JP7011739B2 - 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ） - Google Patents

原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ） Download PDF

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JP7011739B2
JP7011739B2 JP2020566686A JP2020566686A JP7011739B2 JP 7011739 B2 JP7011739 B2 JP 7011739B2 JP 2020566686 A JP2020566686 A JP 2020566686A JP 2020566686 A JP2020566686 A JP 2020566686A JP 7011739 B2 JP7011739 B2 JP 7011739B2
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probe
sample
afm
frequency
frequencies
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JP2021524584A (ja
Inventor
オセシンスキー，セルゲイ
ロイター，アントニウス
ピッテンジャー，ベーデ
サイド－アマーヌッラー，サイド－アシフ
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Bruker Nano Inc
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Bruker Nano Inc
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Priority to JP2022069161A priority patent/JP7349529B2/ja
Priority to JP2023146623A priority patent/JP7654040B2/ja
Priority to JP2025043396A priority patent/JP2025089351A/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/36—DC mode
    • G01Q60/366—Nanoindenters, i.e. wherein the indenting force is measured
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/32—Investigating strength properties of solid materials by application of mechanical stress by applying repeated or pulsating forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40—Investigating hardness or rebound hardness
    • G01N3/42—Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/36—DC mode
    • G01Q60/363—Contact-mode AFM
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0001—Type of application of the stress
    • G01N2203/0003—Steady
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0001—Type of application of the stress
    • G01N2203/0005—Repeated or cyclic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0014—Type of force applied
    • G01N2203/0016—Tensile or compressive
    • G01N2203/0019—Compressive
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058—Kind of property studied
    • G01N2203/0069—Fatigue, creep, strain-stress relations or elastic constants
    • G01N2203/0075—Strain-stress relations or elastic constants
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058—Kind of property studied
    • G01N2203/0092—Visco-elasticity, solidification, curing, cross-linking degree, vulcanisation or strength properties of semi-solid materials
    • G01N2203/0094—Visco-elasticity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/026—Specifications of the specimen
    • G01N2203/0286—Miniature specimen; Testing on microregions of a specimen
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/06—Indicating or recording means; Sensing means
    • G01N2203/067—Parameter measured for estimating the property
    • G01N2203/0676—Force, weight, load, energy, speed or acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/10—Thermal environment

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  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
JP2020566686A 2018-08-06 2019-08-02 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ） Active JP7011739B2 (ja)

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JP2022004078A JP7062842B2 (ja) 2018-08-06 2022-01-14 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ）
JP2022069161A JP7349529B2 (ja) 2018-08-06 2022-04-20 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ）
JP2023146623A JP7654040B2 (ja) 2018-08-06 2023-09-11 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ）
JP2025043396A JP2025089351A (ja) 2018-08-06 2025-03-18 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ）

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US201862715166P 2018-08-06 2018-08-06
US62/715,166 2018-08-06
US201862769905P 2018-11-20 2018-11-20
US62/769,905 2018-11-20
PCT/US2019/044952 WO2020033269A1 (en) 2018-08-06 2019-08-02 Nanoscale dynamic mechanical analysis via atomic force microscopy (afm-ndma)

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JP7011739B2 true JP7011739B2 (ja) 2022-01-27

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JP2020566686A Active JP7011739B2 (ja) 2018-08-06 2019-08-02 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ）
JP2022004078A Active JP7062842B2 (ja) 2018-08-06 2022-01-14 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ）
JP2022069161A Active JP7349529B2 (ja) 2018-08-06 2022-04-20 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ）
JP2023146623A Active JP7654040B2 (ja) 2018-08-06 2023-09-11 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ）
JP2025043396A Pending JP2025089351A (ja) 2018-08-06 2025-03-18 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ）

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JP2022069161A Active JP7349529B2 (ja) 2018-08-06 2022-04-20 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ）
JP2023146623A Active JP7654040B2 (ja) 2018-08-06 2023-09-11 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ）
JP2025043396A Pending JP2025089351A (ja) 2018-08-06 2025-03-18 原子間力顕微鏡によるナノスケール動的機械分析（ＡＦＭ－ｎＤＭＡ）

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US (6) US11029330B2 (enExample)
EP (2) EP3788386B1 (enExample)
JP (5) JP7011739B2 (enExample)
KR (1) KR102339797B1 (enExample)
CN (2) CN112585479B (enExample)
WO (1) WO2020033269A1 (enExample)

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EP3722817B1 (en) * 2019-04-12 2022-05-11 attocube systems AG Active bimodal afm operation for measurements of optical interaction
CN111896775B (zh) * 2020-08-17 2023-09-05 四川轻化工大学 一种基于结合胶检测天然橡胶中炭黑的补强性能的方法
US20240151742A1 (en) * 2021-03-15 2024-05-09 Uti Limited Partnership Transitional tapping atomic force microscopy for high-resolution imaging
US11714104B2 (en) * 2021-05-25 2023-08-01 Bruker Nano, Inc. AFM imaging with creep correction
CN114544876B (zh) * 2022-02-23 2022-11-25 上海大学 一种粘弹性材料特性确定方法及系统
CN114720502B (zh) * 2022-04-11 2024-06-25 重庆大学 用于微观形貌观测的阵列式定位方法及装置
US20250370002A1 (en) * 2022-06-23 2025-12-04 Trustees Of Tufts College Controlled Indentation Instrumentation Working in Dynamical Mechanical Analysis Mode
CN115753502B (zh) * 2022-11-14 2023-08-18 西安交通大学 一种生物组织微纳米流变学特性的测试装置及方法
WO2024211750A1 (en) * 2023-04-05 2024-10-10 Laser Thermal Analysis, Inc. Nano-probe thermoreflectance microscopy
CN117030430B (zh) * 2023-08-04 2024-02-06 青岛海洋地质研究所 一种水合物纳米压痕装置
CN119479946B (zh) * 2025-01-09 2025-04-29 中南大学 一种蠕变松弛时效宏微观统一本构模型参数确定方法及系统

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CN112585479A (zh) 2021-03-30
US11307220B2 (en) 2022-04-19
JP2022089945A (ja) 2022-06-16
US20210239732A1 (en) 2021-08-05
US20240175895A1 (en) 2024-05-30
JP2022036270A (ja) 2022-03-04
US11635449B2 (en) 2023-04-25
JP7654040B2 (ja) 2025-03-31
EP3788386A1 (en) 2021-03-10
EP4134680A1 (en) 2023-02-15
JP2021524584A (ja) 2021-09-13
JP7349529B2 (ja) 2023-09-22
JP2023162445A (ja) 2023-11-08
US20230243867A1 (en) 2023-08-03
EP3788386B1 (en) 2022-10-05
US11940461B2 (en) 2024-03-26
WO2020033269A1 (en) 2020-02-13
US20250147066A1 (en) 2025-05-08
JP7062842B2 (ja) 2022-05-06
CN114966119A (zh) 2022-08-30
US11029330B2 (en) 2021-06-08
JP2025089351A (ja) 2025-06-12
CN114966119B (zh) 2023-10-24
US20200041541A1 (en) 2020-02-06
KR20210053293A (ko) 2021-05-11
KR102339797B1 (ko) 2021-12-15
US20220252638A1 (en) 2022-08-11
CN112585479B (zh) 2022-04-19
US12241911B2 (en) 2025-03-04

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