KR20190121239A - Polishing device - Google Patents

Abstract

An object of the present invention is to provide a polishing apparatus capable of stopping polishing of a workpiece at a time of completing a desired workpiece shape or of becoming a desired workpiece shape, based on change of a shape of the workpiece being polished. The polishing device comprises: a polishing machine (10) configured to polish a workpiece (W) by a lower surface plate (11) and an upper surface plate (12), which rotate; a shape measuring device (20) configured to measure the shape of the workpiece (W) through a measuring hole (19) formed in the upper surface plate (12); a memory (30) configured to store shape information of the workpiece (W) measured by the shape measuring device (20); an indicator (40) configured to display the shape information of the workpiece (W) measured by the shape measuring device (20); and a control unit (50) configured to control the display contents of the indicator (40). The control unit (50) generates a first portrayal (P1) in which shape portrayals of a being-polished workpiece (Wα), which is currently being polished, measured by the shape measuring device (20) are arranged in time series, and displays the first portrayal (P1) in the indicator (40).

Description

Polishing Device {POLISHING DEVICE}

The present invention relates to a polishing apparatus for polishing a surface of a workpiece such as a silicon wafer.

Background Art Conventionally, an upper plate, a lower plate, a sun gear, an internal gear, and a carrier plate are provided to polish the surface of a workpiece such as a silicon wafer held on the carrier plate. Polishing apparatus is known (for example, refer patent document 1). This polishing apparatus has a measuring device which measures in real time the thickness of the workpiece being polished through the through hole formed in the upper plate, and determines the stop timing of the polishing process based on the measurement result of the workpiece thickness by the measuring device.

[Patent Document 1] Japanese Patent Application Laid-Open No. 2015-47656

By the way, in the conventional grinding | polishing apparatus, the stop timing of grinding | polishing process is determined based on the measurement result of the workpiece thickness. However, it is difficult to predict the change of the shape change of the future workpiece in the case of continuing polishing processing from the temporary measurement result of the workpiece thickness. Therefore, it is not possible to grasp whether the workpiece shape approaches the desired shape when the polishing process is continued, and a problem arises that it is difficult to stop polishing the workpiece at the timing at which the workpiece shape is desired. In addition, it is thought that the difference in the various conditions related to the polishing processing not only affects the shape of the workpiece after the completion of polishing, but also affects the shape of the workpiece being polished. However, until now, the change of the time-series workpiece shape change caused by the polishing process has largely depended on the user's skill, and has hindered the improvement of the efficiency of the process improvement.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and provides a polishing apparatus capable of stopping polishing of a workpiece at a timing of becoming a desired workpiece shape or of a desired workpiece shape based on the change of the shape change of the workpiece being polished. It is a task to do.

In order to achieve the above object, the polishing apparatus of the present invention includes a polishing machine for polishing a work piece by a rotating surface plate, a shape measuring device for measuring the shape of the work piece through a measuring hole formed in the surface plate, and a shape measuring device. A memory for storing the shape information of the workpiece, a display for displaying the shape information of the workpiece measured by the shape measuring device, and a control unit for controlling the display contents of the indicator.

And a control part produces | generates the 1st drawing which time-series arranged the shape drawing of the workpiece | work in grinding | polishing which is the workpiece | work currently grinding | polishing measured by a shape measuring machine, and displays this 1st drawing on a display.

As a result, on the basis of the change in the shape change of the workpiece under polishing, the polishing of the workpiece can be stopped at the timing of becoming the desired workpiece shape or at the timing of becoming the desired workpiece shape.

BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing which shows schematically the whole structure of the grinding | polishing apparatus of Example 1. FIG.
2 is an explanatory diagram showing the positional relationship between the sun gear, the internal gear and the carrier plate of the first embodiment.
3A is an explanatory diagram showing a passage trajectory when the measuring hole passes through the workpiece in the polishing apparatus of Example 1. FIG.
It is explanatory drawing which shows the cross-sectional shape line which showed the cross-sectional shape of the workpiece | work in the grinding | polishing apparatus of Example 1. FIG.
FIG. 4 is an explanatory diagram showing a first drawing generated in the polishing apparatus of Example 1. FIG.
FIG. 5 is an explanatory diagram showing a second drawing generated in the polishing apparatus of Example 1. FIG.
6 is a flowchart showing the flow of the polishing stop determination processing performed in the first embodiment.
FIG. 7 is a flowchart showing the flow of the second drawing generation process executed in the first embodiment. FIG.
8 is an explanatory diagram showing a screen of a display in the polishing apparatus of the first embodiment.
It is explanatory drawing which arrange | positioned the shape drawing at the time of carrying out the grinding | polishing process of a 1st workpiece in time series.
It is explanatory drawing which arrange | positioned the shape drawing at the time of carrying out the grinding | polishing process of a 2nd workpiece in time series.
It is explanatory drawing which arrange | positioned the shape drawing at the time of carrying out the grinding | polishing process of the 3rd workpiece in time series.
It is explanatory drawing which arrange | positioned the shape drawing at the time of carrying out the grinding | polishing process of a 4th workpiece in time series.
FIG. 11 is an explanatory diagram schematically showing an overall configuration of a polishing apparatus of Example 2. FIG.
12 is a flowchart showing the flow of the polishing stop determination processing performed in the second embodiment.
It is explanatory drawing which arrange | positioned the shape drawing at the time of carrying out the grinding | polishing process of the 5th workpiece to time series.
It is explanatory drawing which arrange | positioned the shape drawing at the time of carrying out the grinding | polishing process of a 6th workpiece to time series.
It is explanatory drawing which shows the relationship between the workpiece | work polishing time and the flatness of the workpiece | work center part.
It is explanatory drawing which shows the relationship between the workpiece | work polishing time and the flatness of the workpiece outer periphery area | region.

EMBODIMENT OF THE INVENTION Hereinafter, the form for implementing the grinding | polishing apparatus of this invention is demonstrated based on Example 1 and Example 2 shown in drawing.

(Example 1)

Hereinafter, the structure of the polishing apparatus 1 of Example 1 is referred to as "the whole structure", "detailed structure of the polishing machine", "detailed structure of the shape measuring instrument", "detailed structure of the memory", "detailed structure of the display device", "control part" Detailed structure "," polishing stop determination processing structure ", and" 2nd drawing generation processing structure "are demonstrated.

[Overall configuration]

The polishing apparatus 1 of Example 1 is a double-side polishing apparatus which polishes both front and back sides of the thin workpiece W such as a semiconductor wafer, quartz wafer, sapphire wafer, glass wafer or ceramic wafer. As shown in FIG. 1, the polishing apparatus 1 includes a polishing machine 10, a shape measuring device 20, a memory 30, a display 40, and a controller 50.

[Detailed configuration of the polishing machine]

The polisher 10 polishes the workpiece | work W by the lower top plate 11 and the upper top plate 12 which rotate. The grinding | polishing machine 10 is a disk-shaped lower plate 11 and the upper plate 12 arrange | positioned concentrically centering on the axis L1, and the sun gear rotatably arrange | positioned at the center part of the lower plate 11 ( 13), an internal gear 14 disposed on the outer circumferential side of the lower platen 11, and a workpiece holding hole 15a (see FIG. 2) disposed between the lower platen 11 and the upper platen 12. It has a carrier plate 15 formed thereon. Moreover, the polishing pad 11a is attached to the upper surface of the lower surface plate 11, and the polishing pad 12a is attached to the lower surface of the upper surface plate 12. As shown in FIG. In addition, in the top plate 12, a supply hole (not shown) for supplying the polishing slurry is formed.

Here, the carrier plate 15 is engaged with the sun gear 13 and the internal gear 14, as shown in FIG. 2. The carrier plate 15 rotates (rotates) around the axis L1 while rotating by the sun gear 13 and the internal gear 14 rotating.

The workpiece W is disposed in the workpiece holding hole 15a of the carrier plate 15. Then, the carrier plate 15 rotates and revolves in a state of being sandwiched between the polishing pad 11a attached to the rotating lower plate 11 and the polishing pad 12a attached to the rotating upper plate 12. (W) is polished by the polishing pad 11a and the polishing pad 12a. That is, the surfaces of the polishing pad 11a and the polishing pad 12a serve as polishing surfaces for polishing the workpiece W. FIG.

The upper surface plate 12 is fixed to the rod 16 via the support stud 16a and the attachment member 16b attached to the upper surface. The rod 16 is stretched in the vertical direction by the fifth drive device M5. That is, the upper surface plate 12 moves up and down as the rod 16 expands and contracts.

In the center of the grinding | polishing machine 10, the 1st drive shaft 17a which stood up along the axis line L1 is arrange | positioned. The first drive shaft 17a is a shaft that is rotated by the first drive device M1. The driver 18 is fixed to the upper end of this first drive shaft 17a. As a result, the driver 18 is integrally rotated with the first drive shaft 17a by the first drive device M1.

As for the driver 18, the groove part (not shown) in which the hook 12b provided in the upper surface plate 12 engages is formed in the outer peripheral surface. The rod 16 extends and the upper plate 12 moves downward, and the hook 12b is coupled to the groove of the driver 18 so that the driver 18 and the upper plate 12 are integrally rotated. do. That is, the upper surface plate 12 is integrally rotated with the first drive shaft 17a by the first drive device M1.

The second drive shaft 17b is fixed to the hole 13a in the center portion of the sun gear 13 in a penetrating state. The second drive shaft 17b is a hollow tube with both ends open, and the first drive shaft 17a is rotatably penetrated. In addition, the second drive shaft 17b is rotated by the second drive device M2. Thereby, the sun gear 13 is integrally rotated with the 2nd drive shaft 17b by the 2nd drive apparatus M2.

The third drive shaft 17c is formed below the central portion of the lower platen 11. The third drive shaft 17c is a hollow tube with both ends open, and the second drive shaft 17b is rotatably penetrated. In addition, the third drive shaft 17c is rotated by the third drive device M3. As a result, the lower platen 11 rotates integrally with the third drive shaft 17c by the third drive device M3.

The fourth drive shaft 17d is formed in the internal gear 14. The fourth drive shaft 17d is a hollow tube with both ends open, and the third drive shaft 17c is rotatably penetrated. In addition, the fourth drive shaft 17d is rotated by the fourth drive device M4. As a result, the internal gear 14 rotates integrally with the fourth drive shaft 17d by the fourth drive device M4.

Moreover, the measurement hole 19 is formed in the upper surface plate 12 in the position separated by the predetermined distance along the radial direction from the center. This measuring hole 19 penetrates through the upper surface plate 12 and the polishing pad 12a, and is equipped with a window member 19a for transmitting the laser light as the measurement light.

[Detailed configuration of shape measuring instrument]

The shape measuring device 20 irradiates a measurement light toward the workpiece | work W, receives the measurement light reflected by the workpiece | work W, and measures the thickness of the workpiece | work W in grinding | polishing. Moreover, this shape measuring device 20 calculates the cross-sectional shape of the workpiece | work W from the thickness of the workpiece | work W measured. The shape measuring device 20 has a measuring unit 21, a thickness measuring part 22, and a shape calculating part 23.

The measuring unit 21 is attached to the top plate 12 and rotates in unison with the top plate 12. In addition, the measuring unit 21 is a laser light source (not shown) which irradiates the laser beam which is a measurement light toward the workpiece | work W through the window member 19a of the measurement hole 19 of the upper surface plate 12, It has a light receiving part (not shown) which receives the reflected light reflected by the workpiece | work W. FIG. The light receiving signal received by the light receiving unit is transmitted to the thickness measuring unit 22 by the transmitting unit 21a.

The thickness measuring part 22 measures the thickness of the workpiece | work W by the light reflection interference method, for example. This thickness measuring part 22 has the receiving part 22a which receives the light reception signal transmitted from the measuring unit 21, and calculate | requires the thickness of the workpiece | work W based on the light reception signal which this receiving part 22a receives. .

Here, by the rotation of the upper surface plate 12, as shown in FIG. 3A, the laser beam from the measuring unit 21 is in the period in which the measuring hole 19 passes through the surface of the workpiece W. As shown in FIG. Irradiated continuously on the surface of the workpiece W. Therefore, the thickness measurement part 22 continuously measures the thickness of each in-plane position of the workpiece | work W on the pass traces Na-Nc of the measurement hole 19. As shown in FIG. And this thickness measuring part 22 is provided from the one end W1a-W3a of the workpiece | work W to the other end W1b-W3b, while the measurement hole 19 is passing through each passage trace Na-Nc. In the passage period of the measuring hole 19 in the above, a data string composed of a plurality of continuous thickness data is output for each passage. Thereby, the thickness measuring part 22 consists of several continuous data which measured the thickness of each in-plane position of the workpiece | work W whenever the measuring hole 19 passes through the surface of the workpiece | work W. Output a data string. On the other hand, the data string output from the thickness measuring unit 22 is stored in the memory 30.

 The shape calculating part 23 calculates the cross-sectional shape of the workpiece | work W. As shown in FIG. The interval for obtaining the cross-sectional shape of the workpiece W can be arbitrarily set. In Example 1, the cross-sectional shape of the workpiece | work W is calculated | required based on the data sequence acquired for 15 second, for example, and the cross-sectional shape of the workpiece | work W is newly calculated | required every 15 second. In addition, the shape information such as the cross-sectional shape of the workpiece created by the shape calculating unit 23, the workpiece shape pattern obtained by arithmetic processing of the shape information, and the conditional attribute at the time of polishing the workpiece W and the workpiece W The workpiece shape pattern and the like generated based on the learning result of the correlation between the shape information are stored in the memory 30.

The shape calculating unit 23 also obtains a cross-sectional shape line T1 as shown in FIG. 3B. This cross-sectional shape line T1 is a shape drawing which shows the cross-sectional shape of the workpiece | work W. FIG. Cross-sectional shape line T1 is calculated | required every time the thickness of the workpiece | work W is measured by the thickness measuring part 22. FIG. Thereby, by arranging the cross-sectional shape line T1 calculated | required about the same workpiece | work W in time series, the change of the shape change of the said workpiece | work W appears. Moreover, the processing result information which is the shape of the final workpiece of the workpiece | work W by the cross-sectional shape line T1 at the time of completion | finish of grinding | polishing of the said workpiece | work W is shown. On the other hand, the information (the information of the cross-sectional shape of the workpiece W) of the cross-sectional shape line T1 obtained by the shape calculating unit 23 is stored in the memory 30.

[Detailed Configuration of Memory]

The memory 30 is a storage device capable of writing and reading data from the shape measuring device 20 and the control unit 50. The memory 30 includes information on the thickness of the workpiece W obtained by the thickness measuring unit 22 and information on the cross-sectional shape of the workpiece W determined by the shape calculating unit 23 (hereinafter, referred to as “process W”). The shape information of the "

The memory 30 stores the shape information of the work W in association with the conditional attribute when the work W is polished. Here, "conditional attribute" is various parameters which influence the grinding | polishing process of the workpiece | work W, such as grinding | polishing conditions, grinding | polishing environment, apparatus characteristics, etc., and have a correlation with respect to the grinding | polishing state of the workpiece | work W. As shown in FIG. Examples of the "conditional attribute" include an operation condition of the polishing machine 10, a polishing slurry condition, a polishing pad condition, a carrier plate condition, a workpiece condition, a polishing process condition, and the like.

On the other hand, the operating conditions of the grinder 10 are, for example, the rotational speed of the lower surface plate 11 and the upper surface plate 12, the rotational speed of the sun gear 13 and the internal gear 14, and the processing of the upper surface plate 12. Load set value and unit pressure, load slope, coolant temperature of lower plate 11 and upper plate 12, rotational speed of rotating and revolving carrier plate 15, vibration state and inclination characteristics of grinder 10, and the like. . The polishing slurry conditions are, for example, the type, temperature, flow rate, slurry life, slurry pH value, and the like of the polishing slurry. The polishing pad conditions are, for example, the type, thickness, groove shape, surface roughness, polishing pad life, modified material deposition degree, seasoning conditions, and the like of the polishing pad 11a and the polishing pad 12a. Carrier plate conditions are a material, the thickness, the workpiece holding hole 15a of the carrier plate 15, the shape, the bending characteristic of a discarding hole, a carrier plate life, a wear generation part, etc. The workpiece conditions are a kind of the workpiece W, a thickness at the start of polishing, a shape at the start of polishing, a variation in the thickness of the workpiece in a batch, and the like. The polishing process conditions are transition information of shape change in a batch, the number of continuous polishings, the workpiece polishing amount, the polishing time, the difference in thickness between the carrier plate 15 and the workpiece W, and the like.

[Detailed Configuration of Indicators]

The display unit 40 is based on the display command from the control unit 50, the shape information of the workpiece W currently being polished, the shape information of the workpiece W polished in the past, and the shape information of the workpiece W. The workpiece shape pattern and workpiece W produced on the basis of the learning result of the correlation between the workpiece shape pattern obtained by performing the calculation process and the conditional attribute when the workpiece W is polished and the shape information of the workpiece W are produced. Arbitrary information is displayed, such as when the polishing stop is determined. The indicator 40 is attached to the polishing machine 10, for example. This indicator 40 has the screen 40a (refer FIG. 8) which the user of the grinder 10 can see visually.

[Detailed Configuration of Control Unit]

The control unit 50 includes a control operation unit 51 made of a central processing unit (CPU), a sub memory 52, an input device 53, and the like. This control part 50 is based on the program stored in the sub memory 52, the processing target, the conditional attribute, etc. of the workpiece | work W input by the user of the grinder 10 via the input device 53, The control instruction part 51 outputs a control command to the 1st drive device M1-5th drive device M5, and controls the operation | movement of the grinding | polishing machine 10. FIG.

Moreover, this control calculation part 51 displays on the display 40 the 1st drawing P1 which arrange | positioned the shape drawing of the workpiece | work W under grinding | polishing in time series, and predicts the transition of a workpiece shape based on shape information. The polishing stop determination processing for determining whether to stop the polishing of the workpiece W is performed in accordance with this prediction result. That is, this control calculating part 51 is the 1st drawing generation part 54, the 2nd drawing generation part 55, the display control part 56, the shape transition prediction part 57, and the state determination part ( 58).

The first drawing generator 54 extracts, from the memory 30, the shape information of the currently polished workpiece (hereinafter, referred to as the workpiece Wα during polishing) measured by the shape measuring machine 20. . Here, the shape information extracted from the memory 30 is the shape information obtained from the start of polishing of the workpiece Wα during polishing to the measurement performed immediately before the extraction of the shape information. Then, the first drawing generation unit 54 arranges the shape drawing (cross-sectional shape line T1) of the workpiece Wα during polishing based on the extracted shape information of the workpiece Wα during polishing in sequential order. One first drawing P1 (see FIG. 4) is generated.

On the other hand, the shape information of the workpiece Wα during polishing increases each time the number of measurements increases with the progress of the polishing of the workpiece Wα during polishing. Therefore, the first drawing P1 gradually changes from the figure shown on the left side of FIG. 4 to the figure shown on the right side of FIG. 4 in accordance with the number of measurements.

In the second drawing generating unit 55, after acquiring the conditional property of the workpiece Wα during grinding, the workpiece W in the polishing (from the workpiece W polished in the past, that is, before polishing the workpiece Wα in polishing), Shape information of a workpiece (hereinafter referred to as "shape reference workpiece (Wβ)") related to the conditional attribute of Wα) or a conditional attribute of matching the conditional property of workpiece (Wα) during polishing Typical shape information related to is extracted from the memory 30.

Here, the shape information extracted from the memory 30 is extracted from a desired range of the shape information stored in the memory 30.

On the other hand, "typical shape information" is a typical shape change when the workpiece W is polished, and is abstract and representative shape information obtained arithmetically, and the conditional attribute and the workpiece when the workpiece W is polished It is a workpiece | work shape pattern produced | generated based on the learning result of the correlation between the shape information of (W). In addition, below, it is called "shape information of a selection master" including the shape information or typical shape information of the shape reference workpiece W (beta).

In addition, "matches the conditional property of the workpiece Wα during polishing" means that the conditional property during polishing is at least partly equal to the conditional property of the workpiece Wα during polishing, or the workpiece Wα during polishing. Refers to cases in which at least some of the conditional attributes of) are similar. For example, as the conditional property of the workpiece Wα during polishing, "rotational speed of the lower plate 11 = A", "rotational speed of the upper plate 12 = B", "slurry type = C", "carrier material" = D ", the rotation speed of the lower plate 11 = A + x, the rotation speed of the upper plate 12 = B + y, slurry type = C or C ', It is determined that conditional attributes such as carrier material = D or D '" match the conditional attributes of the workpiece Wα during polishing ", and the shape information of the selection master related to these conditional attributes is obtained from the memory 30. Extracted. On the other hand, the criterion for determining whether or not the conditional attribute matches can be arbitrarily set.

And in this 2nd drawing generation part 55, based on the shape information of the selection master extracted based on the conditional attribute of the workpiece Wα during grinding | polishing, the shape drawing of this selection master (cross-sectional shape line T1) 2nd drawing P2 (refer FIG. 5) arrange | positioned in order in time series from grinding start to polishing stop is produced | generated. On the other hand, the 2nd drawing production | generation part 55 always monitors the conditional attribute of the workpiece W (alpha) during grinding | polishing of the workpiece | work W. For example, when the conditional attribute of the workpiece Wα during polishing is deviated from the originally set or assumed state during the progress of a batch due to a slurry flow rate abnormality or the like, the conditionality of the workpiece Wα during polishing is Edit the new combination of conditional attributes based on the deviation pattern of the attributes. Then, shape information of the selection master relating to the newly edited combination of the conditional attributes is extracted from the memory 30. And based on the shape information of the selection master newly extracted, 2nd drawing P2 is produced | generated again. In the second drawing generating unit 55, when regenerating the second drawing P2, the second drawing generating unit 55 may generate the drawing based on the virtual pattern of the shape drawing guided by the learning function.

In the display control unit 56, the first drawing P1 generated by the first drawing generating unit 54 and the second drawing P2 generated by the second drawing generating unit 55 are displayed on the display unit 40. The control command to be displayed on the screen 40a of the control panel is output to the display unit 40. In addition, when the display control part 56 judges that the state determination part 58 stops the grinding | polishing process by the grinding | polishing machine 10, the display 40a of the display 40 shows that this grinding | polishing stop determination was performed. The control command to be displayed on the display device 40 is output to the display unit 40.

In the shape transition predicting unit 57, the time series change of the shape information of the workpiece Wα during polishing extracted by the first drawing generating unit 54 and the selection master extracted by the second drawing generating unit 55 are performed. Comparing the time series change of the shape information. And the shape transition prediction part 57 predicts the future shape transition of the workpiece | work W (alpha) during grinding | polishing based on the result of a comparison calculation. On the other hand, the shape transition of the workpiece Wα during polishing predicted by the shape transition predicting section 57 is a shape of the workpiece shape obtained for each measurement including the final polished shape.

And the comparison calculation of the time-series change of shape information by this shape transition prediction part 57 is performed, for example in the following procedure. That is, the cross-sectional shape line T1 of the selection master is arranged in time series for each conditional property. The shape transition pattern of the selection master for each conditional attribute is generated, and a database relating to the shape transition pattern is constructed. Here, in the selection master, the conditional property at the time of polishing matches the conditional property of the workpiece Wα during polishing. Therefore, it is considered that the shape transition of the workpiece Wα during polishing is the same as that of the selection master.

Therefore, the shape transition predicting section 57 compares the cross-sectional shape line T1 of the workpiece Wα during polishing with pattern recognition of the database-shaped shape transition pattern. Then, with reference to the shape transition of the selection master, it is estimated whether the current polishing step of the workpiece Wα is from the polishing start to the polishing stop. Further, the shape transition predicting section 57 predicts the future shape transition of the workpiece Wα during polishing based on the current polishing step of the workpiece Wα during polishing and the shape transition of the selection master.

On the other hand, the shape transition predicting section 57 is equipped with a machine learning function and updates the shape transition pattern and the temporal variation pattern from time to time by machine learning. In addition, when the conditional attribute monitored during the polishing of the workpiece Wα during the polishing changes with the progress of the polishing, beyond the negligible range, the shape transition predicting section 57 immediately changes to the new condition. The shape prediction of the workpiece Wα during subsequent polishing is performed on the basis of the attribute, and is calculated and output.

The state determination unit 58 determines the current polishing state of the workpiece Wα during polishing on the basis of the subsequent shape change of the workpiece Wα during polishing predicted by the shape transition predicting unit 57. Here, in the "polishing state", the polishing stop state in which the workpiece shape of the workpiece Wα during polishing reaches a workpiece shape capable of stopping the polishing process, or the polishing continuation state in which polishing operation by the polishing machine 10 is required to be continued. Etc. are included.

[Polishing stop determination processing configuration]

FIG. 6 is a flowchart showing the flow of the polishing stop determination processing executed by the control calculating section 51 of the control section 50 of the first embodiment. Hereinafter, each step of the polishing stop determination processing of the first embodiment will be described based on FIG. 6.

In step S1, it is determined whether the polishing processing of the workpiece | work W by the grinding | polishing machine 10 is performed. If YES (during workpiece polishing), the process proceeds to step S2. In the case of NO (no workpiece polishing), step S1 is repeated.

Here, the determination of the polishing of the workpiece by the polishing machine 10 depends on whether the polishing machining instruction flag is standing in accordance with the control instruction from the control computing unit 51 to the first driving apparatus M1 to the fifth driving apparatus M5. It is performed based on whether or not.

In step S2, following the determination that the workpiece is being polished in step S1, shape information of the workpiece Wα during polishing measured by the shape measuring machine 20 is extracted from the memory 30, and the flow advances to step S3.

In step S3, following the extraction of the shape information of the workpiece Wα during polishing in step S2, the shape drawing of the workpiece Wα during polishing is performed based on the shape information of the workpiece Wα extracted in step S2. First drawing P1 (refer FIG. 4) arrange | positioned in order in time series from the start of grinding | polishing by the grinding | polishing machine 10 to the measurement made just before information extraction is produced | generated, and it progresses to step S4.

In step S4, following generation of the first drawing P1 in step S3, the first drawing P1 generated in this step S3 and the second drawing P2 generated in the second drawing generation process described later ( 5), and the process proceeds to step S5.

Here, the process (2nd drawing production process) which produces | generates the 2nd drawing P2 is performed in parallel with each step of the grinding | polishing stop determination process shown in FIG. 6, and the 2nd drawing P2 is the workpiece | work under grinding | polishing. If the conditional attribute changes during polishing of (Wα), it is appropriately replaced.

In step S5, following the reading of the first drawing P1 and the second drawing P2 in step S4, the first drawing P1 generated in step S3 and read in step S4 and read in step S4 The control command for simultaneously displaying the entered second drawing P2 on the screen 40a of the display 40 is outputted to the display 40, and the flow proceeds to step S6.

On the other hand, in Example 1, as shown in FIG. 8, the indicator 40 matches the ratio of each X-axis and Z-axis of 1st drawing P1 and 2nd drawing P2 equally, and is 1st The drawing P1 and the second drawing P2 are arranged in the horizontal direction and displayed on the screen 40a. In addition, the indicator 40 also simultaneously displays the conditional attribute (part or all) of the workpiece Wα during polishing on the screen 40a. On the other hand, whether or not to display all the conditional properties may be set in consideration of the display space of the screen 40a and the convenience of monitoring the conditional properties. In addition, the conditional attribute of the workpiece Wα during polishing may not be displayed on the screen 40a.

In step S6, following the output of the control command to the display 40 in step S5, the time-series change of the shape information of the selection master extracted when the second drawing P2 is generated, and the workpiece during polishing (Wα) extracted in step S2 The time series change of the shape information of ()) is compared and calculated, and the shape change of the workpiece Wα during polishing is predicted from the result of this comparison calculation, and the flow proceeds to step S7.

On the other hand, when the 2nd drawing P2 is replaced, the shape information of the selection master extracted when generating the 2nd drawing P2 changes with the 2nd drawing P2 which replaced.

In step S7, following the prediction of the shape transition of the workpiece Wα during polishing in step S6, the polishing state of the workpiece Wα during polishing is determined based on the predicted shape transition, and the flow advances to step S8.

Here, the grinding | polishing state of the workpiece | work W (alpha) during grinding | polishing is determined by either the "polishing stop state" which reached | attained the workpiece | work shape which can stop grinding | polishing process, and the "polishing continuing state" which requires continuation of a grinding | polishing process.

In step S8, following the determination of the polishing state of the workpiece Wα during polishing in step S7, based on the determination of the polishing state performed in step S7, polishing of the workpiece Wα during polishing by the polishing machine 10 is performed. It is determined whether or not to stop. In the case of YES (polishing stop), the flow proceeds to step S9. If NO (continue polishing), the flow proceeds to step S2.

Here, determination of the polishing stop of the workpiece Wα during polishing is performed when it is determined as "polishing stop state" in step S7.

In step S9, following the determination of the polishing stop in step S8, a control command for indicating that the polishing stop of the workpiece Wα during polishing is determined on the screen 40a of the indicator 40 is displayed on the display 40. FIG. It outputs and notifies grinding stop determination, and advances to step S10.

In step S10, following the notification of the polishing stop determination in step S9, polishing of the workpiece Wα during polishing by the polishing machine 10 is stopped, and the flow advances to the end.

Here, stopping of the grinding | polishing process by the grinding | polishing machine 10 is performed by outputting a stop control command from the control calculating part 51 to the 1st drive apparatus M1-the 5th drive apparatus M5.

[Second Drawing Generation Processing Configuration]

FIG. 7 is a flowchart showing the flow of the second drawing generation processing executed by the second drawing generation unit 55 of the control unit 50 of the first embodiment. Hereinafter, based on FIG. 7, each step of the 2nd drawing production process of Example 1 is demonstrated.

In step S11, it is determined whether the polishing processing of the workpiece W by the polishing machine 10 is performed. If YES (during workpiece polishing), the process proceeds to step S12. In the case of NO (no polishing of workpiece), step S11 is repeated.

Here, the determination of the polishing of the workpiece by the polishing machine 10 is performed in the same manner as in step S1 in the polishing stop determination processing.

In step S12, following the determination that the workpiece is being polished in step S11, the conditional attribute of the polishing workpiece Wα currently being polished is acquired, and the flow advances to step S13.

Here, the conditional attribute of the workpiece Wα during polishing is input through the input device 53 by the user of the polisher 10 at the start of polishing of the workpiece Wα during polishing, or is input to the sub memory 52. It is stored in advance or the change state is monitored by a sensor or the like through the CPU.

In step S13, following the acquisition of the conditional attribute of the workpiece Wα during polishing in step S12, the selection relating to the conditional attribute matching the conditional attribute acquired in step S12, among the workpiece W polished in the past The shape information of the master (shape information of the shape reference workpiece Wβ, or typical shape information) is extracted from the memory 30, and the flow proceeds to step S14.

In step S14, following the extraction of the shape information of the selection master in step S13, based on the shape information of the selection master extracted in step S13, the shape drawing of the selection master is changed from the start of polishing by the polishing machine 10 to the polishing stop. Second drawing P2 (refer FIG. 5) arrange | positioned in the time series of is produced | generated, and it progresses to step S15.

In step S15, following the generation of the second drawing P2 in step S14, it is determined whether the polishing of the workpiece Wα is continued during polishing. If YES (continue polishing), the flow proceeds to step S16. In the case of NO (polishing stop), generation or replacement of the second drawing P2 is not required, and the process proceeds to the end, and the second drawing generation processing is completed.

Here, determination of the continuation of polishing of the workpiece Wα during polishing is performed when it is determined that the `` polishing continuation state '' which requires the continuation of the polishing processing based on the polishing state of the workpiece Wα during polishing.

In step S16, following the determination that polishing continues in step S15, the conditional attribute of the workpiece Wα during polishing is acquired again, and the flow advances to step S17.

In step S17, following reacquisition of the conditional attribute of the workpiece Wα during polishing in step S16, it is determined whether a change has occurred in the state of the conditional attribute of the workpiece Wα during polishing. If YES (with change), the flow proceeds to step S18. If NO (no change), the process returns to step S15.

Here, whether or not a state change has occurred in the conditional attribute of the workpiece Wα during polishing is determined by the conditional attribute of the workpiece Wα obtained in step S16 and the condition of the workpiece Wα obtained before. Compare enemy attributes and make judgments based on the gaps. On the other hand, when the state change occurs in the conditional property of the workpiece Wα during polishing, the conditional property greatly deviates from the originally set state or the conditional property fluctuates greatly from the assumption as the progress of the polishing process occurs. One case.

In step S18, following the determination that there is a state change of the conditional property in step S17, the conditional property of the selection master is edited on the basis of the conditional property of the workpiece Wα after the change obtained in step S16. Proceed to step S19.

Here, the editing of the conditional attribute is a conditional attribute of the selection master based on the conditional attribute of the workpiece Wα during polishing, which is a conditional attribute having a high influence on the polishing of the workpiece W, or a specific condition. To select or replace the conditional attribute according to.

In step S19, following the editing of the conditional attribute in step S18, the shape information of the selection master (shape information of the shape reference workpiece Wβ, related to the conditional attribute that best matches the conditional attribute edited in step S19, Or typical shape information] is extracted from the memory 30, and the flow proceeds to step S20.

In step S20, following extraction of the shape information of the selection master in step S19, the second drawing P2 is generated again based on the shape information of the selection master extracted in this step S19. And the 2nd drawing P2 produced | generated until the time of extracting shape information of a selection master again is replaced with this newly created 2nd drawing P2, and it returns to step S15.

The operation will be described below.

First, the "problem at the time of stopping polishing of a workpiece" is explained, and then, the action of the polishing apparatus 1 of Example 1 is divided into "abrasive stop action" and "predictive accuracy improvement effect of shape transition", and it demonstrates.

[Problem at stopping polishing work]

When grinding both surfaces of the workpiece | work W by the grinding | polishing machine 10 of the grinding | polishing apparatus 1, the thickness and cross-sectional shape of the workpiece | work W change gradually with progress of a grinding | polishing process. In particular, the cross-sectional shape of the workpiece W is generally determined by the difference in thickness between the carrier plate 15 and the workpiece W when other conditional properties are constant in a desirable state. It changes from a "center convex and a roll-off-minus shape" through a "flat shape" like a "central concave and outer periphery standing shape." In addition, a "center convex shape" is a shape in which the thickness of the center part of the workpiece | work W is larger than an outer peripheral area. In addition, a "peripheral deflection shape" is a shape in which the thickness gradually decreases toward the outer peripheral edge of the workpiece W. FIG. In addition, a "flat shape" is a shape in which the whole surface of the workpiece | work W is substantially flat. In addition, a "center concave shape" is a shape where the thickness of the center part of the workpiece | work W is smaller than an outer peripheral area. In addition, a "peripheral standing shape" is a shape in which the thickness gradually increases toward the outer peripheral edge of the workpiece W. FIG.

And the workpiece | work W becomes a desired thickness by stopping grinding | polishing process when the thickness of the workpiece | work W enters in target thickness range (T1 <= thickness <= T2). On the other hand, although the cross-sectional shape of the workpiece | work W also changes with the setting in the machining process of a subsequent process, it is usually preferable that it is a "flat shape" in which the whole surface of the workpiece W is substantially flat. Therefore, it is desired to stop the polishing of the workpiece W when the thickness falls within the target thickness range and the cross-sectional shape becomes a "flat shape".

On the other hand, the thickness of the workpiece | work W is measured in real time, and the shape drawing of the workpiece | work W in grinding | polishing is produced | generated based on a measurement result every time it measures. And the shape drawing of the workpiece | work W is monitored by the user of the grinding | polishing machine 10, the grinding | polishing machine (at the timing which thinks that the thickness of the workpiece | work W entered the target thickness range, and the cross-sectional shape reached the "flat shape" ( 10) is stopped.

However, the process (shape transition) of the change of the cross-sectional shape of the workpiece | work W may differ from the influence, such as the difference in the conditional attribute at the time of the grinding | polishing of the workpiece | work W. In addition, the cross-sectional shape of the workpiece | work W may not become a desired shape like "flat shape" by correlation with the conditional attribute at the time of the grinding | polishing of the workpiece | work W, and in that case, it is secondaryly acceptable There is a need to stop polishing in the cross-sectional shape.

On the other hand, only by temporarily monitoring the shape drawing of the workpiece W, it is difficult to predict how the workpiece shape changes in the future. That is, for example, in the case of the workpiece | work W of "weak center convex shape" at this time, it may become a "flat shape" and the "peripheral standing shape" by continuing polishing process. Only by temporarily monitoring the "approximate center convex shape" which is the shape of the workpiece at this time, the shape of the subsequent workpiece is unclear and the workpiece W cannot be stopped at an appropriate timing. This results in a deterioration of the site front least squares range (SFQR) in the workpiece outer peripheral region. Moreover, even if the workpiece | work W becomes "flat shape", the case where the grinding | polishing stop timing delays timely may arise.

That is, only by temporarily monitoring the shape drawing of the workpiece | work W, it is not possible to grasp the change of the shape change of the workpiece | work W under grinding | polishing. Therefore, based on the change of the shape change of the workpiece | work W, the problem that the grinding | polishing process of the workpiece | work W cannot be stopped at the timing which became the desired workpiece shape or the desired workpiece shape arises.

[Polishing stop action]

In the polishing apparatus 1 of Example 1, the thickness and cross-sectional shape of the workpiece | work W are measured by the shape measuring machine 20 during the grinding | polishing of the workpiece | work W by the grinding | polishing machine 10. FIG. And this grinding | polishing apparatus 1 memorize | stores the information of the thickness and cross-sectional shape of the workpiece | work W measured with the shape measuring machine 20 in the memory 30. As shown in FIG.

On the other hand, when the grinding | polishing process of the workpiece | work W is performed by the grinding | polishing machine 10, the control calculating part 51 of the control part 50 determines that it is grinding | polishing the workpiece | work W, and from step S1 shown in the flowchart of FIG. Each process of step S2, step S3, and step S4 is performed in order. That is, the first drawing generation unit 54 extracts the shape information of the workpiece Wα during polishing from the memory 30, and performs the first drawing P1 based on the extracted shape information of the workpiece Wα during polishing. Create In addition, the display control part 56 reads the 1st drawing P1 produced | generated by the 1st drawing production | generation part 54, and the 2nd drawing P2 produced | generated by the 2nd drawing generation part 55, and displays an indicator. The control instruction which displays the 1st drawing P1 and the 2nd drawing P2 on the screen 40a of 40 is output.

As a result, the first drawing P1 and the second drawing P2 are simultaneously displayed on the screen 40a of the display 40. As described above, in the polishing apparatus 1 of the first embodiment, when the shape of the workpiece Wα is polished by the shape measuring machine 20, the first drawing P1 is displayed on the display 40.

Here, 1st drawing P1 arranges the shape drawing (cross-sectional shape line T1) of the workpiece | work Wα during grinding in order in time series. Therefore, the user of the grinding | polishing machine 10 can recognize the shape drawing of the workpiece | work W (alpha) during the grinding continuously drawn in a list. Thereby, a user can grasp | ascertain the change of the shape change of the workpiece W (alpha) during grinding | polishing from grinding start to the present (1st drawing production time point). As a result, the user can predict the future shape change of the workpiece Wα during polishing based on the change of the shape change of the workpiece Wα during polishing. Therefore, even when the polishing machine 10 is controlled by the user's manual operation to stop the polishing process, the polishing process can be easily stopped at the timing of the desired workpiece shape or the timing of the desired workpiece shape.

Further, the user can collectively recognize the shape drawing of the workpiece Wα during polishing in relation to the conditional attribute, so that the user can design the device of the polishing machine 10 and design of subsidiary materials such as slurry. The improvement of the conditional property at the time of grinding | polishing a workpiece | work, such as the selection of a subsidiary material and the selection of processing conditions, can be performed easily. And a user can implement process improvement planning more efficiently, Furthermore, the productivity of the wafer in which the final workpiece shape becomes a desired shape can be aimed at.

In addition, in the first embodiment, the first drawing P1 and the second drawing P2 are simultaneously displayed on the screen 40a of the display 40. Therefore, the user of the grinder 10 can monitor the 1st drawing P1 and the 2nd drawing P2 simultaneously by looking at the screen 40a visually.

Here, the second drawing P2 is based on the shape information of the selection master extracted based on the conditional attribute of the workpiece Wα during polishing, and the shape drawing of the selection master (cross-sectional shape line T1) in time series. It is arranged in order. Therefore, the user of the grinding | polishing machine 10 monitors the 1st drawing P1, and confirms the 2nd drawing P2, referring to the shape change of the selection master shown by the 2nd drawing P2 with reference to it. It is possible to predict the change of the shape change in the future during the polishing of the workpiece Wα more accurately. As a result, when the user controls the polishing machine 10 by manual operation to stop the polishing process, the polishing process can be stopped at a more suitable timing. In some cases, the conditional attribute may be changed to adjust the shape of the final work piece and the timing of polishing termination.

On the other hand, in the polishing apparatus 1 of the first embodiment, after displaying the first drawing P1 and the second drawing P2 on the screen 40a of the display 40, step S6 shown in the flowchart of FIG. From step S7 and step S8 are performed in order. That is, the shape transition predicting unit 57 compares the time series change of the shape information of the workpiece Wα during polishing with the time series change of the selection master, and based on the result, the shape of the subsequent shape of the workpiece Wα during polishing is calculated. Predict trends. In addition, the state determination unit 58 determines the current polishing state of the workpiece Wα during polishing based on the shape transition of the workpiece Wα during polishing predicted by the shape transition predicting unit 57, and polishes the polishing. Based on the determination result of the state, it is judged whether or not polishing processing is to be stopped.

And when it is determined by this state determination part 58 that the grinding | polishing process of the workpiece W (alpha) during grinding | polishing is stopped, the process of step S9 shown by the flowchart of FIG. 6 is performed. That is, the display control part 56 outputs the control command which displays on the screen 40a of the display unit 40 that the grinding | polishing stop of the workpiece | work W (alpha) was determined during grinding | polishing. Then, on the screen 40a of the indicator 40, it is displayed that the polishing stop of the workpiece Wα during polishing is determined, and the polishing stop determination is notified.

As a result, the user of the grinder 10 can grasp | ascertain that the grinding | polishing stop was determined by visually seeing the screen 40a. Thereby, even when a user controls the grinding | polishing machine 10 by manual operation, and stops a grinding | polishing process, it can stop a grinding | polishing process at an appropriate timing. On the other hand, even when the grinding | polishing machine 10 is stopped by the stop control instruction | command from the control part 50 as mentioned later, it becomes possible for a user to recognize the stop operation | movement of the grinding | polishing machine 10. FIG.

Thereafter, the process of step S10 shown in the flowchart of FIG. 6 is performed. That is, the control calculating part 51 of the control part 50 performs various outputs for completion | finish of grinding | polishing processes, such as a stop control command, to the 1st drive device M1-the 5th drive device M5. As a result, the grinding | polishing machine 10 stops automatically through a predetermined sequence, and the grinding | polishing process of the workpiece | work W (alpha) during grinding | polishing is complete | finished. Thereby, in the grinding | polishing apparatus 1 of Example 1, the stop timing of grinding | polishing process is delayed rather than timely, and polishing processing can be stopped automatically at an appropriate timing.

In the polishing apparatus 1 of the first embodiment, the shape transition predicting unit 57 and the state determining unit 58 of the control calculating unit 51 of the control unit 50 are used to determine the workpiece Wα during polishing. The time series change of shape information and the time series change of a selection master are compared and calculated. Moreover, the change of the shape change of the workpiece W (alpha) during grinding | polishing is predicted based on the result of this comparison calculation. The polishing state of the workpiece Wα during polishing is automatically recognized based on the change in the shape change of the workpiece Wα during polishing.

Here, the shape information of the selection master is related to the conditional attribute that matches the conditional attribute of the workpiece Wα during polishing. Therefore, the time series change of this selection master reflects the correlation between the conditional property of the workpiece | work Wα and shape transition during grinding | polishing. Thereby, in this grinding | polishing apparatus 1, the prediction accuracy of the shape transition of the workpiece | work W (alpha) during grinding | polishing can be improved, and the state determination of the workpiece | work (W (alpha)) during grinding | polishing can be performed suitably. Then, by properly determining the state of the workpiece Wα during polishing, the polishing process can be stopped at an optimal timing at which the workpiece Wα becomes the desired shape during polishing or the workpiece Wα becomes the desired shape during polishing. have.

Further, in the polishing apparatus 1 of the first embodiment, the polishing machine 10 is judged to stop the polishing process or the continuation of the polishing process in accordance with the polishing state of the workpiece Wα during polishing, and the polishing machine 10 is automatically operated at a timing determined to be appropriate. Stop. By thus automatically performing the polishing stop, it is possible to prevent the timing of the polishing stop from being delayed more than timely. In addition, depending on the weaving method of the device control, the conditional attribute of the workpiece Wα during polishing may be intentionally changed to adjust the shape of the final workpiece or the timing of polishing termination.

In addition, in this Example 1, the 2nd drawing production process is performed by the 2nd drawing production part 55 in parallel with a grinding | stopping stop determination process, and it is until the completion | finish of grinding | polishing of the workpiece | work W (alpha) during grinding | polishing is completed. Then, it is monitored whether or not the conditional property of the workpiece Wα changes during polishing. And when the conditional attribute of the workpiece | work W (alpha) changes during grinding | polishing, 2nd drawing P2 is replaced irrespective of the step at the time in the polishing stop determination process.

That is, when the grinding | polishing process of the workpiece | work W is performed by the grinding | polishing machine 10, the 2nd drawing production | generation part 55 determines that it is grinding | polishing the workpiece | work W, and from step S11 to step S12 shown in the flowchart of FIG. , Each of the steps S13 and S14 is performed in order. That is, the second drawing generation unit 55 acquires the conditional attribute of the workpiece Wα during polishing, and the shape information of the selection master related to the conditional attribute matching the acquired conditional attribute (shape reference workpiece ( Shape information or typical shape information of Wβ)] is extracted from the memory 30. And this 2nd drawing generation part 55 produces | generates 2nd drawing P2 based on the extracted shape information of the selection master.

If 2nd drawing P2 was produced | generated, the 2nd drawing production part 55 performs the process of step S15, and determines whether the grinding | polishing process of the workpiece | work W (alpha) during grinding | polishing continues. In the case where the polishing processing is continued, the respective processes of steps S16 and S17 are performed in order, the conditional attribute of the workpiece Wα is again obtained during polishing, and it is determined whether or not a change has occurred in this conditional attribute. do.

When it is determined that a change has occurred in the conditional property of the workpiece Wα during polishing, it is determined that the conditional property has changed in the course of polishing, and from step S18 to step S19 and step S20 shown in the flowchart of FIG. The process is performed. That is, the conditional attribute of the selection master is edited again based on the conditional attribute of the workpiece Wα obtained again, and based on the selection master related to the conditional attribute that best matches this conditional attribute. , New second drawing P2 is generated. Then, the second drawing P2 up to that time is replaced with a new one.

Thereby, even if the conditional attribute of the workpiece | work Wα during grinding | polishing changes with progress of grinding | polishing process, 2nd drawing P2 can be made into the latest drawing according to the change of the conditional attribute of the workpiece | work Wα during grinding | polishing. In addition, the shape prediction of the workpiece | work W alpha during subsequent grinding | polishing can be performed suitably.

It demonstrates by giving a specific example below.

As shown in Fig. 9A, in the polishing step A in the initial stage of polishing, the first work W1 having a cross-sectional shape of the “steel concave shape” in which the central portion is relatively largely recessed is subjected to polishing processing, and the thickness thereof is increased. In the polishing step B immediately after reaching the target thickness range (T1? Thickness? T2), the cross-sectional shape becomes "weakly concave shape (state with a small central portion)". And the grinding | polishing process is continued, and in the grinding | polishing step C by which the thickness approached the lower limit T1 of the target thickness range, the cross-sectional shape of this 1st workpiece | work W1 becomes a "flat shape."

On the other hand, as shown in FIG. 9B, in the polishing step A in the initial stage of polishing, the second workpiece W2 having a `` weakly convex '' cross-sectional shape in which the center portion is projected relatively small is subjected to polishing processing and has a thickness. In the polishing step B immediately after reaching the target thickness range (T1? Thickness? T2), the cross-sectional shape becomes "weakly concave shape (state with a small central portion)". However, after the polishing operation is continued, in the polishing step C in which the thickness is close to the lower limit T1 of the target thickness range, the cross-sectional shape of the second workpiece W2 is "steel concave shape (state in which the central portion is largely recessed)". It becomes.

On the other hand, in the grinding | polishing apparatus 1 of Example 1, the 1st drawing P1 which produced the shape drawing of the 1st workpiece | work W1 and the 2nd workpiece | work W2 in order in time series is produced, and this 1st The drawing P1 is displayed on the display 40. Therefore, the shape change of each 1st workpiece | work W1 and the 2nd workpiece | work W2 can be grasped | ascertained from this 1st drawing P1, and the subsequent shape change can be estimated.

That is, in the polishing apparatus 1 of Example 1, in the polishing step B, the first workpiece W1 may determine that "because the dents in the central portion gradually become shallower, it is better to carry out polishing to the polishing step C". Can be. On the other hand, in the 2nd workpiece | work W2, it can be judged that "it is better to stop a grinding | polishing process in grinding | polishing process B rather than to grind | polishing to the grinding | polishing stage C, since the hollow part of a center part is gradually deepening." Thus, the polishing apparatus 1 of Example 1 can appropriately determine the best timing of polishing stop according to the shape of the workpiece | work at the time of grinding | polishing start, and can grind | polish to desired workpiece shape.

In addition, in the polishing apparatus 1 of Example 1, the time-series change of the shape information of the workpiece | work Wα during grinding, and the time-series change of a selection master are compared and calculated. For this reason, even if it is not possible to predict the change of the shape of a workpiece | work in the future only by the shape change of a present arrangement, a shape change can be predicted suitably.

As shown in FIG. 10A, the grinding | polishing machine 10 of the "steel convex shape" which the center part protruded comparatively large at the start of grinding | polishing of the 3rd workpiece | work W3 "conditional property in which the peripheral part of a workpiece is hard to be deformed (bending)." The case where grinding | polishing is performed by the furnace is demonstrated. In the polishing step A in the initial polishing step, the cross-sectional shape of the third workpiece W3 having a "steel convex shape" is subjected to polishing, and the polishing step immediately after the thickness reaches a target thickness range (T1? Thickness? T2). In B, it becomes "weakly convex shape (the state which center part protruded small)". In addition, the polishing process is continued, and in the polishing step C in which the thickness approaches the lower limit T1 of the target thickness range, the cross-sectional shape of the third workpiece W3 becomes a "flat shape".

On the other hand, as shown in Fig. 10B, the fourth workpiece W4 having a "steel convex shape" in which the central portion protrudes relatively large at the start of polishing is polished by the polishing machine 10 of "conditional property in which the peripheral part of the workpiece is easy to bend". The case where processing is performed is demonstrated. In the polishing step A in the initial polishing step, the cross-sectional shape of the fourth workpiece W4 having the "steel convex shape" is a polishing step immediately after the polishing process is performed and the thickness reaches a target thickness range (T1? Thickness? T2). In B, it becomes "weakly convex shape (state in which the center part protruded small)." In addition, in the polishing step C in which the thickness is close to the lower limit T1 of the target thickness range after the polishing process, the cross-sectional shape of the fourth workpiece W4 is "weakened convexly weakly standing shape (middle part and peripheral part, respectively). Protruded state).

Here, when the accumulation of data is still insufficient and the prediction of the shape transition having a strong correlation with the conditional property cannot be predicted, for example, polishing immediately before the polishing of the workpiece Wα (for example, before one batch) during polishing. From the shape change of the processed workpiece, it is possible to predict the shape change of the workpiece Wα during polishing after a certain point in time of the current arrangement which shows the shape change of the same tendency as the current arrangement. That is, in the polishing apparatus 1 of Example 1, the workpiece | work processed by grinding | polishing before 1 batch of the workpiece | work Wα of grinding | polishing as a selection master is employ | adopted, for example. Then, the time series change of the selection master and the time series change of the shape information of the third work piece W3 or the fourth work piece W4 are compared and calculated, so that the polishing machine 10 used in the current batch or the batch performed before and after the comparison is calculated. Conditional attributes can be estimated.

That is, in the polishing apparatus 1 of the first embodiment, when polishing is carried out by the polishing machine 10 having the "conditional property hard to bend the periphery of the workpiece", even in the polishing step B, even if the protrusion of the center portion is shallow, Since it is difficult to rise, it is better to carry out polishing until polishing step C ”. On the other hand, when polishing is carried out by the polishing machine 10 of the conditional property of which the peripheral part of the workpiece is easy to bend, during the polishing step B, since the standing is advanced in the outer circumferential region as the polishing process proceeds, up to the polishing step C It is better to stop the polishing process in the polishing step B than to polish it. &Quot; In this way, the polishing apparatus 1 of the first embodiment appropriately determines the best timing of polishing stop according to the conditional attribute of the polishing machine 10 selected by the user or the conditional attribute of the given polishing machine 10, It can grind to a workpiece shape.

[Effectiveness of Predicting Accuracy of Shape Trend]

In the polishing apparatus 1 of the first embodiment, the conditional attribute at the time of polishing the workpiece W is stored in the memory 30 with respect to the shape information of the workpiece W. FIG. Then, the shape information of the selection master related to the conditional attribute of the workpiece Wα during polishing is extracted from the memory 30, and the second drawing P2 is based on the extracted shape information of the selection master. )

Therefore, the shape transition of the selection master represented by the second drawing P2 reflects the correlation between the conditional attribute and the shape change in the workpiece Wα during polishing. And by displaying this 2nd drawing P2 simultaneously with 1st drawing P1, the prediction accuracy of the shape transition of the workpiece W (alpha) during grinding | polishing by the user who monitored these drawing can be improved.

Further, as the shape information of the selection master, the workpiece shape pattern generated based on the learning result of the correlation between the conditional attribute when the workpiece W is polished and the shape information of the workpiece W (typical shape information) In the case of using, the transition accuracy of the shape of the workpiece represented by the second drawing P2 can be improved as compared with the case of using the shape information of the shape reference workpiece Wβ as the shape information of the selection master. Therefore, it is possible to more accurately predict the shape transition of the workpiece Wα during polishing, and to stop the polishing at a more appropriate timing.

In addition, in the first embodiment, the shape trend prediction unit 57 has a machine learning function, and updates the database-like shape trend prediction pattern from time to time by machine learning. Thereby, the shape transition prediction after the present time of the workpiece | work Wα during grinding | polishing becomes more accurate automatically.

In addition, by improving the prediction accuracy of the shape transition, it is possible to more appropriately determine the state of the workpiece when determining the state of the workpiece Wα during polishing based on the prediction of the transition of the workpiece shape. As a result, it becomes possible to perform polishing stop at an optimum timing with higher precision.

Next, the effect will be described.

In the polishing apparatus 1 of Example 1, the effect enumerated below can be acquired.

(1) the polishing machine 10 which polishes the workpiece | work W by the rotating surface plate (the lower surface plate 11 and the upper surface plate 12),

A shape measuring device 20 for measuring the shape of the workpiece W through a measuring hole 19 formed in the surface plate (upper surface plate 12),

A memory 30 for storing shape information of the workpiece W measured by the shape measuring device 20,

An indicator 40 for displaying the shape information of the workpiece W measured by the shape measuring device 20,

The control part 50 which controls the display content of the display part 40 is provided,

The control part 50 produces | generates the 1st drawing P1 which arrange | positioned in time series the shape drawing of the workpiece Wα which is the grinding | polishing thing currently being measured by the shape measuring machine 20, and this 1st drawing P1. ) Is displayed on the display 40.

Thereby, based on the change of the shape change of the workpiece W (alpha) during grinding | polishing, the grinding | polishing process of the workpiece W (alpha) during grinding | polishing can be stopped at the timing which became the desired workpiece shape or the desired workpiece shape.

(2) The memory 30 stores the shape information of the workpiece W in association with the conditional attribute when the workpiece W is polished, and the controller 50 stores the workpiece Wα during polishing. Based on the result of the comparison operation of the time series change of the shape information of and the time series change of the shape information (shape information of the selection master) related to the conditional property of the workpiece Wα during polishing, The shape transition of W (alpha) was predicted, and it was set as the structure which performs the state determination of the workpiece W (alpha) during grinding | polishing based on the prediction of the shape transition of the workpiece W (alpha) during grinding | polishing.

Thereby, the accuracy of the prediction of the shape transition of the workpiece Wα during polishing can be improved to determine the state appropriately, and the optimum timing at which the workpiece Wα becomes a desired shape or the workpiece Wα during polishing is desired. Abrasive processing can be stopped at the optimum timing to become a shape.

(3) the polishing machine 10 which polishes the workpiece | work W by the rotating surface plate (lower surface plate 11 and the upper surface plate 12),

A shape measuring device 20 for measuring the shape of the workpiece W through a measuring hole 19 formed in the surface plate (upper surface plate 12),

A memory 30 for storing shape information of the workpiece W measured by the shape measuring device 20,

An indicator 40 for displaying the shape information of the workpiece W measured by the shape measuring device 20,

The control part 50 which controls the display content of the display part 40 is provided,

The control part 50 is the grinding | polishing of the 1st drawing P1 which arranged the shape drawing of the workpiece Wα which is the grinding | polishing currently a workpiece | work which is currently a grinding | polishing measured by the shape measuring machine 20 in time series, and the workpiece Wα during grinding | polishing. A second drawing P2 in which the shape drawing of the previously polished workpiece (selection master) is arranged in time series is generated, and the first drawing P1 and the second drawing P2 are simultaneously displayed on the indicator 40. It was set as the structure.

Thereby, on the basis of the change in the shape change of the workpiece Wα during polishing, the polishing of the workpiece Wα during polishing can be stopped at the timing when the desired workpiece shape is obtained or when the workpiece Wα becomes the desired shape during polishing. Can be.

(4) The memory 30 stores the shape information of the work W in association with the conditional attribute when the work W is polished.

The control part 50 was set as the structure which produces | generates 2nd drawing P2 based on the shape information of the workpiece | work (selection master) related to the conditional attribute of the workpiece | work Wα during grinding | polishing.

Thereby, the prediction accuracy of the shape change of the workpiece | work Wα during grinding | polishing can be aimed at.

(5) The control part 50 is based on the workpiece shape pattern (typical shape information) produced | generated based on the correlation of the conditional attribute at the time of grinding the workpiece | work W, and the shape information of the workpiece | work W. 2 Create the drawing (P2).

Thereby, the accuracy of the transition of the workpiece shape represented by the second drawing P2 can be improved, and the shape transition of the workpiece Wα can be more accurately predicted during polishing.

(6) The memory 30 stores the shape information of the work W in association with the conditional attribute when the work W is polished.

The control unit 50 changes the time series of the shape information of the workpiece Wα during polishing and the time series change of the shape information (shape information of the selected master) related to the conditional attribute that matches the conditional attribute of the workpiece Wα during polishing. The shape transition of the workpiece Wα during polishing is predicted based on the result of the comparison operation of, and the state of the workpiece Wα during polishing is determined based on the prediction of the shape trend of the workpiece Wα during polishing. .

As a result, the accuracy of the prediction of the shape transition of the workpiece Wα during polishing can be improved to determine the state appropriately, and the workpiece Wα becomes the desired shape during polishing, or the workpiece Wα becomes the desired shape during polishing. Polishing can be stopped at an optimum timing.

(7) The controller 50 stops the polishing of the workpiece Wα during polishing when it is determined that the polishing of the workpiece Wα during polishing is stopped as a result of the state determination of the workpiece Wα during polishing, It was set as the structure which notifies that the grinding | polishing process of the workpiece W (alpha) was stopped during grinding | polishing.

As a result, the polishing stop of the workpiece Wα during polishing can be automatically performed at an appropriate timing, and the user of the polishing machine 10 can be notified of the stop of polishing processing.

(Example 2)

The grinding | polishing apparatus of Example 2 is an example which specifies the responsibility parameter when the final workpiece shape of the workpiece | work W (alpha) turns into an allowable workpiece shape during a grinding | polishing, and reports the said responsibility parameter. Hereinafter, the polishing apparatus of Example 2 is demonstrated. In addition, about the structure equivalent to the polishing apparatus 1 of Example 1, the same code | symbol as Example 1 is attached | subjected and detailed description is abbreviate | omitted.

In the polishing apparatus 1A of the second embodiment, as illustrated in FIG. 11, the control calculation unit 51A of the control unit 50A includes the first drawing generator 54 and the second drawing generator 55. And a display control unit 56A, a shape transition predicting unit 57A, a state determining unit 58A, a parameter specifying unit 59, and a correlation data processing unit 60.

In the shape transition predicting unit 57A of the second embodiment, the time series change of the shape information of the workpiece Wα during polishing and the time series change of the shape information of the selection master are compared and calculated, and the polishing is performed based on the result of the comparison operation. The future shape change of the heavy workpiece Wα is predicted. In addition, the shape transition predicting unit 57A receives the support of the correlation data processing unit 60 as necessary based on the prediction of the shape change in the future during the polishing of the workpiece Wα, and then the workpiece Wα during polishing. It is predicted whether or not the final workpiece shape (hereinafter, referred to as "final workpiece shape") can be a desired workpiece shape.

Here, "the desired workpiece shape (hereinafter referred to as" desired state ")" is a shape which satisfies the 1st shape condition set previously. On the other hand, when it is predicted that the final workpiece shape cannot be in a desired state, the shape transition predicting unit 57A receives the support of the correlation data processing unit 60 as necessary, while the final workpiece shape is secondarily acceptable. Predict whether or not a shape can be made. On the other hand, the "secondarily acceptable workpiece shape (hereinafter referred to as" secondary allowable state ") means that the final workpiece shape cannot be in a desired state, that is, it is determined that the first shape condition is not satisfied even if the polishing process is continued. It is a shape which satisfies the 2nd shape condition set at the time of carrying out.

In the state determination unit 58A of the second embodiment, the current polishing state of the workpiece Wα during polishing is determined based on the subsequent shape transition of the workpiece Wα during polishing predicted by the shape transition predicting unit 57A. do. Here, in the "polishing state" determined by the state determining unit 58A, the shape of the first polishing stop state in which the shape of the workpiece Wα during polishing reaches a desired state, or the shape of the workpiece Wα during polishing A second polishing stop state that has reached this secondary acceptable state, a third polishing stop state requiring immediate polishing stop, a polishing continued state requiring continuation of polishing processing by the polishing machine 10, and the like.

In the parameter specifying unit 59, when the shape transition predicting unit 57A determines that the final workpiece shape can be in the secondary allowable state, the final workpiece shape of the workpiece Wα during polishing becomes a secondary allowable state ( A highly correlated conditional property (hereinafter referred to as "responsibility parameter") is specified for the desired state. The parameter specifying unit 59 may enumerate the responsible parameters in the order of high correlation strength.

The specification of the responsibility parameter by this parameter specification part 59 is performed, for example in the following procedure. That is, during the polishing, which is searched by the correlation data processing unit 60 and determined that the abnormal state of the workpiece shape stored in the memory 30 and the conditional attribute having a high correlation strength and the secondary allowable state can be obtained. Contrast the conditional properties of the workpiece Wα. And the conditional attribute with a relatively high correlation intensity is specified as a "responsibility parameter." In addition, this responsibility parameter may be one or plural.

In addition, enumeration of the correlation strength of the responsibility parameter by the parameter specification part 59 in ascending order of the intensity is performed, for example in the following procedure. In other words, the conditional property data having a high degree of correlation strength with the abnormal state of the shape of the workpiece is compared with the conditional property of the workpiece Wα during polishing which is determined to be a secondary acceptable state. Then, a plurality of conditional attributes are selected in order of relatively high correlation strength, and the responsibility parameters are listed in the selected order. On the other hand, the number of conditional attributes to be selected may be two or more.

On the other hand, it is also possible to analyze the correlation between the abnormality of the state information monitored during the polishing of the workpiece W and the abnormal state of the workpiece shape, such as the data of the temperature distribution on the polishing pad, the vibration of the bearing and the temperature data. Therefore, by monitoring not only a single workpiece shape trend, but also a correlation between the trend of the workpiece shape across multiple batches and the trend of the conditional attribute, the specific accuracy of the correlation between the responsibility parameter and the responsibility parameter strength can be monitored. Can be improved. On the other hand, multivariate analysis, artificial intelligence (machine learning, deep learning), etc. can be used for updating these correlation analysis, the prediction model based on it, and the update of the prediction precision at any time.

And in the display control part 56A of Example 2, when it outputs the control command which displays on the screen 40a of the display 40 that the grinding | polishing stop determination was performed to the display 40, the state determination part 58A Is determined to be the "first polishing stop state," a control command for displaying that the workpiece shape is a desired state is output. In addition, when the state determination part 58A judges that it is a "second polishing stop state," the fact that a workpiece shape is a secondary permissible state, the information of the parameter or the responsibility parameter specified by the parameter specification part 59, or correlation A control command for displaying information of the responsibility parameters listed in order of high intensity is output. In addition, when it determines with the state determination part 58A "third polishing stop state," it outputs the control instruction which displays that a workpiece shape is an allowable external shape.

The correlation data processing unit 60 searches for the conditional attribute of the workpiece W, the shape transition of the workpiece W during polishing, and the correlation strength of the final workpiece shape. The correlation strength search by the correlation data processing unit 60 is performed in the following order, for example.

That is, based on the polishing result of the workpiece W performed in the past, the abnormal state recognition when an abnormality (for example, discontinuity of slurry flow rate) occurs for a predetermined conditional property, and the workpiece shape of the workpiece Wα during polishing are The relationship between the shape transition (hereinafter, referred to as "abnormal state of the workpiece shape") in the case of the secondary permissible state is computed respectively. On the other hand, for example, the state recognition of the discontinuity of the slurry flow rate is performed by comparing the length of time when the slurry flow rate is less than the predetermined value with the threshold value.

Then, for each conditional attribute when an abnormal state of the workpiece shape occurs, the correlation strength with the abnormal state of the workpiece shape is searched, for example, by calculating a correlation coefficient by regression analysis. Moreover, the relationship between a predetermined conditional attribute and the shape transition of the workpiece | work W at that time is calculated | required from the grinding | polishing result of the workpiece | work W performed in the past. Then, on the basis of the relationship between the predetermined conditional attribute and the workpiece shape trend, a parameter that is questionable as a cause of the deviation between the desired shape weight and the desired final work shape and the actual shape shape and the final work shape along the polishing process occurs. By specifying, the correlation strength between the conditional attribute and the workpiece shape trend and the final workpiece shape may be searched for. This correlation strength data is stored in the memory 30 in association with the recognition of certain abnormal states and conditional attributes.

On the other hand, this correlation data processing part 60 is a dedicated calculation part which exclusively searches for the conditional attribute of the workpiece | work W, the shape transition of the workpiece | work W at the time of grinding | polishing, and the correlation strength of the final workpiece shape. Therefore, the correlation data processing unit 60 can perform the calculation of correlation search regardless of whether or not the workpiece W is being polished.

Next, using the flowchart shown in FIG. 12, the polishing stop determination processing performed in the polishing apparatus 1A of the second embodiment will be described. The same process as the polishing stop determination processing in Example 1 is assigned the same reference numeral as in Example 1, and detailed description thereof is omitted. On the other hand, also in the polishing apparatus 1A of Example 2, the 2nd drawing production | generation process which produces the 2nd drawing P2 in parallel with the polishing stop determination process shown in FIG. 12 is performed. In the polishing stop determination processing performed in the second embodiment, the second drawing P2 generated by the second drawing generation processing is read at the necessary timing (step S4).

In the polishing stop determination processing performed in Example 2, the time series change of the shape information of the selection master and the time series change of the shape information of the workpiece Wα during polishing are compared and calculated in step S6. If the shape change of the workpiece Wα during polishing is predicted from this comparison calculation result, the process proceeds to step S61.

In step S61, it is determined whether the final workpiece shape of the workpiece Wα during polishing can be a desired workpiece shape based on the prediction of the future shape transition of the workpiece Wα during polishing. If YES (which may be the desired state), the flow proceeds to step S71. If NO (cannot be the desired state), the flow proceeds to step S62.

In step S62, following the determination that the final workpiece shape in step S61 cannot be a desired state, the final workpiece shape of the workpiece Wα during polishing is based on the prediction of the future shape trend of the workpiece Wα during polishing. It is determined whether or not it can be a secondary acceptable work piece shape. In the case of YES (which may be the secondary allowable state), the polishing processing is continued and the flow proceeds to step S63. If NO (cannot be in the secondary allowed state), the flow proceeds to step S71.

In step S63, following the determination that the final workpiece shape in step S62 can be in the secondary acceptable state, the conditional property is highly correlated with respect to the final workpiece shape of the workpiece Wα being subjected to secondary tolerance during polishing. The responsibility parameters are specified or the responsibility parameters are listed in order of high correlation strength, and the flow proceeds to step S71.

In step S71, it is determined that the final workpiece shape in step S61 can be in the desired state, the determination that the final workpiece shape in step S62 cannot be in the desired state and the secondary allowed state, and the responsibility parameter in step S63 Following any one of the enumeration of the responsible parameters in the order of specific or high correlation strength, the polishing state of the workpiece Wα during polishing is determined based on the prediction of the future shape trend of the workpiece Wα during polishing, and the step Proceed to S81.

Here, the polishing state of the workpiece Wα during polishing is the "first polishing stop state" in which the workpiece shape of the workpiece Wα reaches the desired state during polishing, and the workpiece shape of the workpiece Wα during polishing is in the secondary acceptable state. It is determined in any of the "second polishing stop state" which reached | attained, the "third polishing stop state" which stops grinding | polishing process immediately, and the "polishing continued state" which requires continuing of polishing process.

On the other hand, the determination of whether it is a "first polishing stop state" is performed when it is determined in step S61 that the shape of the final workpiece can be in a desired state. In addition, the determination of whether it is "the 2nd polishing stop state" is performed in step S63 when the responsibility parameter is specified or enumeration of the responsibility parameter was performed in order of high correlation strength. In addition, the determination of a "third polishing stop state" is performed when it is determined in step S62 that the final workpiece shape cannot be either of a desired state and a secondary acceptable state. In addition, the determination of the "polishing continued state" has been determined that the final workpiece shape becomes either a desired state or a secondary allowable state, but the current workpiece shape of the workpiece Wα during polishing reaches a desired state or a secondary acceptable state. It is done when it is not there.

In step S81, following the determination of the polishing state of the workpiece Wα during polishing in step S71, based on the determination of the polishing state performed in step S71, polishing of the workpiece Wα during polishing by the polishing machine 10 is performed. It is determined whether or not to stop. In the case of YES (polishing stop), the flow proceeds to step S91. If NO (continue polishing), the flow returns to step S2.

Here, the determination that the polishing stop of the workpiece Wα during polishing is performed when one of the "first polishing stop state", "second polishing stop state", and "third polishing stop state" is made in step S71. Is done.

In step S91, following the determination of the polishing stop in step S81, the state of the workpiece Wα during polishing is determined on the screen 40a of the indicator 40 with the effect that the polishing stop of the workpiece Wα during polishing is determined. The control command to display is output to the display 40, a notification of polishing stop determination is made, and the flow proceeds to step S10.

Here, in the case where the determination of the "first polishing stop state" is made in step S71, a control command for displaying that the workpiece Wα during polishing is in a "desired state" together with the fact that the polishing stop is determined is output. In addition, when the determination of the "second polishing stop state" is made in step S71, the control command which displays that the workpiece | work W (alpha) during grinding | polishing is a "secondary permissible state" with the intention of having determined the polishing stop is output. In addition, in the case where the determination of the "third polishing stop state" is made in step S71, the "working allowance" means that the workpiece Wα during polishing is neither of the desired state nor the secondary allowable state together with the fact that the polishing stop is determined. Outputs a control command for displaying &quot; outer shape &quot;.

Next, the operation of the polishing apparatus 1A of the second embodiment will be described.

In 1 A of grinding | polishing apparatuses of Example 2, when the grinding | polishing process of the workpiece | work W is performed by the grinding | polishing machine 10, the 1st drawing P1 and the 2nd drawing P2 are displayed similarly to Example 1, 40 is displayed on the screen 40a. Thereafter, the processes of steps S6 and S61 shown in the flowchart of FIG. 12 are performed in order. That is, the shape transition predicting unit 57A compares and calculates the time series change of the shape information of the workpiece Wα during polishing and the time series change of the shape information of the selection master, and based on the result, Predict future shape trends. Then, based on the prediction of the shape transition, it is determined whether or not the final workpiece shape can be in a desired state.

When it is determined that the final workpiece shape can be in a desired state, the processing of step S81 is performed in order from step S71 shown in the flowchart of FIG. That is, the state determination unit 58A determines the current polishing state of the workpiece Wα during polishing based on the shape change of the workpiece Wα during polishing predicted by the shape transition predicting unit 57A, and polishes the polishing. Based on the determination result of the state, it is judged whether or not polishing processing is to be stopped.

And when this state determination part 58A determines that the grinding | polishing state of the workpiece | work W (alpha) during grinding | polishing is "the 1st grinding stop state", the process of step S91 shown in the flowchart of FIG. 12 is performed. That is, the display control part 56A controls to display on the screen 40a of the display 40 that the workpiece Wα is in a "desired state" during the polishing, with the fact that the polishing stop of the workpiece Wα is polished. Output the command. In addition, on the screen 40a of the indicator 40, in addition to the determination that the polishing of the workpiece Wα is stopped during polishing, it is displayed that the workpiece Wα is in a "desired state" during polishing, and the polishing stop determination is notified. do.

As a result, the user of the grinding | polishing machine 10 can grasp | ascertain the screen stop 40a, and can grasp | ascertain that the grinding stop was determined and the workpiece shape of the workpiece W (alpha) during grinding | polishing. Thereby, even when a user controls the grinding | polishing machine 10 by manual operation, and stops a grinding | polishing process, it can stop a grinding | polishing process at an appropriate timing. Moreover, even when the grinding | polishing machine 10 is stopped by the stop control instruction | command from the control part 50A, a user can recognize the stop operation | movement of the grinding | polishing machine 10. FIG.

Subsequently, the process of step S10 is performed, and the control calculation unit 51A of the control unit 50A sends various outputs for finishing polishing such as a stop control command to the first drive unit M1 to the fifth drive unit M5. Do it. As a result, the grinding | polishing machine 10 stops automatically through a predetermined sequence, and the grinding | polishing process of the workpiece | work W (alpha) during grinding | polishing is complete | finished.

On the other hand, based on the prediction of the future shape transition of the workpiece Wα during polishing, when it is determined that the final workpiece shape cannot be in a desired state, the process of step S62 shown in the flowchart of FIG. 12 is performed. That is, the shape transition predicting unit 57A determines whether or not the final workpiece shape can be in the secondary acceptable state, based on the prediction of the future shape transition of the workpiece Wα during polishing.

When it is determined that the shape of the final workpiece can be in the secondary acceptable state, the process of step S63 shown in the flowchart of FIG. 12 is performed. In other words, the parameter specifying unit 59 specifies a responsible parameter having a high correlation with respect to the fact that the final workpiece shape of the workpiece Wα is in a secondary allowable state (that the final workpiece shape cannot be a desired state) during polishing. Responsibility parameters are listed in ascending order of correlation or strength.

And if the responsibility parameter is specified or enumerated, the process of step S81, step S91 will be performed in order from step S71 shown in the flowchart of FIG. That is, the state determination unit 58A determines the current polishing state of the workpiece Wα during polishing based on the shape transition of the workpiece Wα during polishing, and performs polishing processing based on the determination result of the polishing state. It is determined whether to stop. And when the state determination part 58A determines that the grinding | polishing state of the workpiece W (alpha) in grinding | polishing is "the 2nd grinding stop state", the display control part 56A will determine the grinding | polishing stop of the workpiece W (alpha) during grinding | polishing. In addition to the fact that the workpiece Wα is in the "secondary permissible state" during polishing, the responsibility parameters specified by the parameter specifying unit 59 and the responsibility parameters listed in the order of high correlation strength are displayed. A control command to be displayed on the screen 40a is output. In the screen 40a of the indicator 40, the polishing stop of the workpiece Wα during polishing is determined, the workpiece Wα during the polishing is in a "secondary permissible state", the responsibility parameter or the correlation strength is high. Responsibility parameters listed in order are respectively displayed, and the polishing stop determination is notified.

Subsequently, the process of step S10 is performed, and the control calculation unit 51A of the control unit 50A sends various outputs for finishing polishing such as a stop control command to the first drive unit M1 to the fifth drive unit M5. Do it. As a result, the grinding | polishing machine 10 stops automatically through a predetermined sequence, and the grinding | polishing process of the workpiece | work W (alpha) during grinding | polishing is complete | finished.

As a result, the user of the grinder 10 visually sees the screen 40a, and in addition to the fact that the polishing stop is determined and the workpiece shape of the workpiece Wα during polishing, the workpiece Wα during polishing is in the secondary permissible state. Identify responsible parameters that are highly correlated to Thereby, even when a user controls the grinding | polishing machine 10 by manual operation, and stops a grinding | polishing process, it can stop a grinding | polishing process at an appropriate timing. Moreover, even when the grinding | polishing machine 10 is stopped by the stop control instruction | command from the control part 50A, a user can recognize the stop operation | movement of the grinding | polishing machine 10. FIG.

In addition, it is possible to reasonably devise necessary countermeasures (improvement of conditional properties, improvement of the polishing machine 10, and the like) for making the final workpiece shape desired by being able to grasp the responsible parameter or its candidate. And it becomes possible to obtain the workpiece | work W of a desired state efficiently. And it can be urged to expand the experience data according to the deviation of the desired final workpiece shape and the actual workpiece shape, and the improvement proposal of the grinding | polishing apparatus 1 for eliminating the deviation.

On the other hand, in the process of step S62 shown in the flowchart of Fig. 12, when it is determined that the shape of the final workpiece cannot be in the secondary allowed state, the processes of step S71, step S81, and step S91 are performed in order from step S62. That is, the state determination unit 58A determines the current polishing state of the workpiece Wα during polishing, and determines that the polishing state of the workpiece Wα during polishing is "third polishing stop state" to stop polishing processing. . And the display control part 56A displays on the screen 40a of the display 40 that the workpiece Wα is a "permissible external shape" in addition to the fact that the polishing stop of the workpiece Wα was polished during polishing. Outputs a control command to make Then, the screen 40a of the indicator 40 indicates that the polishing stop of the workpiece Wα during polishing is determined and that the workpiece Wα during polishing is a "permissible external shape", and the polishing stop determination is notified. .

Subsequently, the process of step S10 is performed, and the control calculation unit 51A of the control unit 50A sends various outputs for finishing polishing such as a stop control command to the first drive unit M1 to the fifth drive unit M5. Do it. As a result, the grinding | polishing machine 10 stops automatically through a predetermined sequence, and the grinding | polishing process of the workpiece | work W (alpha) during grinding | polishing is complete | finished.

As a result, the user of the grinding | polishing machine 10 can grasp | ascertain the screen stop 40a, and can grasp | ascertain that the grinding stop was determined and the workpiece shape of the workpiece W (alpha) during grinding | polishing. Thereby, even if a user controls the grinding | polishing machine 10 by manual operation, and stops grinding, it can stop grinding immediately. Moreover, even when the grinding | polishing machine 10 is stopped by the stop control instruction | command from the control part 50A, a user can recognize the stop operation | movement of the grinding | polishing machine 10. FIG.

In addition, when the plurality of responsibility parameters are specified by the parameter specifying unit 59 and these responsibility parameters are displayed on the screen 40a of the indicator 40 in the order of high correlation strength, the workpiece Wα during polishing It is easier to identify the conditional attribute that has the most influence on this secondary acceptance state. As a result, it is possible to more reasonably devise necessary countermeasures (improved conditional properties, improved polisher 10, etc.) for bringing the final workpiece shape to a desired state.

It demonstrates by giving a specific example below.

As shown in Fig. 13A, the case where the fifth workpiece W5 having a "convex deflection shape" in which the outer circumferential region is relatively polished at the start of polishing processing is polished by the polishing machine 10 of the "first batch after dressing" Explain. In the polishing step A in the initial polishing step, the cross-sectional shape of the fifth workpiece W5 having the "convex deflection shape" is subjected to polishing, and the polishing step B immediately after the thickness reaches the target thickness range (T1 ≤ thickness ≤ T2). In this example, the flat and sag shape (the center part is flat and the outer peripheral area is excessively polished) is obtained. Subsequently, polishing is continued, and in polishing step C in which the thickness is close to the lower limit T1 of the target thickness range, the cross-sectional shape of the fifth workpiece W5 becomes a "flat shape" in a desired state.

Next, as shown in FIG. 13B, the sixth workpiece W6 having a "convex deflection shape" in which the outer peripheral region is relatively polished at the start of the polishing process is polished by the polishing machine 10 of the "tenth batch after dressing". The case will be described. In the polishing step A in the initial polishing step, the cross-sectional shape of the sixth workpiece W6 having the "convex deflection shape" is subjected to polishing processing, and the polishing step B immediately after the thickness reaches the target thickness range (T1 ≤ thickness ≤ T2). In this example, the flat and sag shape (the center part is flat and the outer peripheral area is excessively polished) is obtained. However, further polishing operation is continued, and in polishing step C in which the thickness is close to the lower limit T1 of the target thickness range, the cross-sectional shape of the sixth workpiece W6 is &quot; concave sag shape (the center part is largely depressed and the peripheral part is excessively large. In the state of polishing).

Here, in the polishing step C, in the polishing step C, in the polishing step C, the cross-sectional shape of the fifth workpiece W5 becomes a "flat shape", so the final workpiece shape is desired. It is expected to be in a state. On the other hand, when performing a grinding | polishing process with the grinding | polishing machine 10 of the "10th batch after dressing", a workpiece cross-sectional shape does not become a "flat shape" even in any grinding | polishing step. Therefore, at the time of grinding | polishing of the 6th workpiece | work W6, it is anticipated that the shape of the final workpiece may not be in a desired state. However, since the "flat and deflected shape" in the polishing step B corresponds to the secondary permissible state, it is expected that the final workpiece shape of the sixth workpiece W6 may be the secondary permissible state.

In addition, the conditional attribute (responsibility parameter) highly correlated with the appearance of the event that the final workpiece shape does not become the desired "flat shape" when polishing the sixth workpiece W6 is polished. ) Is specified as deterioration of the surface of the polishing pad, for example, caused by an increase in the number of batches.

Therefore, in the polishing apparatus 1A of Example 2, when the shape transition of the 6th workpiece | work W6 is predicted during the grinding | polishing of the 6th workpiece | work W6, based on this prediction, the shape of the final workpiece | work is a desired state ( It is determined that it cannot be a flat shape, and can be a secondary acceptable state (flat and sag shape). Then, the polishing stop determination is notified at the timing when the workpiece shape of the sixth workpiece W6 reaches the secondary allowable state (flat and sag shape) as the polishing process progresses, and the sixth workpiece W6 receives the secondary allowable state ( Flat surface and sag), and the "resistance of the surface of the polishing pad" is reported as a parameter with a heavy responsibility for becoming a secondary permissible state.

Thereby, the best timing of polishing stop can be determined suitably, and it can be made into the secondary tolerance state which satisfy | fills a 2nd shape condition, although the shape of a final workpiece is not a desired state. In addition, since the responsible parameter or the candidate can be grasped, it contributes to the improvement of the conditional property at the time of the work piece polishing, and the user can make more efficient process planning. In addition, the polishing apparatus 1 itself can make an improvement proposal.

Next, the effect will be described.

In 1 A of grinding | polishing apparatuses of Example 2, the effect enumerated below can be acquired.

(8) When the controller 50A determines that the workpiece Wα cannot be in a desired workpiece state based on the prediction of the shape transition of the workpiece Wα during polishing, the workpiece Wα during polishing is It was set as the structure which stops the grinding | polishing process of the workpiece W (alpha) during grinding | polishing in the secondary tolerance state, and notifies the determination of stopping of grinding | polishing process.

As a result, even when the final workpiece shape cannot be in a desired state, polishing can be stopped at an appropriate timing to prevent the occurrence of a stop delay of polishing. In addition, it is possible to prevent the timing of stopping the polishing process from being delayed more timely, and to automatically stop the polishing process at an appropriate timing.

(9) The controller 50A specifies a conditional attribute (responsibility parameter) having high correlation with the appearance of the secondary permissible state of the workpiece Wα during polishing, or the appearance of the secondary permissible state of the workpiece Wα during polishing. The conditional attributes are listed in the order of high correlation with respect to, and a specific or enumerated conditional attribute (responsibility parameter or candidate thereof) is notified.

As a result, the user can grasp the responsibility parameter or the candidate thereof, and can reasonably devise necessary measures for bringing the final workpiece shape into a desired state.

As mentioned above, although the grinding | polishing apparatus of this invention was demonstrated based on Example 1 and Example 2, the specific structure is not limited to these Examples, Comprising: It does not deviate from the summary of invention regarding each claim of a claim. Changes or additions to the design are permitted unless otherwise indicated.

In the polishing apparatus 1 of the first embodiment, an example in which the memory 30 associates the shape information of the workpiece W with the conditional attributes when the workpiece W is polished is stored. However, it is not limited to this. For example, when storing the shape information of the workpiece W in the memory 30, the conditional attribute generated in a learning manner with respect to the shape information of the workpiece W may be associated and stored. Here, the "conditionally generated attribute" is a conditional attribute obtained as a result of learning and calculating the relationship (trend) between the shape information acquired at the time of the polishing process performed in the past and the conditional attribute. This "conditionally generated attribute" is based on the conditional information related to the shape information of the workpiece | work W accumulated in the grinding | polishing process performed in the past, for example, according to the shape information of the workpiece | work W. Learning trends of conditional attributes, automatically calculating the magnitude of the influence in the polishing result of each parameter of the conditional attributes in a given complex condition system, and using the results to weight influence predictions Conditional attributes outputted by the system are considered.

When the conditional attribute of the workpiece Wα during polishing and the conditional attribute generated in a learning manner are matched to extract shape information of the selection master, and the shape transition of the workpiece Wα during polishing is predicted. It is possible to make the prediction more optimal than the prediction pattern or tendency that the user has easily taken.

In other words, by extracting the shape information of the selection master based on the shape information of the workpiece W related to the conditional attribute generated in a learning manner, it is possible to voluntarily discover and present the influence weight of a specific parameter under a certain condition. And a moderate degree of influence can be performed. In addition, depending on the weaving method of the learning algorithm designed to combine the degree of influence, it is possible to extend the prediction range of the shape trend of the workpiece Wα during polishing by outputting purely as a calculation result beyond the prediction range by the user. .

As a result, the accuracy of shape prediction of the workpiece Wα during polishing, which has been easily overlooked in the past, is significantly improved than the prediction accuracy by the user. In addition, it is possible to objectively and accurately predict the correlation between the conditional attribute and the workpiece shape precision under specific conditions, and the conditional attribute before the polishing of the workpiece Wα during polishing or at the initial stage of the polishing processing. It is possible to promptly change prior to the need to contribute to the improvement and stability of the yield.

In addition, in the polishing apparatus 1 of the first embodiment, the memory 30 stores the shape information of the work W in association with the conditional attribute when the work W is polished. The shape transition predicting unit 57 compares the time series change of the shape information of the selection master extracted based on the conditional property of the workpiece Wα during polishing with the time series change of shape information of the workpiece Wα during polishing. The example which computed and predicted the shape transition of the workpiece | work Wα during grinding | polishing was shown. That is, in Example 1, it produces | generates based on the shape information of the shape reference workpiece W (beta), or based on the learning result of the correlation between the conditional attribute at the time of grind | polishing the workpiece | work W and the shape information of the workpiece | work W. The shape transition of the workpiece Wα during polishing is estimated based on typical shape information which is a workpiece shape pattern. However, it is not limited to this.

As a workpiece shape pattern obtained by performing arithmetic processing on the shape information of the workpiece W, a desired workpiece obtained by receiving the support of the correlation data processing unit 60 as necessary and arithmetic processing information having a shape characteristic of the workpiece W You may use a shape pattern. In this case, in the memory 30, all the conditional attributes at the time of polishing the workpiece W are related to the workpiece-shaped pattern having the shape characteristic of the workpiece W, and the conditional attributes are as necessary. Group or remember as you progress. The shape transition predicting unit 57 may predict the shape transition of the workpiece Wα during polishing based on the workpiece shape pattern related to the conditional attribute that matches the conditional attribute of the workpiece Wα during polishing. .

That is, the information including at least one of the workpiece shape patterns obtained by performing arithmetic processing on the shape information of the workpiece W and the shape information of the workpiece W is referred to as "prediction information", and the memory 30 stores this prediction information. The conditional attribute at the time of polishing the workpiece W and the conditional attribute generated in a learning manner are stored in association with each other. The shape transition predicting unit 57 of the control unit 50 is associated with a time series change of the prediction information of the workpiece Wα during polishing and a conditional attribute that matches the conditional attribute of the workpiece Wα during polishing. Based on the result of the comparison operation of the time series change of the prediction information stored in the memory 30, the shape transition of the workpiece Wα during polishing is predicted.

Here, "arithmetic processing" means, for example, averaging the cross-sectional shape lines of the plurality of workpieces W selected for each conditional property, and calculating an average cross-sectional shape line for each conditional property, or in a predetermined cross-sectional shape line. In calculating the flatness from the difference between the minimum value of the maximum value of the thickness, obtaining the desired cross-sectional shape line using the mode or the median value of the plurality of cross-sectional shape lines, and the correlation between the conditional attribute and the workpiece shape, It calculates the shape of the workpiece | work which relates to the group of the shape characteristic of the workpiece | work W or the group newly generated statistically and computationally as a typical shape in the said group.

That is, the flatness of the center part of the workpiece | work W which is a workpiece | work shape pattern obtained, for example from the shape information of the workpiece | work W polished in the past, is computed for every workpiece | work polishing time. Subsequently, regression analysis or the like is performed to generate a relationship between the workpiece polishing time and the flatness of the workpiece center portion as the first flatness prediction line La, as shown in FIG. 14A. Then, the first flatness prediction line La and the change in the flatness of the central portion of the workpiece Wα during polishing may be compared to predict the shape of the workpiece Wα during polishing.

Moreover, the flatness of the outer periphery area | region of the workpiece | work W which is the workpiece | work shape pattern obtained from the shape information of the workpiece | work W which was polished in the past is calculated for every workpiece | work polishing time. Subsequently, regression analysis or the like is performed to generate a relationship between the workpiece polishing time and the flatness of the workpiece outer peripheral region as the second flatness prediction line Lb. Then, the second flatness prediction line Lb and the flatness of the outer circumferential region of the workpiece Wα during polishing may be compared to predict the shape of the workpiece Wα during polishing.

On the other hand, it can be seen from the first flatness predictive line La that the flatness of the workpiece center portion gradually decreases in accordance with the workpiece polishing time and deteriorates when the predetermined time Ta is exceeded. Therefore, it is thought that the workpiece | work with favorable flatness of a center part can be obtained by stopping the grinding | polishing process of the workpiece W (alpha) during grinding | polishing at the timing which the workpiece | work polishing time reached | attained predetermined time Ta. In addition, from the second flatness prediction line Lb, the flatness of the workpiece outer peripheral region maintains a substantially constant value on the negative side until the workpiece polishing time reaches a predetermined time Tb, and the workpiece polishing time is predetermined. It can be seen that when the time Tb is exceeded, the positive side is gradually increased. Therefore, by stopping the polishing of the workpiece Wα during polishing at the timing when the workpiece polishing time reaches the predetermined time Tb, it is considered that a workpiece having good flatness in the outer circumferential region can be obtained.

In addition, in Example 1, the 2nd drawing generation part 55 performs the 2nd drawing P2 based on the shape information of the selection master which concerns on the conditional attribute which matches the conditional attribute of the workpiece Wα during grinding | polishing. An example of generating is shown. However, the shape information of the workpiece W used when generating the second drawing P2 is not limited to this. For example, regardless of the conditional property of the workpiece Wα during polishing, based on the shape information of the workpiece W polished immediately before the workpiece Wα during polishing by a polishing machine for polishing the workpiece Wα during polishing. 2nd drawing P2 may be produced | generated. In addition, regardless of the conditional properties of the workpiece Wα during polishing, the shape information of the workpiece W polished before immediately before the workpiece Wα during polishing by a polishing machine that polishes the workpiece Wα during polishing You may generate 2nd drawing P2 based on.

In addition, in Example 1 and Example 2, the 2nd drawing production part 55 carries out 2nd drawing P2 based on the shape information of the selection master extracted based on the conditional property of the workpiece W (alpha) during grinding | polishing. Although the example to produce | generate was shown, it is not limited to this and based on the conditional attribute of the workpiece W (alpha) during grinding | polishing, such as 2nd 2nd drawing based on the shape information of a selection master, 3rd 2nd drawing, etc. Extract the selection master, generate a plurality of second drawing based on the shape information of the selection master, and display the plurality of second drawing on the screen 40a of the display 40 or refer to the plurality of second drawing In this way, the transition of the shape change in the future during the polishing of the workpiece Wα may be predicted.

Further, a plurality of shape information of the workpiece W stored in the memory 30 is extracted from a desired range, and the shape information of the extracted workpiece W is averaged, or specific data is acquired from the shape information of the extracted workpiece W. You may generate 2nd drawing P2 based on the workpiece shape pattern which has the shape characteristic obtained by performing calculation processing, such as generating desired shape information.

Even in this case, the accuracy of the transition of the workpiece shape represented by the second drawing P2 can be improved than when the second drawing P2 is generated using the shape information of the selection master. Therefore, it is possible to more accurately predict the shape transition of the workpiece Wα during polishing, and to stop the polishing at a more appropriate timing.

And the shape information of this workpiece | work W received the result which compared with the measured value data of the workpiece shape by the shape measurement dedicated machine (for example, separate flatness measurement dedicated machine etc.) provided separately from the grinder 10, The measured value obtained The data may be corrected as necessary and adjusted.

In addition, in the polishing apparatus 1 of Example 1, the 1st drawing P1 and the 2nd drawing P2 are produced | generated, and the 1st drawing P1 and the 2nd drawing P2 are made to the indicator 40, respectively. An example of displaying at the same time is shown. However, it is not limited to this. During the polishing, the display 40 may display only the first drawing P1 in which the shape drawing of the workpiece Wα is arranged in time series. Even in this case, the user can grasp the transition of the shape change of the workpiece Wα during polishing. And based on the change of the shape change of the workpiece | work Wα during grinding | polishing, the grinding | polishing process of the workpiece | work Wα of grinding | polishing can be stopped at the timing which became a desired workpiece shape.

In the polishing apparatus 1 of Example 1, when the polishing stop of the workpiece Wα is determined during polishing, the display 40 notifies the display 40 of the stop determination of the polishing process and stops the polishing machine 10. An example is shown. However, for example, it may be only notified that the stop determination of the polishing process has been performed, or the polishing machine 10 may be stopped and controlled without stopping the stop determination and the polishing process of the workpiece Wα may be stopped.

In Example 2, when the final workpiece shape cannot be in a desired state based on the prediction of the shape transition of the workpiece Wα during polishing, when the workpiece Wα during polishing is in the secondary acceptable state, The example in which the determination of the stop of polishing processing is displayed on the display 40 and notified, and the polishing machine 10 is stopped is shown. However, when the workpiece Wα during polishing is in the secondary permissible state, for example, it may be simply notified that the stop determination of the polishing process has been performed, and the polishing machine 10 is stopped and controlled without notifying the stop determination. It is only necessary to stop the polishing process of the sheet.

In addition, in Example 1, although the example in which the measuring unit 21 was attached to the upper surface plate 12 was shown, it is not limited to this. For example, you may irradiate the laser beam which is a measurement light from the optical head provided above the upper surface plate 12. In this case, a plurality of measuring holes are formed along the circumferential direction of the upper plate 12, and the laser beam is irradiated every time each measuring hole is directly under the optical head by the rotation of the upper plate 12, Measure the thickness of the workpiece. In addition, you may make a measurement hole in the lower platen 11, and irradiate a laser beam to the lower surface of the workpiece | work W from below the lower platen 11, and measure thickness.

In Example 1, when obtaining the cross-sectional shape of the workpiece W, the obtained data string is averaged by the moving average treatment, the polynomial approximation curve drawing treatment, etc., but not limited thereto. Any method may be used as long as the cross-sectional shape can be visualized.

In addition, in Example 1 and Example 2, a 2nd drawing production | generation process is performed in parallel with a grinding | polishing stop determination process, the change of the conditional attribute of the workpiece | work Wα during grinding | polishing is carried out, and 2nd drawing P2 is appropriately performed. An example of replacing is shown. However, the present invention is not limited to this, and for example, the second drawing P2 generated once based on the conditional attribute of the workpiece Wα obtained during determination after polishing is determined may be maintained until the end of polishing. In this case, the second drawing generation processing may not be executed in parallel with the polishing stop determination processing, and may be performed during the polishing stop determination processing (for example, between steps S1 and S2, between steps S3 and S4, and the like). You may perform each process of step S12, step S13, and step S14 in a 2nd drawing production process.

In addition, in Example 1 and Example 2, although the lower surface plate 11 and the upper surface plate 12 were shown and the double-side grinding apparatus which can grind | polish both surfaces of the workpiece | work W was shown, one side of the workpiece | work W is shown. Even if it is one side grinding | polishing apparatus which grinds only a surface, this invention is applicable.

1, 1A: Polishing apparatus 10: Polishing machine
11: lower level 12: upper level
20: shape measuring instrument 19: measuring hole
30: Memory 40: Indicator
40a: screen 50, 50A: control unit
51, 51A: control operation unit 54: first drawing generation unit
55: second drawing generator 56, 56A: display controller
57, 57A: shape trend prediction unit 58, 58A: state determination unit
59: parameter specifying unit 60: correlation data processing unit

Claims (12)

A polishing machine for polishing a work piece by a rotating platen,
A shape measuring device for measuring the shape of the workpiece through a measuring hole formed in the surface plate;
A memory for storing shape information of the workpiece measured by the shape measuring device;
An indicator for displaying shape information of the workpiece measured by the shape measuring instrument;
A control unit for controlling the display contents of the indicator;
The said control part produces | generates the 1st drawing which arranged the shape drawing of the workpiece | work of grinding | polishing which is the workpiece | work currently being polished measured by the said shape measuring device in time series, and displays the said 1st drawing on the said indicator, The grinding | polishing apparatus characterized by the above-mentioned. . The method of claim 1,
The memory may be generated by conditional attribute or learning in the prediction information including at least one of the shape information of the workpiece and the shape pattern of the workpiece obtained by arithmetic processing of the workpiece. Remember to associate conditional attributes,
The control unit is further configured to perform the processing of the workpiece under polishing based on a result of a comparison operation of the time series change of the prediction information of the workpiece under polishing and the time series change of the prediction information related to the conditional attribute of the workpiece during polishing. A polishing apparatus is predicted, and the state of the workpiece during polishing is determined based on the prediction of the shape change of the workpiece during polishing. The method of claim 2,
When the control unit determines that the polishing of the workpiece during polishing is stopped as a result of the state determination of the workpiece under polishing, notification of the determination of stopping of polishing of the workpiece during polishing and stopping of polishing of the workpiece during polishing. At least one of them is carried out. The method of claim 2,
When the control unit determines that the workpiece under polishing cannot be a desired workpiece state based on the prediction of the shape transition of the workpiece during polishing, the controller controls the polishing of the workpiece during polishing when the workpiece during polishing is in a secondary allowable state. At least one of the stop and notification of the determination of the stop of the polishing of the workpiece during polishing is performed. The method of claim 4, wherein
The control unit conditions conditional properties having a high correlation with respect to the appearance of the secondary permissible state of the workpiece during polishing, or conditions in a high correlation with the appearance of the secondary permissible state of the workpiece during polishing. Polishing apparatus, characterized in that it lists enumerated attributes and notifies specific or enumerated conditional attributes. A polishing machine for polishing the workpiece by a rotating surface plate,
A shape measuring device for measuring the shape of the workpiece through a measuring hole formed in the surface plate;
A memory for storing shape information of the workpiece measured by the shape measuring device;
An indicator for displaying shape information of the workpiece measured by the shape measuring instrument;
A control unit for controlling the display contents of the indicator;
The control unit includes a first drawing in which the shape drawing of the workpiece during polishing, which is the workpiece currently being polished measured by the shape measuring instrument, is arranged in time series, and the shape drawing of the workpiece polished before the polishing of the workpiece during polishing in time series. A polishing apparatus, characterized in that the second drawing arranged is generated and the first drawing and the second drawing are simultaneously displayed on the display. The method of claim 6,
The memory stores and associates the shape information of the workpiece with the conditional attribute when the workpiece is polished or the conditionally generated attribute learned.
And the control unit generates the second drawing based on the shape information of the workpiece related to the conditional attribute of the workpiece during polishing. The method according to claim 6 or 7,
The control unit is based on a workpiece shape pattern obtained by arithmetic processing of the shape information of the workpiece stored in the memory, or on a learning result of the correlation between the conditional attribute when the workpiece is polished and the shape information of the workpiece. The said 2nd drawing is produced | generated based on the workpiece | work shape pattern produced | generated and the grinding | polishing apparatus characterized by the above-mentioned. The method according to claim 6 or 7,
The memory may be generated by conditional attribute or learning in the prediction information including at least one of the shape information of the workpiece and the shape pattern of the workpiece obtained by arithmetic processing of the workpiece. Remember to associate conditional attributes,
The control unit is further configured to perform the processing of the workpiece under polishing based on a result of a comparison operation of the time series change of the prediction information of the workpiece under polishing and the time series change of the prediction information related to the conditional attribute of the workpiece during polishing. A polishing apparatus is predicted, and the state of the workpiece during polishing is determined based on the prediction of the shape transition. The method of claim 9,
When the control unit determines that the polishing of the workpiece during polishing is stopped as a result of the state determination of the workpiece under polishing, notification of the determination of stopping of polishing of the workpiece during polishing and stopping of polishing of the workpiece during polishing. At least one of them is carried out. The method of claim 9,
When the control unit determines that the workpiece under polishing cannot be a desired workpiece state based on the prediction of the shape transition of the workpiece during polishing, the controller controls the polishing of the workpiece during polishing when the workpiece during polishing is in a secondary allowable state. At least one of the stop and notification of the determination of the stop of the polishing of the workpiece during polishing is performed. The method of claim 11,
The control unit conditions conditional properties having a high correlation with respect to the appearance of the secondary permissible state of the workpiece during polishing, or conditions in a high correlation with the appearance of the secondary permissible state of the workpiece during polishing. Polishing apparatus, characterized in that it lists enumerated attributes and notifies specific or enumerated conditional attributes.

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