JP6976043B2 - 原子層堆積中における化学物質の制御された分離および送出により低欠陥処理を可能にするシステムおよび方法 - Google Patents
原子層堆積中における化学物質の制御された分離および送出により低欠陥処理を可能にするシステムおよび方法 Download PDFInfo
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Description
本出願は、2015年7月15日に出願された、米国特許仮出願第62/192,844号の利益を主張する。上述の出願の開示全体は参照により本明細書に組み込まれる。
Claims (26)
- 基板処理システムのためのガス送出システムであって、
入口および出口を含み、前記入口は第1のガス源と流体連通する、第1のバルブと、
第1の入口、第2の入口、および出口を含み、前記第1の入口は前記第1のバルブの前記出口と流体連通し、前記第2の入口は第2のガス源と流体連通する、第2のバルブと、
入口および出口を含み、前記入口は第3のガス源と流体連通する、第3のバルブと、
コネクタであって、
第1の端部と第2の端部とを有する第1のガスチャネルと、
前記第1のガスチャネルの前記第2の端部、前記第2のバルブの前記出口、並びに処理チャンバのガス分配装置と流体連通する第2のガスチャネルと、
第1の端部および第2の端部を有する環状ガスチャネルを規定するシリンダと、
前記シリンダは、前記シリンダおよび前記第1のガスチャネルが共同で前記シリンダの外側表面と前記第1のガスチャネルの内側表面との間に前記環状ガスチャネルを規定するように、前記第1のガスチャネルの内部に少なくとも部分的に配置され、
前記環状ガスチャネルは、前記第3のバルブの前記出口および前記第1のガスチャネルの前記第1の端部と流体連通し、
前記環状ガスチャネルの前記第1の端部と、前記第3のバルブの前記出口と流体連通する第3のガスチャネルと、
前記第1のガスチャネルの前記第1の端部は、前記環状ガスチャネルの前記第1の端部の入口に提供されたガスが、前記環状ガスチャネルを前記第1の端部から前記第2の端部まで流れて前記第1のガスチャネルの前記第1の端部にて前記シリンダ内に流れ、前記シリンダおよび前記第1のガスチャネルを通って前記第2のガスチャネルに流れるように、前記環状ガスチャネルの前記第2の端部と流体連通すること、
を備えるコネクタと、
を備える、ガス送出システム。 - 請求項1に記載のガス送出システムであって、前記第1のガス源は、パージ・ガス源を含む、ガス送出システム。
- 請求項1に記載のガス送出システムであって、前記第2のガス源は、前駆体ガス源を含む、ガス送出システム。
- 請求項1に記載のガス送出システムであって、入口および出口を含む第4のバルブをさらに備え、前記入口は第4のガス源と流体連通し、前記出口は前記第1のガスチャネルと流体連通する、ガス送出システム。
- 請求項4に記載のガス送出システムであって、前記第4のガス源は、洗浄ガス源を含む、ガス送出システム。
- 請求項5に記載のガス送出システムであって、前記洗浄ガス源は、遠隔プラズマ洗浄(RPC)ガスを含む、ガス送出システム。
- 請求項1に記載のガス送出システムであって、前記第3のガス源は、酸化ガス源を含む、ガス送出システム。
- 請求項1に記載のガス送出システムであって、前記基板処理システムは、原子層堆積を実行する、ガス送出システム。
- 請求項1に記載のガス送出システムであって、さらに、前記第1のバルブ、前記第2のバルブ、および前記第3のバルブを制御するように構成されているコントローラを備える、ガス送出システム。
- 請求項9に記載のガス送出システムであって、前記コントローラは、
前記第1のバルブおよび前記第2のバルブを使用して、第1の所定期間中、前記第2のガス源から前駆体ガスを供給し、
前記第1のバルブおよび前記第2のバルブを使用して、第2の所定期間中、前記第1のガス源からパージ・ガスを供給し、
前記第3のバルブを使用して、第3の所定期間中、前記第3のガス源から酸化ガスを供給するように構成されている、ガス送出システム。 - 請求項10に記載のガス送出システムであって、
前記第1の所定期間は原子層堆積(ALD)プロセスのドーズ段に相当し、
前記第2の所定期間は前記ALDプロセスのバースト・パージ段に相当する、ガス送出システム。 - 請求項4に記載のガス送出システムであって、前記第4のバルブと前記コネクタ間の距離は10インチ(254mm)〜40インチ(1016mm)である、ガス送出システム。
- 請求項4に記載のガス送出システムであって、前記第4のバルブと前記コネクタ間の距離は5インチ(127mm)未満である、ガス送出システム。
- 基板処理システムにガスを供給するための方法であって、
第1のバルブを使用して、第1のガス源からガスを選択的に供給し、
第2のバルブを使用して、前記第1のガス源または第2のガス源からガスを選択的に供給し、
第3のバルブを使用して、第3のガス源からガスを選択的に供給し、
第1の端部と第2の端部とを有する第1のガスチャネルと、
前記第1のガスチャネルの前記第2の端部、前記第2のバルブの出口、並びに処理チャンバのガス分配装置と流体連通する第2のガスチャネルと、
第1の端部および第2の端部を有する環状ガスチャネルを規定するシリンダと、
前記シリンダおよび前記第1のガスチャネルは共同で前記シリンダの外側表面と前記第1のガスチャネルの内側表面との間に前記環状ガスチャネルを規定するように、前記第1のガスチャネルの内部に少なくとも部分的に配置され、
前記環状ガスチャネルは前記第3のバルブの出口および前記第1のガスチャネルの前記第1の端部と流体連通し、
前記環状ガスチャネルの前記第1の端部、前記第3のバルブの前記出口と流体連通する第3のガスチャネルと、
前記第1のガスチャネルの前記第1の端部は、前記環状ガスチャネルの前記第1の端部の入口に提供されたガスが、前記環状ガスチャネルを前記第1の端部から前記第2の端部まで流れて前記第1のガスチャネルの前記第1の端部にて前記シリンダ内に流れ、前記シリンダおよび前記第1のガスチャネルを通って前記第2のガスチャネルに流れるように、前記環状ガスチャネルの前記第2の端部と流体連通すること、
を含むコネクタを提供すること、
を備える、方法。 - 請求項14に記載の方法であって、前記第1のガス源はパージ・ガス源を含む、方法。
- 請求項14に記載の方法であって、前記第2のガス源は前駆体ガス源を含む、方法。
- 請求項14に記載の方法であって、さらに、前記第1のガスチャネルと流体連通する出口を有する第4のバルブを使用して、第4のガス源からガスを選択的に供給することを備える、方法。
- 請求項17に記載の方法であって、前記第4のガス源は洗浄ガス源を含む、方法。
- 請求項18に記載の方法であって、前記洗浄ガス源は遠隔プラズマ洗浄(RPC)ガスを含む、方法。
- 請求項14に記載の方法であって、前記第3のガス源は酸化ガス源を含む、方法。
- 請求項14に記載の方法であって、前記基板処理システムは原子層堆積を行う、方法。
- 請求項14に記載の方法であって、さらに、コントローラを使用して、前記第1のバルブ、前記第2のバルブ、および前記第3のバルブを制御することを備える、方法。
- 請求項22に記載の方法であって、前記コントローラは、
前記第1のバルブおよび前記第2のバルブを使用して、第1の所定期間中、前記第2のガス源から前駆体ガスを供給し、
前記第1のバルブおよび前記第2のバルブを使用して、第2の所定期間中、前記第1のガス源からパージ・ガスを供給し、
前記第3のバルブを使用して、第3の所定期間中、前記第3のガス源から酸化ガスを供給するように構成されている、方法。 - 請求項23に記載の方法であって、
前記第1の所定期間は原子層堆積(ALD)プロセスのドーズ段に相当し、
前記第2の所定期間は前記ALDプロセスのバースト・パージ段に相当する、方法。 - 請求項17に記載の方法であって、前記第4のバルブと前記コネクタ間の距離は10インチ(254mm)〜40インチ(1016mm)である、方法。
- 請求項17に記載の方法であって、前記第4のバルブと前記コネクタ間の距離は5インチ(127mm)未満である、方法。
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