JP2019181657A - Polishing apparatus - Google Patents

Abstract

To provide a polishing apparatus that, based on transition of shape changes of a workpiece during polishing, can stop a polishing work of the workpiece at timing when the workpiece became a desired workpiece shape or at timing when the workpiece is becoming a desired workpiece shape.SOLUTION: A polishing apparatus comprises: a polishing machine 10 which polishes a workpiece W by rotating a lower surface plate 11 and an upper surface plate 12; a shape measuring device 20 which measures the shape of the workpiece W via a measurement hole 19 formed on the upper surface plate 12; a memory 30 which stores shape information of the workpiece W measured by the shape measuring device 20; a display 40 which displays the shape information of the workpiece W measured by the shape measuring device 20; a control part 50 which controls the display content of the display 40. The control part 50 creates a first drawing P1 in which shape drawings of a workpiece being polished Wα, which is a workpiece currently being polished and measured by the shape measuring device 20, are arrayed in time series, and displays the first drawing P1 on the display 40.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a polishing apparatus that polishes the surface of a workpiece such as a silicon wafer.

  Conventionally, a polishing apparatus that includes an upper surface plate, a lower surface plate, a sun gear, an internal gear, and a carrier plate and that polishes the surface of a workpiece such as a silicon wafer held on the carrier plate is known ( For example, see Patent Document 1). This polishing apparatus has a measuring instrument that measures the thickness of the workpiece being polished in real time through a through hole formed in the upper surface plate, and polishing processing is performed based on the measurement result of the workpiece thickness by this measuring instrument. The stop timing is determined.

JP 2015-47656 A

  By the way, in the conventional polishing apparatus, the stop timing of the polishing process is determined based on the measurement result of the workpiece thickness. However, it is difficult to predict the future change in the shape of the workpiece when polishing is continued from the temporary measurement result of the workpiece thickness. Therefore, it is difficult to determine whether the workpiece shape approaches the desired shape when the polishing process is continued, and there is a problem that it is difficult to stop polishing the workpiece at the timing when the desired workpiece shape is reached. In addition, it is considered that the difference in various conditions related to the polishing process does not affect only the workpiece shape after the polishing, but also affects the workpiece shape transition during polishing. However, until now, the time-series transition of workpiece shape changes due to polishing has largely depended on the skill of the user, which has been an obstacle to improving the efficiency of process improvement.

  The present invention has been made paying attention to the above problems, and based on the transition of the change in the shape of the workpiece being polished, the workpiece polishing process is stopped when the desired workpiece shape is reached or when the desired workpiece shape is reached. It is an object of the present invention to provide a polishing apparatus that can be used.

In order to achieve the above object, a polishing apparatus of the present invention includes a polishing machine that polishes a workpiece with a rotating platen, a shape measuring instrument that measures the shape of a workpiece through a measurement hole formed in the platen, and a shape A memory for storing the shape information of the workpiece measured by the measuring instrument, a display for displaying the shape information of the workpiece measured by the shape measuring instrument, and a control unit for controlling the display content of the display. .
And a control part produces | generates the 1st drawing which arranged in a time series the shape drawing of the workpiece | work in grinding | polishing which is the workpiece | work under grinding measured by the shape measuring device, and displays this 1st drawing on a display.

  As a result, based on the transition of the change in the shape of the workpiece during polishing, the workpiece polishing process can be stopped at the timing when the desired workpiece shape is reached or when the desired workpiece shape is reached.

It is explanatory drawing which shows roughly the whole structure of the grinding | polishing apparatus of Example 1. FIG. It is explanatory drawing which shows the positional relationship of the sun gear of Example 1, an internal gear, and a carrier plate. In the polishing apparatus of Example 1, it is explanatory drawing which shows the passage locus when a measurement hole passes on a workpiece | work. In the polishing apparatus of Example 1, it is explanatory drawing which shows the cross-sectional shape line showing the cross-sectional shape of the workpiece | work. FIG. 3 is an explanatory diagram illustrating a first drawing generated by the polishing apparatus according to the first embodiment. It is explanatory drawing which shows the 2nd drawing produced | generated with the grinding | polishing apparatus of Example 1. FIG. 3 is a flowchart showing a flow of polishing stop determination processing executed in Example 1; 6 is a flowchart illustrating a flow of second drawing generation processing executed in the first embodiment. It is explanatory drawing which shows the screen of the indicator in the grinding | polishing apparatus of Example 1. FIG. It is explanatory drawing which arranged the shape drawing when the 1st workpiece | work was grind | polished in time series. It is explanatory drawing which arranged the shape drawing when the 2nd workpiece | work was grind | polished in time series. It is explanatory drawing which arranged the shape drawing when the 3rd workpiece | work was grind | polished in time series. It is explanatory drawing which arranged the shape drawing when the 4th workpiece | work was grind | polished in time series. It is explanatory drawing which shows roughly the whole structure of the grinding | polishing apparatus of Example 2. FIG. 10 is a flowchart showing a flow of polishing stop determination processing executed in Example 2; It is explanatory drawing which arranged the shape drawing when the 5th workpiece | work was grind | polished in time series. It is explanatory drawing which arranged the shape drawing when the 6th workpiece | work was grind | polished in time series. It is explanatory drawing which shows the relationship between workpiece | work grinding | polishing time and the flatness of a workpiece | work center part. It is explanatory drawing which shows the relationship between workpiece | work grinding | polishing time and the flatness of a workpiece | work outer peripheral area | region.

  Hereinafter, the form for implementing the polish device of the present invention is explained based on Example 1 and Example 2 shown in a drawing.

Example 1
In the following, the configuration of the polishing apparatus 1 of Example 1 is referred to as “overall configuration”, “detailed configuration of polishing machine”, “detailed configuration of shape measuring device”, “detailed configuration of memory”, “detailed configuration of display device”, “ The description will be divided into “detailed configuration of control unit”, “polishing stop determination processing configuration”, and “second drawing generation processing configuration”.

[overall structure]
The polishing apparatus 1 according to the first embodiment is a double-side polishing apparatus that polishes both the front and back surfaces of a thin workpiece W such as a semiconductor wafer, a crystal wafer, a sapphire wafer, a glass wafer, or a ceramic wafer. As shown in FIG. 1, the polishing apparatus 1 includes a polishing machine 10, a shape measuring device 20, a memory 30, a display device 40, and a control unit 50.

[Detailed configuration of polishing machine]
The polishing machine 10 polishes the workpiece W by the rotating lower surface plate 11 and upper surface plate 12. The polishing machine 10 includes a disk-shaped lower surface plate 11 and an upper surface plate 12 that are concentrically arranged with the axis L1 as a center, a sun gear 13 that is rotatably disposed at the center of the lower surface plate 11, and a lower surface plate 11 And an internal gear 14 disposed on the outer peripheral side, and a carrier plate 15 disposed between the lower surface plate 11 and the upper surface plate 12 and having a work holding hole 15a (see FIG. 2) formed therein. . A polishing pad 11 a is attached to the upper surface of the lower surface plate 11, and a polishing pad 12 a is attached to the lower surface of the upper surface plate 12. Further, the upper surface plate 12 is provided with a supply hole (not shown) for supplying a polishing slurry.

  Here, the carrier plate 15 meshes with the sun gear 13 and the internal gear 14 as shown in FIG. The carrier plate 15 rotates (revolves) around the axis L1 while rotating as the sun gear 13 and the internal gear 14 rotate.

  The workpiece W is disposed in the workpiece holding hole 15 a of the carrier plate 15. Then, the carrier W 15 rotates and revolves while being sandwiched between the polishing pad 11a attached to the rotating lower surface plate 11 and the polishing pad 12a attached to the rotating upper surface plate 12, so that the workpiece W becomes the polishing pad. Polishing is performed by 11a and the polishing pad 12a. That is, the surfaces of the polishing pad 11a and the polishing pad 12a become polishing surfaces for polishing the workpiece W.

  The upper surface plate 12 is fixed to the rod 16 via a support stud 16a and an attachment member 16b attached to the upper surface. The rod 16 is expanded and contracted in the vertical direction by the fifth driving device M5. That is, the upper surface plate 12 moves up and down as the rod 16 expands and contracts.

  In the center of the polishing machine 10, a first drive shaft 17a standing along the axis L1 is disposed. The first drive shaft 17a is a shaft rotated by the first drive device M1. A driver 18 is fixed to the upper end portion of the first drive shaft 17a. Accordingly, the driver 18 is rotated integrally with the first drive shaft 17a by the first drive device M1.

  The driver 18 has a groove portion (not shown) that engages with a hook 12 b provided on the upper surface plate 12 on the outer peripheral surface. Then, the rod 16 extends, the upper surface plate 12 moves downward, and the hook 12b engages with the groove portion of the driver 18, whereby the driver 18 and the upper surface plate 12 rotate together. That is, the upper surface plate 12 is rotated integrally with the first drive shaft 17a by the first drive device M1.

  The second drive shaft 17b is fixed in a through state in the hole 13a at the center of the sun gear 13. The second drive shaft 17b is a hollow tube whose both ends are open, and the first drive shaft 17a penetrates rotatably. The second drive shaft 17b is rotated by the second drive device M2. Thereby, the sun gear 13 is rotated integrally with the second drive shaft 17b by the second drive device M2.

  A third drive shaft 17 c is formed in the lower part of the center portion of the lower surface plate 11. The third drive shaft 17c is a hollow tube whose both ends are open, and the second drive shaft 17b penetrates rotatably. The third drive shaft 17c is rotated by the third drive device M3. Thereby, the lower surface plate 11 rotates integrally with the 3rd drive shaft 17c by the 3rd drive device M3.

  The internal gear 14 is formed with a fourth drive shaft 17d. The fourth drive shaft 17d is a hollow tube whose both ends are open, and the third drive shaft 17c penetrates rotatably. The fourth drive shaft 17d is rotated by the fourth drive device M4. Thereby, the internal gear 14 rotates integrally with the fourth drive shaft 17d by the fourth drive device M4.

  Furthermore, a measurement hole 19 is formed in the upper surface plate 12 at a position away from the center by a predetermined distance along the radial direction. The measurement hole 19 is provided with a window member 19a that penetrates the upper surface plate 12 and the polishing pad 12a and transmits laser light as measurement light.

[Detailed configuration of shape measuring instrument]
The shape measuring instrument 20 irradiates measurement light toward the workpiece W, receives the measurement light reflected by the workpiece W, and measures the thickness of the workpiece W being polished. Further, the shape measuring instrument 20 obtains the cross-sectional shape of the workpiece W from the measured thickness of the workpiece W. The shape measuring instrument 20 includes a measuring unit 21, a thickness measuring unit 22, and a shape calculating unit 23.

  The measurement unit 21 is attached to the upper surface plate 12 and rotates together with the upper surface plate 12. Further, the measurement unit 21 is reflected by the work W with a laser light source (not shown) that irradiates the work W with laser light as measurement light via the window member 19 a of the measurement hole 19 of the upper surface plate 12. A light receiving portion (not shown) for receiving the reflected light. The light receiving signal received by the light receiving unit is transmitted to the thickness measuring unit 22 by the transmitting unit 21a.

  The thickness measuring unit 22 measures the thickness of the workpiece W by, for example, a light reflection interference method. The thickness measurement unit 22 includes a reception unit 22a that receives the light reception signal transmitted from the measurement unit 21, and obtains the thickness of the workpiece W based on the light reception signal received by the reception unit 22a.

  Here, as shown in FIG. 3A, the laser light from the measurement unit 21 continues on the surface of the workpiece W while the measurement hole 19 passes over the surface of the workpiece W by the rotation of the upper surface plate 12. Is irradiated. Therefore, the thickness measurement unit 22 continuously measures the thickness of each in-plane position of the workpiece W on the passage trajectories Na to Nc of the measurement hole 19. And this thickness measurement part 22 is during the passage of the measurement hole 19 from the one end W1a-W3a of the workpiece | work W to the other end W1b-W3b, while the measurement hole 19 has passed each passage locus Na-Nc. A data string composed of a large number of continuous thickness data is output for each passage. Thereby, the thickness measuring unit 22 outputs a data string composed of a plurality of continuous data obtained by measuring the thickness of each in-plane position of the workpiece W every time the measurement hole 19 passes over the surface of the workpiece W. . The data string output from the thickness measuring unit 22 is stored in the memory 30.

  The shape calculation unit 23 obtains the cross-sectional shape of the workpiece W. The interval for obtaining the cross-sectional shape of the workpiece W can be arbitrarily set. In the first embodiment, for example, the cross-sectional shape of the work W is obtained based on a data string acquired for 15 seconds, and a new cross-sectional shape of the work W is obtained at intervals of 15 seconds. Further, shape information such as a workpiece cross-sectional shape created by the shape calculation unit 23, a workpiece shape pattern obtained by calculating the shape information, a conditional attribute when the workpiece W is polished, and the shape of the workpiece W A workpiece shape pattern or the like generated based on the learning result of the degree of correlation with information is stored in the memory 30.

  Further, the shape calculation unit 23 obtains a cross-sectional shape line T1 as shown in FIG. 3B. This cross-sectional shape line T1 is a shape drawing showing the cross-sectional shape of the workpiece W. The cross-sectional shape line T1 is obtained every time the thickness of the workpiece W is measured by the thickness measuring unit 22. Thereby, the transition of the shape change of the workpiece W is shown by arranging the cross-sectional shape lines T1 obtained for the same workpiece W in time series. Further, the processing result information which is the final workpiece shape of the workpiece W is indicated by the cross-sectional shape line T1 at the end of the polishing of the workpiece W. Information on the cross-sectional shape line T1 obtained by the shape calculating unit 23 (information on the cross-sectional shape of the workpiece W) is stored in the memory 30.

[Detailed memory configuration]
The memory 30 is a storage device that can read and write data from the shape measuring instrument 20 and the control unit 50. The memory 30 stores information on the thickness of the workpiece W obtained by the thickness measuring unit 22 and information on the cross-sectional shape of the workpiece W obtained by the shape calculating unit 23 (hereinafter referred to as “shape information of the workpiece W”). ) Etc. are stored.

  Further, the memory 30 stores the shape information of the workpiece W in association with the conditional attributes when the workpiece W is polished. Here, the “conditional attributes” are various parameters that affect the polishing process of the workpiece W such as polishing conditions, polishing environment, and apparatus characteristics and have a correlation with the polishing state of the workpiece W. “Conditional attributes” include, for example, operating conditions of the polishing machine 10, polishing slurry conditions, polishing pad conditions, carrier plate conditions, workpiece conditions, polishing process conditions, and the like.

  The operating conditions of the polishing machine 10 include, for example, the rotational speed of the lower surface plate 11 and the upper surface plate 12, the rotational speed of the sun gear 13 and the internal gear 14, the processing load setting value and unit pressure of the upper surface plate 12, and the load slope. The cooling water temperature of the lower surface plate 11 and the upper surface plate 12, the rotational speed of rotation and revolution of the carrier plate 15, the vibration state and tilt characteristics of the polishing machine 10, and the like. The polishing slurry conditions include, for example, the type / temperature / flow rate of the polishing slurry, the slurry life, the slurry pH value, and the like. The polishing pad conditions include, for example, the type / thickness / groove shape / surface roughness of the polishing pad 11a and the polishing pad 12a, the polishing pad life, the degree of deposit of the modified material, and seasoning conditions. The carrier plate conditions are the material / thickness of the carrier plate 15, the shape / deflection characteristics of the workpiece holding hole 15 a and the disposal hole, the carrier plate life, the wear generation site, and the like. The workpiece conditions include the type of workpiece W, the thickness at the start of polishing, the shape at the start of polishing, the variation of the workpiece thickness within the batch, and the like. The polishing process conditions are the transition information of the shape change within the batch, the number of continuous polishing, the workpiece polishing amount, the polishing time, the thickness difference between the carrier plate 15 and the workpiece W, and the like.

[Detailed configuration of display unit]
The display device 40 is obtained by arithmetically processing the shape information of the workpiece W currently being polished, the shape information of the workpiece W polished in the past, and the shape information of the workpiece W based on a display command from the control unit 50. Work shape pattern, workpiece shape pattern generated based on the learning result of the degree of correlation between the condition attribute when the workpiece W is polished and the shape information of the workpiece W, the polishing stop determination of the workpiece W being arbitrary, etc. Display information of. The indicator 40 is attached to the polishing machine 10, for example. The display 40 has a screen 40a (see FIG. 8) that can be viewed by the user of the polishing machine 10.

[Detailed configuration of control unit]
The control unit 50 includes a control calculation unit 51 including a CPU (Central Processing Unit), a sub memory 52, an input device 53, and the like. This control unit 50 is controlled by the control calculation unit 51 based on a program stored in the sub-memory 52, a processing target of the workpiece W input by the user of the polishing machine 10 via the input device 53, a conditional attribute, and the like. A control command is output to the first driving device M1 to the fifth driving device M5, and the operation of the polishing machine 10 is controlled.

  In addition, the control calculation unit 51 displays the first drawing P1 in which the shape drawing of the workpiece W being polished is arranged in time series on the display 40, and predicts the transition of the workpiece shape based on the shape information. A polishing stop determination process is performed to determine whether or not to stop the polishing of the workpiece W according to the prediction result. That is, the control calculation unit 51 includes a first drawing generation unit 54, a second drawing generation unit 55, a display control unit 56, a shape transition prediction unit 57, and a state determination unit 58.

The first drawing generation unit 54 extracts the shape information of the workpiece that is currently being polished (hereinafter referred to as “the workpiece Wα being polished”) measured by the shape measuring instrument 20 from the memory 30. Here, the shape information extracted from the memory 30 is shape information obtained between the start of polishing of the workpiece Wα being polished and the measurement performed immediately before the extraction of the shape information. Then, in the first drawing generation unit 54, a first drawing P1 (FIG. 5) in which the shape drawing (cross-sectional shape line T1) of the workpiece Wα being polished is arranged in time series based on the extracted shape information of the workpiece Wα being polished. 4).
The shape information of the workpiece Wα being polished increases as the number of measurements increases with the progress of polishing of the workpiece Wα being polished. Therefore, the first drawing P1 gradually changes from the diagram shown on the left side of FIG. 4 to the diagram shown on the right side of FIG. 4 according to the number of measurements.

The second drawing generation unit 55 acquires the conditional attribute of the workpiece Wα being polished, and sets the conditional attribute of the workpiece Wα being polished out of the workpiece W polished in the past, that is, before polishing the workpiece Wα being polished. Shape information of a workpiece linked to a matching conditional attribute (hereinafter referred to as “shape reference workpiece Wβ”) or a typical shape linked to a conditional attribute matching the conditional attribute of the workpiece Wα being polished Information is extracted from the memory 30.
Here, the shape information extracted from the memory 30 is extracted from a desired range of the shape information stored in the memory 30.

  The “typical shape information” is an abstract and representative shape information obtained mathematically as a typical shape transition when the workpiece W is polished, and the workpiece W is polished. It is the workpiece | work shape pattern produced | generated based on the learning result of the correlation degree between the conditional attribute at the time and the shape information of the workpiece | work W. FIG. In the following, the shape information of the shape reference workpiece Wβ or typical shape information is referred to as “shape information of the selected master”.

  Further, “matches the conditional attribute of the workpiece Wα being polished” means that the conditional attribute at the time of polishing is at least partially the same as the conditional attribute of the workpiece Wα being polished, This refers to a case where at least a part of the conditional attribute is similar. For example, as the conditional attributes of the workpiece Wα being polished, “rotational speed of lower surface plate 11 = A”, “rotational speed of upper surface plate 12 = B”, “slurry type = C”, “carrier material = D” are set. In this case, “rotational speed of lower surface plate 11 = A ± x”, “rotational speed of upper surface plate 12 = B ± y”, “slurry type = C or C ′”, “carrier material = D or It is determined that a conditional attribute such as “D ′” “matches the conditional attributes of the workpiece Wα being polished”, and the shape information of the selected master associated with these conditional attributes is extracted from the memory 30. Note that the criterion for determining whether or not the conditional attribute matches can be arbitrarily set.

  The second drawing generation unit 55 polishes the shape drawing (cross-sectional shape line T1) of the selected master from the start of polishing based on the shape information of the selected master extracted based on the conditional attribute of the workpiece Wα being polished. A second drawing P2 (see FIG. 5) arranged in order of time series until the stop is generated. Note that the second drawing generation unit 55 always monitors the conditional attribute of the workpiece Wα being polished while the workpiece W is being polished. And, for example, when the conditional attribute of the workpiece Wα during polishing deviates from the initial setting or assumed state during the progress of a certain batch due to the occurrence of an abnormal slurry flow rate, the conditional attribute of the workpiece Wα being polished Edit a new combination of conditional attributes based on the deviation pattern. Then, the shape information of the selected master associated with the newly edited combination of conditional attributes is extracted from the memory 30. Then, based on the newly extracted shape information of the selected master, the second drawing P2 is generated again. Further, the second drawing generation unit 55 may generate the second drawing P2 based on a virtual pattern of shape drawing derived by the learning function when the second drawing P2 is regenerated.

  In the display control unit 56, a control command for displaying the first drawing P1 generated by the first drawing generation unit 54 and the second drawing P2 generated by the second drawing generation unit 55 on the screen 40a of the display 40. Is output to the display 40. In addition, when the state determination unit 58 determines that the polishing process by the polishing machine 10 is to be stopped, the display control unit 56 displays a control command for displaying on the screen 40a of the display unit 40 that the polishing stop determination has been performed. Output to 40.

  In the shape transition prediction unit 57, the time series change of the shape information of the workpiece Wα being polished extracted by the first drawing generation unit 54, and the time series change of the shape information of the selected master extracted by the second drawing generation unit 55 Are compared. Then, the shape transition prediction unit 57 predicts a future shape transition of the workpiece Wα being polished based on the result of the comparison calculation. The shape transition of the workpiece Wα being polished predicted by the shape transition prediction unit 57 is a change in the workpiece shape obtained for each measurement including the final polished shape.

  And the comparison calculation of the time-sequential change of shape information by this shape transition prediction part 57 is performed in the following procedures, for example. That is, the cross-sectional shape line T1 of the selected master is arranged in time series for each conditional attribute. And the shape transition pattern of the selection master for every conditional attribute is produced | generated, and the database regarding a shape transition pattern is constructed | assembled. Here, in the selected master, the conditional attribute at the time of polishing matches the conditional attribute of the workpiece Wα being polished. Therefore, it is considered that the shape transition of the workpiece Wα during polishing is the same as that of the selected master.

Therefore, the shape transition prediction unit 57 compares the cross-sectional shape line T1 of the workpiece Wα being polished with the shape transition pattern stored in the database by pattern recognition. Then, referring to the shape transition of the selected master, it is estimated which stage the current polishing stage of the workpiece Wα is from the start of polishing to the stop of polishing. Further, the shape transition prediction unit 57 predicts the future shape transition of the workpiece Wα being polished based on the current polishing stage of the workpiece Wα being polished and the shape transition of the selected master.
The shape transition predicting unit 57 has a machine learning function, and updates the shape transition pattern and the temporal variation pattern as needed by machine learning. Further, when the conditional attribute monitored during polishing of the workpiece Wα being polished changes with a progress of the polishing process beyond the negligible range, the shape transition prediction unit 57 immediately adds a new one. Based on the conditional attribute, the shape of the subsequent workpiece Wα during polishing is predicted, calculated and output.

  The state determination unit 58 determines the current polishing state of the workpiece Wα being polished based on the future shape transition of the workpiece Wα being polished predicted by the shape transition prediction unit 57. Here, the “polishing state” includes a polishing stop state in which the workpiece shape of the workpiece Wα being polished has reached a workpiece shape capable of stopping the polishing process, a polishing continuation state in which the polishing process by the polishing machine 10 needs to be continued, and the like. Is included.

[Polishing stop judgment process]
FIG. 6 is a flowchart illustrating the flow of the polishing stop determination process executed by the control calculation unit 51 of the control unit 50 according to the first embodiment. Hereinafter, each step of the polishing stop determination process of the first embodiment will be described with reference to FIG.

In step S1, it is determined whether or not the workpiece W is being polished by the polishing machine 10. If YES (work polishing), the process proceeds to step S2. If NO (no workpiece polishing), step S1 is repeated.
Here, the determination of the workpiece polishing performed by the polishing machine 10 is accompanied by a control command from the control calculation unit 51 to the first driving device M1 to the fifth driving device M5, and is based on whether or not the polishing command flag is set. Do.

  In step S2, following the determination that the workpiece is being polished in step S1, the shape information of the workpiece Wα being polished measured by the shape measuring instrument 20 is extracted from the memory 30, and the process proceeds to step S3.

  In step S3, following the extraction of the shape information of the workpiece Wα being polished in step S2, the polishing machine 10 draws the shape of the workpiece Wα being polished based on the shape information of the workpiece Wα being polished extracted in step S2. A first drawing P1 (see FIG. 4) arranged in chronological order from the start of polishing to the measurement performed immediately before information extraction is generated, and the process proceeds to step S4.

In step S4, following the generation of the first drawing P1 in step S3, the first drawing P1 generated in step S3 and the second drawing P2 generated in the second drawing generation process described later (see FIG. 5). ) And the process proceeds to step S5.
Here, the process of generating the second drawing P2 (second drawing generation process) is performed in parallel with each step of the polishing stop determination process shown in FIG. 6, and the second drawing P2 is the workpiece Wα being polished. If the conditional attributes change during the polishing, the replacement is made as appropriate.

In step S5, following the reading of the first drawing P1 and the second drawing P2 in step S4, the first drawing P1 generated in step S3 and read in step S4 and the second drawing read in step S4 A control command for simultaneously displaying P2 on the screen 40a of the display 40 is output to the display 40, and the process proceeds to step S6.
In Example 1, as shown in FIG. 8, the display device 40 aligns the ratios of the X axis and the Z axis of the first drawing P1 and the second drawing P2 to be the same, and the first drawing P1 and the second drawing P1. The drawing P2 is arranged in the horizontal direction and displayed on the screen 40a. The display 40 also displays the conditional attributes (part or all) of the workpiece Wα being polished on the screen 40a at the same time. Whether to display all the conditional attributes may be set in consideration of the display space of the screen 40a, the convenience of monitoring the conditional attributes, and the like. Further, the conditional attribute of the workpiece Wα being polished may not be displayed on the screen 40a.

In step S6, following the output of the control command to the display 40 in step S5, the time series change of the shape information of the selected master extracted when generating the second drawing P2, and the polishing in progress extracted in step S2 The time series change of the shape information of the workpiece Wα is compared and calculated, and the future shape transition of the workpiece Wα being polished is predicted from the comparison calculation result, and the process proceeds to step S7.
Note that, when the second drawing P2 is replaced, the shape information of the selected master extracted when the second drawing P2 is generated changes in accordance with the replaced second drawing P2.

In step S7, following the prediction of the shape transition of the workpiece Wα being polished in step S6, the polishing state of the workpiece Wα being polished is determined based on the predicted shape transition, and the process proceeds to step S8.
Here, the polishing state of the workpiece Wα being polished is determined to be either a “polishing stop state” that has reached a workpiece shape capable of stopping the polishing process or a “polishing continuation state” that requires continuation of the polishing process.

In step S8, following the determination of the polishing state of the workpiece Wα being polished in step S7, whether the polishing of the workpiece Wα being polished by the polishing machine 10 is stopped based on the determination of the polishing state performed in step S7. Determine whether or not. If YES (stop polishing), the process proceeds to step S9. If NO (continuous polishing), the process proceeds to step S2.
Here, the determination of the polishing stop of the workpiece Wα being polished is made when it is determined as “polishing stopped state” in step S7.

  In step S9, following the determination of polishing stop in step S8, a control command for displaying on the screen 40a of the display 40 that the polishing stop of the workpiece Wα being polished is determined is output to the display 40, and the polishing stop determination is made. Is advanced to step S10.

In step S10, following the notification of the polishing stop determination in step S9, the polishing of the workpiece Wα being polished by the polishing machine 10 is stopped and the process proceeds to the end.
Here, the polishing process by the polishing machine 10 is stopped by outputting a stop control command from the control calculation unit 51 to the first driving device M1 to the fifth driving device M5.

[Second drawing generation processing configuration]
FIG. 7 is a flowchart illustrating the flow of the second drawing generation process executed by the second drawing generation unit 55 of the control unit 50 according to the first embodiment. Hereinafter, based on FIG. 7, each step of the 2nd drawing production | generation process of Example 1 is demonstrated.

In step S <b> 11, it is determined whether or not the workpiece W is being polished by the polishing machine 10. If YES (work polishing), the process proceeds to step S12. If NO (no workpiece polishing), step S11 is repeated.
Here, the determination of the workpiece polishing by the polishing machine 10 is performed in the same manner as Step S1 in the polishing stop determination process.

In step S12, following the determination that the workpiece is being polished in step S11, the conditional attribute of the workpiece Wα that is currently being polished is acquired, and the process proceeds to step S13.
Here, the conditional attributes of the workpiece Wα being polished are input by the user of the polishing machine 10 via the input device 53 at the start of polishing of the workpiece Wα being polished, stored in advance in the sub-memory 52, or via the CPU. The state of change is monitored by sensors.

  In step S13, following the acquisition of the conditional attribute of the workpiece Wα being polished in step S12, the workpiece W that has been polished in the past is linked to the conditional attribute that matches the conditional attribute acquired in step S12. The selected master shape information (shape reference workpiece Wβ shape information or typical shape information) is extracted from the memory 30, and the process proceeds to step S14.

  In step S14, following the extraction of the shape information of the selected master in step S13, the shape drawing of the selected master is performed from the start of polishing by the polishing machine 10 to the stop of polishing based on the shape information of the selected master extracted in step S13. The second drawing P2 (see FIG. 5) arranged in order of time series is generated, and the process proceeds to step S15.

In step S15, following the generation of the second drawing P2 in step S14, it is determined whether or not polishing of the workpiece Wα being polished is continued. If YES (polishing continued), the process proceeds to step S16. In the case of NO (polishing stop), the generation and replacement of the second drawing P2 are unnecessary and the process proceeds to the end, and the second drawing generation process is terminated.
Here, the determination that the polishing of the workpiece Wα being polished is continued is performed when it is determined that the “polishing continuation state” in which the polishing process needs to be continued based on the polishing state of the workpiece Wα being polished.

  In step S16, following the determination that polishing is continued in step S15, the conditional attribute of the workpiece Wα being polished is acquired again, and the process proceeds to step S17.

In step S17, following the re-acquisition of the conditional attribute of the workpiece Wα being polished in step S16, it is determined whether or not the state of the conditional attribute of the workpiece Wα being polished has changed. If YES (changed), the process proceeds to step S18. If NO (no change), the process returns to step S15.
Here, whether or not a state change has occurred in the conditional attribute of the workpiece Wα being polished is determined based on the conditional attribute of the workpiece Wα being polished acquired in step S16 and the conditional attribute of the workpiece Wα being polished acquired before that. And judge based on the difference. Note that the case where the state change occurs in the conditional attribute of the workpiece Wα during polishing means that the conditional attribute greatly deviates from the initially set state as the polishing process proceeds, or the conditional attribute is large from the assumption. For example, when it fluctuates.

In step S18, following the determination that there is a change in the state of the conditional attribute in step S17, the conditional attribute of the selected master is determined based on the changed conditional attribute of the workpiece Wα being polished acquired in step S16. Edit and proceed to step S19.
Here, the editing of the conditional attribute is based on the conditional attribute of the workpiece Wα being polished, as a conditional attribute of the selected master having a high influence on the polishing process of the workpiece W or a specific condition. Select or replace the corresponding conditional attribute.

  In step S19, following the editing of the conditional attribute in step S18, the shape information (the shape reference work Wβ of the shape reference work Wβ) linked to the conditional attribute that most closely matches the conditional attribute edited in step S19. Shape information or typical shape information) is extracted from the memory 30, and the process proceeds to step S20.

  In step S20, following the extraction of the shape information of the selected master in step S19, the second drawing P2 is generated again based on the shape information of the selected master extracted in step S19. Then, the second drawing P2 generated up to the time when the shape information of the selected master is extracted again is replaced with the newly generated second drawing P2, and the process returns to step S15.

The operation will be described below.
First, the “problem when the workpiece polishing is stopped” will be described, and then the operation of the polishing apparatus 1 according to the first embodiment will be described separately as “the polishing stopping operation” and “the shape transition prediction accuracy improving operation”.

[Problems when stopping workpiece polishing]
When both surfaces of the workpiece W are polished by the polishing machine 10 of the polishing apparatus 1, the thickness and cross-sectional shape of the workpiece W gradually change as the polishing process proceeds. In particular, the cross-sectional shape of the workpiece W is generally determined by a difference in thickness between the carrier plate 15 and the workpiece W when other conditional attributes are desirable and is constant. It changes from “convex / periphery sag shape” to “flat shape” to “center concave / periphery tactile shape”. The “central convex shape” is a shape in which the thickness of the central portion of the workpiece W is larger than that of the outer peripheral region. The “peripheral sag shape” is a shape in which the thickness gradually decreases toward the outer peripheral edge of the workpiece W. The “flat shape” is a shape in which the entire surface of the workpiece W is substantially flat. The “center concave shape” is a shape in which the thickness of the central portion of the work W is smaller than that of the outer peripheral region. Further, the “peripheral tapping shape” is a shape in which the thickness gradually increases toward the outer peripheral edge of the workpiece W.

  Then, by stopping the polishing process when the thickness of the workpiece W is within the target thickness range (T1 ≦ thickness ≦ T2), the workpiece W has a desired thickness. On the other hand, although the cross-sectional shape of the workpiece W depends on the setting in the subsequent machining process, it is often preferable that the workpiece W is generally a “flat shape” in which the entire surface of the workpiece W is substantially flat. Therefore, it is desired that the polishing process of the workpiece W be stopped when the thickness is within the target thickness range and the cross-sectional shape becomes a “flat shape”.

  On the other hand, the thickness of the workpiece W is measured in real time, and each time the measurement is performed, a shape drawing of the workpiece W being polished is generated based on the measurement result. The user of the polishing machine 10 monitors the drawing of the shape of the workpiece W, and the polishing machine 10 is moved at a timing when the thickness of the workpiece W is within the target thickness range and the cross-sectional shape seems to have reached the “flat shape”. It is done to stop.

  However, the cross-sectional shape change process (shape transition) of the workpiece W may be different due to the influence of the difference in the conditional attributes at the time of polishing the workpiece W. Further, the cross-sectional shape of the workpiece W may not be a desired shape such as a “flat shape” due to the correlation with the conditional attribute at the time of polishing the workpiece W, and in that case, it is secondarily acceptable. The polishing process needs to be stopped at the cross-sectional shape.

  On the other hand, it is difficult to predict how the workpiece shape will change in the future only by temporarily monitoring the shape drawing of the workpiece W. That is, for example, in the case of the workpiece W having a “weak central convex shape” at the present time, there are a case where a “flat shape” and a “periphery shape” are obtained by continuing the polishing process. Only by temporarily monitoring the “weak central convex shape” that is the current workpiece shape, the workpiece shape after that is unknown, and the polishing process cannot be stopped at an appropriate timing. Therefore, SFQR (Site front least squares range) in the work outer peripheral area may be deteriorated. In addition, although the workpiece W has a “flat shape”, the polishing stop timing may be delayed from the appropriate time.

  That is, the transition of the shape change of the workpiece W during polishing cannot be grasped only by temporarily monitoring the shape drawing of the workpiece W. For this reason, there arises a problem that the polishing of the workpiece W cannot be stopped at the timing when the desired workpiece shape is achieved or when the desired workpiece shape is achieved based on the transition of the shape change of the workpiece W.

[Polishing stop action]
In the polishing apparatus 1 according to the first embodiment, the thickness and cross-sectional shape of the workpiece W are measured by the shape measuring device 20 while the workpiece W is being polished by the polishing machine 10. The polishing apparatus 1 stores information on the thickness and cross-sectional shape of the workpiece W measured by the shape measuring instrument 20 in the memory 30.

  On the other hand, when the polishing of the workpiece W is executed by the polishing machine 10, the control calculation unit 51 of the control unit 50 determines that the workpiece W is being polished, and steps S1 to S2 and S3 shown in the flowchart of FIG. Each process of step S4 is performed in order. That is, the first drawing generation unit 54 extracts the shape information of the workpiece Wα being polished from the memory 30, and generates the first drawing P1 based on the extracted shape information of the workpiece Wα being polished. Further, the display control unit 56 reads the first drawing P1 generated by the first drawing generation unit 54 and the second drawing P2 generated by the second drawing generation unit 55, and the screen 40a of the display device 40 is read. Outputs a control command to display the first drawing P1 and the second drawing P2.

  As a result, the first drawing P1 and the second drawing P2 are simultaneously displayed on the screen 40a of the display device 40. Thus, in the polishing apparatus 1 according to the first embodiment, when the shape of the workpiece Wα being polished is measured by the shape measuring instrument 20, the first drawing P1 is displayed on the display 40.

  Here, the first drawing P1 is obtained by arranging the shape drawing (cross-sectional shape line T1) of the workpiece Wα being polished in order in time series. Therefore, the user of the polishing machine 10 can recognize a list of the shape drawing of the workpiece Wα that is being continuously drawn. Thereby, the user can grasp the transition of the shape change of the workpiece Wα during polishing from the start of polishing to the present (first drawing generation time). As a result, the user can predict the future shape transition of the workpiece Wα being polished based on the transition of the shape change of the workpiece Wα being polished. Therefore, even when the polishing machine 10 is controlled by a manual operation by the user and the polishing process is stopped, the polishing process is easily stopped at the timing when the desired workpiece shape is reached or when the desired workpiece shape is reached.

  Further, since the user can recognize the shape drawing of the workpiece Wα being polished in a list associated with the conditional attributes, the user can design the apparatus of the polishing machine 10, the design of the auxiliary material such as the slurry, the auxiliary material. It is possible to easily plan improvement of the conditional attributes at the time of workpiece polishing such as selection and further selection of processing conditions. Then, the user can plan the process improvement more efficiently, and as a result, it is possible to improve the productivity of the wafer whose final work shape becomes a desired shape.

  Moreover, in the first embodiment, the first drawing P1 and the second drawing P2 are simultaneously displayed on the screen 40a of the display device 40. Therefore, the user of the polishing machine 10 can simultaneously monitor the first drawing P1 and the second drawing P2 by viewing the screen 40a.

  Here, the second drawing P2 is obtained by sequentially arranging the shape drawing (cross-sectional shape line T1) of the selected master in time series based on the shape information of the selected master extracted based on the conditional attribute of the workpiece Wα being polished. It is. Therefore, the user of the polishing machine 10 monitors the first drawing P1 and at the same time confirms the second drawing P2, so that the shape transition of the selected master indicated in the second drawing P2 is referred to and the workpiece Wα is being polished. Future changes in shape can be predicted more accurately. As a result, when the user controls the polishing machine 10 by manual operation to stop the polishing process, the polishing process can be stopped at a more appropriate timing. Furthermore, depending on the case, conditional attributes can be changed intentionally to adjust the final workpiece shape and the timing of completion of polishing.

  On the other hand, in the polishing apparatus 1 of the first embodiment, after the first drawing P1 and the second drawing P2 are displayed on the screen 40a of the display device 40, each of steps S6 to S7 and step S8 shown in the flowchart of FIG. Process in order. That is, the shape transition prediction unit 57 compares the time series change of the shape information of the workpiece Wα being polished and the time series change of the selected master, and predicts the future shape change of the workpiece Wα being polished based on the result. To do. Further, the state determination unit 58 determines the current polishing state of the workpiece Wα being polished based on the shape transition of the workpiece Wα being polished predicted by the shape transition prediction unit 57, and polishes based on the determination result of the polishing state. It is determined whether or not machining is stopped.

  When the state determination unit 58 determines that the polishing process of the workpiece Wα being polished is to be stopped, the process of step S9 shown in the flowchart of FIG. 6 is performed. That is, the display control unit 56 outputs a control command to display on the screen 40a of the display 40 that the polishing stop of the workpiece Wα being polished has been determined. Then, the screen 40a of the display 40 displays that the polishing stop of the workpiece Wα being polished has been determined, and notifies the determination of the polishing stop.

  As a result, the user of the polishing machine 10 can grasp that the polishing stop has been determined by viewing the screen 40a. Thereby, even if it is a case where a user controls polisher 10 by manual operation and stops polish processing, polish processing can be stopped at an appropriate timing. As will be described later, even when the polishing machine 10 is stopped by a stop control command from the control unit 50, the user can recognize the stop operation of the polishing machine 10.

  Then, the process of step S10 shown in the flowchart of FIG. 6 is performed. That is, the control calculation unit 51 of the control unit 50 outputs various outputs for finishing the polishing process such as a stop control command to the first driving device M1 to the fifth driving device M5. As a result, the polishing machine 10 automatically stops after a predetermined sequence, and the polishing of the workpiece Wα being polished is completed. As a result, in the polishing apparatus 1 according to the first embodiment, it is possible to prevent the polishing process stop timing from being delayed from the appropriate time and automatically stop the polishing process at an appropriate timing.

  In the polishing apparatus 1 according to the first embodiment, the shape transition prediction unit 57 and the state determination unit 58 included in the control calculation unit 51 of the control unit 50 allow the time series change of the shape information of the workpiece Wα being polished and the selection master. Comparing with time series change. Furthermore, based on the result of this comparison calculation, the transition of the shape change of the workpiece Wα during polishing is predicted. Based on the transition of the shape change of the workpiece Wα being polished, the polishing state of the workpiece Wα being polished is automatically recognized.

  Here, the shape information of the selected master is linked to a conditional attribute that matches the conditional attribute of the workpiece Wα being polished. Therefore, the time-series change of the selected master reflects the correlation between the conditional attribute of the workpiece Wα being polished and the shape transition. Thereby, in this polishing apparatus 1, the prediction accuracy of the shape transition of the workpiece Wα being polished can be improved, and the state determination of the workpiece Wα being polished can be appropriately performed. Then, by appropriately determining the state of the workpiece Wα being polished, the polishing process is stopped at an optimal timing when the workpiece Wα being polished has a desired shape or the workpiece Wα being polished becomes a desired shape. Can do.

  Further, in the polishing apparatus 1 of the first embodiment, the stop of the polishing process or the continuation of the polishing process is determined according to the polishing state of the workpiece Wα being polished, and the polishing machine 10 is automatically stopped at a timing determined to be appropriate. By automatically performing the polishing stop in this way, it is possible to prevent the polishing stop timing from being delayed from the appropriate time. Further, depending on how to control the apparatus, it is possible to intentionally change the conditional attributes of the workpiece Wα being polished, and to adjust the final workpiece shape and the polishing end timing.

  Further, in the first embodiment, the second drawing generation unit 55 performs the second drawing generation process in parallel with the polishing stop determination process, and the polishing from the start to the end of the polishing of the workpiece Wα being polished is performed. It is monitored whether or not the conditional attribute of the medium work Wα is changed. When the conditional attribute of the workpiece Wα during polishing changes, the second drawing P2 is replaced regardless of the step at that point in the polishing stop determination process.

  That is, when the polishing process of the workpiece W is executed by the polishing machine 10, the second drawing generation unit 55 determines that the workpiece W is being polished, and steps S11 to S12, step S13, and step S13 shown in the flowchart of FIG. Each process of S14 is performed in order. That is, the second drawing generation unit 55 acquires the conditional attribute of the workpiece Wα being polished, and the shape information (shape reference workpiece Wβ) associated with the conditional attribute that matches the acquired conditional attribute. The shape information or typical shape information) is extracted from the memory 30. And this 2nd drawing production | generation part 55 produces | generates 2nd drawing P2 based on the shape information of the extracted selection master.

  If the 2nd drawing P2 is produced | generated, the 2nd drawing production | generation part 55 will perform the process of step S15, and will determine whether the grinding | polishing process of the workpiece | work Wα in grinding | polishing is continued. When the polishing process is continued, the processes of step S16 and step S17 are performed in order, the conditional attribute of the workpiece Wα being polished is obtained again, and it is determined whether or not the conditional attribute has changed. To do.

  When it is determined that the conditional attribute of the workpiece Wα being polished has changed, it is determined that the conditional attribute has changed during the polishing process, and steps S18 to S19 and S20 shown in the flowchart of FIG. 7 are performed. Perform the process. In other words, the conditional attribute of the selected master is re-edited based on the re-acquired conditional attribute of the workpiece Wα being polished, and the selected master associated with the conditional attribute that best matches the re-edited conditional attribute. Based on the above, a new second drawing P2 is generated. Then, the previous second drawing P2 is replaced with a new one.

  Thereby, even if the conditional attribute of the workpiece Wα being polished changes with the progress of the polishing process, the second drawing P2 can be the latest drawing according to the change of the conditional attribute of the workpiece Wα being polished. Then, it is possible to appropriately perform the shape prediction of the workpiece Wα during polishing thereafter.

A specific example will be described below.
As shown in FIG. 9A, in the polishing stage A at the initial stage of polishing, the first work W1 having a cross-sectional shape of “strongly concave shape” having a relatively large indent at the center is subjected to polishing and is targeted for thickness. In the polishing stage B immediately after reaching the thickness range (T1 ≦ thickness ≦ T2), the cross-sectional shape becomes “weakly concave shape (a state where the central portion is small and recessed)”. Then, the polishing process is continued, and the cross-sectional shape of the first workpiece W1 becomes a “flat shape” at the polishing stage C when the thickness is close to the target lower limit (T1) of the thickness range.

  On the other hand, as shown in FIG. 9B, in the polishing stage A at the initial stage of polishing, the second work W2 having a cross-sectional shape of “weakly convex shape” whose central portion protrudes relatively small is subjected to polishing and has a thickness of In the polishing stage B immediately after reaching the target thickness range (T1 ≦ thickness ≦ T2), the cross-sectional shape becomes “weakly concave shape (a state where the central portion is small and recessed)”. However, the polishing process is continued thereafter, and in the polishing stage C when the thickness is close to the lower limit (T1) of the target thickness range, the cross-sectional shape of the second workpiece W2 is “a strongly concave shape (the central portion is greatly depressed). State) ”.

  On the other hand, in the polishing apparatus 1 according to the first embodiment, the first drawing P1 in which the shape drawing of the first workpiece W1 and the second workpiece W2 is arranged in time series is generated, and the first drawing P1 is displayed on the display 40. Display. Therefore, the shape transition of each of the first workpiece W1 and the second workpiece W2 can be grasped from the first drawing P1, and the subsequent shape change can be predicted.

  That is, in the polishing apparatus 1 of the first embodiment, at the polishing stage B, it can be determined that the first work W1 is “the dent at the central portion is gradually becoming shallower, and it is better to perform polishing until the polishing stage C”. . On the other hand, in the second workpiece W2, it can be determined that “the dent in the central portion becomes gradually deeper, so it is better to stop the polishing process in the polishing stage B than in the polishing stage C”. As described above, the polishing apparatus 1 according to the first embodiment can appropriately determine the best timing for stopping polishing in accordance with the workpiece shape at the start of polishing and can polish the workpiece into a desired workpiece shape.

  Further, in the polishing apparatus 1 according to the first embodiment, the time series change of the shape information of the workpiece Wα being polished is compared with the time series change of the selected master. For this reason, even if it is a case where the transition of the future work shape change cannot be predicted only by the shape transition of the current batch, the shape transition can be appropriately predicted.

  As shown in FIG. 10A, the third work W3 having a “strongly convex shape” whose central portion protrudes relatively large at the start of polishing is polished by the polishing machine 10 having a “conditional attribute in which the peripheral edge of the work is difficult to warp”. The case will be described. In the polishing stage A at the initial stage of polishing, the cross-sectional shape of the “strongly convex” third workpiece W3 is the polishing stage immediately after the polishing process proceeds and the thickness reaches the target thickness range (T1 ≦ thickness ≦ T2). In B, a “weakly convex shape (a state in which the central portion protrudes small)” is obtained. Further, the polishing process is continued, and the cross-sectional shape of the third workpiece W3 becomes a “flat shape” at the polishing stage C when the thickness is close to the lower limit (T1) of the target thickness range.

  On the other hand, as shown in FIG. 10B, the fourth work W4 having a “strongly convex shape” whose central portion protrudes relatively large at the start of polishing is polished by the polishing machine 10 having “conditional attributes in which the peripheral edge of the workpiece is easily warped” The case of performing will be described. In the polishing stage A at the initial stage of polishing, the cross-sectional shape of the “strongly convex” fourth workpiece W4 is the polishing stage immediately after the polishing process proceeds and the thickness reaches the target thickness range (T1 ≦ thickness ≦ T2). In B, a “weakly convex shape (a state in which the central portion protrudes small)” is obtained. Further, in the polishing stage C where the polishing process is continued and the thickness is close to the lower limit (T1) of the target thickness range, the cross-sectional shape of the fourth workpiece W4 is “weakly convex / weakly tactile shape (central portion and peripheral edge). The state where each part protrudes small).

  Here, when the accumulation of data is still insufficient and it is not possible to predict a shape transition having a strong correlation with the conditional attribute, for example, the workpiece polished immediately before polishing of the workpiece Wα being polished (for example, one batch before) From the shape transition, it is possible to predict the shape transition of the workpiece Wα being polished after a certain point in the current batch showing the shape transition having the same tendency as the current batch. That is, in the polishing apparatus 1 according to the first embodiment, for example, a workpiece that is polished one batch before the workpiece Wα being polished is employed as the selected master. Then, by comparing the time series change of the selected master with the time series change of the shape information of the third work W3 and the fourth work W4, the polishing machine 10 used in the current batch or a batch performed before and after the batch. Can be estimated.

  That is, in the polishing apparatus 1 according to the first embodiment, when polishing is performed with the polishing machine 10 having the “conditional attribute that the peripheral edge of the workpiece is less likely to warp”, the “periphery even when the protrusion at the center portion becomes shallower” at the polishing stage B. Since it is difficult for the region to come out, it is better to perform polishing until the polishing stage C ”. On the other hand, when performing the polishing process with the polishing machine 10 having the “conditional attribute that the peripheral edge of the workpiece is likely to warp”, the polishing process proceeds to the outer peripheral region as the polishing process progresses. It is better to stop the polishing process at the polishing stage B than to polish to C ”. As described above, the polishing apparatus 1 according to the first embodiment appropriately determines the best timing of polishing stop according to the conditional attribute of the polishing machine 10 selected by the user or the given conditional attribute of the polishing machine 10. , And can be polished into a desired workpiece shape.

[Prediction accuracy improvement effect of shape transition]
In the polishing apparatus 1 according to the first embodiment, the condition information at the time of polishing the workpiece W is associated with the shape information of the workpiece W and stored in the memory 30. Then, the shape information of the selected master associated with the conditional attribute that matches the conditional attribute of the workpiece Wα being polished is extracted from the memory 30, and the second drawing P2 is drawn based on the extracted shape information of the selected master. Generate.

  Therefore, the shape transition of the selected master indicated by the second drawing P2 reflects the correlation between the conditional attribute and the shape transition in the workpiece Wα being polished. And by displaying such 2nd drawing P2 simultaneously with 1st drawing P1, the prediction precision of the shape transition of workpiece | work Wα in grinding | polishing by the user who monitored these drawing can be improved.

  In addition, as shape information of the selected master, a workpiece shape pattern (typical shape information) generated based on the learning result of the degree of correlation between the conditional attribute when the workpiece W is polished and the shape information of the workpiece W Can be used to improve the transition accuracy of the workpiece shape indicated by the second drawing P2 as compared with the case where the shape information of the shape reference workpiece Wβ is used as the shape information of the selected master. Therefore, it is possible to more accurately predict the shape transition of the workpiece Wα being polished, and to stop polishing at an appropriate timing.

  In the first embodiment, the shape transition prediction unit 57 has a machine learning function, and updates the shape transition prediction pattern stored in the database as needed by machine learning. As a result, the shape transition prediction of the workpiece Wα being polished after the current time becomes automatically more accurate.

  Furthermore, by improving the prediction accuracy of the shape transition, when the state determination of the workpiece Wα being polished is performed based on the prediction of the workpiece shape transition, it is possible to more appropriately determine the workpiece state. As a result, it is possible to stop polishing at an optimal timing with higher accuracy.

Next, the effect will be described.
In the polishing apparatus 1 of Example 1, the effects listed below can be obtained.

(1) a polishing machine 10 for polishing a workpiece W by rotating surface plates (lower surface plate 11 and upper surface plate 12);
A shape measuring instrument 20 for measuring the shape of the workpiece W through a measurement hole 19 formed in the surface plate (upper surface plate 12);
A memory 30 for storing shape information of the workpiece W measured by the shape measuring instrument 20;
A display 40 for displaying the shape information of the workpiece W measured by the shape measuring instrument 20;
A control unit 50 for controlling the display content of the display 40,
The control unit 50 generates a first drawing P1 in which the shape drawing of the workpiece Wα being polished, which is the workpiece currently being polished, measured by the shape measuring instrument 20 is arranged in time series, and the display unit 40 displays the first drawing P1. It was set as the structure displayed on.
Thereby, based on the transition of the shape change of the workpiece Wα being polished, the polishing process of the workpiece Wα being polished can be stopped at the timing when the desired workpiece shape is reached or when the desired workpiece shape is reached.

(2) The memory 30 stores the shape information of the workpiece W in association with the conditional attributes when the workpiece W is polished,
The control unit 50 changes the time series of the shape information of the workpiece Wα being polished and the time series change of the shape information (the shape information of the selected master) associated with the conditional attribute that matches the conditional attribute of the workpiece Wα being polished. The shape transition of the workpiece Wα being polished is predicted on the basis of the result of the comparison calculation, and the state determination of the workpiece Wα being polished is performed based on the prediction of the shape transition of the workpiece Wα being polished.
As a result, it is possible to improve the prediction accuracy of the shape transition of the workpiece Wα being polished and to appropriately perform the state determination. The optimum timing at which the workpiece Wα is in a desired shape or the workpiece Wα being polished is desired. The polishing process can be stopped at the optimal timing for forming the shape.

(3) a polishing machine 10 for polishing the workpiece W by rotating surface plates (lower surface plate 11 and upper surface plate 12);
A shape measuring instrument 20 for measuring the shape of the workpiece W through a measurement hole 19 formed in the surface plate (upper surface plate 12);
A memory 30 for storing shape information of the workpiece W measured by the shape measuring instrument 20;
A display 40 for displaying the shape information of the workpiece W measured by the shape measuring instrument 20;
A control unit 50 for controlling the display content of the display 40,
The control unit 50 performs the polishing process before the polishing of the workpiece Wα being polished, and the first drawing P1 in which the shape drawing of the workpiece Wα being polished, which is the workpiece currently being polished, measured by the shape measuring instrument 20 is arranged in time series. The second drawing P2 in which the shape drawing of the workpiece (selected master) is arranged in time series is generated, and the first drawing P1 and the second drawing P2 are simultaneously displayed on the display 40.
Thereby, based on the transition of the shape change of the workpiece Wα being polished, the polishing process of the workpiece Wα being polished can be stopped at the timing when the workpiece shape becomes a desired shape or the timing when the workpiece Wα being polished becomes a desired shape.

(4) The memory 30 stores the shape information of the workpiece W in association with the conditional attributes when the workpiece W is polished,
The control unit 50 is configured to generate the second drawing P2 based on the shape information of the workpiece (selected master) associated with the conditional attribute that matches the conditional attribute of the workpiece Wα being polished.
Thereby, the prediction accuracy of the shape transition of the workpiece Wα being polished can be improved.

(5) The control unit 50 performs the second drawing based on the workpiece shape pattern (typical shape information) generated based on the degree of correlation between the conditional attribute when the workpiece W is polished and the shape information of the workpiece W. P2 is generated.
Thereby, the transition accuracy of the workpiece shape indicated by the second drawing P2 can be improved, and the shape transition of the workpiece Wα being polished can be predicted more accurately.

(6) The memory 30 stores the shape information of the workpiece W in association with the conditional attributes when the workpiece W is polished,
The control unit 50 changes the time series of the shape information of the workpiece Wα being polished and the time series change of the shape information (the shape information of the selected master) associated with the conditional attribute that matches the conditional attribute of the workpiece Wα being polished. The shape transition of the workpiece Wα being polished is predicted on the basis of the result of the comparison calculation, and the state determination of the workpiece Wα being polished is performed based on the prediction of the shape transition of the workpiece Wα being polished.
Thereby, the prediction accuracy of the shape transition of the workpiece Wα being polished can be improved and the state determination can be appropriately performed, and the workpiece Wα being polished has a desired shape, or the workpiece Wα being polished has a desired shape. The polishing process can be stopped at an optimal timing.

(7) As a result of determining the state of the workpiece Wα being polished, the control unit 50 stops the polishing process of the workpiece Wα being polished and also polishes the workpiece Wα being polished. It was set as the structure which alert | reports that the process stop determination was carried out.
Accordingly, it is possible to automatically stop the polishing of the workpiece Wα during polishing at an appropriate timing and notify the user of the polishing machine 10 of the stop of the polishing process.

(Example 2)
The polishing apparatus according to the second embodiment is an example in which a responsibility parameter is specified when the final workpiece shape of the workpiece Wα being polished becomes a second acceptable workpiece shape, and the responsibility parameter is notified. Hereinafter, the polishing apparatus of Example 2 will be described. In addition, about the structure equivalent to the grinding | polishing apparatus 1 of Example 1, the code | symbol same as Example 1 is attached | subjected and detailed description is abbreviate | omitted.

  In the polishing apparatus 1A according to the second embodiment, as illustrated in FIG. 11, the control calculation unit 51A of the control unit 50A includes a first drawing generation unit 54, a second drawing generation unit 55, a display control unit 56A, and a shape transition. A prediction unit 57A, a state determination unit 58A, a parameter specifying unit 59, and a correlation data processing unit 60 are included.

  In the shape transition prediction unit 57A of the second embodiment, the time series change of the shape information of the workpiece Wα being polished is compared with the time series change of the shape information of the selected master, and based on the result of this comparison calculation, the polishing is in progress. Predict the future shape transition of the workpiece Wα. Further, in this shape transition prediction unit 57A, the final workpiece shape of the workpiece Wα being polished is received based on the prediction of the future shape transition of the workpiece Wα being polished as needed with the support of the correlation data processing unit 60. (Hereinafter referred to as “final workpiece shape”) predicts whether or not the desired workpiece shape can be obtained.

  Here, the “desired workpiece shape (hereinafter referred to as“ desired state ”)” is a shape that satisfies a preset first shape condition. On the other hand, when it is predicted that the final workpiece shape cannot be in the desired state, the shape transition prediction unit 57A receives the support of the correlation degree data processing unit 60 as necessary, and the final workpiece shape is secondarily. Predict whether an acceptable workpiece shape can be achieved. The “secondarily acceptable work shape (hereinafter referred to as“ secondary acceptable state ”)” means that the final work shape cannot be in a desired state, that is, the first work shape is continued even if polishing is continued. The shape satisfies the second shape condition set when it is determined that the shape condition is not satisfied.

  The state determination unit 58A according to the second embodiment determines the current polishing state of the workpiece Wα being polished based on the future shape transition of the workpiece Wα being polished predicted by the shape transition prediction unit 57A. Here, in the “polishing state” determined by the state determining unit 58A, the first polishing stopped state in which the workpiece shape of the workpiece Wα being polished has reached a desired state, or the workpiece shape of the workpiece Wα being polished is secondary. The second polishing stopped state that has reached the allowable state, the third polishing stopped state that requires immediate polishing stop, the polishing continued state that requires continuation of polishing by the polishing machine 10, and the like are included.

  In the parameter specifying unit 59, when the shape transition predicting unit 57A determines that the final workpiece shape can be in the secondary allowable state, the final workpiece shape of the workpiece Wα being polished is in the secondary allowable state ( A conditional attribute (hereinafter referred to as “responsibility parameter”) having a high degree of correlation is specified. The parameter specifying unit 59 may enumerate responsibility parameters in descending order of correlation strength.

  The responsibility parameter is specified by the parameter specifying unit 59, for example, in the following procedure. That is, the correlation data processing unit 60 searches for the abnormal state of the workpiece shape stored in the memory 30 and the condition attribute data having a high correlation strength, and is determined to be in the secondary allowable state. The condition attribute of the work Wα is checked. Then, a conditional attribute having a relatively high correlation strength is specified as a “responsibility parameter”. The responsibility parameter may be one or plural.

  In addition, the parameter specification unit 59 enumerates the responsibility parameters in the order of the degree of correlation degree strength, for example, in the following procedure. That is, the abnormal state of the workpiece shape and the data of the conditional attribute having a high correlation strength are collated with the conditional attribute of the workpiece Wα being polished that has been determined to be in the secondary allowable state. Then, a plurality of conditional attributes are selected in descending order of correlation strength, and responsibility parameters are listed in the selected order. Note that the number of conditional attributes to be selected may be two or more.

  It is also possible to analyze the correlation between the abnormal state information monitored during polishing of the workpiece W, such as temperature distribution data on the polishing pad, bearing vibration and temperature data, and the abnormal state of the workpiece shape. Is possible. Therefore, by monitoring the correlation between not only a single workpiece shape transition but also a workpiece shape transition trend across multiple batches and a conditional attribute transition trend, the responsibility parameters and the correlation strength of the responsibility parameters Specific accuracy can be improved. Note that multivariate analysis, artificial intelligence (machine learning, deep learning), or the like can be used to update these correlation analyzes, prediction models based on the correlation analysis, and update prediction accuracy as needed.

  Then, in the display control unit 56A of the second embodiment, when the control command to display on the screen 40a of the display 40 that the polishing stop determination has been performed is output to the display 40, the state determination unit 58A causes the “first polishing stop” to be displayed. When it is determined as “state”, a control command for displaying that the workpiece shape is in a desired state is output. When the state determination unit 58A determines that the state is the “second polishing stop state”, the fact that the workpiece shape is a secondary allowable state, information on the responsibility parameter specified by the parameter specification unit 59, or the degree of correlation A control command for displaying information on responsibility parameters listed in descending order of strength is output. Furthermore, when the state determination unit 58A determines that the state is the “third polishing stopped state”, a control command for displaying that the workpiece shape is an unacceptable shape is output.

  The correlation data processing unit 60 searches for the correlation strength between the conditional attribute of the workpiece W, the shape transition of the workpiece W during polishing, and the final workpiece shape. The search for the correlation strength by the correlation data processing unit 60 is performed by the following procedure, for example.

  That is, based on the polishing result of the workpiece W performed in the past, the abnormality state recognition when an abnormality (for example, discontinuity of the slurry flow rate) occurs with respect to a predetermined conditional attribute, and the workpiece shape of the workpiece Wα being polished is determined. The relationship with the shape transition in the secondary allowable state (hereinafter referred to as “work shape abnormal state”) is calculated computationally. For example, the discontinuity of the slurry flow rate is recognized by comparing the length of time that the slurry flow rate is below a predetermined value with a threshold value.

  Then, for each conditional attribute when an abnormal state of the workpiece shape occurs, a search is made for the strength of correlation with the abnormal state of the workpiece shape, for example, by calculating a correlation coefficient by regression analysis. Further, the relationship between a predetermined conditional attribute and the shape transition of the workpiece W at that time is obtained from the polishing result of the workpiece W performed in the past. And based on the relationship between this predetermined conditional attribute and the workpiece shape transition, it is doubtful that the desired shape transition and the desired final workpiece shape accompanying the polishing process are different from the actual shape transition and the final workpiece shape. By specifying the parameter, the correlation strength between the conditional attribute, the workpiece shape transition, and the final workpiece shape may be searched. The correlation strength data is stored in the memory 30 in association with the recognition of the specified abnormal state and the conditional attribute.

  The correlation degree data processing unit 60 is a dedicated arithmetic unit that exclusively searches for the degree of correlation between the conditional attributes of the workpiece W, the shape transition of the workpiece W during polishing, and the final workpiece shape. Therefore, the correlation degree data processing unit 60 can execute a correlation degree search calculation regardless of whether or not the workpiece W is being polished.

  Next, a polishing stop determination process executed by the polishing apparatus 1A of the second embodiment will be described using the flowchart shown in FIG. The same processes as the polishing stop determination process in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and detailed description thereof is omitted. Also in the polishing apparatus 1A of the second embodiment, the second drawing generation process for generating the second drawing P2 is executed in parallel with the polishing stop determination process shown in FIG. In the polishing stop determination process executed in the second embodiment, the second drawing P2 generated by the second drawing generation process is read at a necessary timing (step S4).

  In the polishing stop determination process executed in the second embodiment, the time series change of the shape information of the selected master and the time series change of the shape information of the workpiece Wα being polished are compared in step S6. If the future shape transition of the workpiece Wα being polished is predicted from the comparison calculation result, the process proceeds to step S61.

  In step S61, it is determined whether or not the final workpiece shape of the workpiece Wα being polished can be a desired workpiece shape based on the prediction of the future shape transition of the workpiece Wα being polished. If YES (can be in a desired state), the process proceeds to step S71. If NO (cannot be in the desired state), the process proceeds to step S62.

  In step S62, following the determination that the final workpiece shape cannot be in the desired state in step S61, the final workpiece shape of the workpiece Wα being polished is secondary based on the prediction of the future shape transition of the workpiece Wα being polished. It is determined whether or not the workpiece shape can be acceptable. In the case of YES (which can be a secondary permissible state), the polishing process is continued and the process proceeds to step S63. If NO (cannot be in a secondary allowable state), the process proceeds to step S71.

  In step S63, following the determination that the final workpiece shape can be in the secondary allowable state in step S62, the degree of correlation with respect to the final workpiece shape of the workpiece Wα being polished in the secondary allowable state. The responsibility parameters having high conditional attributes are identified, or the responsibility parameters are listed in descending order of correlation strength, and the process proceeds to step S71.

In step S71, it is determined that the final workpiece shape in step S61 can be in a desired state, and it is determined in step S62 that the final workpiece shape cannot be in either a desired state or a secondary allowable state, step S63. In accordance with either the identification of the responsibility parameters in the above or enumeration of the responsibility parameters in the order of high correlation strength, the polishing state of the workpiece Wα being polished is determined based on the prediction of the future shape transition of the workpiece Wα being polished, Proceed to step S81.
Here, the polishing state of the workpiece Wα being polished is the “first polishing stop state” in which the workpiece shape of the workpiece Wα being polished has reached a desired state, and the workpiece shape of the workpiece Wα being polished has reached a secondary allowable state. The determination is made as one of “second polishing stopped state”, “third polishing stopped state” in which the polishing process is immediately stopped, and “polishing continued state” in which the polishing process needs to be continued.

  The determination as to whether or not the “first polishing stop state” is made is made when it is determined in step S61 that the final workpiece shape can be in a desired state. The determination as to whether or not the state is the “second polishing stop state” is made when the responsibility parameters are specified or the responsibility parameters are listed in descending order of correlation strength in step S63. The determination of “third polishing stopped state” is performed when it is determined in step S62 that the final workpiece shape cannot be in either the desired state or the secondary allowable state. Furthermore, although it is determined that the final workpiece shape is either a desired state or a secondary permissible state, the current work shape of the workpiece Wα being polished is a desired state or a secondary permissible state. Performed when the state has not been reached.

In step S81, following the determination of the polishing state of the workpiece Wα being polished in step S71, whether the polishing of the workpiece Wα being polished by the polishing machine 10 is stopped based on the determination of the polishing state performed in step S71. Determine whether or not. If YES (stop polishing), the process proceeds to step S91. If NO (continuous polishing), the process returns to step S2.
Here, the determination of the polishing stop of the workpiece Wα being polished is made in step S71 as one of “first polishing stopped state”, “second polishing stopped state”, and “third polishing stopped state”. Sometimes done.

In step S91, following the determination of polishing stop in step S81, the display 40 displays a control command for displaying the state of the workpiece Wα being polished on the screen 40a of the display 40 as well as determining that polishing of the workpiece Wα is being polished. Is output, the polishing stop determination is notified, and the process proceeds to step S10.
Here, when it is determined that the “first polishing stop state” is made in step S71, a control command for displaying that the polishing stop is determined and that the workpiece Wα being polished is in the “desired state” is output. To do. If it is determined in step S71 that the state is “second polishing stop state”, a control command for displaying that the polishing stop is determined and that the workpiece Wα being polished is in the “secondary allowable state”. Is output. Furthermore, when it is determined in step S71 that the state is the “third polishing stop state”, it is determined that the polishing stop is determined and the workpiece Wα being polished is neither in the desired state nor in the secondary allowable state. A control command for displaying the meaning of “unacceptable shape” is output.

Next, the operation of the polishing apparatus 1A of Example 2 will be described.
In the polishing apparatus 1A according to the second embodiment, when the workpiece W is polished by the polishing machine 10, the first drawing P1 and the second drawing P2 are displayed on the screen 40a of the display 40 as in the first embodiment. Then, each process of step S6 and step S61 shown in the flowchart of FIG. That is, the shape transition predicting unit 57A compares the time series change of the shape information of the workpiece Wα being polished with the time series change of the shape information of the selected master, and based on the result, the future shape of the workpiece Wα being polished is calculated. Predict the transition. Then, based on the prediction of the shape transition, it is determined whether or not the final workpiece shape can be in a desired state.

  When it is determined that the final workpiece shape can be in a desired state, the processing from step S71 to step S81 shown in the flowchart of FIG. That is, the state determination unit 58A determines the current polishing state of the workpiece Wα being polished based on the shape transition of the workpiece Wα being polished predicted by the shape transition prediction unit 57A, and polishes based on the determination result of the polishing state. It is determined whether or not machining is stopped.

  When the state determination unit 58A determines that the polishing state of the workpiece Wα being polished is the “first polishing stopped state”, the process of step S91 shown in the flowchart of FIG. 12 is performed. That is, the display control unit 56 outputs a control command for displaying on the screen 40a of the display 40 that the polishing workpiece Wα is in the “desired state” as well as determining that polishing of the workpiece Wα is being polished. Then, on the screen 40a of the display 40, in addition to the fact that the polishing process of the workpiece Wα being polished is stopped, it is displayed that the workpiece Wα being polished is in the “desired state”, and the polishing stop determination is notified. .

  As a result, the user of the polishing machine 10 can grasp the polishing stoppage and the workpiece shape of the workpiece Wα being polished by viewing the screen 40a. Thereby, even if it is a case where a user controls polisher 10 by manual operation and stops polish processing, polish processing can be stopped at an appropriate timing. Even when the polishing machine 10 is stopped by a stop control command from the control unit 50, the user can recognize the stop operation of the polishing machine 10.

  Then, the process of step S10 is performed and the control calculation part 51 of the control part 50 performs various outputs for completion | finish of grinding processes, such as a stop control command, to the 1st drive device M1-the 5th drive device M5. As a result, the polishing machine 10 automatically stops after a predetermined sequence, and the polishing of the workpiece Wα being polished is completed.

  On the other hand, when it is determined that the final workpiece shape cannot be in a desired state based on the prediction of the future shape transition of the workpiece Wα being polished, the process of step S62 shown in the flowchart of FIG. 12 is performed. That is, the shape transition prediction unit 57A determines whether or not the final workpiece shape can be in the secondary allowable state based on the prediction of the future shape transition of the workpiece Wα being polished.

  When it is determined that the final workpiece shape can be in the secondary allowable state, the process of step S63 shown in the flowchart of FIG. 12 is performed. That is, the parameter specifying unit 59 specifies a responsibility parameter having a high degree of correlation with respect to the final workpiece shape of the workpiece Wα being polished being in a secondary allowable state (the final workpiece shape cannot be in a desired state). Alternatively, the responsibility parameters are listed in descending order of correlation strength.

  When the responsibility parameters are specified or enumerated, the processing from step S71 to step S81 and step S91 shown in the flowchart of FIG. That is, the state determination unit 58A determines the current polishing state of the workpiece Wα being polished based on the shape transition of the workpiece Wα being polished, and determines whether or not to stop the polishing process based on the determination result of the polishing state. To do. When the state determination unit 58A determines that the polishing state of the workpiece Wα being polished is the “second polishing stop state”, the display control unit 56 determines that the polishing stop of the workpiece Wα being polished has been determined. The screen 40a of the display 40 shows that the workpiece Wα being polished is in the “secondary allowable state” and the responsibility parameters specified by the parameter specification unit 59 or the responsibility parameters listed in descending order of correlation strength. The control command to be displayed is output. The screen 40a of the display device 40 lists that the polishing stop of the workpiece Wα being polished is determined, the workpiece Wα being polished is “secondary allowable state”, and the responsibility parameter or the correlation strength is listed in descending order. Each responsibility parameter thus displayed is displayed, and a polishing stop determination is notified.

  Then, the process of step S10 is performed and the control calculation part 51 of the control part 50 performs various outputs for completion | finish of grinding processes, such as a stop control command, to the 1st drive device M1-the 5th drive device M5. As a result, the polishing machine 10 automatically stops after a predetermined sequence, and the polishing of the workpiece Wα being polished is completed.

  As a result, the user of the polishing machine 10 visually observed the screen 40a to determine that the polishing was stopped, and in addition to the workpiece shape of the workpiece Wα being polished, the workpiece Wα being polished was in a secondary allowable state. It is possible to grasp responsibility parameters having a high degree of correlation. Thereby, even if it is a case where a user controls polisher 10 by manual operation and stops polish processing, polish processing can be stopped at an appropriate timing. Even when the polishing machine 10 is stopped by a stop control command from the control unit 50, the user can recognize the stop operation of the polishing machine 10.

  Furthermore, by grasping the responsibility parameters or their candidates, necessary measures (improvement of conditional attributes, improvement of the polishing machine 10, etc.) for making the final workpiece shape a desired state can be rationally planned. And it becomes possible to obtain the workpiece | work W of a desired state efficiently. Further, it is possible to promote the accumulation of experience data corresponding to the degree of deviation between the desired final workpiece shape and the actual workpiece shape, and improvement proposals for the polishing apparatus 1 for eliminating the deviation.

  In the process of step S62 shown in the flowchart of FIG. 12, when it is determined that the final workpiece shape cannot be in the secondary allowable state, the processes of step S62 to step S71, step S81, and step S91 are performed in order. . That is, the state determination unit 58A determines the current polishing state of the workpiece Wα being polished, and determines that the polishing process is stopped when the polishing state of the workpiece Wα being polished is the “third polishing stopped state”. The display control unit 56 outputs a control command to display on the screen 40a of the display 40 that the workpiece Wα being polished is “non-permissible shape” in addition to the fact that the polishing stop of the workpiece Wα being polished has been determined. . Then, on the screen 40a of the display 40, it is displayed that the polishing stop of the workpiece Wα being polished is determined and that the workpiece Wα being polished is “non-permissible shape”, and the polishing stop determination is notified.

  Then, the process of step S10 is performed and the control calculation part 51 of the control part 50 performs various outputs for completion | finish of grinding processes, such as a stop control command, to the 1st drive device M1-the 5th drive device M5. As a result, the polishing machine 10 automatically stops after a predetermined sequence, and the polishing of the workpiece Wα being polished is completed.

  As a result, the user of the polishing machine 10 can grasp the polishing stoppage and the workpiece shape of the workpiece Wα being polished by visually checking the screen 40a. Thereby, even if it is a case where a user controls polisher 10 by manual operation and stops polish processing, polish processing can be stopped immediately. Further, even when the polishing machine 10 is stopped by a stop control command from the control unit 50, the user can recognize the stop operation of the polishing machine 10.

  In addition, when a plurality of responsibility parameters are specified by the parameter specifying unit 59 and these responsibility parameters are displayed on the screen 40a of the display device 40 in descending order of the correlation strength, the workpiece Wα being polished is in a secondary allowable state. It becomes easy to grasp the conditional attribute that has the greatest influence on the situation. Thereby, it is possible to further rationally plan necessary measures (improvement of conditional attributes, improvement of the polishing machine 10, etc.) for making the final workpiece shape a desired state.

A specific example will be described below.
As shown in FIG. 13A, a case will be described in which a fifth workpiece W5 having a “convex sagging shape” in which the outer peripheral region is relatively polished at the start of the polishing process is polished by the “first batch after dressing” polishing machine 10. . In the polishing stage A at the initial stage of polishing, the sectional shape of the fifth workpiece W5 having the “convex sagging shape” is the polishing stage immediately after the polishing process proceeds and the thickness reaches the target thickness range (T1 ≦ thickness ≦ T2). In B, it becomes a “flat sagging shape (a state where the central portion is flat and the outer peripheral region is excessively polished)”. Thereafter, the polishing process is continued, and in the polishing stage C where the thickness is close to the lower limit (T1) of the target thickness range, the cross-sectional shape of the fifth workpiece W5 becomes a “flat shape” which is a desired state.

  Next, as shown in FIG. 13B, when polishing the sixth workpiece W <b> 6 having a “convex sagging shape” in which the outer peripheral region is relatively polished at the start of the polishing process, with the polishing machine 10 of “10th batch after dressing”. Will be explained. The cross-sectional shape of the “convex sagging” sixth workpiece W6 in the polishing stage A at the initial stage of polishing is the polishing stage immediately after the polishing process proceeds and the thickness reaches the target thickness range (T1 ≦ thickness ≦ T2). In B, it becomes a “flat sagging shape (a state where the central portion is flat and the outer peripheral region is excessively polished)”. However, the polishing process is further continued, and in the polishing stage C where the thickness is close to the lower limit (T1) of the target thickness range, the cross-sectional shape of the sixth workpiece W6 is “concave sagging shape (the central portion is greatly recessed and The peripheral edge is excessively polished).

  Here, when the polishing process is performed by the “first batch after dressing”, the cross-sectional shape of the fifth workpiece W5 becomes “flat shape” in the polishing stage C, so that the final workpiece shape is in a desired state. Expected to be. On the other hand, when the polishing process is performed by the “10th batch after dressing”, the workpiece cross-sectional shape does not become a “flat shape” at any polishing stage. Therefore, when the sixth workpiece W6 is polished, it is predicted that the final workpiece shape cannot be in a desired state. However, since the “flat sag shape” in the polishing stage B corresponds to the secondary allowable state, it is predicted that the final workpiece shape of the sixth workpiece W6 can be the secondary allowable state.

  In addition, a conditional attribute (responsibility parameter) having a high degree of correlation with respect to causing an event that the final workpiece shape does not become a “flat shape” that is a desired state at the time of polishing the sixth workpiece W6 is, for example, the number of batches It is specified that the surface of the polishing pad is altered with the increase.

  Therefore, in the polishing apparatus 1A of Example 2, when the shape transition of the sixth workpiece W6 is predicted during the polishing of the sixth workpiece W6, the final workpiece shape cannot be in a desired state (flat shape) based on this prediction. Then, it is determined that the secondary allowable state (flat sag shape) can be obtained. Then, the polishing stop determination is notified at the timing when the workpiece shape of the sixth workpiece W6 reaches the secondary permissible state (flat / sag shape) with the progress of the polishing process, and the sixth workpiece W6 is secondary permissible. “Polishing of the surface of the polishing pad” is reported as a parameter having a high responsibility for the state (flat / sagging shape) and the secondary allowable state.

  Accordingly, it is possible to appropriately determine the best timing for stopping the polishing, and to achieve a secondary allowable state that satisfies the second shape condition although the final workpiece shape is not in a desired state. In addition, since the responsibility parameter or its candidate can be grasped, it contributes to the improvement of the conditional attribute at the time of workpiece polishing, and the user can make more efficient process planning. Further, the polishing apparatus 1 itself can make an improvement proposal.

Next, the effect will be described.
In the polishing apparatus 1A of Example 2, the effects listed below can be obtained.

(8) When the control unit 50A determines that the workpiece Wα being polished cannot be in a desired workpiece state based on the prediction of the shape transition of the workpiece Wα being polished, the workpiece Wα being polished is in a secondary allowable state. At this time, the polishing process of the workpiece Wα being polished is stopped, and the stop determination of the polishing process is notified.
Accordingly, even when the final workpiece shape cannot be in a desired state, the polishing process can be stopped at an appropriate timing, and a delay in the polishing process can be prevented from occurring. In addition, it is possible to prevent the polishing process from being delayed and to automatically stop the polishing process at an appropriate timing.

(9) The control unit 50A identifies a conditional attribute (responsibility parameter) having a high degree of correlation with the appearance of the secondary allowable state of the workpiece Wα being polished, or the secondary allowable state of the workpiece Wα being polished. Conditional attributes are listed in descending order of the degree of correlation with respect to the appearance, and the specified or listed condition attribute (responsibility parameter or candidate thereof) having a high degree of correlation is notified.
As a result, the user can grasp the responsibility parameter or its candidate, and can rationally plan necessary measures for bringing the final workpiece shape into a desired state.

  As described above, the polishing apparatus of the present invention has been described based on the first and second embodiments. However, the specific configuration is not limited to these embodiments, and each claim of the claims Design changes and additions are allowed without departing from the gist of the invention.

  In the polishing apparatus 1 according to the first embodiment, an example is shown in which the memory 30 stores the shape information of the workpiece W in association with the conditional attribute when the workpiece W is polished. However, the present invention is not limited to this. For example, when storing the shape information of the workpiece W in the memory 30, the learning attribute information may be stored in association with the shape information of the workpiece W. Here, the “conditional attribute generated by learning” is a condition attribute obtained as a result of learning and calculating the relationship (trend) between the shape information acquired in the past polishing process and the conditional attribute. Attribute. This “learning-generated conditional attribute” corresponds to the shape information of the workpiece W, for example, based on the conditional attribute associated with the shape information of the workpiece W accumulated in the past polishing process. Learn the tendency of conditional attributes, automatically calculate the degree of influence in the polishing result of each parameter of the conditional attribute in a given complex condition system, and weight the influence prediction using the result The conditional attribute etc. which were output by performing operations such as can be considered.

  Then, in the case of extracting the shape information of the selected master by matching the conditional attribute of the workpiece Wα being polished and the conditional attribute generated by learning, and predicting the shape transition of the workpiece Wα being polished, the user It is possible to make predictions more optimally beyond the prediction patterns and trends that have been apt to be taken.

  In other words, by extracting the shape information of the selected master based on the shape information of the workpiece W associated with the learning-generated conditional attribute, the influence severity of a specific parameter under a certain condition can be found spontaneously. Can be presented, and the influence severity can be formulated. Also, depending on how the learning algorithm is designed to formulate the severity of influence, the output as the result of calculation exceeds the prediction range by the user, and the prediction range of the shape transition of the workpiece Wα being polished is expanded. Can do.

  As a result, the accuracy of the shape prediction of the workpiece Wα being polished, which has been often overlooked in the past, is remarkably improved as compared with the prediction accuracy by the user. In addition, it becomes possible to objectively predict the correlation between the conditional attribute and the workpiece shape accuracy under a specific condition, so that the conditional attribute can be changed before or during the polishing of the workpiece Wα being polished. Advance changes can be promoted as necessary, which can contribute to the improvement and stability of good product yield.

  Further, in the polishing apparatus 1 of the first embodiment, the memory 30 stores the shape information of the workpiece W in association with the conditional attributes when the workpiece W is polished. Then, in the shape transition prediction unit 57, the time series change of the shape information of the selected master extracted on the basis of the conditional attribute of the workpiece Wα being polished is compared with the time series change of the shape information of the workpiece Wα being polished, An example of predicting the shape transition of the workpiece Wα during polishing was shown. That is, in the first embodiment, the workpiece shape pattern generated based on the shape information of the shape reference workpiece Wβ or the learning result of the degree of correlation between the conditional attribute when the workpiece W is polished and the shape information of the workpiece W. The shape transition of the workpiece Wα being polished is estimated based on the typical shape information. However, the present invention is not limited to this.

  As a work shape pattern obtained by calculating the shape information of the work W, the support of the correlation data processing unit 60 is received as necessary, and the information having the shape characteristics of the work W is obtained by calculation processing. A desired workpiece shape pattern may be used. In this case, in the memory 30, all the conditional attributes when the workpiece W is polished are linked to the workpiece shape pattern having the shape characteristics of the workpiece W, and the conditional attributes are grouped as necessary. Subdivided and memorized as learning progressed. Then, the shape transition prediction unit 57 may predict the shape transition of the workpiece Wα being polished based on a workpiece shape pattern associated with a conditional attribute that matches the conditional attribute of the workpiece Wα being polished.

  That is, information including at least one of the shape information of the workpiece W and the workpiece shape pattern obtained by calculating the shape information of the workpiece W is referred to as “prediction information”, and the memory 30 includes the workpiece W as the prediction information. Conditional attributes at the time of polishing and conditional attributes generated by learning are linked and stored. Then, the shape transition prediction unit 57 of the control unit 50 stores in the memory 30 the time series change of the prediction information of the workpiece Wα being polished and the conditional attribute that matches the conditional attribute of the workpiece Wα being polished. The shape transition of the workpiece Wα being polished is predicted based on the result of the comparison operation with the time series change of the predicted information.

  Here, the “arithmetic processing” means, for example, averaging the cross-sectional shape lines of a plurality of workpieces W selected for each conditional attribute to obtain an average cross-sectional shape line for each conditional attribute, Calculate the flatness from the difference between the minimum and maximum thickness values of the shape line, obtain the desired cross-sectional shape line using the mode and median of the multiple cross-sectional shape lines, conditional attributes and workpiece From the viewpoint of the degree of correlation with the shape, by calculating a work shape associated with a group of the shape features of the work W or a newly generated statistically / calculated group as a typical shape in the group, etc. is there.

  That is, for example, the flatness of the central portion of the workpiece W, which is a workpiece shape pattern obtained from the shape information of the workpiece W polished in the past, is calculated for each workpiece polishing time. Subsequently, regression analysis or the like is performed, and as shown in FIG. 14A, a relationship between the workpiece polishing time and the flatness of the central portion of the workpiece is generated as a first flatness prediction line La. Then, the shape prediction of the workpiece Wα being polished may be performed by comparing the first flatness prediction line La and the transition of the flatness of the central portion of the workpiece Wα being polished.

  Moreover, the flatness of the outer peripheral area | region of the workpiece | work W which is a workpiece | work shape pattern obtained from the shape information of the workpiece | work W grind | polished in the past is calculated for every workpiece | work grinding | polishing time. Subsequently, regression analysis or the like is performed, and as shown in FIG. 14B, a relationship between the workpiece polishing time and the flatness of the workpiece outer peripheral region is generated as a second flatness prediction line Lb. Then, the shape of the workpiece Wα being polished may be predicted by comparing the second flatness prediction line Lb with the transition of the flatness of the outer peripheral region of the workpiece Wα being polished.

  In addition, it can be seen from the first flatness prediction line La that the flatness at the center of the workpiece gradually decreases in accordance with the workpiece polishing time, and deteriorates when the predetermined time Ta is exceeded. Therefore, it is considered that a workpiece with good flatness at the center can be obtained by stopping the polishing of the workpiece Wα being polished at the timing when the workpiece polishing time reaches the predetermined time Ta. Further, from the second flatness prediction line Lb, the flatness of the workpiece outer peripheral region is maintained at a substantially constant value on the minus side until the workpiece polishing time reaches the predetermined time Tb, and when the workpiece polishing time exceeds the predetermined time Tb. It turns out that it becomes a positive side and becomes large gradually. For this reason, it is considered that a workpiece with good flatness in the outer peripheral region can be obtained by stopping the polishing of the workpiece Wα being polished at the timing when the workpiece polishing time reaches the predetermined time Tb.

  Moreover, in Example 1, the 2nd drawing production | generation part 55 produces | generates 2nd drawing P2 based on the shape information of the selection master linked | related with the conditional attribute which matches the conditional attribute of the workpiece | work Wα in grinding | polishing. showed that. However, the shape information of the workpiece W used when generating the second drawing P2 is not limited to this. For example, regardless of the conditional attribute of the workpiece Wα being polished, the second drawing P2 is generated based on the shape information of the workpiece W polished immediately before the workpiece Wα being polished by the polishing machine that has polished the workpiece Wα being polished. May be. In addition, regardless of the conditional attributes of the workpiece Wα being polished, the second drawing P2 is performed based on the shape information of the workpiece W polished before immediately before the workpiece Wα being polished by the polishing machine that has polished the workpiece Wα being polished. May be generated.

  Moreover, in Example 1 and Example 2, the 2nd drawing production | generation part 55 produces | generates 2nd drawing P2 based on the shape information of the selection master extracted based on the conditional attribute of workpiece | work Wα in grinding | polishing. Although shown, it is not limited to this, a plurality of selection masters are extracted based on the conditional attributes of the workpiece Wα being polished, such as the second second drawing and the third second drawing based on the shape information of the selected master. Based on the shape information of the selected master, a plurality of second drawings are generated, and the plurality of second drawings are displayed on the screen 40a of the display 40, or the workpiece Wα being polished is referred to by referring to the plurality of second drawings. Future changes in shape may be predicted.

Furthermore, a plurality of pieces of shape information of the workpiece W stored in the memory 30 are extracted from a desired range, the shape information of the extracted workpiece W is averaged, or specific data is acquired from the extracted shape information of the workpiece W to obtain a desired shape. The second drawing P2 may be generated based on a workpiece shape pattern having a geometric feature obtained by performing an arithmetic process such as generating information.
Even in this case, the accuracy of the transition of the workpiece shape indicated by the second drawing P2 can be improved as compared with the case where the second drawing P2 is generated using the shape information of the selected master. Therefore, it is possible to more accurately predict the shape transition of the workpiece Wα being polished, and to stop polishing at an appropriate timing.

  Then, the shape information of the workpiece W is obtained by receiving the result of comparison with the measured value data of the workpiece shape by a shape measurement dedicated device (for example, a separate flatness measurement dedicated device, etc.) provided separately from the polishing machine 10. The obtained measurement value data may be corrected and adjusted as necessary.

  In the polishing apparatus 1 according to the first embodiment, the first drawing P1 and the second drawing P2 are generated, and the first drawing P1 and the second drawing P2 are simultaneously displayed on the display 40. However, the present invention is not limited to this. Only the first drawing P1 in which the shape drawing of the workpiece Wα being polished is arranged in time series may be displayed on the display 40. Even in this case, the user can grasp the transition of the shape change of the workpiece Wα during polishing. Based on the transition of the shape change of the workpiece Wα during polishing, the workpiece polishing process can be stopped at the timing when the desired workpiece shape is obtained.

  Further, in the polishing apparatus 1 of the first embodiment, when it is determined that the polishing of the workpiece Wα being polished is stopped, the stop determination of the polishing process is displayed on the display device 40 and the polishing machine 10 is stopped. It was. However, for example, it may only be notified that the polishing process stop determination has been performed, or the polishing machine 10 may be controlled to stop without notifying the stop determination, and the polishing process of the workpiece Wα being polished may be stopped.

  Further, in Example 2, when it is determined that the final workpiece shape cannot be in a desired state based on the prediction of the shape transition of the workpiece Wα during polishing, when the workpiece Wα during polishing is in a secondary allowable state, An example in which the polishing process stop determination is displayed and notified on the display 40 and the polishing machine 10 is stopped is shown. However, when the workpiece Wα being polished is in the secondary allowable state, for example, it may only be notified that the polishing process stop determination has been performed, or the polishing machine 10 is controlled to stop without informing the stop determination. It is only necessary to stop the polishing of the workpiece Wα.

  In the first embodiment, the example in which the measurement unit 21 is attached to the upper surface plate 12 is shown, but the present invention is not limited to this. For example, laser light that is measurement light may be emitted from an optical head installed above the upper surface plate 12. In this case, a plurality of measurement holes are formed along the circumferential direction of the upper surface plate 12, and each time the measurement holes come directly under the optical head by the rotation of the upper surface plate 12, a laser beam is irradiated, Measure the thickness. In addition, a measurement hole may be provided in the lower surface plate 11, and the thickness may be measured by irradiating the lower surface of the workpiece W with a laser beam from below the lower surface plate 11.

  In the first embodiment, when the cross-sectional shape of the workpiece W is obtained, the obtained data string is averaged by moving average processing, polynomial approximate curve drawing processing, or the like. Any method may be used as long as the shape can be visualized.

  In the first and second embodiments, the second drawing generation process is executed in parallel with the polishing stop determination process, the change in the conditional attribute of the workpiece Wα being polished is monitored, and the second drawing P2 is appropriately replaced. An example is shown. However, the present invention is not limited to this. For example, the second drawing P2 generated once based on the conditional attribute of the workpiece Wα being polished acquired after it is determined that the polishing is being performed may be maintained until the polishing is completed. Furthermore, in this case, it is not necessary to execute the second drawing generation process in parallel with the polishing stop determination process, and during the polishing stop determination process (for example, between step S1 and step S2, or between step S3 and step S4). In the second drawing generation process, each process of step S12, step S13, and step S14 may be executed.

  Moreover, in Example 1 and Example 2, although the double-side polishing apparatus which has the lower surface plate 11 and the upper surface plate 12 and can grind | polish both surfaces of the workpiece | work W simultaneously was shown, the single-side polishing which grind | polishes only the single side | surface of the workpiece | work W. The present invention can be applied even to an apparatus.

1, 1A Polishing apparatus 10 Polishing machine 11 Lower surface plate 12 Upper surface plate 20 Shape measuring device 19 Measuring hole 30 Memory 40 Display device 40a Screen 50, 50A Control unit 51, 51A Control operation unit 54 First drawing generation unit 55 Second drawing Generation unit 56, 56A Display control unit 57, 57A Shape transition prediction unit 58, 58A State determination unit 59 Parameter identification unit 60 Correlation degree data processing unit

Claims (9)

A polishing machine that polishes a workpiece with a rotating surface plate;
A shape measuring instrument for measuring the shape of the workpiece through a measurement hole formed in the surface plate;
A memory for storing shape information of the workpiece measured by the shape measuring instrument;
A display for displaying the shape information of the workpiece measured by the shape measuring instrument;
A control unit for controlling the display content of the display,
The control unit generates a first drawing in which the shape drawing of the workpiece being polished, which is a workpiece currently being polished, measured by the shape measuring instrument is arranged in time series, and causes the display to display the first drawing. A polishing apparatus characterized by that. The polishing apparatus according to claim 1, wherein
The memory is used to predict information including at least one of the workpiece shape information and the workpiece shape pattern obtained by calculating the workpiece shape information. The generated conditional attributes are linked and stored,
The control unit is a result of a comparison operation between the time series change of the prediction information of the workpiece being polished and the time series change of the prediction information associated with the conditional attribute that matches the conditional attribute of the workpiece being polished. A polishing apparatus that predicts a shape transition of the workpiece under polishing based on the prediction, and determines a state of the workpiece during polishing based on the prediction of the shape transition of the workpiece during polishing. A polishing machine that polishes a workpiece with a rotating surface plate;
A shape measuring instrument for measuring the shape of the workpiece through a measurement hole formed in the surface plate;
A memory for storing shape information of the workpiece measured by the shape measuring instrument;
A display for displaying the shape information of the workpiece measured by the shape measuring instrument;
A control unit for controlling the display content of the display,
The control unit includes a first drawing in which shape drawing of a workpiece being polished, which is a workpiece currently being polished, measured by the shape measuring instrument, arranged in time series, and a workpiece polished before the polishing of the workpiece being polished A polishing apparatus, wherein a second drawing in which the shape drawing is arranged in time series is generated, and the first drawing and the second drawing are simultaneously displayed on the display. The polishing apparatus according to claim 3, wherein
The memory stores the shape information of the workpiece in association with a conditional attribute when the workpiece is polished or a learning-generated conditional attribute,
The said control part produces | generates said 2nd drawing based on the shape information of the workpiece | work linked | linked with the conditional attribute which matches the conditional attribute of the said workpiece | work in grinding | polishing. The grinding | polishing apparatus characterized by the above-mentioned. In the polishing apparatus according to claim 3 or 4,
The control unit is a workpiece shape pattern obtained by calculating the shape information of the workpiece stored in the memory, or between a conditional attribute when the workpiece is polished and the shape information of the workpiece. The polishing apparatus, wherein the second drawing is generated based on a work shape pattern generated based on a learning result of the degree of correlation. In the polishing apparatus according to any one of claims 3 to 5,
The memory is used to predict information including at least one of the workpiece shape information and the workpiece shape pattern obtained by calculating the workpiece shape information. The generated conditional attributes are linked and stored,
The control unit is a result of a comparison operation between the time series change of the prediction information of the workpiece being polished and the time series change of the prediction information associated with the conditional attribute that matches the conditional attribute of the workpiece being polished. A polishing apparatus that predicts a shape transition of the workpiece under polishing based on the shape and determines a state of the workpiece under polishing based on the prediction of the shape transition. In the polishing apparatus according to claim 2 or 6,
When the control unit determines that the polishing process of the workpiece being polished is to be stopped as a result of the state determination of the workpiece being polished, the controller determines whether to stop the polishing process of the workpiece being polished and to stop the polishing process of the workpiece being polished. A polishing apparatus that performs at least one of the notifications. In the polishing apparatus according to claim 2 or 6,
When the control unit determines that the workpiece being polished cannot be in a desired workpiece state based on the prediction of the shape transition of the workpiece being polished, the control unit performs the polishing when the workpiece being polished is in a secondary allowable state. A polishing apparatus that performs at least one of a stop of a polishing process of a medium workpiece and a notification of a stop determination of a polishing process of the workpiece being polished. The polishing apparatus according to claim 8, wherein
The control unit specifies a conditional attribute having a high correlation with the appearance of the secondary allowable state of the workpiece being polished, or the correlation with the appearance of the secondary allowable state of the workpiece being polished. A polishing apparatus characterized by listing conditional attributes in descending order and notifying the specified or listed conditional attributes.