JP7043580B2 - 2次元多層厚測定 - Google Patents
2次元多層厚測定 Download PDFInfo
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- JP7043580B2 JP7043580B2 JP2020212426A JP2020212426A JP7043580B2 JP 7043580 B2 JP7043580 B2 JP 7043580B2 JP 2020212426 A JP2020212426 A JP 2020212426A JP 2020212426 A JP2020212426 A JP 2020212426A JP 7043580 B2 JP7043580 B2 JP 7043580B2
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
- A61B3/101—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for examining the tear film
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
- A61B3/1005—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for measuring distances inside the eye, e.g. thickness of the cornea
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
- A61B3/14—Arrangements specially adapted for eye photography
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0059—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence
- A61B5/0075—Measuring for diagnostic purposes; Identification of persons using light, e.g. diagnosis by transillumination, diascopy, fluorescence by spectroscopy, i.e. measuring spectra, e.g. Raman spectroscopy, infrared absorption spectroscopy
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
- G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T11/00—2D [Two Dimensional] image generation
- G06T11/60—Editing figures and text; Combining figures or text
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0012—Biomedical image inspection
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/103—Detecting, measuring or recording devices for testing the shape, pattern, colour, size or movement of the body or parts thereof, for diagnostic purposes
- A61B5/107—Measuring physical dimensions, e.g. size of the entire body or parts thereof
- A61B5/1075—Measuring physical dimensions, e.g. size of the entire body or parts thereof for measuring dimensions by non-invasive methods, e.g. for determining thickness of tissue layer
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30004—Biomedical image processing
- G06T2207/30041—Eye; Retina; Ophthalmic
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- Ophthalmology & Optometry (AREA)
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- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Quality & Reliability (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Eye Examination Apparatus (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
本発明は、多層構造体の層厚を測定するための方法及びシステムに関する。
空気-油界面300において:
前述したように、方程式1はマクスウェル方程式に基づいている。しかしながら、特定のモデルは、異なる方法で求められてもよい。例えば、層厚を求めるために、強度を表す異なる方程式が解かれる。
ここで、I(λ)は特定の波長λで測定された強度を表す方程式であり、Eoptics(λ)は入射光及び反射光を通過させるために用いられる光学系のスペクトル応答であり、Esensor(λ)は反射光を検出する光センサのスペクトル応答、つまり、イメージングセンサ及びシステムの特性である。他の実施形態では、光学系及び/又はセンサのスペクトル応答について必ずしも考慮することはなく、各帯域内の波長にわたる和を用いて(層厚を解くために用いることが可能な)各帯域の強度を求めることが可能である。
シミュレーション及びテスト結果
Claims (1)
- 油層とムチン-水層を含む涙液の層厚を測定するための方法であって、
各ピクセルに対応する前記涙液の位置における第1の入射光の反射の強度を測定することにより、前記涙液の第1の2次元(2D)画像を生成し、
各ピクセルに対応する前記涙液の位置における第2の入射光の反射の強度を測定することにより、前記涙液の第2の2D画像を生成し、
前記第1及び第2の2D画像において対応するピクセルについて測定された反射の強度に基づいて、前記涙液の各位置における前記涙液の少なくとも1つの層の厚さを求め、
前記第1の入射光は第1の離散的狭域スペクトル帯において生成され、前記第2の入射光は第2の離散的狭域スペクトル帯において生成され、前記第1及び第2の離散的狭域スペクトル帯は完全に重複することはなく、
前記第1及び第2の入射光の強度は、光センサによって測定され、
前記涙液の少なくとも1つの層の厚さは、前記涙液への入射光からの反射光の強度の測定値を、訓練された機械学習システムに入力することによって求められ、
前記機械学習システムは、前記強度の測定値に対応する入射光の波長に関する完全分解された分光反射率、物理的涙液モデルの測定値、及び/又は、数値モデル又は数値シミュレーションにより取得された強度と真の厚さとのペアを利用することが可能な教師あり環境にて訓練される、
方法。
Applications Claiming Priority (4)
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US201862622544P | 2018-01-26 | 2018-01-26 | |
US62/622,544 | 2018-01-26 | ||
US16/252,818 | 2019-01-21 | ||
US16/252,818 US10893796B2 (en) | 2018-01-26 | 2019-01-21 | 2D multi-layer thickness measurement |
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JP2019009884A Division JP2019148584A (ja) | 2018-01-26 | 2019-01-24 | 2次元多層厚測定 |
Publications (2)
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JP2021049413A JP2021049413A (ja) | 2021-04-01 |
JP7043580B2 true JP7043580B2 (ja) | 2022-03-29 |
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JP2019009884A Pending JP2019148584A (ja) | 2018-01-26 | 2019-01-24 | 2次元多層厚測定 |
JP2020212426A Active JP7043580B2 (ja) | 2018-01-26 | 2020-12-22 | 2次元多層厚測定 |
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US (1) | US10893796B2 (ja) |
EP (1) | EP3520680A1 (ja) |
JP (2) | JP2019148584A (ja) |
DE (1) | DE19153552T1 (ja) |
Families Citing this family (4)
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US11684253B2 (en) | 2019-04-24 | 2023-06-27 | Topcon Corporation | 2D multi-layer thickness measurement with reconstructed spectrum |
US11253151B2 (en) * | 2019-09-08 | 2022-02-22 | Aizhong Zhang | Multispectral and hyperspectral ocular surface evaluator |
CN111076668B (zh) * | 2019-12-24 | 2021-03-23 | 天津大学 | 用于纳米厚度SiO2厚度的差分反射光谱测量方法 |
US20220330813A1 (en) * | 2021-04-15 | 2022-10-20 | Amo Development, Llc | Methods and systems for thickness measurements using spectrally resolved full gradient topography |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002306417A (ja) | 2001-02-09 | 2002-10-22 | Topcon Corp | 眼特性測定装置 |
US20130050648A1 (en) | 2011-08-30 | 2013-02-28 | Andreas Steinmueller | Ophthalmological analysis instrument and method |
US20160338585A1 (en) | 2014-03-06 | 2016-11-24 | ADOM, Advanced Optical Technologies Ltd | System and Method for Performing Tear Film Structure Measurement and Evaporation Rate Measurements |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6412208A (en) * | 1987-07-04 | 1989-01-17 | Toyo Boseki | Measurement of film thickness and/or refractive index |
JP2883192B2 (ja) * | 1990-11-05 | 1999-04-19 | オリンパス光学工業株式会社 | 光学式膜厚測定装置 |
US5486701A (en) | 1992-06-16 | 1996-01-23 | Prometrix Corporation | Method and apparatus for measuring reflectance in two wavelength bands to enable determination of thin film thickness |
US5640242A (en) | 1996-01-31 | 1997-06-17 | International Business Machines Corporation | Assembly and method for making in process thin film thickness measurments |
US5999267A (en) * | 1999-03-08 | 1999-12-07 | Zawaideh; Emad | Nondestructive optical techniques for simultaneously measuring optical constants and thicknesses of single and multilayer films |
JP2004069651A (ja) * | 2002-08-09 | 2004-03-04 | Omron Corp | 膜厚測定装置 |
JP4781630B2 (ja) * | 2004-02-06 | 2011-09-28 | 大日本印刷株式会社 | 膜厚測定装置 |
JP5273644B2 (ja) * | 2008-02-26 | 2013-08-28 | レーザーテック株式会社 | 膜厚測定装置及び膜厚測定方法 |
US8746883B2 (en) * | 2009-04-01 | 2014-06-10 | Tearscience, Inc. | Ocular surface interferometery (OSI) devices and systems for imaging, processing, and/or displaying an ocular tear film |
US8256898B2 (en) * | 2009-06-12 | 2012-09-04 | The Regents Of The University Of California | Method and device for tear film analysis |
JP5572407B2 (ja) | 2010-01-29 | 2014-08-13 | 京都府公立大学法人 | 眼科装置及び画像分類プログラム |
US10255385B2 (en) * | 2012-03-28 | 2019-04-09 | Kla-Tencor Corporation | Model optimization approach based on spectral sensitivity |
IL221187A (en) | 2012-07-30 | 2017-01-31 | Adom Advanced Optical Tech Ltd | A system to perform optical tomography in two 2D beams |
FR2998047B1 (fr) * | 2012-11-12 | 2015-10-02 | Soitec Silicon On Insulator | Procede de mesure des variations d'epaisseur d'une couche d'une structure semi-conductrice multicouche |
JP2017044596A (ja) * | 2015-08-27 | 2017-03-02 | 東レエンジニアリング株式会社 | 膜厚測定装置および膜厚測定方法 |
JP6750793B2 (ja) * | 2016-04-26 | 2020-09-02 | レーザーテック株式会社 | 膜厚測定装置及び膜厚測定方法 |
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2019
- 2019-01-21 US US16/252,818 patent/US10893796B2/en active Active
- 2019-01-24 EP EP19153552.5A patent/EP3520680A1/en active Pending
- 2019-01-24 DE DE19153552.5T patent/DE19153552T1/de active Pending
- 2019-01-24 JP JP2019009884A patent/JP2019148584A/ja active Pending
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2020
- 2020-12-22 JP JP2020212426A patent/JP7043580B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002306417A (ja) | 2001-02-09 | 2002-10-22 | Topcon Corp | 眼特性測定装置 |
US20130050648A1 (en) | 2011-08-30 | 2013-02-28 | Andreas Steinmueller | Ophthalmological analysis instrument and method |
JP2013056152A (ja) | 2011-08-30 | 2013-03-28 | Oculus Optikgeraete Gmbh | 眼科分析機器及び方法 |
US20160338585A1 (en) | 2014-03-06 | 2016-11-24 | ADOM, Advanced Optical Technologies Ltd | System and Method for Performing Tear Film Structure Measurement and Evaporation Rate Measurements |
Non-Patent Citations (1)
Title |
---|
Inline hyperspectral thickness determination of thin film neural networks,PROCEEDINGS OF SPIE; Hyperspectral Imaging Sensors: Innovative Applications and Sensor Standards 2017,2017年 |
Also Published As
Publication number | Publication date |
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DE19153552T1 (de) | 2019-10-02 |
EP3520680A1 (en) | 2019-08-07 |
US20190231187A1 (en) | 2019-08-01 |
US10893796B2 (en) | 2021-01-19 |
JP2021049413A (ja) | 2021-04-01 |
JP2019148584A (ja) | 2019-09-05 |
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