JP7046184B2 - 光起電力素子および第v族ドーパントを備える半導体層、ならびにそれを形成する方法 - Google Patents
光起電力素子および第v族ドーパントを備える半導体層、ならびにそれを形成する方法 Download PDFInfo
- Publication number
- JP7046184B2 JP7046184B2 JP2020531089A JP2020531089A JP7046184B2 JP 7046184 B2 JP7046184 B2 JP 7046184B2 JP 2020531089 A JP2020531089 A JP 2020531089A JP 2020531089 A JP2020531089 A JP 2020531089A JP 7046184 B2 JP7046184 B2 JP 7046184B2
- Authority
- JP
- Japan
- Prior art keywords
- absorber layer
- alkali metal
- layer
- dopant
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims description 69
- 239000002019 doping agent Substances 0.000 title claims description 51
- 239000004065 semiconductor Substances 0.000 title description 26
- 239000006096 absorbing agent Substances 0.000 claims description 156
- 229910052783 alkali metal Inorganic materials 0.000 claims description 64
- 150000001340 alkali metals Chemical class 0.000 claims description 64
- 238000000137 annealing Methods 0.000 claims description 39
- 150000001875 compounds Chemical class 0.000 claims description 35
- 229910052793 cadmium Inorganic materials 0.000 claims description 27
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims description 27
- 229910052760 oxygen Inorganic materials 0.000 claims description 19
- 239000001301 oxygen Substances 0.000 claims description 19
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 16
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims description 14
- 239000007789 gas Substances 0.000 claims description 14
- 229910052711 selenium Inorganic materials 0.000 claims description 14
- 239000011669 selenium Substances 0.000 claims description 14
- 229910001514 alkali metal chloride Inorganic materials 0.000 claims description 13
- YKYOUMDCQGMQQO-UHFFFAOYSA-L cadmium dichloride Chemical compound Cl[Cd]Cl YKYOUMDCQGMQQO-UHFFFAOYSA-L 0.000 claims description 11
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 10
- 229910052700 potassium Inorganic materials 0.000 claims description 10
- 239000011591 potassium Substances 0.000 claims description 10
- 229910052701 rubidium Inorganic materials 0.000 claims description 10
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 claims description 10
- XSOKHXFFCGXDJZ-UHFFFAOYSA-N telluride(2-) Chemical compound [Te-2] XSOKHXFFCGXDJZ-UHFFFAOYSA-N 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 claims description 8
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 claims description 8
- FGDZQCVHDSGLHJ-UHFFFAOYSA-M rubidium chloride Chemical compound [Cl-].[Rb+] FGDZQCVHDSGLHJ-UHFFFAOYSA-M 0.000 claims description 8
- 230000004913 activation Effects 0.000 claims description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 245
- 239000000463 material Substances 0.000 description 24
- 230000008569 process Effects 0.000 description 22
- 239000000758 substrate Substances 0.000 description 13
- 229910052714 tellurium Inorganic materials 0.000 description 11
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 11
- 230000004888 barrier function Effects 0.000 description 9
- 239000002800 charge carrier Substances 0.000 description 9
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 9
- 239000002245 particle Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 230000009467 reduction Effects 0.000 description 6
- 239000003513 alkali Substances 0.000 description 5
- 239000012298 atmosphere Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- -1 nickel nitride Chemical class 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 230000003213 activating effect Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- SKJCKYVIQGBWTN-UHFFFAOYSA-N (4-hydroxyphenyl) methanesulfonate Chemical compound CS(=O)(=O)OC1=CC=C(O)C=C1 SKJCKYVIQGBWTN-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 229910004613 CdTe Inorganic materials 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000000370 acceptor Substances 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000004549 pulsed laser deposition Methods 0.000 description 2
- 238000001953 recrystallisation Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- KEFYKDIPBYQPHW-UHFFFAOYSA-N 2,4,6,8-tetraselena-1,3,5,7-tetrazatricyclo[3.3.0.03,7]octane Chemical compound [Se]1N2[Se]N3[Se]N2[Se]N13 KEFYKDIPBYQPHW-UHFFFAOYSA-N 0.000 description 1
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 1
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- BTFOWJRRWDOUKQ-UHFFFAOYSA-N [Si]=O.[Sn] Chemical compound [Si]=O.[Sn] BTFOWJRRWDOUKQ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 230000003373 anti-fouling effect Effects 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- SKKMWRVAJNPLFY-UHFFFAOYSA-N azanylidynevanadium Chemical compound [V]#N SKKMWRVAJNPLFY-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- BEQNOZDXPONEMR-UHFFFAOYSA-N cadmium;oxotin Chemical compound [Cd].[Sn]=O BEQNOZDXPONEMR-UHFFFAOYSA-N 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000000005 dynamic secondary ion mass spectrometry Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- PNHVEGMHOXTHMW-UHFFFAOYSA-N magnesium;zinc;oxygen(2-) Chemical compound [O-2].[O-2].[Mg+2].[Zn+2] PNHVEGMHOXTHMW-UHFFFAOYSA-N 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- UQMZPFKLYHOJDL-UHFFFAOYSA-N zinc;cadmium(2+);disulfide Chemical compound [S-2].[S-2].[Zn+2].[Cd+2] UQMZPFKLYHOJDL-UHFFFAOYSA-N 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0296—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe
- H01L31/02963—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe characterised by the doping material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0296—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe
- H01L31/02966—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe including ternary compounds, e.g. HgCdTe
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/048—Encapsulation of modules
- H01L31/0488—Double glass encapsulation, e.g. photovoltaic cells arranged between front and rear glass sheets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
- H01L31/073—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising only AIIBVI compound semiconductors, e.g. CdS/CdTe solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1828—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
- H01L31/1832—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe comprising ternary compounds, e.g. Hg Cd Te
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1864—Annealing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1872—Recrystallisation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/543—Solar cells from Group II-VI materials
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Photovoltaic Devices (AREA)
- Light Receiving Elements (AREA)
Description
[発明の態様]
[1]
吸収体層を含む光起電力素子であって、
該吸収体層がカドミウム、テルル、およびセレンを含み、
該吸収体層が、第V族ドーパントがドープされたp型であり、4×10 15 cm -3 より大きい第V族ドーパントのキャリア濃度を有し、
該吸収体層が該吸収体層の中央領域に酸素を含み、
該吸収体層が該吸収体層の該中央領域にアルカリ金属を含み、
該アルカリ金属の原子濃度対該酸素の原子濃度の比率が、該吸収体層の該中央領域で少なくとも0.1である、
光起電力素子。
[2]
該アルカリ金属がカリウムである、1に記載の光起電力素子。
[3]
該アルカリ金属がルビジウムである、1に記載の光起電力素子。
[4]
該第V族ドーパントのキャリア濃度が、8×10 15 cm -3 ~6×10 16 cm -3 の間である、1に記載の光起電力素子。
[5]
該吸収体層の該中央領域での第V族ドーパントの原子濃度が、1×10 17 cm -3 より大きい、4に記載の光起電力素子。
[6]
該吸収体層と該光起電力素子のエネルギー面の間に配置された、透明な導電性酸化物層を含み、該透明な導電性酸化物層がアルカリ金属を含む、1に記載の光起電力素子。
[7]
該透明な導電性酸化物層におけるアルカリ金属の原子濃度が、該吸収体層の該中央領域での該アルカリ金属の原子濃度より大きい、6に記載の光起電力素子。
[8]
該透明な導電性酸化物層における該アルカリ金属の原子濃度対、吸収体層の中央領域でのアルカリ金属の原子濃度のアルカリ金属比率が、1,000未満である、7に記載の光起電力素子。
[9]
キャリア活性化の方法であって、
吸収体層を還元環境に曝露するステップ、ここで吸収体層が、カドミウム、テルル、セレン、および第V族ドーパントを含む、
吸収体層をアニーリング化合物と接触させるステップ、ここで
アニーリング化合物が塩化カドミウムおよびアルカリ金属塩化物を含み、
アルカリ金属塩化物がアルカリ金属から形成され、そして
アニーリング化合物中のアルカリ金属対カドミウムの原子比率が、10,000ppm未満である、ならびに
吸収体層をアニールするステップ、ここで第V族ドーパントの少なくとも一部が活性化され、吸収体層がアニールされた後、吸収体層は4×10 15 cm -3 より大きい第V族ドーパントのキャリア濃度を有する、
を含む、方法。
[10]
還元環境が、第V族酸化物の形成を軽減するように構成されたフォーミングガスを含み、フォーミングガスが、水素、窒素、またはこれらの組み合わせを含む、9に記載の方法。
[11]
還元環境が、26.7kPa(200Torr)~106.7kPa(800Torr)の間の真空圧力にある、9に記載の方法。
[12]
吸収体層が350℃~500℃の間の温度で5分~60分の間アニールされる、9に記載の方法。
[13]
アルカリ金属塩化物が、LiCl、KCl、RbCl、またはこれらの組み合わせを含む、9に記載の方法。
[14]
アニーリング化合物中のアルカリ金属対カドミウムの原子比率が、500ppm~6,000ppmの間である、9に記載の方法。
[15]
アルカリ金属がカリウムである、14に記載の方法。
[16]
アルカリ金属がルビジウムである、14に記載の方法。
[17]
吸収体層がアニールされた後、吸収体層が、8×10 15 cm -3 ~6×10 16 cm -3 の間の第V族ドーパントのキャリア濃度を有する、9に記載の方法。
[18]
吸収体層での第V族ドーパントの原子濃度が1×10 17 cm -3 より大きい、17に記載の方法。
[19]
第V族ドーパントのキャリア濃度が8×10 15 cm -3 ~6×10 16 cm -3 の間である、1~3のいずれかに記載の光起電力素子。
[20]
吸収体層の中央領域での第V族の原子濃度が1×10 17 cm -3 より大きい、1~3および19のいずれかに記載の光起電力素子。
[21]
吸収体層と光起電力素子のエネルギー面の間に配置された透明な導電性酸化物層を含み、透明な導電性酸化物層がアルカリ金属を含む、1~3、19および20のいずれかに記載の光起電力素子。
[22]
透明な導電性酸化物層でのアルカリ金属の原子濃度が、吸収体層の中央領域でのアルカリ金属の原子濃度より大きい、21に記載の光起電力素子。
[23]
透明な導電性酸化物層でのアルカリ金属の原子濃度対、吸収体層の中央領域でのアルカリ金属の原子濃度のアルカリ金属比率が、1,000未満である、22に記載の光起電力素子。
[24]
還元環境が26.7kPa(200Torr)~106.7kPa(800Torr)の間の真空圧力にある、9または10に記載の方法。
[25]
吸収体層が、350℃~500℃の間の温度で5分~60分の間アニールされる、9,10および24のいずれかに記載の方法。
[26]
アルカリ金属塩化物が、LiCl、KCl、RbCl、またはこれらの組み合わせを含む、9~10、24~25のいずれかに記載の方法。
[27]
アニーリング化合物中のアルカリ金属対カドミウムの原子比率が、500ppm~6,000ppmの間である、9~10および24~26のいずれかに記載の方法。
[28]
アルカリ金属がカリウムである、9~10および24~27のいずれかに記載の方法。
[29]
アルカリ金属がルビジウムである、9~10および24~27のいずれかに記載の方法。
[30]
吸収体層がアニールされた後、吸収体層が8×10 15 cm -3 ~6×10 16 cm -3 の間の第V族ドーパントのキャリア濃度を有する、9~10および24~29のいずれかに記載の方法。
[31]
吸収体層での第V族の原子濃度が1×10 17 cm -3 より大きい、9~10および24~30のいずれかに記載の方法。
[32]
第V族ドーパントのキャリア濃度が8×10 15 cm -3 ~6×10 16 cm -3 の間である、31に記載の方法。
Claims (18)
- 吸収体層を含む光起電力素子であって、
該吸収体層がカドミウム、テルル、およびセレンを含み、
該吸収体層が、第V族ドーパントがドープされたp型であり、4×1015cm-3より大きい第V族ドーパントのキャリア濃度を有し、
該吸収体層が該吸収体層の中央領域に酸素を含み、ここで該中央領域は該吸収体層の50%中間であり、該吸収体層の第1の表面および第2の表面のそれぞれから、該吸収体層の厚みの25%だけ差し引かれたものである、
該吸収体層が該吸収体層の該中央領域にアルカリ金属を含み、
該アルカリ金属の原子濃度対該酸素の原子濃度の比率が、該吸収体層の該中央領域で少なくとも0.1である、
光起電力素子。 - 該アルカリ金属がカリウムである、請求項1に記載の光起電力素子。
- 該アルカリ金属がルビジウムである、請求項1に記載の光起電力素子。
- 該第V族ドーパントのキャリア濃度が、8×1015cm-3~6×1016cm-3の間である、請求項1に記載の光起電力素子。
- 該吸収体層の該中央領域での該第V族ドーパントの原子濃度が、1×1017cm-3より大きい、請求項4に記載の光起電力素子。
- 該吸収体層と該光起電力素子のエネルギー面の間に配置された、透明な導電性酸化物層を含み、該透明な導電性酸化物層がアルカリ金属を含む、請求項1に記載の光起電力素子。
- 該透明な導電性酸化物層における該アルカリ金属の原子濃度が、該吸収体層の該中央領域での該アルカリ金属の原子濃度より大きい、請求項6に記載の光起電力素子。
- 該透明な導電性酸化物層における該アルカリ金属の原子濃度対、該吸収体層の該中央領域での該アルカリ金属の原子濃度のアルカリ金属比率が、1,000未満である、請求項7に記載の光起電力素子。
- キャリア活性化の方法であって、
吸収体層を還元環境に曝露するステップ、ここで該吸収体層が、カドミウム、テルル、セレン、および第V族ドーパントを含む、
該吸収体層をアニーリング化合物と接触させるステップ、ここで
該アニーリング化合物が塩化カドミウムおよびアルカリ金属塩化物を含み、
該アルカリ金属塩化物がアルカリ金属から形成され、そして
該アニーリング化合物中の該アルカリ金属対カドミウムの原子比率が、10,000ppm未満である、ならびに
該吸収体層をアニールするステップ、ここで該第V族ドーパントの少なくとも一部が活性化され、該吸収体層がアニールされた後、該吸収体層は4×1015cm-3より大きい該第V族ドーパントのキャリア濃度を有する、
を含む、方法。 - 該還元環境が、第V族酸化物の形成を軽減するように構成されたフォーミングガスを含み、該フォーミングガスが、水素、窒素、またはこれらの組み合わせを含む、請求項9に記載の方法。
- 該還元環境が、26.7kPa(200Torr)~106.7kPa(800Torr)の間の真空圧力にある、請求項9に記載の方法。
- 該吸収体層が350℃~500℃の間の温度で5分~60分の間アニールされる、請求項9に記載の方法。
- 該アルカリ金属塩化物が、LiCl、KCl、RbCl、またはこれらの組み合わせを含む、請求項9に記載の方法。
- 該アニーリング化合物中の該アルカリ金属対該カドミウムの原子比率が、500ppm~6,000ppmの間である、請求項9に記載の方法。
- 該アルカリ金属がカリウムである、請求項14に記載の方法。
- 該アルカリ金属がルビジウムである、請求項14に記載の方法。
- 該吸収体層がアニールされた後、該吸収体層が、8×1015cm-3~6×1016cm-3の間の該第V族ドーパントのキャリア濃度を有する、請求項9に記載の方法。
- 該吸収体層での該第V族ドーパントの原子濃度が1×1017cm-3より大きい、請求項17に記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2017/114980 WO2019109297A1 (en) | 2017-12-07 | 2017-12-07 | Photovoltaic devices and semiconductor layers with group v dopants and methods for forming the same |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2021509222A JP2021509222A (ja) | 2021-03-18 |
JPWO2019109297A5 JPWO2019109297A5 (ja) | 2022-02-16 |
JP7046184B2 true JP7046184B2 (ja) | 2022-04-01 |
Family
ID=66750043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020531089A Active JP7046184B2 (ja) | 2017-12-07 | 2017-12-07 | 光起電力素子および第v族ドーパントを備える半導体層、ならびにそれを形成する方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US11502212B2 (ja) |
EP (2) | EP3721479B1 (ja) |
JP (1) | JP7046184B2 (ja) |
CN (1) | CN111670504B (ja) |
MY (1) | MY196698A (ja) |
WO (1) | WO2019109297A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009058985A1 (en) | 2007-11-02 | 2009-05-07 | First Solar, Inc. | Photovoltaic devices including doped semiconductor films |
EP3586374B1 (en) | 2017-02-24 | 2022-12-28 | First Solar, Inc. | Method of preparing and treating p-type photovoltaic semiconductor layers |
WO2019152174A1 (en) | 2018-02-01 | 2019-08-08 | First Solar, Inc. | Method for group v doping of an absorber layer in photovoltaic devices |
US11302840B2 (en) * | 2018-10-30 | 2022-04-12 | Vandette B. Carter | Solar cell with three layers and forward biasing voltage |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000100834A (ja) | 1998-09-21 | 2000-04-07 | Matsushita Battery Industrial Co Ltd | 太陽電池用テルル化カドミウム膜の処理方法と処理装置 |
US20090194166A1 (en) | 2007-11-02 | 2009-08-06 | First Solar, Inc. | Photovoltaic devices including doped semiconductor films |
US20130074914A1 (en) | 2011-09-26 | 2013-03-28 | General Electric Company | Photovoltaic devices |
US20130180579A1 (en) | 2012-01-17 | 2013-07-18 | First Solar, Inc | Photovoltaic device having an absorber multilayer and method of manufacturing the same |
US20130337600A1 (en) | 2012-06-14 | 2013-12-19 | General Electric Company | Method of processing a semiconductor assembly |
US20140373908A1 (en) | 2013-06-21 | 2014-12-25 | First Solar Inc. | Photovoltaic devices |
US20160126396A1 (en) | 2014-11-03 | 2016-05-05 | First Solar, Inc. | Photovoltaic devices and method of manufacturing |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4950615A (en) * | 1989-02-06 | 1990-08-21 | International Solar Electric Technology, Inc. | Method and making group IIB metal - telluride films and solar cells |
US5501744A (en) * | 1992-01-13 | 1996-03-26 | Photon Energy, Inc. | Photovoltaic cell having a p-type polycrystalline layer with large crystals |
US5279678A (en) | 1992-01-13 | 1994-01-18 | Photon Energy, Inc. | Photovoltaic cell with thin CS layer |
JPH0685297A (ja) | 1992-09-03 | 1994-03-25 | Matsushita Electric Ind Co Ltd | 太陽電池の製造法 |
WO2008128211A1 (en) * | 2007-04-13 | 2008-10-23 | Ziawatt Solar, Llc | Layers that impede diffusion of metals in group vi element-containing materials |
US8664524B2 (en) * | 2008-07-17 | 2014-03-04 | Uriel Solar, Inc. | High power efficiency, large substrate, polycrystalline CdTe thin film semiconductor photovoltaic cell structures grown by molecular beam epitaxy at high deposition rate for use in solar electricity generation |
WO2012118771A2 (en) * | 2011-02-28 | 2012-09-07 | Alliance For Sustainable Energy, Llc | Improved thin-film photovoltaic devices and methods of manufacture |
US9496446B2 (en) * | 2012-01-31 | 2016-11-15 | First Solar, Inc. | Photovoltaic devices and method of making |
US9054245B2 (en) * | 2012-03-02 | 2015-06-09 | First Solar, Inc. | Doping an absorber layer of a photovoltaic device via diffusion from a window layer |
EP2852985A2 (en) | 2012-05-21 | 2015-04-01 | First Solar, Inc | Method of providing chloride treatment for a photovoltaic device and a chloride treated photovoltaic device |
CN102810598A (zh) * | 2012-07-31 | 2012-12-05 | 江苏顺风光电科技有限公司 | 太阳能电池扩散退火工艺 |
US11876140B2 (en) * | 2013-05-02 | 2024-01-16 | First Solar, Inc. | Photovoltaic devices and method of making |
US10062800B2 (en) * | 2013-06-07 | 2018-08-28 | First Solar, Inc. | Photovoltaic devices and method of making |
EP3586374B1 (en) | 2017-02-24 | 2022-12-28 | First Solar, Inc. | Method of preparing and treating p-type photovoltaic semiconductor layers |
JP6776456B2 (ja) | 2017-02-27 | 2020-10-28 | ファースト・ソーラー・インコーポレーテッド | 第v族ドープのための薄膜積層体、それを含む光起電力素子、および薄膜積層体を有する光起電力素子を形成する方法 |
-
2017
- 2017-12-07 US US16/770,388 patent/US11502212B2/en active Active
- 2017-12-07 MY MYPI2020002894A patent/MY196698A/en unknown
- 2017-12-07 EP EP17934240.7A patent/EP3721479B1/en active Active
- 2017-12-07 EP EP22155897.6A patent/EP4020603A1/en active Pending
- 2017-12-07 WO PCT/CN2017/114980 patent/WO2019109297A1/en unknown
- 2017-12-07 JP JP2020531089A patent/JP7046184B2/ja active Active
- 2017-12-07 CN CN201780098268.5A patent/CN111670504B/zh active Active
-
2022
- 2022-11-14 US US17/986,747 patent/US20230082990A1/en active Pending
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000100834A (ja) | 1998-09-21 | 2000-04-07 | Matsushita Battery Industrial Co Ltd | 太陽電池用テルル化カドミウム膜の処理方法と処理装置 |
US20090194166A1 (en) | 2007-11-02 | 2009-08-06 | First Solar, Inc. | Photovoltaic devices including doped semiconductor films |
US20130074914A1 (en) | 2011-09-26 | 2013-03-28 | General Electric Company | Photovoltaic devices |
US20130180579A1 (en) | 2012-01-17 | 2013-07-18 | First Solar, Inc | Photovoltaic device having an absorber multilayer and method of manufacturing the same |
US20130337600A1 (en) | 2012-06-14 | 2013-12-19 | General Electric Company | Method of processing a semiconductor assembly |
US20140373908A1 (en) | 2013-06-21 | 2014-12-25 | First Solar Inc. | Photovoltaic devices |
US20160126396A1 (en) | 2014-11-03 | 2016-05-05 | First Solar, Inc. | Photovoltaic devices and method of manufacturing |
Also Published As
Publication number | Publication date |
---|---|
US20200381567A1 (en) | 2020-12-03 |
EP3721479A4 (en) | 2020-10-14 |
EP3721479B1 (en) | 2022-02-16 |
EP4020603A1 (en) | 2022-06-29 |
EP3721479A1 (en) | 2020-10-14 |
US11502212B2 (en) | 2022-11-15 |
CN111670504B (zh) | 2024-01-30 |
MY196698A (en) | 2023-04-30 |
US20230082990A1 (en) | 2023-03-16 |
WO2019109297A1 (en) | 2019-06-13 |
CN111670504A (zh) | 2020-09-15 |
JP2021509222A (ja) | 2021-03-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7046184B2 (ja) | 光起電力素子および第v族ドーパントを備える半導体層、ならびにそれを形成する方法 | |
US9853177B2 (en) | Photovoltaic device including a back contact and method of manufacturing | |
JP7372250B2 (ja) | 光起電力素子における吸収体層の第v族ドーピングの方法 | |
JP2023171715A (ja) | ドープ光起電力半導体層および製造方法 | |
JP2022116110A (ja) | 光起電デバイス用の金属酸窒化物バック接点層 | |
CN111490117B (zh) | 用于薄膜太阳能电池的层系统 | |
JP5911640B2 (ja) | 薄膜太陽電池用の層体 | |
EP3857611B1 (en) | Buffer layers for photovoltaic devices with group v doping | |
JP2016225335A (ja) | 化合物薄膜太陽電池用基材、化合物薄膜太陽電池、化合物薄膜太陽電池モジュール、化合物薄膜太陽電池用基材の製造方法、および、化合物薄膜太陽電池の製造方法 | |
EP3472871A1 (en) | A copper-based chalcogenide photovoltaic device and a method of forming the same | |
WO2020086646A1 (en) | Buffer layers for photovoltaic devices with group v doping | |
US20200343402A1 (en) | Absorber layers with mercury for photovoltaic devices and methods for forming the same | |
WO2023236106A1 (en) | Method for manufacturing cdte based thin film solar cell with graded refractive index profile within the cdte-based absorber layer and cdte based thin film solar cell with graded refractive index profile | |
WO2023122338A1 (en) | Cadmium selenide based photovoltaic devices and methods for forming the same | |
US20200403109A1 (en) | Layer structures for photovoltaic devices and photovoltaic devices including the same | |
WO2019126463A1 (en) | Absorber layers with mercury for photovoltaic devices and methods for forming the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200807 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20201014 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210930 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20211005 |
|
A524 | Written submission of copy of amendment under article 19 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20220104 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220222 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220322 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7046184 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |