TW201943497A - Polishing apparatus - Google Patents

Abstract

The invention provides a polishing apparatus, which is based on the change of the shape of the workpiece being polished, and can stop the polishing of the workpiece at a timing that a desired shape of workpiece has obtained or the desired shape of the workpiece is going to be obtained. It has a polisher (10) for polishing a workpiece (w) by a rotating lower fixed disk (11) and a upper fixed disk (12); a shape measuring unit (20) for measuring the shape of the workpiece (W) by forming a measuring hole (19) on the upper fixed disk (12); a storage unit (30) for storing the shape information of the workpiece (W) measured by the shape measuring unit (20); a display unit (40) for displaying the shape information of the workpiece (W) measured by the shape measuring unit (20), and a control unit (50) for controlling the content displayed on the display unit (40), wherein the control unit (50) generates a 1st drawing (P1) from the shape drawing of the workpiece being polished (W[alpha]) measured by the shape measuring unit(20)in chronological order as the workpiece is being polished, and displays the 1st drawing (P1) on the display unit (40).

Description

Grinding device

The present invention relates to a polishing apparatus for polishing the surface of a workpiece such as a silicon wafer.

Conventionally, there is known a polishing apparatus including an upper platen, a lower platen, a sun gear, an internal gear, and a star wheel, etc., and polishing the surface of a workpiece such as a silicon wafer held on the star wheel (see Patent Document 1) ). The grinding device has a measuring device that measures the thickness of the workpiece being polished in real time through a through hole formed in the upper platen, and determines the timing of stopping the grinding process based on the measurement result of the workpiece thickness of the measuring device.
[Prior Art Literature]
[Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. 2015-47656

[Problems to be Solved by the Invention]

However, the conventional polishing apparatus determines the timing of stopping the polishing process based on the measurement result of the workpiece thickness. However, it is difficult to predict the evolution of the shape change of the workpiece in the future when the grinding process is continued from the measurement result of the workpiece thickness at one time. Therefore, it is impossible to grasp whether the shape of the workpiece is close to a desired shape when the grinding process is continued, and a problem arises in that it is difficult to stop the grinding of the workpiece at the time when it becomes the desired shape of the workpiece. In addition, differences in various conditions related to the grinding process affect not only the shape of the workpiece after the grinding is finished, but also the evolution of the shape of the workpiece during the grinding. However, so far, the evolution of the workpiece shape change in the time series of the grinding process is largely dependent on the skills of the user, and has become an obstacle to improving the efficiency of process improvement.

The present invention focuses on the above-mentioned problems, and provides a polishing apparatus capable of stopping the grinding process of a workpiece at a time point when it has become a desired workpiece shape or a time point when it has become a desired workpiece shape according to the evolution of the shape change of a workpiece during grinding. for purpose.
[Means for solving problems]

In order to achieve the above-mentioned object, the grinding apparatus of the present invention includes a grinding machine that grinds a workpiece with a rotating platen, a shape measuring device that measures the shape of the workpiece with a measurement hole formed in the platen, and a storage unit, It is used to store the shape information of the workpiece measured by the shape measuring device; the display is used to display the shape information of the workpiece measured by the shape measuring device; and the control unit is used to control the display content of the display.
In addition, the control unit generates a first drawing and displays the first drawing on the display, where the first drawing is a workpiece in grinding currently being measured by the shape measuring device. Shape plots are generated in a time series arrangement.
[Effect of the invention]

As a result, according to the evolution of the shape change of the workpiece during grinding, the grinding process of the workpiece can be stopped at the time when the workpiece shape has become the desired shape or the time when the workpiece shape has become the desired shape.

Hereinafter, embodiments of the polishing apparatus for implementing the present invention will be described based on the first embodiment and the second embodiment shown in the drawings.

(First Embodiment)
Hereinafter, the structure of the polishing apparatus 1 according to the first embodiment is divided into "overall structure", "detailed structure of a grinder", "detailed structure of a shape measuring device", "detailed structure of a storage unit", and "detailed structure of a display""","Detailed structure of control unit", "Polishing stop judgment processing structure", and "Second drawing generation processing structure" will be described.

[the whole frame]
The polishing apparatus 1 of the first embodiment is a double-sided polishing apparatus that polishes both the front and back surfaces of a thin plate-shaped workpiece W such as a semiconductor wafer, a quartz wafer, a sapphire wafer, a glass wafer, or a ceramic wafer. As shown in FIG. 1, the grinding apparatus 1 includes a grinding machine 10, a shape measuring device 20, a storage unit 30, a display 40, and a control unit 50.

[Detailed structure of the grinder]
The grinder 10 grinds the workpiece W by rotating the lower platen 11 and the upper platen 12. The grinder 10 has a disc-shaped lower platen 11 and an upper platen 12 arranged concentrically about the axis L1, a sun gear 13 provided on the central portion of the lower platen 11 in a rotatable manner, and an internal gear 14 provided. On the peripheral side of the lower platen 11; a planetary wheel 15 is provided between the lower platen 11 and the upper platen 12 and is provided with a work fixing hole 15 a (see FIG. 2). A polishing pad 11 a is adhered to the upper surface of the lower platen 11, and a polishing pad 12 a is adhered to the lower surface of the upper plate 12. Furthermore, a supply hole (not shown) for supplying a polishing slurry is provided in the upper platen 12.

Here, as shown in FIG. 2, the planetary gear 15 meshes with the sun gear 13 and the internal gear 14. The planetary gear 15 rotates around the axis L1 by rotation of the sun gear 13 and the internal gear 14 (revolution).

The work W is provided in the work fixing hole 15 a of the planetary gear 15. In addition, the polishing pad 11a adhered to the rotating lower platen 11 and the polishing pad 12a adhered to the rotating upper platen 12 sandwich the workpiece W, and through the rotation and revolution of the star wheel 15, the polishing pad 11a and polishing The pad 12a grinds the workpiece W. That is, the surfaces of the polishing pad 11 a and the polishing pad 12 a are polishing surfaces of the workpiece W to be polished.

The upper platen 12 is fixed to the rod 16 by a support post 16a and a mounting member 16b mounted on the upper surface thereof. The lever 16 is extended and contracted in the vertical direction by the fifth driving device M5. That is, the upper platen 12 moves up and down by the expansion and contraction of the lever 16.

A first drive shaft 17 a standing up along the axis L1 is provided at the center of the grinder 10. The first drive shaft 17a is a shaft rotated by the first drive device M1. A driver 18 is fixed to an upper end portion of the first drive shaft 17a. Thereby, the driver 18 is rotated integrally with the first driving shaft 17a by the first driving device M1.

A groove (not shown) is formed on the outside of the driver 18 to be fitted into a hook 12 b provided on the upper platen 12. Then, the lever 16 is extended and the upper platen 12 is moved downward, and the hook portion 12b is fitted into the groove portion of the driver 18, so that the drive shaft 18 and the upper platen 12 are integrally rotated. That is, the upper platen 12 is rotated together with the first drive shaft 17a by the first drive device M1.

The second drive shaft 17b is fixed to a hole 13a in a central portion of the sun gear 13 in a penetrating state. The second drive shaft 17b is a hollow tube with both ends open, and the first drive shaft 17a penetrates through it freely. The second drive shaft 17b is rotated by the second drive device M2. Therefore, the sun gear 13 is rotated together by the second drive device M2 and the second drive shaft 17b.

The third drive shaft 17 c is formed in a lower portion of a center portion of the lower platen 11. The third drive shaft 17c is a hollow tube having both ends open, and the second drive shaft 17b is rotatably penetrated therethrough. The third drive shaft 17c is rotated by the third drive device M3. Therefore, the lower platen 11 is rotated together by the third driving device M3 and the third driving shaft 17c.

The fourth drive shaft 17 d is formed in the internal gear 14. The fourth drive shaft 17d is a hollow tube with both ends open, and the third drive shaft 17c is rotatably penetrated therethrough. The fourth drive shaft 17d is rotated by the fourth drive device M4. Therefore, the internal gear 14 rotates together with the fourth drive device M4 and the fourth drive shaft 17d.

A measurement hole 19 is formed in the upper plate 12 at a position along the radial direction from the center. The measurement hole 19 penetrates the upper platen 12 and the polishing pad 12a, and a window member 19a through which laser light as measurement light passes is attached.

[Detailed structure of shape measuring device]
The shape measuring device 20 irradiates the workpiece W with measurement light, and receives the measurement light reflected by the workpiece W to measure the thickness of the workpiece W during grinding. The shape measuring device 20 determines the shape of the cut surface of the work W from the thickness of the work W measured. The shape measuring device 20 includes a measuring unit 21, a thickness measuring unit 22, and a shape computing unit 23.

The measurement unit 21 is attached to the upper platen 12 and rotates integrally with the upper platen 12. In addition, the measurement unit 21 includes a laser light source that irradiates laser light (not shown) as measurement light to the workpiece W through the window member 19 a of the measurement hole 19 of the upper plate 12; and a light receiving unit that receives the reflection of the workpiece W Reflected light (not shown). The received light signal received by the light receiving unit is transmitted to the thickness measuring unit 22 through the transmitting unit 21a.

For example, the thickness measurement unit 22 measures the thickness of the workpiece W by a light reflection interference method. The thickness measuring unit 22 includes a receiving unit 22 a that receives a received light signal transmitted from the measuring unit 21. The receiving unit 22 a determines the thickness of the workpiece W based on the received received light signal.

Here, as shown in FIG. 3A, the laser light from the measurement unit 21 is continuously irradiated on the surface of the workpiece W while the measurement hole 19 passes through the surface of the workpiece W by the rotation of the upper platen 12. Therefore, the thickness measurement unit 22 continuously measures the thickness of the position in each surface of the workpiece W on the trajectory Na ~ Nc through which the measurement hole 19 passes. In addition, the thickness measurement unit 22 outputs a continuous period of time from the time when the measurement hole 19 passes the trajectory Na to Nc (the time period from the one end W1a to W3a of the workpiece W to the other end W1b to W3b to the measurement hole 19). A data stream formed by most thickness data. According to this, the thickness measurement unit 22 outputs a data stream formed by a plurality of continuous data whenever the measurement hole 19 passes through the surface of the workpiece W, and the plurality of continuous data is a thickness measurement of the position within each surface of the workpiece W Coming out of plural continuous data. In addition, the data stream output from the thickness measurement unit 22 is stored in the storage unit 30.

The shape calculation unit 23 determines the shape of the cut surface of the workpiece W. The interval which determines the shape of the cut surface of the workpiece W can be arbitrarily set. For example, in the first embodiment, the cut shape of the workpiece W is determined based on the data stream acquired within 15 seconds, and the cut shape of the new workpiece W is determined at 15 second intervals. In addition, the shape information such as the shape of the cut surface of the workpiece produced by the shape computing unit 23, and the shape pattern of the workpiece obtained by arithmetically processing the shape information, according to the condition attributes when the workpiece W is ground, and the shape information of the workpiece W The workpiece shape patterns and the like generated from the learning results of the correlations are stored in the storage unit 30.

Then, the shape calculation unit 23 determines a cut plane shape line T1 as shown in FIG. 3B. This cutting plane shape line T1 is a shape drawing showing the cutting plane shape of the workpiece W. The tangent plane line T1 is determined whenever the thickness of the workpiece W is measured by the thickness measuring unit 22. Accordingly, by arranging the tangent shape lines T1 obtained for the same workpiece W in time series, the evolution of the shape change of the workpiece W is shown. In addition, the processing result information of the final workpiece shape of the workpiece W is displayed based on the cutting plane shape line T1 at the end of grinding of the workpiece W. In addition, information of the tangent plane shape line T1 determined by the shape computing unit 23 (information of the tangent plane shape of the workpiece W) is stored in the storage unit 30.

[Detailed structure of storage unit]
The storage unit 30 is a storage device capable of reading and writing data from the shape measuring device 20 and the control unit 50. The storage unit 30 stores information on the thickness of the workpiece W determined by the thickness measurement unit 22 and information on the shape of the cut surface of the workpiece W determined by the shape calculation unit 23 (hereinafter referred to as "shape information of the workpiece W").

In addition, the storage unit 30 associates and stores condition attributes when grinding and processing the workpiece W with the shape information of the workpiece W. Here, the “condition attribute” refers to various parameters that affect the polishing process of the workpiece W, such as the polishing conditions, the polishing environment, and the device characteristics, and are related to the polishing state of the workpiece W. Examples of the “condition attribute” include operating conditions of the grinder 10, polishing slurry conditions, polishing pad conditions, star wheel conditions, workpiece conditions, and polishing program conditions.

In addition, the operating conditions of the grinder 10 are, for example, the rotation speed of the lower platen 11 and the upper platen 12, the rotation speed of the sun gear 13 and the internal gear 14, the processing load setting value, the unit pressure, and the load slope of the upper platen 12 , The cooling water temperature of the lower platen 11 and the upper platen 12, the rotation speed of the planetary wheel 15 and the revolution speed, the vibration state and tilt characteristics of the grinder 10, and the like. The polishing slurry conditions include, for example, the type, temperature, flow rate, slurry life, and slurry pH of the polishing slurry. The polishing pad conditions refer to, for example, the type, thickness, groove shape, surface roughness, polishing pad life, degree of denatured material deposition, and seasoning conditions of the polishing pad 11a or the polishing pad 12a. The condition of the star wheel refers to the material and thickness of the star wheel 15, the shape of the workpiece fixing hole 15a or the dummy hole, the deflection characteristics, the life of the star wheel, and the location of wear and the like. The workpiece conditions refer to the type of the workpiece W, the thickness at the start of grinding, the shape at the start of grinding, and the difference in workpiece thickness between batches (mass production). The polishing program conditions refer to the evolution information of the shape change in the batch, the number of continuous polishing, the amount of grinding of the workpiece, the grinding time, the thickness difference between the star wheel 15 and the workpiece W, and the like.

[Detailed structure of display]
According to the display instruction from the control unit 50, the display 40 displays the shape information of the workpiece W currently being ground, the shape information of the workpiece W that has been ground in the past, the shape pattern of the workpiece obtained by arithmetic processing the shape information of the workpiece W, Arbitrary information such as the workpiece shape pattern and the grinding stop determination of the workpiece W, which are generated based on the learning result of the degree of correlation between the condition attribute when grinding the workpiece W and the shape information of the workpiece W. For example, the display 40 is mounted on the grinder 10. The display 40 includes a screen 40 a (see FIG. 8) that can be viewed by a user of the grinder 10.

[Detailed structure of control unit]
The control unit 50 includes a control arithmetic unit 51, a sub storage unit 52, an input device 53, and the like formed of a CPU (Central Processing Unit). The control unit 50 moves from the control operation unit 51 to the first drive device M1 to the first drive unit according to the program stored in the sub-storage unit 52 and the processing target and condition attributes of the workpiece W input by the user of the grinder 10 through the input device 53. The 5 driving device M5 outputs a control command to control the operation of the grinder 10.

In addition, the control arithmetic unit 51 causes the display 40 to display the first drawing P1 of the shape drawing of the workpiece W during grinding in time series, predicts the evolution of the shape of the workpiece based on the shape information, and implements a determination as to whether or not to stop the workpiece W based on the prediction result. The polishing stop judgment processing of the polishing process is performed. That is, the control calculation unit 51 includes a first drawing generation unit 54, a second drawing generation unit 55, a display control unit 56, a shape evolution prediction unit 57, and a state determination unit 58.

The first drawing generation unit 54 reads the shape information of the workpiece currently being ground (hereinafter, referred to as “work under grinding Wα”) measured by the shape measuring device 20 from the storage unit 30. Here, the shape information read from the storage unit 30 is shape information obtained during the period from the grinding of the workpiece Wα during grinding to the measurement performed before the shape information is read. The first drawing generation unit 54 generates a first drawing P1 (see FIG. 4) in which the shape drawing of the workpiece Wα during grinding is arranged in time series based on the read shape information of the workpiece Wα during grinding. In addition, the shape information of the workpiece Wα during polishing is increased as the number of measurements is increased each time the polishing process of the workpiece Wα during polishing is performed. Therefore, according to the number of measurements, the first graph P1 gradually changes from the graph shown on the left side of FIG. 4 to the graph shown on the right side of FIG. 4.

The second drawing generating unit 55 reads the shape information from the storage unit 30. The shape information is based on the condition attributes of the workpiece Wα during grinding, and has been obtained in the past, that is, before the grinding of the workpiece Wα during grinding. The condition attributes of the workpiece W that match the condition attributes of the workpiece Wα during grinding have shape information of the associated workpiece (hereinafter, referred to as “shape reference workpiece Wβ”); or the condition attributes of the workpiece Wα during grinding match Conditional properties have typical shape information associated with them. Here, the shape information read from the storage unit 30 is read from a desired range among the shape information stored in the storage unit 30.

In addition, "typical shape information" is a typical shape evolution when the workpiece W is subjected to grinding and processing, and abstract and representative shape information is obtained by calculation. It is based on the condition attributes when the workpiece W is subjected to grinding and processing. A workpiece shape pattern generated as a result of learning the correlation with the shape information of the workpiece W. In addition, the following includes shape information or typical shape information of the shape reference workpiece Wβ and is referred to as "shape information of the selected master".

In addition, "matching the condition attributes of the workpiece Wα during polishing" means that at least a part of the condition attributes during polishing is the same as the condition attributes of the workpiece Wα during polishing, or at least a part of the condition attributes of the workpiece Wα during polishing A similar situation. For example, as the condition attribute of the workpiece Wα during grinding, “rotation speed of the lower platen 11 = A”, “rotation speed of the upper platen 12 = B”, “type of slurry = C”, “material of the star wheel” In the case of "D", "the rotation speed of the lower platen 11 = A ± x", "the rotation speed of the upper platen 12 = B ± y", "type of slurry = C or C '", "material of star wheel" = D or D '"and other condition attributes are determined to" match the condition attributes of the workpiece Wα during grinding ", and the shape information of the selected master associated with these condition attributes is selected from the storage unit 30. In addition, it is possible to arbitrarily set a criterion for determining whether the condition attributes match.

Then, in the second drawing generation unit 55, the shape information of the selected main control (section shape line T1) is generated from the shape information of the selected main control, which is read out based on the condition attributes of the workpiece Wα during grinding. A second plot P2 (see FIG. 5) arranged in time series from the start of grinding to the end of grinding. In addition, the second drawing generating unit 55 constantly monitors the condition attributes of the workpiece Wα during the grinding of the workpiece W. Furthermore, for example, due to abnormalities in slurry flow, when the condition attributes of the workpiece Wα during grinding deviate from the initial setting or expected state during the progress of a certain batch, the deviation pattern of the condition attributes of the workpiece Wα during grinding is Edit a combination of new condition attributes. Further, the shape information of the selected master associated with the newly edited combination of condition attributes is read from the storage unit 30. Then, the second drawing P2 is generated again from the newly read shape information of the selected master. In addition, when the second drawing generating unit 55 generates the second drawing P2 again, the second drawing generating unit 55 may generate the virtual drawing based on the shape drawing derived from the learning function.

The display control unit 56 outputs a control instruction to the display 40. The control instruction causes the screen 40a of the display 40 to display the first drawing P1 generated by the first drawing generation unit 54 and the second drawing generated by the second drawing generation unit 55. P2. In addition, when the state determination unit 58 determines that the grinding process of the grinder 10 is to be stopped, the display control unit 56 outputs a control instruction to the display 40 to display the content of the grinding stop determination on the screen 40a of the display 40.

In the shape evolution prediction unit 57, the time series change of the shape information of the workpiece Wα during grinding read by the first drawing generation unit 54 and the selected master control read by the second drawing generation unit 55 are performed. Comparison operation of time series changes of shape information. Then, the shape evolution prediction unit 57 predicts the subsequent shape evolution of the workpiece Wα during polishing based on the result of the comparison operation. In addition, the shape evolution of the workpiece Wα during polishing predicted by the shape evolution prediction unit 57 refers to the evolution of the shape of the workpiece obtained by each measurement including the final polished shape.

The comparison operation of the time series change of the shape information of the shape evolution prediction unit 57 is performed, for example, by the following steps. That is, the tangent shape line T1 of the selected master is arranged in time series for each condition attribute. Moreover, a shape evolution pattern of the selected master of each condition attribute is generated, and a database related to the shape evolution pattern is formed. Here, the condition attributes of the selected master during grinding match the condition attributes of the workpiece Wα during grinding. Therefore, the shape evolution of the workpiece Wα during grinding is considered to be the same as the shape evolution of the selected master.

Therefore, the shape evolution prediction unit 57 compares the shape evolution pattern T1 of the cutting surface of the workpiece Wα and the database-developed shape evolution pattern by performing pattern recognition. Moreover, referring to the evolution of the shape of the selected master, it is determined which stage of the current grinding process of the workpiece Wα is from the grinding start to the grinding stop. Furthermore, the shape evolution prediction unit 57 predicts the subsequent shape evolution of the workpiece Wα during grinding based on the current grinding stage of the workpiece Wα during grinding and the shape evolution of the selected master. In addition, the shape evolution prediction unit 57 has a machine learning function, and updates a shape evolution pattern and a pattern that changes with time at any time in a machine learning manner. In addition, with the progress of the grinding process, when the condition attribute monitored during the grinding process of the workpiece Wα has changed beyond a negligible range, the shape evolution prediction unit 57 immediately performs the subsequent grinding based on the new condition attribute. The shape of the intermediate workpiece Wα is predicted, calculated, and output.

In the state determination unit 58, the current grinding state of the workpiece Wα during grinding is determined based on the subsequent shape evolution of the workpiece Wα during grinding, which is predicted by the shape evolution prediction unit 57. Here, the "grinding state" includes a grinding stop state, which refers to a state in which the workpiece shape of the workpiece Wα during grinding has reached a shape of the workpiece that can be stopped by the grinding process, and a grinding continued state, etc. The continued state refers to a state in which the grinding machine 10 is required to continue the grinding process.

[Polishing stop judgment processing structure]
FIG. 6 is a flowchart showing a flow of a grinding stop determination process performed by the control arithmetic unit 51 of the control unit 50 of the first embodiment. Hereinafter, each step of the polishing stop determination process according to the first embodiment will be described with reference to FIG. 6.

In step S1, it is determined whether the grinding machine 10 is performing the grinding process of the workpiece W. If yes (during workpiece grinding), the process proceeds to step S2. If not (no workpiece grinding), the process returns to step S1.
Here, the determination of the grinding of the workpiece by the grinder 10 is made based on whether or not there is a grinding processing command accompanying the control command from the control arithmetic unit 51 to the first drive device M1 to the fifth drive device M5.

In step S2, the determination of the workpiece grinding in step S1 is continued, and the shape information of the workpiece Wα during grinding measured by the shape measuring device 20 is read from the storage unit 30, and the process proceeds to step S3.

In step S3, the reading of the shape information of the workpiece Wα during the grinding in step S2 is continued. Based on the shape information of the workpiece Wα during the grinding read in step S2, the information from the grinding machine 10 to the start of the grinding is generated. The first drawing P1 (see FIG. 4) of the shape drawing of the workpiece Wα during grinding, which is sequentially arranged in time series until the measurement performed before, is read, and the process proceeds to step S4.

In step S4, the generation of the first drawing P1 in step S3 is continued, and the first drawing P1 generated in this step S3 and the second drawing P2 generated by the second drawing generation process described later (see FIG. 5), and proceed to step S5. Here, the process of generating the second drawing P2 (the second drawing generation processing) is performed in parallel with each step of the grinding stop determination processing shown in FIG. 6, and the condition attributes have been changed during the grinding of the workpiece Wα during grinding. In this case, the second drawing P2 may be appropriately replaced.

In step S5, the reading of the first drawing P1 and the second drawing P2 in step S4 is continued, and a control instruction is output to the display 40. The control instruction is generated in step S3 and read in step S4. The first drawing P1 and the second drawing P2 read in step S4 are displayed on the screen 40a of the display 40 at the same time, and the process proceeds to step S6.
In addition, in the first embodiment, as shown in FIG. 8, the display 40 adjusts the ratios of the X-axis and Z-axis of the first drawing P1 and the second drawing P2 to be the same, and simultaneously sets the first drawing P1 and the first drawing P1 and the second drawing P2. The 2 drawing P2 is arranged in a horizontal direction and displayed on the screen 40a. In addition, the display 40 simultaneously displays condition attributes (partially or fully) of the workpiece Wα during grinding on the screen 40a. In addition, it is possible to set whether or not to display all the condition attributes in consideration of the convenience of the display space of the screen 40a and the condition attributes of monitoring. In addition, the condition attributes of the workpiece Wα during grinding may not be displayed on the screen 40a.

In step S6, the control instruction output to the display 40 in step S5 is continued, the time series change of the shape information of the selected master selected when the second drawing P2 is generated, and the grinding read out in step S2 The shape information of the workpiece Wα is changed in time series to perform a comparison operation, and the subsequent shape evolution of the workpiece Wα during polishing is predicted from the result of the comparison operation, and the process proceeds to step S7.
In addition, the shape information of the selected master, which is read when the second drawing P2 is generated, is changed according to the replaced second drawing P2 when the second drawing P2 is replaced.

In step S7, the prediction of the shape evolution of the workpiece Wα during polishing in step S6 is continued, and the polishing state of the workpiece Wα during polishing is determined based on the predicted shape evolution, and the process proceeds to step S8.
Here, the grinding state of the workpiece Wα during grinding is determined to be any of the following states, that is, the "grinding stop state" in which the grinding process has reached a stopable workpiece shape, or the "grinding continuation state" in which the grinding process needs to be continued.

In step S8, the determination of the grinding state of the workpiece Wα during grinding is continued, and based on the determination of the grinding state performed in step S7, it is determined whether to stop the grinding process of the workpiece Wα by the grinding machine 10. If yes (grinding is stopped), the process proceeds to step S9. If it is not (grinding continues), the process proceeds to step S2.
Here, when it is determined in step S7 that it is a "polishing stop state", it is determined whether the polishing of the workpiece Wα is being stopped during polishing.

In step S9, the determination of the grinding stop in step S8 is continued, and a control instruction is output to the display 40. The control instruction is a control for displaying on the screen 40a of the display 40 the content of the grinding stop of the workpiece Wα determined during grinding. A command is issued, and the polishing stop determination is notified, and the process proceeds to step S10.

In step S10, the notification of the grinding stop determination in step S9 is continued, and the grinding process of the workpiece Wα by the grinding machine 10 is stopped, and the process proceeds to END.
Here, the stop of the grinding process of the grinder 10 is performed by the control arithmetic unit 51 outputting a stop control command to the first drive device M1 to the fifth drive device M5.

[Second drawing generation processing structure]
FIG. 7 is a flowchart showing a flow of a second drawing generation process performed by the second drawing generation unit 55 of the control unit 50 of the first embodiment. Hereinafter, each step of the second drawing generation process according to the first embodiment will be described with reference to FIG. 7.

Step S11 determines whether the grinding machine 10 is performing the grinding process of the workpiece W. If yes (during workpiece grinding), the process proceeds to step S12. If it is not (no workpiece grinding), step S11 is repeated.
Here, it is determined that the grinding of the workpiece of the grinding machine 10 is the same as that of the grinding stop determination process of step S1.

In step S12, the judgment in the workpiece grinding in step S11 is continued, the condition attributes of the workpiece Wα in the grinding currently being processed are obtained, and the process proceeds to step S13.
Here, the condition attribute of the workpiece Wα during grinding means that the user of the grinding machine 10 inputs the input of the workpiece 53 during the grinding of the grinding workpiece Wα through the input device 53 and stores it in the sub-storage unit 52 in advance, or the CPU Use sensors, etc. to monitor changing conditions.

In step S13, the acquisition of condition attributes of the workpiece Wα during grinding in step S12 is continued, and the shape information is read from the storage unit 30. The shape information is obtained from the workpiece W completed in the previous grinding process and in step 12 The obtained condition information matching the condition attribute of the selected master is associated with the shape information (the shape refers to the shape information of the workpiece Wβ, or the typical shape information), and the process proceeds to step S14.

In step S14, the reading of the shape information of the selected master in step S13 is continued. Based on the shape information of the selected master read in step S13, a second drawing P2 is generated. The second drawing P2 is a drawing (see FIG. 5) in which the shape information of the selected master is arranged in a sequence in the time series of the grinder 10 from the grinding start to the grinding stop, and proceeds to step S15.

In step S15, the generation of the second drawing P2 in step S14 is continued, and it is determined whether or not the grinding of the workpiece Wα is continuing during the grinding. In the case of YES (polishing continues), the process proceeds to step S16. If it is not (grinding stop), it is not necessary to generate the second drawing P2, and it is not necessary to replace and enter END, and the second drawing generation processing is ended.
Here, when the grinding state of the workpiece Wα during grinding is determined to be a “grinding continuation state” in which the grinding process needs to be continued, the grinding of the workpiece Wα during grinding is judged to be continued.

In step S16, the determination of the grinding continuation in step S15 is continued, the condition attributes of the workpiece Wα during grinding are acquired again, and the process proceeds to step S17.

In step S17, the reacquisition of the condition attributes of the workpiece Wα during polishing in step S16 is continued, and it is determined whether the state of the condition attributes of the workpiece Wα during polishing has changed. In the case of YES (change occurs), the process proceeds to step S18. If not (no change has occurred), the process returns to step S15.
Here, the condition attribute of the workpiece Wα during grinding obtained in step S16 is compared with the condition attribute of the workpiece Wα during grinding obtained before, and the condition attribute of the workpiece Wα during grinding is judged based on the deviation. . In addition, the case where the condition attribute of the workpiece Wα changes state during polishing refers to a case where the condition attribute greatly deviates from a state originally set with the progress of the grinding process, or a condition attribute is greatly changed from an assumption.

In step S18, after judging that the state of the condition attribute has changed in step S17, according to the condition attribute of the changed workpiece Wα obtained in step S16, edit the condition attribute of the selected master and proceed to step S19.
Here, the editing of the condition attribute means that according to the condition attribute of the workpiece Wα during grinding as the condition attribute of the selected master, selecting or replacing the condition attribute that has a large impact on the grinding process of the workpiece W or corresponding to a specific condition Condition attributes.

In step S19, the editing of the condition attributes in step S18 is continued, and in this step S19, the condition attributes that most closely match the edited condition attributes are read from the storage unit 30 with the shape information (shape of the selected master) associated with Referring to the shape information of the workpiece Wβ or the typical shape information), the process proceeds to step S20.

In step S20, the reading of the shape information of the selected master in step S19 is continued, and a second drawing P2 is generated again based on the shape information of the selected master read in step S19. Then, the second drawing P2 generated up to the time when the shape information of the selected master is read again is replaced with the newly generated second drawing P2, and the process returns to step S15.

The operation will be described below.
First, the "problem at the time when workpiece grinding is stopped" will be described. Next, the functions of the polishing device 1 according to the first embodiment will be divided into "a grinding stopping operation" and "prediction accuracy improvement effect of shape evolution".

[Problems when workpiece grinding stops]
When both surfaces of the workpiece W are polished by the grinder 10 of the polishing apparatus 1, the thickness and cut shape of the workpiece W gradually change as the polishing process proceeds. In particular, when the shape of the cut surface of the workpiece W is maintained in a desired state that meets other conditional attributes, it is generally determined by the thickness difference between the star wheel 15 and the workpiece W, but with the progress of the grinding process, for example, It looks like an evolution from a "convex center with a drooping periphery" to a "concave center with a peripheral drooping shape" via a "flat shape". The “convex shape” refers to a shape in which the thickness of the central portion of the workpiece W is larger than the thickness of the peripheral region. The “peripheral drooping shape” means a shape in which the thickness of the peripheral edge toward the workpiece W gradually decreases. The “flat shape” refers to a shape in which the entire surface of the workpiece W is almost flat. The “concave shape” means a shape in which the thickness of the central portion of the workpiece W is smaller than the thickness of the peripheral region. In addition, the "peripheral bulge shape" refers to a shape in which the thickness of the peripheral edge toward the workpiece W gradually increases.

Furthermore, since the grinding process is stopped when the thickness of the workpiece W is within the target thickness range (T1 ≦ thickness ≦ T2), the workpiece W has a desired thickness. On the other hand, although the shape of the cut surface of the workpiece W can be set by the processing flow of the subsequent process, in general, the entire surface of the workpiece W prefers an almost flat “flat shape”. Therefore, when the thickness falls within the target thickness range and the cut surface shape becomes a "flat shape", it is desirable to stop the grinding process of the workpiece W.

On the other hand, the thickness of the workpiece W is measured in real time, and a shape drawing of the workpiece W during grinding is generated according to the measurement result of each measurement. The user of the grinder 10 monitors the shape drawing of the work W, and stops the grinder 10 at a point in time when the thickness of the work W falls within the target thickness range and when the cut shape is considered to have reached the “flat shape”.

However, the process of changing the shape of the cut surface of the workpiece W (shape evolution) will be different due to the influence of the different condition attributes when the workpiece W is ground. In addition, when the shape of the cut surface of the workpiece W cannot be a desired shape of a “flat shape” related to the conditional attributes of the workpiece W during grinding, a situation in which the shape of the cut surface can be allowed to stop for a second time is generated. Necessary for grinding.

On the other hand, it is difficult to temporarily monitor the shape drawing of the workpiece W to predict which shape the workpiece shape will change in the future. In other words, for example, in the case of the workpiece W having a “weakly convex shape” at present, by continuing the grinding process, there may be a case of a “flat shape” and a case of a “peripheral bulge”. It is only temporarily monitored that the current workpiece shape is a "weakly convex shape", neither the subsequent workpiece shape nor the grinding process can be stopped at an appropriate point in time. As a result, the workpiece W becomes a "peripheral bulge". And there is a risk that the SFQR (Site front least squares range) in the peripheral area of the workpiece will deteriorate. In addition, although the workpiece W has become a "flat shape", the grinding stop time may be slower than an appropriate time.

That is, the shape drawing of the workpiece W is only temporarily monitored, and the evolution of the shape change of the workpiece W during grinding cannot be grasped. Therefore, in accordance with the evolution of the shape change of the workpiece W, a problem arises in that the grinding processing of the workpiece W cannot be stopped at a point in time when the shape of the workpiece has become the desired shape of the workpiece or a point in time when the shape of the workpiece becomes the desired shape.

[Effect of grinding stop]
In the polishing apparatus 1 according to the first embodiment, while the workpiece W is being polished by the grinder 10, the thickness of the workpiece W and the shape of the cut surface are measured by the shape measuring device 20. The polishing device 1 stores information on the thickness of the workpiece W and the shape of the cut surface measured by the shape measuring device 20 in the storage unit 30.

On the other hand, when the grinding process is performed on the workpiece W by the grinding machine 10, the control arithmetic unit 51 of the control unit 50 determines that the workpiece W is being polished, and follows steps S1 to S2 according to the flowchart shown in FIG. S3 and S4 are performed in order. That is, the first drawing generating unit 54 reads the shape information of the workpiece Wα during grinding from the storage unit 30, and generates the first drawing P1 based on the read shape information of the workpiece Wα during grinding. In addition, the display control unit 56 reads the first drawing P1 generated by the first drawing generating unit 54 and the second drawing P2 generated by the second drawing generating unit 55, and outputs and displays the first drawing P1 and the screen 40a on the display 40. Control command for the second drawing P2.

Accordingly, the first drawing P1 and the second drawing P2 are simultaneously displayed on the screen 40a of the display 40. In this way, in the polishing apparatus 1 of the first embodiment, when the shape measuring device 20 measures the shape of the workpiece Wα during polishing, the first drawing P1 is displayed on the display 40.

Here, the first drawing P1 is a shape drawing (cutting plane shape line T1) of the workpiece Wα during grinding, which are sequentially arranged in time series. Therefore, the user of the grinder 10 can recognize the shape drawing of the workpiece Wα during grinding, which is continuously drawn, in a list form. According to this, the user can grasp the evolution of the change in the shape of the workpiece Wα during polishing during the period from the start of polishing to the present (first drawing generation point). As a result, the user can predict the future shape evolution of the workpiece Wα during polishing based on the evolution of the shape change of the workpiece Wα during polishing. Therefore, even when the user controls the grinder 10 by manual operation to stop the grinding process, it is easy to stop the grinding process at the time when the desired workpiece shape has been reached or at the time when the desired workpiece shape has been reached.

Also, since the user can identify the shape drawing of the workpiece Wα during grinding in a state associated with the condition attribute, the user can easily implement an improvement plan, which refers to the device of the grinder 10 Design and design of auxiliary materials such as slurry, selection of auxiliary materials, and selection of processing conditions Furthermore, since the user can execute the program improvement plan more efficiently, it is possible to improve the production efficiency of the wafer in which the final workpiece shape becomes a desired shape.

Further, in the first embodiment, the first drawing P1 and the second drawing P2 are displayed on the screen 40 a of the display 40 at the same time. Therefore, the user of the grinder 10 can monitor the first drawing P1 and the second drawing P2 simultaneously by viewing the screen 40a.

Here, the second drawing P2 is a drawing arranged in time series according to the shape drawing (cutting shape line T1) of the selected master, and the shape drawing of the selected master is read according to the condition attribute of the workpiece Wα during grinding. The shape information of the selected master is retrieved. Therefore, the user of the grinding machine 10 can more accurately predict the workpiece Wα during grinding by identifying the second drawing P2 while monitoring the first drawing P1 and referring to the shape evolution of the selected master displayed on the second drawing P2. The evolution of future shape changes. As a result, when the user manually controls the polishing machine 10 to stop the polishing process, the polishing process can be stopped at a more appropriate time. Furthermore, in some cases, it is also possible to intentionally change condition attributes to adjust the final workpiece shape and the time at which grinding is finished.

On the other hand, in the polishing apparatus 1 of the first embodiment, after the first drawing P1 and the second drawing P2 are displayed on the screen 40a of the display 40, the steps from step S6 to step S6 shown in the flowchart of FIG. 6 are performed. Steps S7 and S8 are performed in order. That is, the shape evolution prediction unit 57 performs a comparison operation between the time series change of the shape information of the workpiece Wα during grinding and the time series change of the selected master, and predicts the future shape evolution of the workpiece Wα during grinding based on the result. In addition, the state determination unit 58 determines the current grinding state of the workpiece Wα during grinding based on the shape evolution of the workpiece Wα during grinding predicted by the shape evolution prediction unit 57, and determines whether or not to stop the grinding process based on the determination result of the grinding state.

Then, the state determination unit 58 determines that the grinding process of the workpiece Wα during grinding is stopped, and performs the process of step S9 shown in the flowchart of FIG. 6. In other words, the display control unit 56 outputs a control instruction to display on the screen 40 a of the display 40 the content of the grinding stop of the workpiece Wα determined during grinding. Then, the determination of the grinding stop of the workpiece Wα during grinding is displayed on the screen 40 a of the display 40 to notify the grinding stop determination.

As a result, the user of the grinder 10 can grasp information that it has been determined that the grinding has stopped by looking at the screen 40a. Accordingly, even when the user controls the polishing machine 10 by manual operation to stop the polishing process, the polishing process can be stopped at an appropriate time. As described later, the user can recognize the stop operation of the grinder 10 even when the grinder 10 is stopped by the stop control command of the control unit 50.

Thereafter, the processing shown in step S10 in the flowchart implementing FIG. 6 is performed. In other words, the control arithmetic unit 51 of the control unit 50 performs various outputs to the first drive device M1 to the fifth drive device M5, such as a control instruction for terminating the polishing process. As a result, the grinding machine 10 automatically stops after passing through a predetermined flow, and the grinding process of the workpiece Wα during grinding is terminated. Accordingly, in the polishing apparatus 1 of the first embodiment, it is possible to prevent the stop time of the polishing process from being slower than an appropriate time, and to automatically stop the polishing process at an appropriate time.

Furthermore, in the polishing apparatus 1 of the first embodiment, the time series of the shape information of the workpiece Wα during polishing is controlled by the shape evolution prediction unit 57 and the state determination unit 58 included in the control operation unit 51 of the control unit 50. The change is compared with the time series change of the selected master. Furthermore, the evolution of the shape change of the workpiece Wα during polishing is predicted based on the result of the comparison operation. Then, based on the evolution of the shape change of the workpiece Wα during polishing, the grinding state of the workpiece Wα during polishing is automatically identified.

Here, the shape information of the selected master is correlated with the condition attributes that match the condition attributes of the workpiece Wα during grinding. Therefore, the time series change of the selected master reflects the correlation between the conditional attributes of the workpiece Wα and the shape evolution during grinding. Accordingly, in the polishing apparatus 1, the accuracy of prediction of the shape evolution of the workpiece Wα during polishing can be improved, and the state of the workpiece Wα during polishing can be appropriately determined. Furthermore, by appropriately performing the state determination of the workpiece Wα during polishing, the polishing process can be stopped at the optimum point in time when the workpiece Wα has become the desired shape during polishing or the workpiece Wα has the desired shape during polishing.

Furthermore, in the polishing apparatus 1 of the first embodiment, it is determined whether to stop the grinding process or continue the grinding process in accordance with the grinding state of the workpiece Wα during grinding, and the grinding machine 10 is automatically stopped at a timing determined to be appropriate. This automatically stops the polishing and prevents the stopping time of the polishing process from being slower than an appropriate time. In addition, according to the combination method of the device control, the condition attributes of the workpiece Wα during grinding can also be intentionally changed to adjust the final workpiece shape and the time at which grinding is completed.

In the first embodiment, the second drawing generation process is performed in parallel with the grinding stop determination processing by the second drawing generation unit 55, and the polishing is monitored during the period from the start of grinding of the workpiece Wα to the end thereof. Whether the condition attribute of the workpiece Wα has changed. Then, when the condition attribute of the workpiece Wα during polishing is changed, the second drawing P2 is replaced regardless of the step at that time point in the polishing stop determination processing.

That is, when the grinding machine 10 performs the grinding process of the workpiece W, the second drawing generating unit 55 determines that the workpiece W is being ground, and follows the steps from step S11 to S12, S13, and S14 shown in the flowchart of FIG. Sequential to perform each process. That is, the second drawing generating unit 55 acquires condition attributes of the workpiece Wα during grinding, and reads out shape information (shape of the selected master) associated with the condition attributes that match the acquired condition attributes from the storage unit 30. Refer to the shape information of the workpiece Wβ, or the typical shape information). Then, the second drawing generating unit 55 generates a second drawing P2 based on the read shape information of the selected master.

Once the second drawing P2 is generated, the second drawing generating unit 55 performs the processing of step 15 to determine whether or not to continue the grinding process of the workpiece Wα during grinding. Furthermore, when the grinding process is continued, each process is performed in the order of steps S16 and S17, and the condition attributes of the workpiece Wα during grinding are acquired again to determine whether the condition attributes have changed.

When it is determined that the condition attribute of the workpiece Wα has changed during grinding, it is determined that the condition attribute has changed during the grinding process, and the processing from steps S18 to S19 and S20 shown in the flowchart of FIG. 7 is executed. That is, according to the condition attributes of the workpiece Wα again obtained to re-edit the condition attributes of the selected master, and according to the condition attributes that most closely match the re-edited condition attributes to form the associated selected master, New 2nd drawing P2. Then, the previous second drawing P2 is replaced with a new one.

According to this, even if the condition attribute of the workpiece Wα during polishing changes with the progress of the polishing process, the second drawing P2 can be the latest drawing corresponding to the change of the condition attribute of the workpiece Wα during polishing, and the subsequent drawing can be appropriately performed. Prediction of the shape of the workpiece Wα during grinding.

Specific examples are given below for explanation.
As shown in FIG. 9A, in the grinding stage A at the initial stage of grinding, the first workpiece W1 having a cut shape of a "strongly concave shape" with a large depression in the center portion is subjected to grinding processing so that the thickness reaches a target thickness range (T1 ≤ thickness ≤T2) After the grinding stage B after that, the shape of the cut surface becomes a "weakly concave shape (the center portion is slightly depressed)". Then, the polishing process is continued, and in the polishing stage C whose thickness is close to the lower limit (T1) of the target thickness range, the cut shape of the first workpiece W1 becomes a "flat shape".

On the other hand, as shown in FIG. 9B, in the grinding stage A at the initial stage of grinding, the second workpiece W2 having a cut shape of a “weak convex shape” with a small convex portion at the center portion is subjected to grinding processing, and the thickness reaches the target thickness In the polishing stage B after the range (T1 ≤ thickness ≤ T2), the cut surface shape becomes a "weakly concave shape (the central portion is in a slightly depressed state)". However, after that, the grinding process is continued, and at the grinding stage C with the thickness close to the lower limit (T1) of the target thickness range, the shape of the cut surface of the second workpiece W2 becomes a "strongly concave shape (the state where the center portion is substantially depressed)".

On the other hand, the grinding device 1 of the first embodiment generates a first drawing P1, which is a first drawing P1 in which the shape drawings of the first work W1 and the second work W2 are sequentially arranged in time series. The first drawing P1 is displayed on the display 40. Therefore, it is possible to grasp the evolution from the first drawing P1 to the respective shapes of the first work W1 and the second work W2, and to predict the subsequent state change.

In other words, in the polishing apparatus 1 of the first embodiment, at the polishing stage B, it can be determined that the first workpiece W1 is "because the depression in the central portion gradually becomes shallow, it is preferable to perform the polishing process to the polishing stage C". On the other hand, it can be judged that the second workpiece W2 is "because the depression in the central portion gradually becomes deeper, it is better to stop the grinding process in the grinding stage B instead of grinding to the grinding stage C". As described above, the polishing apparatus 1 of the first embodiment can appropriately determine the optimal time point at which the grinding is stopped based on the shape of the workpiece at the start of grinding, and grind it to a desired workpiece shape.

In addition, in the polishing apparatus 1 of the first embodiment, the time series change of the shape information of the workpiece Wα during polishing is compared with the time series change of the selected master. Therefore, even if it is not possible to predict the evolution of a change in the shape of the workpiece in the future based on only the shape evolution of the current batch, it is possible to appropriately predict the shape evolution.

As shown in FIG. 10A, for the grinder 10 that uses the "conditional property of the peripheral edge portion of the workpiece that is difficult to warp" at the beginning of grinding, the third workpiece W3 having a "strongly convex shape" with a large central portion protruding from the center is polished. The situation is explained. In the grinding stage A at the initial stage of grinding, the cutting surface shape "strong convex shape" of the third workpiece W3 is ground. In the grinding stage B after the thickness reaches the target thickness range (T1≤thickness≤T2), it becomes "weak convex shape ( The center part is slightly protruding) ". Further, the polishing process is continued, and in the polishing stage C with the thickness close to the lower limit (T1) of the target thickness range, the cut shape of the third workpiece W3 becomes a "flat shape".

On the other hand, as shown in FIG. 10B, for the fourth workpiece W4 of the "strongly convex shape" where the center portion of the grinder 10 which has the "conditional property of the peripheral edge portion of the workpiece easily warped" at the start of grinding is large, the center portion is large. A case where polishing is performed will be described. In the grinding stage A at the initial stage of grinding, the cutting surface shape "strong convex shape" of the fourth workpiece W4 is ground, and the grinding stage B after the thickness reaches the target thickness range (T1 ≤ thickness ≤ T2) becomes "weak convex shape (center Some slightly prominent states). " Further, the grinding process is continued. In the grinding stage C with the thickness close to the lower limit (T1) of the target thickness range, the shape of the cut surface of the fourth workpiece W4 becomes "weakly convex, weakly raised (the central portion and the peripheral edge portions are slightly protruding, respectively). status)".

Here, because the accumulation of data is insufficient, it is impossible to predict the evolution of the shape that has a strong correlation with the conditional attributes. For example, the grinding process of the workpiece before the grinding of the workpiece Wα (for example, before a batch) can be performed. The shape evolution predicts the shape evolution of the workpiece Wα during grinding after a certain time point, which is a certain time point of the current batch showing the same tendency of shape evolution as the current batch. That is, in the polishing apparatus 1 of the first embodiment, for example, a workpiece processed by a grinding process one batch before the workpiece Wα during grinding is used as a selected master. Furthermore, by comparing the time-series changes of the selected master and the time-series changes of the shape information of the third and fourth workpieces W3 and W4, it is possible to estimate the current batch and the batches used before and after it. Conditional properties of the grinder 10.

In other words, in the polishing apparatus 1 of the first embodiment, when the grinding process is performed using the grinding machine 10 of "conditional properties where the peripheral edge portion of the workpiece is difficult to warp", it can be determined that "even in the center The protrusion becomes shallow, and it is difficult to form a bulge in the peripheral area, so it can be polished to the polishing stage C ″. On the other hand, when using the grinder 10 with the "conditional property of the peripheral edge portion of the workpiece to be easily warped" for polishing processing, it can be determined at the polishing stage B that "surrounding of the peripheral area is caused by the progress of the polishing processing. Fortunately, the grinding process is stopped in the grinding stage B instead of grinding to the grinding stage C ". In this way, the polishing apparatus 1 of the first embodiment can appropriately determine the optimal time point of the grinding stop according to the condition attribute of the grinding machine 10 selected by the user or the condition attribute given to the grinding machine 10 so as to grind to a desired Workpiece shape.

[The role of improving the prediction accuracy of shape evolution]
In the polishing apparatus 1 of the first embodiment, the shape information of the workpiece W and the condition attributes during grinding of the workpiece W are associated and stored in the storage unit 30. Moreover, the shape information of the selected master is read from the storage unit 30, and the shape information of the selected master is associated with condition attributes that match the condition attributes of the workpiece Wα during grinding, and is based on the read out The shape information of the selected master generates a second drawing P2.

Therefore, the shape evolution of the selected master shown in the second drawing P2 reflects the correlation between the condition attribute and the shape evolution in the workpiece Wα during grinding. In addition, by displaying the second drawing P2 and the first drawing P1 at the same time, a user who monitors these drawings can improve the accuracy of predicting the shape evolution of the workpiece Wα during grinding.

In addition, as the shape information of the selected master, a workpiece shape pattern (typical shape information) generated based on the learning result of the correlation between the condition attributes of the workpiece W and the shape information of the workpiece W during grinding processing is used. In the case, as the shape information of the selected master, compared with the case where the shape information of the shape reference workpiece Wβ is used, the accuracy of the evolution of the shown workpiece shape can be improved by the second drawing P2. Therefore, it is possible to more accurately predict the shape evolution of the workpiece Wα during polishing, and to perform polishing stop at an appropriate point in time.

In addition, the shape evolution prediction unit 57 in the first embodiment has a machine learning function, and updates a database-based shape evolution prediction mode at any time in a machine learning manner. With this, the shape evolution prediction of the workpiece Wα from now on will automatically become more accurate.

Furthermore, since the accuracy of the prediction of the shape evolution is improved, the state of the workpiece Wα can be determined more appropriately when the state of the workpiece Wα during grinding is determined based on the prediction of the evolution of the shape of the workpiece. As a result, the polishing can be stopped at an optimal timing with higher accuracy.

Next, effects will be described.
The following effects can be obtained in the polishing apparatus 1 of the first embodiment.

(1) Equipped with a grinder 10 that grinds a workpiece W by a rotating platen (lower platen 11 and upper platen 12);
A shape measuring device 20 that measures the state of the workpiece W via a measuring hole 19 formed in a fixed plate (upper fixed plate 12);
A storage unit 30 that stores the shape information of the workpiece W measured by the shape measuring device 20;
A display 40 that displays the shape information of the workpiece W measured by the shape measuring device 20; and a control unit 50 that controls the content displayed on the display 40,
The control unit 50 has a structure in which the shape drawings of the workpiece Wα during grinding of the workpiece currently being measured measured by the shape measuring device 20 are arranged in time series to generate a first drawing P1 and the first drawing P1 is displayed on the display 40. .
Therefore, according to the evolution of the shape change of the workpiece Wα during polishing, the grinding processing of the workpiece Wα during polishing can be stopped at a time point when the workpiece shape has become a desired shape or at a time point when it has become a desired workpiece shape.

(2) The storage unit 30 stores and associates the condition attributes of the workpiece W with the shape information of the workpiece W during the grinding process.
The control unit 50 has a structure in which the time of the shape information (the shape information of the selected master) is associated with the time series change of the shape information of the workpiece Wα during grinding and the condition attributes matching the condition attributes of the workpiece Wα during grinding. The results of the comparison operation of the serial changes are used to predict the shape evolution of the workpiece Wα during polishing, and the state of the workpiece Wα during polishing is determined based on the prediction of the shape evolution of the workpiece Wα during polishing.
According to this, it is possible to improve the accuracy of predicting the shape evolution of the workpiece Wα during grinding and to appropriately determine the state, and it is possible to optimize the time point when the workpiece Wα has become the desired shape during grinding or the workpiece Wα becomes The grinding process is stopped at the optimum point of the desired shape.

(3) Equipped with a grinder 10 that grinds the workpiece W from the rotating platen (the lower platen 11 and the upper platen 12);
A shape measuring device 20 that measures the shape of the workpiece W via a measuring hole 19 formed in the fixing plate (upper fixing plate 12);
A storage unit 30 that stores the shape information of the workpiece W measured by the shape measuring device 20;
A display 40 that displays the shape information of the workpiece W measured by the shape measuring device 20; and a control unit 50 that controls the display content of the display 40,
The control unit 50 has a structure that generates a first drawing P1 in which the shape drawing of the workpiece Wα during grinding of the workpiece currently being measured measured by the shape measuring device 20 is arranged in time series, and that the workpiece Wα is ground before grinding The shape drawing of the processed workpiece (selected master) is a second drawing P2 arranged in time series, and the first drawing P1 and the second drawing P2 are displayed on the display 40 at the same time.
According to this, according to the evolution of the shape change of the workpiece Wα during polishing, the grinding process of the workpiece Wα during polishing can be stopped at a time point when the workpiece shape has become a desired shape or when the workpiece Wα has become a desired shape during polishing.

(4) The storage unit 30 stores conditional attributes when the workpiece W is ground and shape information of the workpiece W.
The control unit 50 has a structure that generates a second drawing P2 based on the shape information, which is the shape information of the workpiece (selected master) that is associated with the condition attributes that match the condition attributes of the workpiece Wα during grinding. .
Accordingly, it is possible to improve the accuracy of predicting the shape evolution of the workpiece Wα during polishing.

(5) The control unit 50 generates a second drawing P2 according to the workpiece shape pattern (typical shape information), which is based on the correlation between the condition attribute when the workpiece W is ground and the shape information of the workpiece W The resulting workpiece shape pattern.
Thereby, the accuracy of the evolution of the shape of the workpiece shown in the second drawing P2 can be improved, and the shape evolution of the workpiece Wα during grinding can be predicted more accurately.

(6) The storage unit 30 stores and associates the condition attributes when the workpiece W is ground with the shape information of the workpiece W.
The control unit 50 predicts the shape evolution of the workpiece Wα during polishing based on the result of the comparison operation, and performs state determination of the workpiece Wα during polishing based on the prediction of the shape evolution of the workpiece Wα during polishing. The comparison operation is a time series change of the shape information of the workpiece Wα during grinding and a time series change of the shape information (shape information of the selected master) associated with the condition attribute matching the condition attribute of the workpiece Wα during grinding. Comparison operation.
According to this, it is possible to improve the prediction accuracy of the shape evolution of the workpiece Wα during grinding to appropriately determine the state, and it is possible to optimize the workpiece Wα to have a desired shape during grinding or to optimize the workpiece Wα to a desired shape during grinding. The grinding process is stopped at the time point.

(7) The control unit 50 has the following configuration: When it is determined that the grinding process of the workpiece Wα during grinding is stopped as a result of the state determination of the workpiece Wα during grinding, the grinding process of the workpiece Wα during grinding is stopped and the workpiece Wα is notified at the same time. Judging the stop of the grinding process.
According to this, it is possible to notify the user of the grinder 10 of the stop of the grinding process while automatically stopping the grinding of the workpiece Wα during grinding at an appropriate point in time.

(Second Embodiment)
The second embodiment is an example in which the polishing device determines a responsibility parameter and notifies the responsibility parameter. The liability parameter is a liability parameter when the final workpiece shape of the workpiece Wα during grinding becomes the workpiece shape accepted for the second time. Hereinafter, a polishing apparatus according to a second embodiment will be described. In addition, regarding the same structure as the polishing apparatus 1 of the first embodiment, the same reference numerals as those of the first embodiment are used, and detailed description is omitted.

In the polishing apparatus 1A of the second embodiment, as shown in FIG. 11, the control operation unit 51A of the control unit 50A includes a first drawing generation unit 54, a second drawing generation unit 55, a display control unit 56A, and a shape evolution prediction unit. 57A, a state determination unit 58A, a parameter determination unit 59, and a correlation data processing unit 60. .

The shape evolution prediction unit 57A of the second embodiment compares the time series change of the shape information of the workpiece Wα during polishing with the time series change of the shape information of the selected master, and predicts the polishing operation based on the result of the comparison operation. The subsequent shape evolution of the workpiece Wα. Furthermore, the shape evolution prediction unit 57A predicts the final shape of the workpiece Wα during grinding based on the prediction of the subsequent shape evolution of the workpiece Wα during grinding, and receives support from the correlation data processing unit 60 as needed. (Hereinafter referred to as the "final workpiece shape") whether it can be a desired workpiece shape.

Here, the "desired workpiece shape (hereinafter referred to as" desired state ")" means a shape that satisfies the first shape condition set in advance. On the other hand, when it is predicted that the final workpiece shape cannot be expected, the shape evolution prediction unit 57A receives the support of the correlation data processing unit 60 as necessary, and predicts whether the final workpiece shape can be accepted for the second time. Workpiece shape. In addition, "the workpiece shape accepted for the second time (hereinafter referred to as the" second acceptance state ") means that the final workpiece shape cannot become the desired state, that is, it is judged that even if the machining is continued, it does not satisfy the first In the case of 1 shape condition, a shape that still satisfies the set second shape condition.

In the state determination unit 58A of the second embodiment, the current grinding state of the workpiece Wα during grinding is determined based on the subsequent shape evolution of the workpiece Wα during grinding predicted by the shape evolution prediction unit 57A. Here, the “grinding state” determined by the state determination unit 58A includes a first grinding stop state where the workpiece shape of the workpiece Wα during grinding reaches a desired state, and a workpiece shape of the workpiece Wα during grinding reaching a second acceptance state. The second polishing stop state, the third polishing stop state in which the polishing needs to be stopped immediately, and the polishing continuation state in which the polishing machine 10 needs to continue the polishing process.

In the parameter determination unit 59, when the shape evolution prediction unit 57A judges that the final workpiece shape can become the second acceptance state, it specifies that the final workpiece shape for the workpiece Wα during grinding has become the second acceptance shape (cannot become the desired state ) Is a condition attribute with high relevance (hereinafter referred to as "responsibility parameter"). In addition, in the parameter determining unit 59, the responsibility parameters may be listed in order of the degree of correlation strength.

The responsibility parameter designation of the parameter determination unit 59 is, for example, performed in the following steps. That is, through the retrieval and arrangement of the correlation data processing unit 60, the abnormal state of the shape of the workpiece stored in the storage unit 30 has data of condition attributes with high correlation intensity and the data that can be judged as the second acceptance state. Compare the conditional attributes of the workpiece Wα during grinding. Then, the condition attribute of the relatively high correlation strength is designated as the "responsibility parameter". In addition, the number of the responsibility parameters may be one or more.

In addition, the parameter determining unit 59 lists the responsibility parameters in the order of the correlation strength, for example, according to the following steps. In other words, the conditional attribute data of the abnormal state of the workpiece shape having high correlation strength and the conditional attribute of the workpiece Wα during grinding that is determined to be likely to be the second acceptance state are compared. Moreover, a plurality of condition attributes with relatively high correlation strength are selected, and the responsibility parameters are listed in the order of selection. In addition, the number of selected condition attributes may be two or more.

In addition, it is possible to analyze the relationship between the temperature distribution data on the polishing pad, the vibration or temperature data of the bearing, the abnormality of the state information monitored during the grinding of the workpiece W, and the abnormal state of the workpiece shape. Therefore, it is possible to monitor not only the evolution of the shape of a single workpiece, but also the correlation between the evolution of the shape of the workpiece across most batches and the evolution of the condition attributes, so that the responsibility parameter and the correlation strength of the responsibility parameter can be improved. Precision. In addition, in these correlation analysis, the prediction model updated according to this, and the real-time update of prediction accuracy, multivariate analysis and artificial intelligence (machine learning, deep learning) can be used.

Furthermore, in the display control unit 56A of the second embodiment, when a control command that displays the content of the grinding stop determination on the screen 40a of the display 40 is output to the display 40, if the state determination unit 58A determines that "the first grinding stop In the case of "state", a control command is output to display the contents of the workpiece shape in a desired state. In addition, when the state determination unit 58A determines that it is the "second grinding stop state", it outputs the content that the workpiece shape is in the second acceptance state, the information of the responsibility parameter designated by the parameter determination unit 59, or the correlation. The control order in which the information of the responsibility parameters listed in order of intensity is displayed. Furthermore, when the state determination unit 58A determines that it is a "third grinding stop state", it outputs a control command that indicates that the shape of the workpiece is a non-acceptable shape.

The correlation data processing unit 60 performs a search that refers to the retrieval of the strength of the correlation between the conditional attributes of the workpiece W and the shape evolution of the workpiece W during grinding and the final workpiece shape. The search of the correlation strength by the correlation data processing unit 60 is performed by, for example, the following steps.

In other words, based on the grinding results of the workpieces W that have been implemented in the past, the abnormal state identification and the workpieces during grinding when abnormalities with specific condition attributes (for example, discontinuities in slurry flow) have occurred are calculated by calculation. The relationship between the shape evolution when the workpiece shape of Wα is the second acceptance state (hereinafter referred to as "abnormal state of the workpiece shape"). In addition, discontinuous state recognition of the slurry flow rate is performed by comparing the length of time that the slurry flow rate is below a predetermined value with a threshold value.

Furthermore, for each condition attribute when an abnormal state of the workpiece shape occurs, a correlation coefficient and the like are calculated by regression analysis to explore the degree of correlation with the abnormal state of the workpiece shape. In addition, the relationship between the predetermined condition attribute and the shape evolution of the work W at this time is obtained based on the grinding results of the work W performed in the past. Moreover, according to the relationship between the predetermined condition attribute and the evolution of the workpiece shape, it is possible to determine the cause of the deviation between the final workpiece shape, the desired final workpiece shape, the actual shape evolution, and the final workpiece shape by the grinding process by determining the desired shape evolution accompanying the grinding process. Suspicious parameters to search the strength of the correlation between the attribute of the search condition and the evolution of the workpiece shape and the final workpiece shape. This correlation strength data is stored in the storage unit 30 in association with the identified abnormal condition identification and condition attributes.

In addition, the correlation data processing unit 60 is a dedicated calculation unit that is dedicated to search for the correlation properties between the condition attributes of the workpiece W, the shape evolution of the workpiece W during grinding, and the final workpiece shape. Therefore, the correlation data processing unit 60 can perform a correlation search operation regardless of whether the workpiece W is being ground or not.

Next, a polishing stop determination process performed by the polishing apparatus 1A of the second embodiment will be described using a flowchart shown in FIG. 12. The same processes as those in the polishing stop determination process in the first embodiment are marked with the same symbols as in the first embodiment, and detailed descriptions thereof are omitted. Further, in the polishing apparatus 1A of the second embodiment, a second drawing generation process is performed in parallel with the grinding stop determination process shown in FIG. 12 to generate a second drawing P2. In the polishing stop determination processing performed in the second embodiment, the second drawing P2 generated by the second drawing generation processing is read at a necessary time point (step S4).

In the grinding stop determination process performed in the second embodiment, in step S6, a comparison operation is performed on the time series change of the shape information of the selected master and the time series change of the shape information of the workpiece Wα during grinding. Then, the subsequent shape evolution of the workpiece Wα during polishing is predicted based on the comparison calculation result, and then the process proceeds to step S61.

In step S61, it is determined whether the final workpiece shape of the workpiece Wα during polishing can be a desired workpiece shape based on the prediction of the future shape transition of the workpiece Wα during polishing. If it is YES (can be a desired state), the process proceeds to step S71. In the case of No (it cannot be a desired state), it progresses to step S62.

In step S62, the final workpiece shape continued in step S61 is determined not to be a desired state. Based on the prediction of the future shape evolution of the workpiece Wα during grinding, it is determined whether the final workpiece shape of the workpiece Wα during grinding can become the second time. Accepted workpiece shape. If it is YES (can be in the second acceptance state), the process proceeds to step S63. If not (it cannot be the second acceptance state), the process proceeds to step S71.

In step S63, the determination that the final workpiece shape can become the second acceptance state in step S62 is continued. The final workpiece shape of the workpiece Wα during grinding will become the second acceptance state to determine the responsibility parameter of the high-relevance condition attribute. Or enumerating the ranking of the correlation strength, the process proceeds to step S71.

In step S71, a determination is made that the final workpiece shape in step S61 can be the desired state, a determination that the final workpiece shape in step S62 cannot be any of the desired state and the second acceptance state, and the liability parameter in step S63 After the determination is made, or any one of the correlation strengths is listed in order of high and low, the polishing state of the workpiece Wα during polishing is determined based on the prediction of the future shape evolution of the workpiece Wα during polishing, and the process proceeds to step S81.
Here, the grinding state of the workpiece Wα during grinding is determined to be any one of the following states: the workpiece shape of the workpiece Wα during grinding has reached the desired state “first grinding stop state”, and the workpiece shape of the workpiece Wα during grinding reaches the second time The acceptance state "the second polishing stop state", the "third polishing stop state" in which the polishing process is stopped directly, and it is necessary to continue the polishing process in the "continued polishing state".

In addition, when it is determined in step S61 that the final workpiece shape can be a desired state, a determination is made as to whether it is a "first polishing stop state". Then, when the responsibility parameter is determined in step S63 or the correlation strengths are listed in order of high and low, a determination is made as to whether it is the "second polishing stop state". When it is determined in step S62 that the final workpiece shape cannot be changed to either the desired state or the second acceptance state, it is determined to be the "third polishing stop state". In addition, although the final workpiece shape has been judged to be any of the desired state or the second acceptance state, when the current workpiece shape of the workpiece Wα does not reach the desired state or the second acceptance state during grinding Judgment is made on the "polishing continued state".

In step S81, the determination of the grinding state of the workpiece Wα during grinding is continued, and the determination of the grinding state of the workpiece Wα during grinding is stopped based on the determination of the grinding state performed in step S71. If yes (stop polishing), the process proceeds to step S91. In the case of No (continuous grinding), the process returns to step S2.
Here, the determination of the polishing stop of the workpiece Wα during polishing is performed when it is determined that any of the "first polishing stop state", "second polishing stop state", and "third polishing stop state" is performed in step S71.

In step S91, the determination of the grinding stop in step S81 is continued, and a control instruction is output to the display 40. The control instruction displays on the screen 40a of the display 40 the content of the grinding stop of the workpiece Wα determined during grinding and the grinding in progress The control command of the state of the workpiece Wα notifies the grinding stop determination and proceeds to step S10.
Here, when it is determined as the "first grinding stop state" in step S71, a control command is output, and the control command is used to display the content of the grinding stop and the workpiece Wα during grinding in the "desired state". Control instructions. In addition, when it is determined as the "second grinding stop state" in step S71, a control command is output, the control command is used to display the content of the determination of the grinding stop and the workpiece Wα during grinding is in the "second acceptance state" ”Control instructions. Further, when it is determined as the "third grinding stop state" in step S71, a control instruction is output, and the control instruction is used to display the contents of the determination of the grinding stop and the workpiece Wα during grinding is not expected. "Non-acceptable shape" for either the second acceptance state

Next, the operation of the polishing apparatus 1A of the second embodiment will be described.
In the polishing apparatus 1A of the second embodiment, when the workpiece W is subjected to grinding processing by the grinding machine 10, the first drawing P1 and the second drawing P2 are displayed on the screen 40a of the display 40 in the same manner as in the first embodiment. Thereafter, each process of step S6 and step S61 shown in the flowchart of FIG. 12 is performed in sequence, and is performed. That is, the shape evolution prediction unit 57A compares the time series change of the shape information of the workpiece Wα during polishing with the time series change of the shape information of the selected master, and predicts the future shape evolution of the workpiece Wα during polishing based on the result. Then, based on the prediction of the shape evolution, it is determined whether the final workpiece shape can be a desired state.

When the final workpiece shape is determined to be in a desired state, processing is performed in the order from steps S71 to S81 shown in the flowchart of FIG. 12. That is, the state determination unit 58A determines the current grinding state of the workpiece Wα during grinding based on the shape evolution of the workpiece Wα during grinding predicted by the shape evolution prediction unit 57A, and determines whether to stop the grinding process based on the determination result of the grinding state.

When the polishing state of the workpiece Wα during polishing is determined to be the “first polishing stop state” by the state determination unit 58A, the process of step S91 shown in the flowchart of FIG. 12 is performed. That is, the display control unit 56A outputs a control instruction for determining on the display 40a of the display 40 that the content of the grinding stop of the workpiece Wα during grinding and the workpiece Wα during grinding are in a "desired state" . In addition, on the screen 40a of the display 40, in addition to the determination that the grinding process of the workpiece Wα during grinding is stopped, the workpiece Wα during grinding is also displayed in a “desired state” to notify the grinding stop determination.

As a result, the user of the grinder 10 can grasp the shape of the workpiece determined to be the grinding stop and the workpiece Wα during grinding by looking at the screen 40a. According to this, even when the user controls the polishing machine 10 by manual operation to stop the polishing process, the polishing process can be stopped at an appropriate timing. Furthermore, even when the grinder 10 is stopped by the stop control command of the control unit 50A, the user can recognize the stop operation of the grinder 10.

Thereafter, the process of step S10 is performed to cause the control arithmetic unit 51A of the control unit 50A to output various outputs such as a stop control instruction for terminating the polishing process to the first drive device M1 to the fifth drive device M5. As a result, the grinding machine 10 automatically stops after a predetermined sequence has passed, and the grinding process of the workpiece Wα during grinding is terminated.

On the other hand, when it is determined that the final workpiece shape cannot be expected based on the prediction of the future shape evolution of the workpiece Wα during polishing, the process of step S62 shown in the flowchart of FIG. 12 is performed. That is, the shape evolution prediction unit 57A determines whether or not the final workpiece shape can be brought into the second acceptance state based on the prediction of the future shape evolution of the workpiece Wα during grinding.

When the final workpiece shape is determined to be in the second acceptance state, the process of step S63 shown in the flowchart of FIG. 12 is performed. That is, the parameter determining unit 59 determines the high-relevance responsibility parameter for the final workpiece shape of the workpiece Wα during grinding to become the second acceptance state (the final workpiece shape cannot be the desired state), or enumerates the level of correlation strength Sequential responsibility parameters.

Then, once the responsibility parameters are determined or enumerated, processing is performed in the order from step S71 to step S81 and step S91 shown in the flowchart of FIG. 12. That is, the state determination unit 58A determines the current grinding state of the workpiece Wα during grinding according to the shape evolution of the workpiece Wα during grinding, and determines whether to stop the grinding process based on the determination result of the grinding state. In addition, when the state determination unit 58A determines that the grinding state of the workpiece Wα during grinding is the "second grinding stop state", the display control unit 56A outputs a control command that is a judgment displayed on the screen 40a displayed on the display 40. The content of the grinding stop of the workpiece Wα during grinding, the information that the workpiece Wα is in the "second acceptance state" during grinding, and the responsibility parameters determined by the parameter determination unit 59 or the responsibilities listed in the order of the correlation strength parameter. In addition, on the screen 40a of the display 40, it is determined that the grinding of the workpiece Wα during grinding is stopped, that the workpiece Wα during grinding is in the “second acceptance state”, and the responsibility parameters or the responsibilities listed in the order of the degree of correlation strength Parameter to notify the grinding stop judgment.

After that, the process of step S10 is performed, and the control arithmetic unit 51 A of the control unit 50 A performs various outputs to the first drive device M1 to the fifth drive device M5 for stopping control instructions and the like for terminating the polishing process. As a result, the grinding machine 10 automatically stops after passing through a specific flow, and the grinding process of the workpiece Wα during grinding is ended.

As a result, by observing the screen 40a, the user of the grinder 10 can grasp the determination of the grinding stop and the workpiece shape of the workpiece Wα during grinding, as well as a high degree of correlation for the workpiece Wα being subjected to the second acceptance state during grinding. Responsibility parameters. Accordingly, even when the user controls the polishing machine 10 by manual operation to stop the polishing process, the polishing process can be stopped at an appropriate timing. Furthermore, even when the grinder 10 is stopped by a stop control command from the control unit 50 A, the user can recognize the stop operation of the grinder 10.

In addition, by being able to grasp the responsibility parameter or its candidates, it is possible to reasonably plan countermeasures (improvement of condition attributes, improvement of the grinder 10, etc.) for bringing the final workpiece shape into a desired state. Then, the workpiece W in a desired state can be obtained efficiently. In addition, accumulation of empirical data corresponding to the degree of deviation between the desired final workpiece shape and the actual workpiece shape and the improvement of the polishing device 1 for eliminating the deviation can be promoted.

Further, in step S62 shown in the flowchart of FIG. 12, when it is determined that the final workpiece shape cannot be the second acceptance state, the processing is performed in the order from step S62 to step S71, step S81, and step S91. That is, the state determination unit 58A determines the current grinding state of the workpiece Wα during grinding, and determines that the grinding state of the workpiece Wα during grinding is stopped in the “third grinding stop state”. Then, the display control unit 56A outputs a control instruction that displays on the screen 40a of the display 40 the determination of the grinding stop of the workpiece Wα during grinding and the control instruction that the workpiece Wα is “non-acceptable shape”. Then, on the screen 40a of the display 40, the determination of the grinding stop of the workpiece Wα during grinding and the grinding of the workpiece Wα are “unacceptable shapes” are displayed, and the grinding stop determination is notified.

Thereafter, the process of step S10 is performed, and the control arithmetic unit 51 A of the control unit 50 A performs various outputs to the first drive device M1 to the fifth drive device M5 to stop control instructions and the like for terminating the polishing process. As a result, the grinding machine 10 automatically stops after passing through a specific flow, and the grinding process of the workpiece Wα during grinding is ended.

As a result, the user of the grinding machine 10 can grasp the fact that the grinding is stopped and the workpiece shape of the workpiece Wα during grinding by observing the screen 40a. Accordingly, even when the user controls the polishing machine 10 by manual operation to stop the polishing process, the polishing process can be stopped directly. Furthermore, even when the grinder 10 is stopped by a stop control command from the control unit 50 A, the user can recognize the stop operation of the grinder 10.

In addition, when a plurality of liability parameters are designated by the parameter determination unit 59, and when these liability parameters are displayed on the screen 40a of the display 40 in the order of the degree of correlation strength, it is grasped that the workpiece W? Conditional properties that have the greatest impact become easy. According to this, it is possible to further rationally plan necessary countermeasures (improvement of condition attributes, improvement of the grinder 10, etc.) for bringing the final workpiece shape into a desired state.

Specific examples are given below and explained.
As shown in FIG. 13A, a description will be given of a case where the fifth workpiece W5 whose peripheral area is polished to a relatively “protruding and sagging shape” as the “first batch after trimming” is polished by the grinder 10 when the grinding process is started. In the grinding stage A of the initial grinding stage, the cutting surface shape of the "protruded drooping shape" of the fifth workpiece W5 is polished, and becomes "flat," in the grinding stage B after the thickness reaches the target thickness range (T1≤thickness≤T2). Sagging shape (a state where the central portion is flat and the peripheral area is excessively ground). " Thereafter, the polishing process is continued, and in a polishing stage C having a thickness close to the lower limit (T1) of the target thickness range, the cut shape of the fifth workpiece W5 becomes a "flat shape" in a desired state.

Next, as shown in FIG. 13B, when the grinding process is started, the sixth workpiece W6 whose outer area is polished to a relatively “protruding and sagging shape” as the “first batch after trimming” is polished by the grinder 10 . In the grinding stage A of the initial grinding stage, the cutting surface shape of the "projected drooping shape" of the sixth workpiece W6 is polished, and becomes "flat, Sagging shape (a state where the central portion is flat and the peripheral area is excessively ground). " However, the grinding process is further continued. In the grinding stage C having a thickness close to the lower limit (T1) of the target thickness range, the cut shape of the sixth workpiece W6 is a "concave sagging shape (the central portion is a large depression and the peripheral edge portion Excessive grinding process) ".

Here, when the grinding process is performed with the "first batch of trimmed" grinder 10, in the grinding stage C, since the cut shape of the fifth workpiece W5 becomes a "flat shape", it is predicted that the final workpiece shape will become the desired shape. Expectation. In contrast, when the grinding process is performed with the "tenth batch after refurbishment" of the grinder 10, the shape of the cut surface of the workpiece does not become a "flat shape" at any of the grinding stages. Therefore, when the sixth workpiece W6 is ground, it is predicted that the final workpiece shape cannot be in a desired state. However, since the "flat, sagging shape" in the grinding stage B corresponds to the second acceptance state, it is predicted that the final workpiece shape of the sixth workpiece W6 can become the second acceptance state.

In addition, when the sixth workpiece W6 is ground, a condition attribute (responsibility parameter) having a high degree of correlation with the phenomenon that the final workpiece shape cannot become the "flat shape" in a desired state is determined, for example, as a function of the number of batches. Deterioration of the polishing pad surface caused by the increase.

Therefore, in the polishing apparatus 1A of the second embodiment, when the shape evolution of the sixth workpiece W6 is predicted during the grinding of the sixth workpiece W6, based on the prediction, it is determined that the final workpiece shape cannot become the desired state (flat shape). ), Can become the second acceptance state (flat, saggy shape). Then, with the progress of the grinding process, when the workpiece shape of the sixth workpiece W6 reaches the second acceptance state (flat, saggy shape), the grinding stop determination is notified, and the sixth workpiece W6 is notified of the second acceptance state ( (Flat, sagging shape) and the parameter of "surface change of the polishing pad" which has a heavy responsibility for the second acceptance state.

According to this, it is possible to appropriately determine the optimal time point at which the grinding is stopped, and although the final workpiece shape is not the desired state, it can satisfy the second acceptance state that satisfies the second shape condition. In addition, since the responsibility parameters or their candidates can be grasped, it is helpful to improve the condition attributes during workpiece grinding, and the user can make the process plan more efficiently. In addition, the polishing apparatus 1 itself can propose improvement.

Next, effects will be described.
In the polishing apparatus 1A of the second embodiment, the following effects can be obtained.

(8) The control unit 50A has the following structure: when it is determined that the workpiece Wα during grinding cannot be in the desired workpiece state based on the prediction of the shape evolution of the workpiece Wα during grinding, the grinding is stopped when the workpiece Wα is in the second acceptance state during grinding During the grinding process of the workpiece Wα, the stop determination of the grinding process is notified.
According to this, even when the final workpiece shape cannot be in the desired state, the polishing process can be stopped at an appropriate point in time, thereby preventing a delay in stopping the polishing process. In addition, it is possible to prevent the stop timing of the polishing process from being slower than an appropriate time, and to automatically stop the polishing process at an appropriate time point.

(9) The control unit 50A has the following structure: a condition attribute (responsibility parameter) that determines whether the appearance of the second acceptance state for the workpiece Wα during grinding is highly correlated, or enumerates the second acceptance state for the workpiece Wα during grinding Appears as a condition attribute with high relevance, and notifies the condition attribute (responsibility parameter or its candidate) of the high relevance specified or enumerated.
According to this, the user can grasp the responsibility parameter or its candidate, and reasonably formulate the necessary measures to make the final workpiece shape into a desired state.

As mentioned above, although the grinding | polishing apparatus of this invention was demonstrated based on the 1st and 2nd embodiment, the specific structure is not limited to these embodiments, and as long as it does not deviate from the scope of each request, Contents of the invention, design changes and additions are allowed.

The polishing device 1 of the first embodiment shows an example in which the storage unit 30 associates and stores the shape information of the workpiece W and the condition attributes when the workpiece W is ground. However, it is not limited to this. For example, when the shape information of the workpiece W is stored in the storage unit 30, it may be associated with and stored in a condition attribute generated by learning the shape information of the workpiece W. Here, the "condition attribute generated by learning" refers to the condition attribute obtained by learning the relationship (trend) between the shape information and the condition attribute obtained during the previous grinding process and the calculation result. The “condition attribute generated by learning” is, for example, based on the condition attribute associated with the shape information of the workpiece W accumulated in the past grinding process, learning the tendency of the condition attribute corresponding to the shape information of the workpiece W, and In a given complex condition system, the magnitude of the degree of influence of the grinding result of each parameter of the condition attribute is automatically calculated, and it is conceivable to use the result to add the weight to the condition attribute and output the condition attribute.

Moreover, the condition attributes of the workpiece Wα during grinding are matched with the condition attributes generated by the learning to read the shape information of the selected master, and when the shape evolution of the workpiece Wα during grinding is predicted, the user can Go beyond biased prediction models and trends to make the best predictions.

That is, the shape information of the selected master is read out according to the shape information of the workpiece W that is associated with the condition attributes generated by the learning. It can independently find and prompt the severity of the impact of certain parameters under certain conditions, and affect Severity is adjusted. In addition, the composition of the learning algorithm, which depends on the severity of the adjustment, can exceed the range predicted by the user. The output of this pure calculation result can expand the prediction range of the shape evolution of the workpiece Wα during grinding.

As a result, the accuracy of the shape prediction of the workpiece Wα during grinding, which has been easily overlooked so far, is significantly improved compared to the prediction accuracy of the user. Furthermore, it is possible to predict objectively and highly accurately the correlation between the condition attributes under certain conditions and the accuracy of the workpiece shape, and it can be calculated based on the process from the grinding process of the workpiece Wα to the initial stage of the grinding process during grinding. It is necessary to promote the advance change of condition attributes, which can help improve the yield and stability of the product.

In the polishing apparatus 1 according to the first embodiment, the storage unit 30 associates and stores condition attributes of the workpiece W with the shape information of the workpiece W during grinding processing. Then, in the shape evolution prediction unit 57, the time series change of the shape information of the selected master read out based on the condition attributes of the workpiece Wα during grinding and the time series change of the shape information of the workpiece Wα during grinding are performed. The comparison calculation shows an example of predicting the shape evolution of the workpiece Wα during grinding. That is, in the first embodiment, the shape information of the workpiece is generated by referring to the shape information of the workpiece Wβ according to the shape, or based on the learning result of the correlation between the condition attribute and the shape information of the workpiece when the workpiece W is ground. The typical shape information is estimated as the shape evolution of the workpiece Wα during grinding. However, it is not limited to this.

As a workpiece shape pattern obtained by performing arithmetic processing on the shape information of the workpiece W, it is possible to receive the support of the correlation data processing unit 60 as needed, and it is also possible to use the desired processing obtained by performing arithmetic processing on the information having the shape characteristics of the workpiece W. Workpiece shape pattern. In this case, in the storage unit 30, all the condition attributes when grinding the workpiece W are associated with the shape pattern of the workpiece having the shape characteristics of the workpiece W, and the condition attributes are grouped as needed, or as As the learning progresses, subdivide and save it. Further, the shape evolution prediction unit 57 may predict the shape evolution of the workpiece Wα during grinding based on a workpiece shape pattern that is associated with the condition attributes of the workpiece Wα during grinding.

That is, information including at least either the shape information of the workpiece W and the workpiece shape pattern obtained by arithmetic processing the shape information of the workpiece W is referred to as "prediction information", and the storage unit 30 The condition attributes and the condition attributes generated by the learning are associated with the prediction information and stored. Moreover, the shape evolution prediction unit 57 of the control unit 50 predicts the shape evolution of the workpiece Wα during grinding based on the result of a comparison operation that compares the time-series change of the prediction information of the workpiece Wα during grinding with that during the grinding The condition attribute matching the condition attribute of the workpiece Wα is associated with the time series change of the prediction information stored in the storage unit 30 and the result of the comparison operation is performed.

Here, "calculation processing" refers to, for example, averaging the cutting plane shape lines of a plurality of workpieces W selected for each condition attribute and determining the average cutting plane shape line for each condition attribute; from a specific cutting plane shape line The difference between the maximum and minimum values of the thickness is used to calculate the flatness; the most frequent and intermediate values of multiple cut shape lines are used to obtain the desired cut shape line; the correlation between the condition attribute and the shape of the workpiece From a viewpoint, the typical shape of the group is calculated from the group of the features of the shape of the workpiece W or the shape of the workpiece that is associated with the new statistics and calculations.

That is, for example, the grinding time of each workpiece is calculated from the flatness of the central portion of the workpiece W in the workpiece shape pattern obtained from the shape information of the previously processed workpiece W. As shown in FIG. 14A, a regression analysis and the like are then performed to generate a first flatness prediction line La from the relationship between the grinding time of the workpiece and the flatness of the central portion of the workpiece. Then, the first flatness prediction line La can be compared with the evolution of the flatness of the central portion of the workpiece Wα during polishing, and the shape of the workpiece Wα during polishing can be predicted.

Then, the polishing time of each workpiece is calculated from the flatness of the peripheral area of the workpiece W in the workpiece shape pattern obtained from the shape information of the previously processed workpiece W. As shown in FIG. 14B, a regression analysis and the like are then performed to generate a second flatness prediction line Lb from the relationship between the workpiece grinding time and the flatness of the peripheral area of the workpiece. Then, the second flatness prediction line Lb can be compared with the evolution of the flatness of the peripheral region of the workpiece Wα during polishing, and the shape of the workpiece Wα during polishing can be predicted.

In addition, it can be seen from the first flatness prediction line La that the flatness of the central portion of the workpiece gradually decreases with the grinding time of the workpiece, and deteriorates beyond a specific time Ta. Therefore, it is conceivable that by stopping the grinding process of the workpiece Wα during grinding when the workpiece grinding time reaches a specific time Ta, it is possible to obtain a workpiece having a good flatness in the central portion. In addition, from the second flatness prediction line Lb, it can be known that the flatness of the peripheral area of the workpiece remains an almost constant value on the negative side before the workpiece grinding time reaches the predetermined time Tb. When the workpiece grinding time exceeds a specific time Tb It becomes positive and becomes larger gradually. Therefore, it is conceivable that by stopping the grinding process of the workpiece Wα during grinding at a time when the workpiece grinding time reaches the predetermined time Tb, a workpiece having a good flatness in the peripheral region can be obtained.

Furthermore, in the first embodiment, the second drawing generating unit 55 generates an example of the second drawing P2 according to the shape information of the selected master having a condition attribute that matches the condition attribute of the workpiece Wα during grinding. However, the shape information of the workpiece W used when the second drawing P2 is generated is not limited to this. For example, it is not limited to the condition attribute of the workpiece Wα during grinding, and the second drawing P2 may be generated based on the shape information of the workpiece W that is ground before the workpiece Wα by the grinder that grinds the workpiece Wα during grinding. In addition, it is not limited to the condition attribute of the workpiece Wα during grinding, but may also be generated based on the shape information of the workpiece Wα that has been previously ground by the grinder that grinds the workpiece Wα during grinding before the workpiece Wα before grinding. 2 Drawing P2.

In the first and second embodiments, examples in which the second drawing generating unit 55 generates the second drawing P2 based on the shape information of the selected master selected by the condition attribute of the workpiece Wα during grinding are not shown. Based on this, according to the second second drawing, the third second drawing, etc. of the shape information of the selected master, a plurality of selected masters are read according to the condition attributes of the workpiece Wα during grinding, and according to the selected masters, The master shape information generates a plurality of second drawings, and displays the plurality of second drawings on the screen 40a of the display 40, or predicts the evolution of the shape change of the workpiece Wα in the future with reference to the plurality of second drawings.

Further, the shape information of a plurality of workpieces W stored in the storage unit 30 can be read out from a desired range, and a second drawing P2 can be generated according to a pattern of the workpiece shape having a shape feature, the shape feature being a pair of The shape information of the read workpiece W is averaged, or shape data obtained by obtaining specific data from the selected shape information of the workpiece W and performing arithmetic processing to generate desired shape information.
In this case, the accuracy of the evolution of the workpiece shape represented by the second drawing P2 can be improved more than the case of the second drawing P2 generated by using the shape information of the selected master.
Therefore, it is possible to more accurately predict the shape evolution of the workpiece Wα during polishing, and to stop the polishing process at an appropriate point in time.

Moreover, the shape information of the workpiece W can be corrected and adjusted according to the requirements. The measurement value data is a measurement value data obtained by comparing the measurement value data of the shape of the workpiece with a shape measurement dedicated device (for example, an individual flatness measurement dedicated device) provided separately from the grinder 10.

Furthermore, in the polishing apparatus 1 of the first embodiment, a first drawing P1 and a second drawing P2 are generated respectively, and an example in which the first drawing P1 and the second drawing P2 are displayed on the display 40 at the same time is shown. However, it is not limited to this. Only the first drawing P1 may be displayed on the display 40, and the first drawing P1 is a first drawing P1 in which the shape drawing of the workpiece Wα during grinding is arranged in time series. Even in this case, the user can grasp the evolution of the shape change of the workpiece Wα during grinding. Then, based on the evolution of the shape change of the workpiece Wα during the polishing, the grinding process of the workpiece Wα during the polishing can be stopped at the time when the desired workpiece shape is obtained.

In addition, the polishing apparatus 1 of the first embodiment shows an example in which when it is determined that the grinding of the workpiece Wα during grinding is stopped, the stop determination of the grinding process is displayed on the display 40 and the grinding machine 10 is stopped. However, for example, only the stop determination of the grinding process that has been performed may be notified, or only the grinding machine 10 may be stopped to stop the grinding process of the workpiece Wα during grinding without notifying the stop determination.

In the second example, it was shown that when the shape of the workpiece Wα during polishing was judged to be unsatisfactory, it was determined that the final workpiece shape could not be the desired state. When the workpiece Wα was in the second acceptance state during polishing, the polishing process was performed. An example of the stop determination is displayed on the display 40 and notified, and the grinder 10 is stopped. However, when the workpiece Wα during polishing is in the second acceptance state, for example, only the stop determination of the polishing processing may be notified, or the polishing machine 10 may be stopped and controlled to stop the polishing processing of the workpiece Wα during polishing without notifying the stop determination.

Next, an example in which the measurement unit 21 is mounted on the upper platen 12 is shown in the first embodiment, but it is not limited to this. For example, laser light as measurement light may be irradiated from an optical head provided above the upper platen 12. In this case, a plurality of measurement holes are formed along the circumferential direction of the upper platen 12, and each measurement hole is irradiated with laser light whenever it comes directly under the optical head by the rotation of the upper platen 12 to measure the workpiece thickness. In addition, a measurement hole is provided in the lower platen 11, and the lower surface of the workpiece W can be irradiated with laser light from below the lower platen 11 to measure the thickness.

Moreover, in the first embodiment, when calculating the cut shape of the workpiece W, the obtained data sequence is subjected to moving average processing or polynomial approximation curve drawing processing to average the thickness data, but it is not limited to this, as long as Any method can be used to visualize the cut shape of the workpiece W.

In addition, in the first and second embodiments, it is shown that the second drawing generation processing is performed in parallel with the grinding stop determination processing, and changes in the condition attributes of the workpiece Wα during grinding are monitored, and the second drawing P2 is appropriately replaced. example. However, the invention is not limited to this. For example, the second drawing P2 that has been generated in accordance with the condition attribute of the workpiece Wα during polishing determined to be obtained after the polishing can be maintained until the polishing is completed. Furthermore, in this case, the second drawing generation processing may not be performed in parallel with the grinding stop determination processing, and may be in the middle of the grinding stop determination processing (for example, between steps S1 and S2 or between steps S3 and S4 Time, etc.) Each of steps S12, S13, and S14 in the second drawing generation process is performed.

In addition, although the first and second embodiments have shown the double-side polishing apparatus having the lower platen 11 and the upper platen 12 and capable of simultaneously grinding both surfaces of the workpiece W, only the single-piece grinding of the workpiece W The present invention can also be applied to a single-side polishing device.

1,1A‧‧‧grinding device

10‧‧‧Grinding machine

11‧‧‧ lower order

12‧‧‧ Last order

20‧‧‧ Shape Measuring Device

19‧‧‧Measuring hole

30‧‧‧Storage unit

40‧‧‧ Display

40a‧‧‧screen

50, 50A‧‧‧ Control Unit

51, 51A‧‧‧ Control arithmetic unit

54‧‧‧The first drawing generation unit

55‧‧‧The second drawing generation unit

56,56A‧‧‧Display control unit

57,57A‧‧‧ Shape Prediction Unit

58, 58A‧‧‧State Judgment Unit

59‧‧‧parameter determination unit

60‧‧‧Correlation data processing unit

FIG. 1 is an explanatory diagram schematically showing the overall configuration of the polishing apparatus according to the first embodiment.

FIG. 2 is an explanatory diagram showing a positional relationship between a sun gear, an internal gear, and a planetary gear of the first embodiment.

FIG. 3A is an explanatory diagram showing a passing trajectory when a measurement hole passes through a workpiece in the polishing apparatus of the first embodiment. FIG.

FIG. 3B is an explanatory diagram showing a cut surface shape line of a cut surface shape of a workpiece in the polishing apparatus of the first embodiment.

FIG. 4 is an explanatory diagram showing a first drawing generated by the polishing apparatus of the first embodiment.

Fig. 5 is an explanatory diagram showing a second drawing generated by the polishing apparatus of the first embodiment.

FIG. 6 is a flowchart showing a flow of a grinding stop determination process performed in the first embodiment.

FIG. 7 is a flowchart showing a flow of a second drawing generation process performed in the first embodiment.

FIG. 8 is an explanatory view showing a screen of a display of the polishing apparatus of the first embodiment.

FIG. 9A is an explanatory diagram in which a shape drawing when a first workpiece is ground is arranged in time series.

FIG. 9B is an explanatory diagram in which a shape drawing when a second workpiece is subjected to grinding processing is arranged in time series.

FIG. 10A is an explanatory diagram in which a shape drawing when a third workpiece is subjected to grinding processing is arranged in time series.

FIG. 10B is an explanatory diagram in which the shape drawing when the fourth workpiece is subjected to grinding processing is arranged in time series.

FIG. 11 is an explanatory diagram schematically showing an entire configuration of a polishing apparatus according to a second embodiment.

FIG. 12 is a flowchart showing a flow of a grinding stop determination process performed in the second embodiment.

FIG. 13A is an explanatory diagram in which a shape drawing when a fifth workpiece is ground is arranged in time series.

FIG. 13B is an explanatory diagram in which the shape drawing when the sixth workpiece is subjected to grinding processing is arranged in time series.

FIG. 14A is an explanatory diagram showing the relationship between the workpiece grinding time and the flatness of the central portion of the workpiece.

FIG. 14B is an explanatory diagram showing the relationship between the grinding time of the workpiece and the flatness of the peripheral region of the workpiece.

Claims (12)

A grinding device having: A grinder that grinds a workpiece from a rotating platen; A shape measuring device for measuring the shape of the workpiece through a measuring hole formed in the fixed plate; A storage unit that stores shape information of the workpiece measured by the shape measuring device; A display that displays shape information of the workpiece measured by the shape measuring device; and A control unit that controls content displayed on the display, The control unit generates a first drawing and displays the first drawing on the display. The first drawing is a shape drawing of a workpiece during grinding that is measured by the shape measuring device and is a workpiece currently being ground. Time series arrangement. The grinding device according to claim 1, wherein: The storage unit includes at least shape information of the workpiece and prediction information of one of the workpiece shape patterns obtained by calculating and processing the shape information of the workpiece, and condition attributes when grinding and processing the workpiece or condition attributes generated by learning. Associate and store, The control unit, based on the result of a comparison operation between the time series change of the predicted information of the workpiece in the grinding and the time series change of the predicted information associated with the condition attribute matching the condition attribute of the workpiece in the grinding, The shape evolution of the workpiece during the grinding is predicted, and the state of the workpiece during the grinding is determined based on the prediction of the shape evolution of the workpiece during the grinding. The grinding device according to claim 2, wherein: The control unit judges, as a result of the state determination of the workpiece during grinding, to stop the grinding processing of the workpiece during grinding and stop the grinding processing of the workpiece during grinding when the grinding processing of the workpiece during grinding is stopped. At least one of the notifications to stop judgment. The grinding device according to claim 2, wherein: When the control unit determines that the workpiece during grinding cannot be in a desired workpiece state based on the prediction of the shape evolution of the workpiece during grinding, when the workpiece during grinding is in a second acceptance state, the grinding is performed. At least one of a notice of stopping the grinding process of the workpiece and a notice of stopping the grinding process of the workpiece during the grinding. The grinding device according to claim 4, wherein: The control unit determines the condition attribute of high correlation for the appearance of the second acceptance state of the workpiece during the grinding, or in the order of the correlation degree for the appearance of the second acceptance state of the workpiece during the grinding Conditional attributes are enumerated and the decision or enumerated conditional attributes are notified. A grinding device having: A grinder that grinds a workpiece from a rotating platen; A shape measuring device for measuring the shape of the workpiece through a measuring hole formed on the fixed plate; A storage unit that stores shape information of the workpiece measured by the shape measuring device; A display that displays shape information of the workpiece measured by the shape measuring device; and A control unit that controls content displayed on the display, The control unit generates a first drawing and a second drawing, and displays the first drawing and the second drawing on the display at the same time, and the first drawing uses the current measured by the shape measuring device as the current grinding. The drawing of the shape of the workpiece during grinding of the workpiece is arranged in time series, and the second drawing is the drawing of the shape of the workpiece that has been ground before the grinding of the workpiece during grinding in time sequence. The grinding device according to claim 6, wherein: The storage unit associates and stores shape information of the workpiece with condition attributes during grinding and processing the workpiece or condition attributes generated by learning, The control unit generates the second drawing based on shape information of a workpiece associated with a condition attribute matching a condition attribute of the workpiece during grinding. The grinding device according to claim 6 or 7, wherein: The control unit is based on a workpiece shape pattern obtained by performing arithmetic processing on the shape information of the workpiece stored in the storage unit or a correlation between condition attributes when grinding and processing the workpiece and the shape information of the workpiece. The second shape is generated from the workpiece shape pattern generated by the learning result of the degree. The grinding device according to claim 6 or 7, wherein: The storage unit includes shape information of the workpiece and prediction information of at least one of a workpiece shape pattern obtained by calculating and processing the shape information of the workpiece, and condition attributes or conditions generated during learning when the workpiece is ground and processed. Attributes are associated and stored, The control unit is based on a result of a comparison operation between a time series change of the prediction information of the workpiece in the grinding and a time series change of the prediction information associated with a condition attribute matching the condition attribute of the workpiece in the grinding, The shape evolution of the workpiece during the grinding is predicted, and the state determination of the workpiece during the grinding is performed according to the prediction of the shape evolution. The grinding device according to claim 9, wherein: The control unit determines whether to stop the grinding process of the workpiece during grinding, and determines whether to stop the grinding process of the workpiece during grinding and stop the grinding process of the workpiece during grinding, as a result of determining the state of the workpiece during grinding. At least one of the notices. The grinding device according to claim 9, wherein: When the control unit determines that the workpiece during grinding cannot be in a desired workpiece state based on the prediction of the shape evolution of the workpiece during grinding, when the workpiece during grinding is in a second acceptance state, the grinding is performed. At least one of a notice of stopping the grinding process of the workpiece and a notice of stopping the grinding process of the workpiece during the grinding. The grinding device according to claim 11, wherein: the control unit determines a condition attribute with a high degree of correlation for the appearance of the second acceptance state of the workpiece during the grinding, or for the second condition of the workpiece during the grinding The appearance of the second acceptance status enumerates the conditional attributes in the order of the relevance, and informs the decision or enumerated conditional attributes.