JP6990506B2 - 三次元印刷のための方法及び装置 - Google Patents
三次元印刷のための方法及び装置 Download PDFInfo
- Publication number
- JP6990506B2 JP6990506B2 JP2016226850A JP2016226850A JP6990506B2 JP 6990506 B2 JP6990506 B2 JP 6990506B2 JP 2016226850 A JP2016226850 A JP 2016226850A JP 2016226850 A JP2016226850 A JP 2016226850A JP 6990506 B2 JP6990506 B2 JP 6990506B2
- Authority
- JP
- Japan
- Prior art keywords
- control mechanism
- polarization
- laser energy
- substrate
- controller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/34—Laser welding for purposes other than joining
- B23K26/342—Build-up welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/141—Processes of additive manufacturing using only solid materials
- B29C64/153—Processes of additive manufacturing using only solid materials using layers of powder being selectively joined, e.g. by selective laser sintering or melting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
- B29C64/264—Arrangements for irradiation
- B29C64/268—Arrangements for irradiation using laser beams; using electron beams [EB]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/30—Auxiliary operations or equipment
- B29C64/386—Data acquisition or data processing for additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/30—Auxiliary operations or equipment
- B29C64/386—Data acquisition or data processing for additive manufacturing
- B29C64/393—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y40/00—Auxiliary operations or equipment, e.g. for material handling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y50/00—Data acquisition or data processing for additive manufacturing
- B33Y50/02—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/001—Rapid manufacturing of 3D objects by additive depositing, agglomerating or laminating of material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2025/00—Use of polymers of vinyl-aromatic compounds or derivatives thereof as moulding material
- B29K2025/04—Polymers of styrene
- B29K2025/06—PS, i.e. polystyrene
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2077/00—Use of PA, i.e. polyamides, e.g. polyesteramides or derivatives thereof, as moulding material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
- B29K2105/25—Solid
- B29K2105/251—Particles, powder or granules
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Laser Beam Processing (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Producing Shaped Articles From Materials (AREA)
- Powder Metallurgy (AREA)
- Ceramic Engineering (AREA)
Description
Claims (7)
- 三次元印刷装置(100)であって、該三次元印刷装置は、
上にある基材(113)を支持するための、静止している被加工物支持体(102)と、
前記基材にレーザエネルギー(115)を供給するためのレーザ(217)と、
前記基材の画像を捕捉するための画像デバイス(108)と、
前記画像デバイスから画像データを受信するためのコントローラ(110)と、
前記コントローラに連結され、かつ、前記コントローラから指令を受信するよう適合した光学アセンブリ(216)とを備え、前記光学アセンブリは、
ビームステアリング機構(220)と、
形状制御機構(350)と、
偏光機構(222)と、
強度制御機構(223)とを備える、三次元印刷装置(100)。 - 前記ビームステアリング機構と、前記形状制御機構と、前記偏光機構と、前記強度制御機構とが、前記コントローラから受信した前記指令に応じて調整可能である、請求項1に記載の三次元印刷装置。
- 前記ビームステアリング機構は、2つの回転可能な鏡(224、227)を備え、当該2つの鏡は垂直な軸の周囲で回転可能である、請求項1又は2に記載の三次元印刷装置。
- 前記ビームステアリング機構は、ステアリング可能な電気-エバネセント光リフラクタを備える、請求項1から3のいずれか一項に記載の三次元印刷装置。
- 前記偏光機構は、一又は複数の回転可能な偏光感応要素を備えており、
前記一又は複数の回転可能な偏光感応要素が、軸方向に位置合わせされた、複数の回転可能な偏光感応要素であることと、
前記一又は複数の回転可能な偏光感応要素が、二分の一波長板又は四分の一波長板を備えていることの、少なくとも一方である、請求項1に記載の三次元印刷装置。 - 前記形状制御機構は、一又は複数の回転可能なハウジングであって、各々が、前記レーザエネルギーを受け入れるために各々に形成された円形開口を有するハウジングを備えており、
前記形状制御機構が、異なる軸の周囲で回転する複数の回転可能なハウジングを備えていること、
前記形状制御機構が楕円形状レンズを備えていることの、少なくとも一方である、請求項1に記載の三次元印刷装置。 - 3D印刷工程中にレーザ(271)を調整する方法であって、該方法は、
印刷ソース(106)から静止している被加工物支持体(102)上の基材(113)へと、レーザエネルギーを方向づけること(471)と、
前記基材上の前記レーザエネルギーの衝突場所の画像を捕捉すること(472)と、
捕捉された前記画像の画像データをコントローラ(110)に提供すること(473)と、
前記コントローラが前記画像データを受信することに応じて、前記印刷ソースの一又は複数のパラメータを調整するために、前記コントローラから前記印刷ソースに指令を提供すること(474)と、
前記印刷ソースの一又は複数のパラメータを調整すること(475)とを含み、
前記印刷ソースの前記一又は複数のパラメータを調整することは、
ビームステアリング機構(220)を調整することと、
強度制御機構(223)を調整することと、
偏光機構(222)を調整することと、
形状制御機構(350)を調整することとを含む、方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/952,055 US10688733B2 (en) | 2015-11-25 | 2015-11-25 | Method and apparatus for three-dimensional printing |
US14/952,055 | 2015-11-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017149132A JP2017149132A (ja) | 2017-08-31 |
JP6990506B2 true JP6990506B2 (ja) | 2022-01-12 |
Family
ID=58719926
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016226850A Active JP6990506B2 (ja) | 2015-11-25 | 2016-11-22 | 三次元印刷のための方法及び装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10688733B2 (ja) |
JP (1) | JP6990506B2 (ja) |
CN (1) | CN106945272B (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10220471B2 (en) | 2015-10-14 | 2019-03-05 | Lawrence Livermore National Security, Llc | Spatter reduction laser scanning strategy in selective laser melting |
WO2018080507A1 (en) * | 2016-10-27 | 2018-05-03 | Hewlett-Packard Development Company, L.P. | Recoater for 3d printers |
US10814429B2 (en) * | 2018-01-26 | 2020-10-27 | General Electric Company | Systems and methods for dynamic shaping of laser beam profiles for control of micro-structures in additively manufactured metals |
US10821551B2 (en) | 2018-01-26 | 2020-11-03 | General Electronic Company | Systems and methods for dynamic shaping of laser beam profiles in additive manufacturing |
CN110361868B (zh) * | 2018-03-26 | 2020-10-09 | 上海微电子装备(集团)股份有限公司 | 一种激光光束的调制装置、激光封装设备及加工方法 |
CN110405204B (zh) * | 2018-04-28 | 2021-09-10 | 深圳市裕展精密科技有限公司 | 异质金属件的制备方法 |
CN114126785A (zh) * | 2019-06-13 | 2022-03-01 | Slm方案集团股份公司 | 用于制造三维工件的设备和方法 |
WO2021234973A1 (ja) * | 2020-05-22 | 2021-11-25 | 技術研究組合次世代3D積層造形技術総合開発機構 | 積層造形における造形品質評価方法、積層造形システム、情報処理装置およびそのプログラム |
CN111730861A (zh) * | 2020-06-30 | 2020-10-02 | 北京闻亭泰科技术发展有限公司 | 一种基于数字光处理的3d打印激光处理模块 |
WO2022069192A1 (en) | 2020-10-02 | 2022-04-07 | SLM Solutions Group AG | Method of operating an irradiation system, irradiation system and apparatus for producing a three-dimensional work piece with polarization control |
EP4005707A1 (en) * | 2020-11-24 | 2022-06-01 | Rolls-Royce Corporation | Occulting device for optical system in additive manufacturing systems |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002210835A (ja) | 2001-01-24 | 2002-07-31 | Matsushita Electric Works Ltd | 光ビームの偏向制御方法及び光造形装置 |
JP2004306612A (ja) | 2003-04-09 | 2004-11-04 | Three D Syst Inc | サーマルイメージ・フィードバックを用いた焼結 |
JP2015530285A (ja) | 2012-07-27 | 2015-10-15 | フェニックス システム | 積層を利用して三次元立体物を製造する装置及び製造方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4863538A (en) | 1986-10-17 | 1989-09-05 | Board Of Regents, The University Of Texas System | Method and apparatus for producing parts by selective sintering |
US5155324A (en) | 1986-10-17 | 1992-10-13 | Deckard Carl R | Method for selective laser sintering with layerwise cross-scanning |
US5121329A (en) | 1989-10-30 | 1992-06-09 | Stratasys, Inc. | Apparatus and method for creating three-dimensional objects |
US5198159A (en) * | 1990-10-09 | 1993-03-30 | Matsushita Electric Works, Ltd. | Process of fabricating three-dimensional objects from a light curable resin liquid |
US5393482A (en) * | 1993-10-20 | 1995-02-28 | United Technologies Corporation | Method for performing multiple beam laser sintering employing focussed and defocussed laser beams |
DE102007008988A1 (de) * | 2007-02-23 | 2008-08-28 | Airbus Deutschland Gmbh | Rumpf eines Luft-oder Raumfahrzeugs und ein entsprechendes Luft-oder Raumfahrzeug |
JP5234315B2 (ja) * | 2007-12-03 | 2013-07-10 | ソニー株式会社 | 光造形装置および光造形方法 |
US8605256B2 (en) * | 2008-02-26 | 2013-12-10 | 3M Innovative Properties Company | Multi-photon exposure system |
JP5301217B2 (ja) | 2008-08-22 | 2013-09-25 | パナソニック株式会社 | 三次元形状造形物の製造方法およびその製造装置 |
EP3479933A1 (en) | 2009-09-17 | 2019-05-08 | Sciaky Inc. | Electron beam layer manufacturing apparatus |
DE112011101779T5 (de) | 2010-05-25 | 2013-03-14 | Panasonic Corporation | Metallpulver zum selektiven Lasersintern, Verfahren zur Herstellung eines dreidimensionalen Formgegenstands unter Verwendung desselben und davon erhaltener dreidimensionaler Formgegenstand |
US9897892B2 (en) * | 2013-03-14 | 2018-02-20 | The United States Of America, As Represented By The Secretary Of The Navy | Non-mechanical beam steering tracking system |
US10198420B2 (en) | 2013-06-15 | 2019-02-05 | Microsoft Technology Licensing, Llc | Telling interactive, self-directed stories with spreadsheets |
GB201317974D0 (en) * | 2013-09-19 | 2013-11-27 | Materialise Nv | System and method for calibrating a laser scanning system |
US10086566B2 (en) * | 2014-01-02 | 2018-10-02 | Old World Labs | Apparatus for production of three-dimensional objects by stereolithography |
KR101590774B1 (ko) * | 2014-10-16 | 2016-02-19 | 한국생산기술연구원 | 단방향으로 회전하는 폴리곤미러를 구비하는 입체조형장비의 헤드장치 및 이를 이용하는 조형평면의 스캐닝방법 및 이를 이용하는 입체조형장치. |
CN104785779B (zh) * | 2015-03-20 | 2017-08-18 | 徐州奕创光电科技有限公司 | 一种激光扫描头、三维打印装置及打印方法 |
US10131095B2 (en) * | 2015-08-05 | 2018-11-20 | Formlabs, Inc. | Techniques of additive fabrication using an aspheric lens and related systems and methods |
-
2015
- 2015-11-25 US US14/952,055 patent/US10688733B2/en active Active
-
2016
- 2016-11-16 CN CN201611009604.8A patent/CN106945272B/zh active Active
- 2016-11-22 JP JP2016226850A patent/JP6990506B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002210835A (ja) | 2001-01-24 | 2002-07-31 | Matsushita Electric Works Ltd | 光ビームの偏向制御方法及び光造形装置 |
JP2004306612A (ja) | 2003-04-09 | 2004-11-04 | Three D Syst Inc | サーマルイメージ・フィードバックを用いた焼結 |
JP2015530285A (ja) | 2012-07-27 | 2015-10-15 | フェニックス システム | 積層を利用して三次元立体物を製造する装置及び製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US10688733B2 (en) | 2020-06-23 |
CN106945272A (zh) | 2017-07-14 |
JP2017149132A (ja) | 2017-08-31 |
US20170144371A1 (en) | 2017-05-25 |
CN106945272B (zh) | 2020-08-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6990506B2 (ja) | 三次元印刷のための方法及び装置 | |
JP4873191B2 (ja) | レーザービームを用いた材料の穿孔および除去装置 | |
US11980970B2 (en) | Visible laser additive manufacturing | |
JP3645262B2 (ja) | 多重ビームレーザ焼結 | |
US20120267345A1 (en) | Method of manufacturing a component | |
JP4204810B2 (ja) | レーザビーム送出システム | |
JP5015326B2 (ja) | 三次元物体の製造方法 | |
US9931712B2 (en) | Laser drilling and trepanning device | |
TWI659821B (zh) | 具有改良的光學單元之立體平版印刷機 | |
CN206241474U (zh) | 一种激光加工装置 | |
KR20180016596A (ko) | 빔 디렉터 | |
JP2004514053A (ja) | 電磁放射線束によって焼結、物質除去および/またはラベリングを行う装置およびその装置を操作する方法 | |
KR20160107298A (ko) | 표면을 레이저 가공하기 위한 가공 장치 및 방법 | |
TW201026420A (en) | Method and apparatus for forming grooves in the surface of a polymer layer | |
KR20150126603A (ko) | 테이퍼 제어를 위한 빔 각도 및 작업물 이동의 공조 | |
KR102375235B1 (ko) | 레이저 가공 시스템 및 방법 | |
KR20120004426A (ko) | 개선된 레이저 가공 방법 및 장치 | |
JP2010522977A5 (ja) | ||
CN108115289A (zh) | 一种激光加工装置及激光加工方法 | |
KR20200129726A (ko) | 세라믹 임플란트 레이저 가공 장치 | |
US20230092230A1 (en) | Laser processing machine, laser processing system, rotator unit apparatus, laser processing method, and method for producing probe card | |
CN117715717A (zh) | 使用光转向和/或动态波束整形进行增材制造 | |
WO2020012771A1 (ja) | レーザ加工装置、レーザ加工方法及び成膜マスクの製造方法 | |
JP2019098373A (ja) | 付加加工用ヘッド | |
SU1798090A1 (en) | Method of and device for laser treatment of dielectric materials |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20191115 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20201207 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20201215 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210312 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210525 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210824 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20211124 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20211206 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6990506 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |