and the conditional attributes generated by learning are linked and stored. Then, the shape transition prediction unit 57 of the control unit 50 stores in the memory 30 in association with the time-series change of the prediction information of the work Wα being polished and the conditional attribute matching the conditional attribute of the work Wα being polished. Based on the result of the comparison calculation with the time-series change of the predicted information, the shape transition of the work Wα during polishing is predicted.

Here, the "calculation process" is, for example, averaging the cross-sectional shape lines of a plurality of works W selected for each conditional attribute to obtain an average cross-sectional shape line for each conditional attribute, or a predetermined cross-section. To calculate the flatness from the difference between the maximum and minimum thicknesses in the shape line, to obtain the desired cross-section shape line using the most frequent and median values of multiple cross-section shape lines, conditional attributes and work. From the viewpoint of the degree of correlation with the shape, by calculating the work shape associated with the group of the shape features of the work W or the newly generated statistically and computationally group as a typical shape in the group, etc. be.

That is, for example, the flatness of the central portion of the work W, which is a work shape pattern obtained from the shape information of the work W that has been polished in the past, is calculated for each work polishing time. Subsequently, regression analysis or the like is performed, and as shown in FIG. 14A, the relationship between the work polishing time and the flatness of the central portion of the work is generated as the first flatness prediction line La. Then, the shape of the work Wα being polished may be predicted by comparing the first flatness prediction line La with the transition of the flatness of the central portion of the work Wα being polished.

Further, the flatness of the outer peripheral region of the work W, which is the work shape pattern obtained from the shape information of the work W polished in the past, is calculated for each work polishing time. Subsequently, regression analysis or the like is performed, and as shown in FIG. 14B, the relationship between the work polishing time and the flatness of the work outer peripheral region is generated as the second flatness prediction line Lb. Then, the shape of the work Wα being polished may be predicted by comparing the second flatness prediction line Lb with the transition of the flatness of the outer peripheral region of the work Wα being polished.

From the first flatness prediction line La, it can be seen that the flatness of the central portion of the work gradually decreases according to the work polishing time, and deteriorates when the predetermined time Ta is exceeded. Therefore, it is considered that a work having a good flatness in the central portion can be obtained by stopping the polishing process of the work Wα during polishing at the timing when the work polishing time reaches Ta for a predetermined time. Further, from the second flatness prediction line Lb, the flatness of the work outer peripheral region is maintained at a substantially constant value on the minus side until the work polishing time reaches the predetermined time Tb, and when the work polishing time exceeds the predetermined time Tb. It can be seen that it gradually increases on the plus side. Therefore , it is considered that a work having a good flatness in the outer peripheral region can be obtained by stopping the polishing process of the work Wα during polishing at the timing when the work polishing time reaches Tb for a predetermined time.

Further, in the first embodiment, the second drawing generation unit 55 generates the second drawing P2 based on the shape information of the selection master associated with the conditional attribute matching the conditional attribute of the work Wα being polished. showed that. However, the shape information of the work W used when generating the second drawing P2 is not limited to this. For example, regardless of the conditional attributes of the work Wα being polished, the second drawing P2 is generated based on the shape information of the work W that has been polished immediately before the work Wα being polished by the polishing machine that has polished the work Wα being polished. May be. Further, regardless of the conditional attributes of the work Wα being polished, the second drawing P2 is based on the shape information of the work W that has been polished before the work Wα being polished by the polishing machine that has been polished the work Wα being polished. May be generated.

Further, in the first and second embodiments, the second drawing generation unit 55 generates the second drawing P2 based on the shape information of the selection master extracted based on the conditional attribute of the work Wα being polished. Although shown, not limited to this, a plurality of selected masters are extracted based on the conditional attributes of the work Wα being polished, such as the second second drawing and the third second drawing based on the shape information of the selected master. , A plurality of second drawings are generated based on the shape information of those selection masters, and the plurality of second drawings are displayed on the screen 40a of the display 40, or the polishing work Wα is being polished with reference to the plurality of second drawings. You may predict the transition of the shape change in the future.

Further, a plurality of shape information of the work W stored in the memory 30 is extracted from a desired range, the shape information of the extracted work W is averaged, and specific data is acquired from the shape information of the extracted work W to obtain a desired shape. The second drawing P2 may be generated based on the work shape pattern having the shape characteristics obtained by performing arithmetic processing such as generating information.
Even in this case, the accuracy of the transition of the work shape indicated by the second drawing P2 can be improved as compared with the case where the second drawing P2 is generated by using the shape information of the selection master. Therefore, it is possible to more accurately predict the shape transition of the work Wα during polishing and to stop polishing at an appropriate timing.

Then, the shape information of the work W is obtained by comparing with the measured value data of the work shape by the shape measurement dedicated device (for example, a separate flatness measurement dedicated device) provided separately from the grinding machine 10. The measured value data may be corrected and adjusted as necessary.

Further, in the polishing apparatus 1 of the first embodiment, an example is shown in which the first drawing P1 and the second drawing P2 are generated, respectively, and the first drawing P1 and the second drawing P2 are simultaneously displayed on the display 40. However, it is not limited to this. Only the first drawing P1 in which the shape drawing of the work Wα being polished is arranged in chronological order may be displayed on the display 40. Even in this case, the user can grasp the transition of the shape change of the work Wα during polishing. Then, based on the transition of the shape change of the work Wα during polishing, the polishing process of the work Wα during polishing can be stopped at the timing when the desired work shape is obtained.

Further, in the polishing apparatus 1 of the first embodiment, when it is determined that the polishing work Wα is stopped during polishing, the stop determination of the polishing process is displayed on the display 40 to notify the display, and an example of stopping the polishing machine 10 is shown. rice field. However, for example, it may be possible to simply notify that the stop determination of the polishing process has been performed, or it may be possible to simply stop the polishing machine 10 to stop the polishing process of the work Wα during polishing without notifying the stop determination.

Further, in the second embodiment, when it is determined that the final work shape cannot be in the desired state based on the prediction of the shape transition of the work Wα during polishing, and when the work Wα being polished is in the secondary allowable state, this is performed. An example of stopping the polishing machine 10 is shown while displaying the stop determination of the polishing process on the display 40 to notify the display. However, when the work Wα during polishing is in the secondary permissible state, for example, it may only be notified that the stop determination of the polishing process has been performed, or the polishing machine 10 may be stopped and controlled without notifying the stop determination during polishing. It may be sufficient to simply stop the polishing process of the work Wα.

Then, in Example 1, an example in which the measuring unit 21 is attached to the upper surface plate 12 is shown, but the present invention is not limited to this. For example, a laser beam which is a measurement light may be irradiated from an optical head installed above the upper surface plate 12. In this case, a plurality of measurement holes are formed along the circumferential direction of the upper surface plate 12, and the rotation of the upper surface plate 12 causes laser light to be irradiated every time each measurement hole is directly under the optical head of the work. Measure the thickness. A measuring hole may be provided in the lower platen 11, and the lower surface of the work W may be irradiated with a laser beam from below the lower platen 11 to measure the thickness.

Further, in the first embodiment, when the cross-sectional shape of the work W is obtained, the thickness data of the obtained data string is averaged by a moving average process, a polynomial approximation curve drawing process, or the like, but the cross section of the work W is not limited to this. Any method may be used as long as the shape can be visualized.

Further, in the first and second embodiments, the second drawing generation process is executed in parallel with the polishing stop determination process, the change in the conditional attribute of the work Wα during polishing is monitored, and the second drawing P2 is replaced as appropriate. An example is shown. However, the present invention is not limited to this, and for example, the second drawing P2 once generated based on the conditional attribute of the work Wα during polishing acquired after determining that it is being polished may be maintained until the end of polishing. Further, in this case, it is not necessary to execute the second drawing generation process in parallel with the polishing stop determination process, and during the polishing stop determination process (for example, between steps S1 and S2, or between steps S3 and S4). In the meantime, etc.), each process of step S12, step S13, and step S14 in the second drawing generation process may be executed.

Further, in Examples 1 and 2, a double-sided polishing apparatus having a lower surface plate 11 and an upper surface plate 12 and capable of simultaneously polishing both sides of the work W is shown, but single-sided polishing for polishing only one side of the work W. The present invention can be applied even to an apparatus.

1,1A Polishing device 10 Polishing machine 11 Lower surface plate 12 Upper surface plate 20 Shape measuring instrument 19 Measuring hole 30 Memory 40 Display 40a Screen 50, 50A Control unit 51, 51A Control calculation unit 54 First drawing generation unit 55 Second drawing Generation unit 56, 56A Display control unit 57, 57A Shape transition prediction unit 58, 58A Status determination unit 59 Parameter specification unit 60 Correlation degree data processing unit

Claims (9)

A grinding machine that grinds the work with a rotating surface plate,
A shape measuring instrument that measures the shape of the work through the measuring holes formed in the surface plate, and
A memory that stores the shape information of the work measured by the shape measuring instrument, and
A display that displays the shape information of the work measured by the shape measuring device, and
A control unit that controls the display contents of the display is provided.
The control unit generates a first drawing in which the shape drawings of the work being polished, which is the work currently being polished measured by the shape measuring instrument, are arranged in chronological order, and displays the first drawing on the display. A polishing device characterized by that. In the polishing apparatus according to claim 1,
The memory is used for predictive information including at least one of the work shape information and the work shape pattern obtained by arithmetically processing the work shape information, as a conditional attribute or learning when the work is polished. Associate and memorize the generated conditional attributes,
The control unit determines the result of a comparison calculation between the time-series change of the prediction information of the work being polished and the time-series change of the prediction information associated with the conditional attribute matching the conditional attribute of the work being polished. A polishing apparatus characterized in that the shape transition of the work being polished is predicted based on the prediction of the shape transition of the work being polished, and the state of the work being polished is determined based on the prediction of the shape transition of the work being polished. A grinding machine that grinds the work with a rotating surface plate,
A shape measuring instrument that measures the shape of the work through the measuring holes formed in the surface plate, and
A memory that stores the shape information of the work measured by the shape measuring instrument, and
A display that displays the shape information of the work measured by the shape measuring device, and
A control unit that controls the display contents of the display is provided.
The control unit has a first drawing in which the shape drawing of the work being polished, which is the work currently being polished measured by the shape measuring instrument, is arranged in chronological order, and a work that has been polished before polishing the work being polished. A polishing apparatus characterized by generating a second drawing in which the shape drawings of the above are arranged in chronological order, and displaying the first drawing and the second drawing on the display at the same time. In the polishing apparatus according to claim 3,
The memory stores the shape information of the work in association with the conditional attributes when the work is polished or the conditional attributes generated by learning.
The control unit is a polishing apparatus characterized in that the second drawing is generated based on the shape information of the work associated with the conditional attribute matching the conditional attribute of the work being polished. In the polishing apparatus according to claim 3 or 4.
The control unit is between the work shape pattern obtained by arithmetically processing the shape information of the work stored in the memory, or the conditional attribute when the work is polished and the shape information of the work. A polishing apparatus characterized in that the second drawing is generated based on a work shape pattern generated based on a learning result of a degree of correlation. In the polishing apparatus according to any one of claims 3 to 5.
The memory is used for predictive information including at least one of the work shape information and the work shape pattern obtained by arithmetically processing the work shape information, as a conditional attribute or learning when the work is polished. Associate and memorize the generated conditional attributes,
The control unit determines the result of a comparison calculation between the time-series change of the prediction information of the work being polished and the time-series change of the prediction information associated with the conditional attribute matching the conditional attribute of the work being polished. A polishing apparatus characterized in that the shape transition of the work being polished is predicted based on the prediction, and the state of the work being polished is determined based on the prediction of the shape transition. In the polishing apparatus according to claim 2 or 6.
When the control unit determines as a result of determining the state of the work being polished that the polishing process of the workpiece being polished is stopped, the control unit determines that the polishing process of the workpiece being polished is stopped and the polishing process of the workpiece being polished is stopped. A polishing device characterized in performing at least one of the notifications. In the polishing apparatus according to claim 2 or 6.
When the control unit determines that the work being polished cannot be in a desired work state based on the prediction of the shape transition of the work being polished, the polishing unit is in a secondary allowable state when the work being polished is in a secondary allowable state. A polishing apparatus characterized in that at least one of the notification of the stop of the polishing process of the medium work and the determination of the stop determination of the polishing process of the work being polished is performed. In the polishing apparatus according to claim 8,
The control unit identifies a conditional attribute having a high degree of correlation with the appearance of the secondary allowable state of the work being polished, or the degree of correlation with the appearance of the secondary allowable state of the work being polished. A polishing device characterized in that the conditional attributes are listed in descending order and the specific or listed conditional attributes are notified.

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