CN112585479B - 经由原子力显微镜进行纳米级动态力学分析(afm-ndma) - Google Patents

经由原子力显微镜进行纳米级动态力学分析(afm-ndma) Download PDF

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CN112585479B
CN112585479B CN201980052345.2A CN201980052345A CN112585479B CN 112585479 B CN112585479 B CN 112585479B CN 201980052345 A CN201980052345 A CN 201980052345A CN 112585479 B CN112585479 B CN 112585479B
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probe
sample
afm
frequency
creep
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CN112585479A (zh
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谢尔盖·奥斯钦斯基
安东尼奥斯·鲁伊特
B·皮腾杰
赛义德-阿西夫·赛义德-阿玛努拉
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Bruker Nano Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/36—DC mode
    • G01Q60/366—Nanoindenters, i.e. wherein the indenting force is measured
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/32—Investigating strength properties of solid materials by application of mechanical stress by applying repeated or pulsating forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/40—Investigating hardness or rebound hardness
    • G01N3/42—Investigating hardness or rebound hardness by performing impressions under a steady load by indentors, e.g. sphere, pyramid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/10—Thermal environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/36—DC mode
    • G01Q60/363—Contact-mode AFM
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0001—Type of application of the stress
    • G01N2203/0003—Steady
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0001—Type of application of the stress
    • G01N2203/0005—Repeated or cyclic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0014—Type of force applied
    • G01N2203/0016—Tensile or compressive
    • G01N2203/0019—Compressive
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058—Kind of property studied
    • G01N2203/0069—Fatigue, creep, strain-stress relations or elastic constants
    • G01N2203/0075—Strain-stress relations or elastic constants
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/0058—Kind of property studied
    • G01N2203/0092—Visco-elasticity, solidification, curing, cross-linking degree, vulcanisation or strength properties of semi-solid materials
    • G01N2203/0094—Visco-elasticity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/026—Specifications of the specimen
    • G01N2203/0286—Miniature specimen; Testing on microregions of a specimen
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/06—Indicating or recording means; Sensing means
    • G01N2203/067—Parameter measured for estimating the property
    • G01N2203/0676—Force, weight, load, energy, speed or acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation

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  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
CN201980052345.2A 2018-08-06 2019-08-02 经由原子力显微镜进行纳米级动态力学分析(afm-ndma) Active CN112585479B (zh)

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US201862715166P 2018-08-06 2018-08-06
US62/715,166 2018-08-06
US201862769905P 2018-11-20 2018-11-20
US62/769,905 2018-11-20
PCT/US2019/044952 WO2020033269A1 (en) 2018-08-06 2019-08-02 Nanoscale dynamic mechanical analysis via atomic force microscopy (afm-ndma)

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US (6) US11029330B2 (enExample)
EP (2) EP3788386B1 (enExample)
JP (5) JP7011739B2 (enExample)
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Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11029330B2 (en) * 2018-08-06 2021-06-08 Bruker Nano, Inc. Nanoscale dynamic mechanical analysis via atomic force microscopy (AFM-nDMA)
EP3722817B1 (en) * 2019-04-12 2022-05-11 attocube systems AG Active bimodal afm operation for measurements of optical interaction
CN111896775B (zh) * 2020-08-17 2023-09-05 四川轻化工大学 一种基于结合胶检测天然橡胶中炭黑的补强性能的方法
US20240151742A1 (en) * 2021-03-15 2024-05-09 Uti Limited Partnership Transitional tapping atomic force microscopy for high-resolution imaging
US11714104B2 (en) * 2021-05-25 2023-08-01 Bruker Nano, Inc. AFM imaging with creep correction
CN114544876B (zh) * 2022-02-23 2022-11-25 上海大学 一种粘弹性材料特性确定方法及系统
CN114720502B (zh) * 2022-04-11 2024-06-25 重庆大学 用于微观形貌观测的阵列式定位方法及装置
US20250370002A1 (en) * 2022-06-23 2025-12-04 Trustees Of Tufts College Controlled Indentation Instrumentation Working in Dynamical Mechanical Analysis Mode
CN115753502B (zh) * 2022-11-14 2023-08-18 西安交通大学 一种生物组织微纳米流变学特性的测试装置及方法
WO2024211750A1 (en) * 2023-04-05 2024-10-10 Laser Thermal Analysis, Inc. Nano-probe thermoreflectance microscopy
CN117030430B (zh) * 2023-08-04 2024-02-06 青岛海洋地质研究所 一种水合物纳米压痕装置
CN119479946B (zh) * 2025-01-09 2025-04-29 中南大学 一种蠕变松弛时效宏微观统一本构模型参数确定方法及系统

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7555940B2 (en) * 2006-07-25 2009-07-07 Veeco Instruments, Inc. Cantilever free-decay measurement system with coherent averaging
US8156795B2 (en) * 2006-10-23 2012-04-17 John Samuel Batchelder System and method for measuring surface energies
CN103069279A (zh) * 2010-03-19 2013-04-24 布鲁克纳米公司 低漂移的扫描探针显微镜
US8973161B2 (en) * 2012-06-22 2015-03-03 Rutgers, The State University Of New Jersey Method and apparatus for nanomechanical measurement using an atomic force microscope
US9417170B2 (en) * 2011-07-15 2016-08-16 Clarkson University High resolution, high speed multi-frequency dynamic study of visco-elastic properites
US9778194B2 (en) * 2014-07-16 2017-10-03 Purdue Research Foundation In-situ combined sensing of uniaxial nanomechanical and micromechanical stress with simultaneous measurement of surface temperature profiles by raman shift in nanoscale and microscale structures
WO2017191015A1 (en) * 2016-05-04 2017-11-09 Institut National De La Santé Et De La Recherche Médicale (Inserm) A method of operating an afm

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000346784A (ja) * 1999-06-04 2000-12-15 Shimadzu Corp 粘弾性分布測定方法
US7596990B2 (en) 2004-04-14 2009-10-06 Veeco Instruments, Inc. Method and apparatus for obtaining quantitative measurements using a probe based instrument
CN105319396B (zh) * 2008-11-13 2019-06-04 布鲁克纳米公司 使用峰值力轻敲模式来测量样本的物理特性的方法和设备
KR101535519B1 (ko) * 2011-02-10 2015-07-09 하이지트론, 인코포레이티드 나노기계 테스트 시스템
EP2932277B1 (en) * 2012-12-12 2024-04-03 Universität Basel Method and device for controlling a scanning probe microscope
JP6360735B2 (ja) * 2014-07-02 2018-07-18 国立大学法人北海道大学 細胞の複素弾性率の計測方法および計測システム
JP6766351B2 (ja) 2014-12-26 2020-10-14 株式会社リコー 微小物特性計測装置
US10072920B2 (en) * 2015-05-22 2018-09-11 Cornell University Optical sensing based on measurements of displacements induced by optical scattering forces in viscoelastic media using phase-sensitive optical coherence tomography
EP3747950A1 (en) * 2016-08-09 2020-12-09 A.L.M. Holding Company Sterol blends as an additive in asphalt binder
CN107045075B (zh) * 2017-03-31 2019-08-02 国家纳米科学中心 一种基于多孔介质模型的细胞物理状态的表征方法
CN107449939B (zh) * 2017-08-03 2020-04-24 哈尔滨工业大学 采用磁驱峰值力调制原子力显微镜进行的多参数同步测量方法
US11029330B2 (en) 2018-08-06 2021-06-08 Bruker Nano, Inc. Nanoscale dynamic mechanical analysis via atomic force microscopy (AFM-nDMA)

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7555940B2 (en) * 2006-07-25 2009-07-07 Veeco Instruments, Inc. Cantilever free-decay measurement system with coherent averaging
US8156795B2 (en) * 2006-10-23 2012-04-17 John Samuel Batchelder System and method for measuring surface energies
CN103069279A (zh) * 2010-03-19 2013-04-24 布鲁克纳米公司 低漂移的扫描探针显微镜
US9417170B2 (en) * 2011-07-15 2016-08-16 Clarkson University High resolution, high speed multi-frequency dynamic study of visco-elastic properites
US8973161B2 (en) * 2012-06-22 2015-03-03 Rutgers, The State University Of New Jersey Method and apparatus for nanomechanical measurement using an atomic force microscope
US9778194B2 (en) * 2014-07-16 2017-10-03 Purdue Research Foundation In-situ combined sensing of uniaxial nanomechanical and micromechanical stress with simultaneous measurement of surface temperature profiles by raman shift in nanoscale and microscale structures
WO2017191015A1 (en) * 2016-05-04 2017-11-09 Institut National De La Santé Et De La Recherche Médicale (Inserm) A method of operating an afm

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Cytoskeleton remodelling of confluent epithelial cells cultured on porous substates;JAN ROTHER ET AL;《Journal of the royal society》;20150206;第12卷(第103期);全文 *
Stress relaxation and creep on living cells with the atomic force microscope:a means to calculate elastic moduli and viscosities of cell components;SUSANA MORENO-FLORES ET AL;《NANOTECHNOLOGY》;20101005;第21卷(第44期);全文 *

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CN112585479A (zh) 2021-03-30
US11307220B2 (en) 2022-04-19
JP2022089945A (ja) 2022-06-16
US20210239732A1 (en) 2021-08-05
US20240175895A1 (en) 2024-05-30
JP2022036270A (ja) 2022-03-04
US11635449B2 (en) 2023-04-25
JP7654040B2 (ja) 2025-03-31
EP3788386A1 (en) 2021-03-10
EP4134680A1 (en) 2023-02-15
JP2021524584A (ja) 2021-09-13
JP7349529B2 (ja) 2023-09-22
JP2023162445A (ja) 2023-11-08
US20230243867A1 (en) 2023-08-03
EP3788386B1 (en) 2022-10-05
US11940461B2 (en) 2024-03-26
WO2020033269A1 (en) 2020-02-13
US20250147066A1 (en) 2025-05-08
JP7062842B2 (ja) 2022-05-06
CN114966119A (zh) 2022-08-30
US11029330B2 (en) 2021-06-08
JP2025089351A (ja) 2025-06-12
CN114966119B (zh) 2023-10-24
US20200041541A1 (en) 2020-02-06
KR20210053293A (ko) 2021-05-11
KR102339797B1 (ko) 2021-12-15
US20220252638A1 (en) 2022-08-11
JP7011739B2 (ja) 2022-01-27
US12241911B2 (en) 2025-03-04

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