JP7045199B2 - 基板処理装置および基板処理方法 - Google Patents
基板処理装置および基板処理方法 Download PDFInfo
- Publication number
- JP7045199B2 JP7045199B2 JP2018008691A JP2018008691A JP7045199B2 JP 7045199 B2 JP7045199 B2 JP 7045199B2 JP 2018008691 A JP2018008691 A JP 2018008691A JP 2018008691 A JP2018008691 A JP 2018008691A JP 7045199 B2 JP7045199 B2 JP 7045199B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- solution
- phosphoric acid
- etching
- supply device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67115—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
Description
110 スピンチャック
120 燐酸液供給装置
130 リンス液供給装置
140 薬液供給装置
W 基板
Lp 燐酸液
Lr リンス液
Lc 薬液
Claims (12)
- 基板を処理する基板処理方法であって、
前記基板を燐酸液で処理する工程と、
前記基板を前記燐酸液で処理した後に、前記基板をリンス液で処理する工程と、
前記基板を前記リンス液で処理した後に、前記基板を前記燐酸液で処理した際に前記基板に形成された燐拡散領域から前記燐拡散領域の深さ方向における一部の厚さの膜をエッチング液で除去する工程と、
前記エッチング液で除去する工程の後に、前記燐拡散領域から前記燐拡散領域の深さ方向における一部の厚さの膜を除去するように、アンモニアを含有する薬液で前記基板を処理する工程と
を包含する、基板処理方法。 - 前記基板には酸化膜および窒化膜が形成されており、前記膜は酸化膜である、請求項1に記載の基板処理方法。
- 前記エッチング液はフッ酸である、請求項1または2に記載の基板処理方法。
- 前記基板を前記エッチング液でエッチングするエッチング速度は、前記基板を前記薬液でエッチングするエッチング速度よりも大きい、請求項1から3のいずれかに記載の基板処理方法。
- 前記エッチング液で前記基板から除去する膜の厚さは、前記薬液で前記基板から除去する膜の厚さよりも大きい、請求項1から4のいずれかに記載の基板処理方法。
- 前記エッチング液の温度は前記薬液の温度よりも高い、請求項1から5のいずれかに記載の基板処理方法。
- 基板を処理する基板処理装置であって、
燐酸液を前記基板に供給する燐酸液供給装置と、
リンス液を前記基板に供給するリンス液供給装置と、
アンモニアを含有する薬液を前記基板に供給する薬液供給装置と、
エッチング液を前記基板に供給するエッチング液供給装置と、
前記燐酸液供給装置と、前記リンス液供給装置と、前記薬液供給装置と、前記エッチング液供給装置とを制御する制御部と
を備え、
前記制御部は、
前記燐酸液供給装置が前記燐酸液を前記基板に供給して前記基板を前記燐酸液で処理するように、前記燐酸液供給装置を制御し、
前記燐酸液で前記基板を処理した後に、前記リンス液供給装置が前記リンス液を前記基板に供給して前記基板を前記リンス液で処理するように、前記リンス液供給装置を制御し、
前記リンス液で前記基板を処理した後に、前記薬液供給装置が前記薬液を前記基板に供給して、前記基板を前記燐酸液で前記基板を処理した際に前記基板に形成された燐拡散領域から前記燐拡散領域の深さ方向における一部の厚さの膜を除去するように、前記薬液供給装置を制御し、
前記基板を前記リンス液で処理した後であって、前記基板を前記薬液で処理する前に、前記基板の前記燐拡散領域の深さ方向における一部の厚さの膜を前記エッチング液で除去するように、前記エッチング液供給装置を制御する、基板処理装置。 - 前記基板には酸化膜および窒化膜が形成されており、前記膜は酸化膜である、請求項7に記載の基板処理装置。
- 前記エッチング液はフッ酸である、請求項7または8に記載の基板処理装置。
- 前記制御部は、前記エッチング液で前記基板をエッチングするエッチング速度が前記薬液で前記基板をエッチングするエッチング速度よりも大きくなるように、前記エッチング液供給装置および前記薬液供給装置を制御する、請求項7から9のいずれかに記載の基板処理装置。
- 前記制御部は、前記エッチング液で前記基板から除去する膜の厚さが前記薬液で前記基板から除去する膜の厚さよりも大きくなるように、前記エッチング液供給装置および前記薬液供給装置を制御する、請求項7から10のいずれかに記載の基板処理装置。
- 前記制御部は、前記エッチング液の温度が前記薬液の温度よりも高くなるように前記エッチング液供給装置および前記薬液供給装置を制御する、請求項7から11のいずれかに記載の基板処理装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018008691A JP7045199B2 (ja) | 2018-01-23 | 2018-01-23 | 基板処理装置および基板処理方法 |
US16/219,967 US10790151B2 (en) | 2018-01-23 | 2018-12-14 | Substrate processing apparatus and substrate processing method |
CN201811531441.9A CN110071055B (zh) | 2018-01-23 | 2018-12-14 | 基板处理装置及基板处理方法 |
KR1020180161597A KR102203993B1 (ko) | 2018-01-23 | 2018-12-14 | 기판 처리 장치 및 기판 처리 방법 |
TW107145480A TWI720387B (zh) | 2018-01-23 | 2018-12-17 | 基板處理裝置及基板處理方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018008691A JP7045199B2 (ja) | 2018-01-23 | 2018-01-23 | 基板処理装置および基板処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019129196A JP2019129196A (ja) | 2019-08-01 |
JP7045199B2 true JP7045199B2 (ja) | 2022-03-31 |
Family
ID=67300124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018008691A Active JP7045199B2 (ja) | 2018-01-23 | 2018-01-23 | 基板処理装置および基板処理方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10790151B2 (ja) |
JP (1) | JP7045199B2 (ja) |
KR (1) | KR102203993B1 (ja) |
CN (1) | CN110071055B (ja) |
TW (1) | TWI720387B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102326012B1 (ko) * | 2019-12-13 | 2021-11-15 | 세메스 주식회사 | 박막 식각 방법 및 장치 |
KR102622986B1 (ko) * | 2020-12-31 | 2024-01-10 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006313812A (ja) | 2005-05-09 | 2006-11-16 | Seiko Epson Corp | ウェハの洗浄方法 |
JP2006313811A (ja) | 2005-05-09 | 2006-11-16 | Seiko Epson Corp | ウェハの洗浄方法 |
JP2015115455A (ja) | 2013-12-11 | 2015-06-22 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
JP2016519441A (ja) | 2013-05-08 | 2016-06-30 | ティーイーエル エフエスアイ,インコーポレイティド | ヘイズ除去および残渣除去用の水蒸気を含むプロセス |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2605594B2 (ja) * | 1993-09-03 | 1997-04-30 | 日本電気株式会社 | 半導体装置の製造方法 |
JP2002280347A (ja) * | 2001-03-15 | 2002-09-27 | Dainippon Screen Mfg Co Ltd | 薬液処理方法および薬液処理装置 |
JP2004146594A (ja) * | 2002-10-24 | 2004-05-20 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理方法 |
JP6502633B2 (ja) | 2013-09-30 | 2019-04-17 | 芝浦メカトロニクス株式会社 | 基板処理方法及び基板処理装置 |
JP6352511B2 (ja) * | 2013-09-30 | 2018-07-04 | 芝浦メカトロニクス株式会社 | 基板処理装置 |
TWI578396B (zh) * | 2013-12-11 | 2017-04-11 | 斯克林集團公司 | 基板處理方法及基板處理裝置 |
JP6440111B2 (ja) * | 2014-08-14 | 2018-12-19 | 株式会社Screenホールディングス | 基板処理方法 |
-
2018
- 2018-01-23 JP JP2018008691A patent/JP7045199B2/ja active Active
- 2018-12-14 CN CN201811531441.9A patent/CN110071055B/zh active Active
- 2018-12-14 KR KR1020180161597A patent/KR102203993B1/ko active IP Right Grant
- 2018-12-14 US US16/219,967 patent/US10790151B2/en active Active
- 2018-12-17 TW TW107145480A patent/TWI720387B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006313812A (ja) | 2005-05-09 | 2006-11-16 | Seiko Epson Corp | ウェハの洗浄方法 |
JP2006313811A (ja) | 2005-05-09 | 2006-11-16 | Seiko Epson Corp | ウェハの洗浄方法 |
JP2016519441A (ja) | 2013-05-08 | 2016-06-30 | ティーイーエル エフエスアイ,インコーポレイティド | ヘイズ除去および残渣除去用の水蒸気を含むプロセス |
JP2015115455A (ja) | 2013-12-11 | 2015-06-22 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
Also Published As
Publication number | Publication date |
---|---|
TW201933486A (zh) | 2019-08-16 |
KR20190089713A (ko) | 2019-07-31 |
JP2019129196A (ja) | 2019-08-01 |
US20190228989A1 (en) | 2019-07-25 |
TWI720387B (zh) | 2021-03-01 |
CN110071055B (zh) | 2023-06-13 |
US10790151B2 (en) | 2020-09-29 |
CN110071055A (zh) | 2019-07-30 |
KR102203993B1 (ko) | 2021-01-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11094524B2 (en) | Substrate processing method and substrate processing apparatus | |
US20220262622A1 (en) | Method of restoring collapsed pattern, substrate processing method, and substrate processing device | |
US9852914B2 (en) | Sacrificial-film removal method and substrate processing device | |
JP7045199B2 (ja) | 基板処理装置および基板処理方法 | |
US20180269076A1 (en) | Substrate processing method, substrate processing apparatus and recording medium | |
JP2007088262A (ja) | 電子デバイスの洗浄装置及び電子デバイスの洗浄方法 | |
WO2020188958A1 (ja) | 基板処理方法および基板処理装置 | |
KR102121705B1 (ko) | 희생막 형성 방법, 기판 처리 방법 및 기판 처리 장치 | |
JP2008147434A (ja) | 半導体装置の製造方法 | |
WO2020195695A1 (ja) | 基板処理装置、基板処理方法および半導体製造方法 | |
US20170309485A1 (en) | Apparatus for semiconductor wafer treatment and semiconductor wafer treatment | |
WO2024048269A1 (ja) | 基板処理方法、および基板処理装置 | |
WO2022220037A1 (ja) | 基板処理方法、基板処理装置および乾燥処理液 | |
WO2022024590A1 (ja) | 基板処理方法 | |
JP2021073736A (ja) | 基板処理方法および基板処理装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20201218 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210928 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20211005 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20211203 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220204 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220301 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220318 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7045199 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |