JP6958737B2 - 欠陥検出装置 - Google Patents
欠陥検出装置 Download PDFInfo
- Publication number
- JP6958737B2 JP6958737B2 JP2020528709A JP2020528709A JP6958737B2 JP 6958737 B2 JP6958737 B2 JP 6958737B2 JP 2020528709 A JP2020528709 A JP 2020528709A JP 2020528709 A JP2020528709 A JP 2020528709A JP 6958737 B2 JP6958737 B2 JP 6958737B2
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- vibration
- wave
- contact
- contact portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000007547 defect Effects 0.000 title claims description 105
- 238000005286 illumination Methods 0.000 claims description 73
- 230000005284 excitation Effects 0.000 claims description 70
- 238000001514 detection method Methods 0.000 claims description 69
- 238000006073 displacement reaction Methods 0.000 claims description 35
- 239000000463 material Substances 0.000 claims description 20
- 238000005305 interferometry Methods 0.000 claims description 15
- 238000007689 inspection Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 10
- 229910000831 Steel Inorganic materials 0.000 description 9
- 230000010363 phase shift Effects 0.000 description 9
- 239000010959 steel Substances 0.000 description 9
- 235000019687 Lamb Nutrition 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 5
- 230000010355 oscillation Effects 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/045—Analysing solids by imparting shocks to the workpiece and detecting the vibrations or the acoustic waves caused by the shocks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/041—Analysing solids on the surface of the material, e.g. using Lamb, Rayleigh or shear waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
- G01B11/162—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means by speckle- or shearing interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02094—Speckle interferometers, i.e. for detecting changes in speckle pattern
- G01B9/02095—Speckle interferometers, i.e. for detecting changes in speckle pattern detecting deformation from original shape
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02097—Self-interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2437—Piezoelectric probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/44—Processing the detected response signal, e.g. electronic circuits specially adapted therefor
- G01N29/4445—Classification of defects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J9/0215—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods by shearing interferometric methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8838—Stroboscopic illumination; synchronised illumination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/01—Indexing codes associated with the measuring variable
- G01N2291/012—Phase angle
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0422—Shear waves, transverse waves, horizontally polarised waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
被検査物体の表面の任意の箇所に配置可能であり、該被検査物体内に、ある一つの振動モードが優勢的であって所定の方向に指向して進行する弾性波を励起する励振源と、
レーザ光源を用いて、前記被検査物体の表面の照明領域にストロボ照明を行う照明部と、
スペックル干渉法又はスペックル・シェアリング干渉法により、前記弾性波の互いに異なる少なくとも3つの位相において前記照明領域内における各点の前後方向の変位を一括測定する変位測定部と、
前記変位測定部で測定された変位に基づいて、前記弾性波の反射波及び散乱波のいずれか一方又は両方を検出する反射波・散乱波検出部と
を備えることを特徴とする。
(1-1) 第1実施形態の欠陥検出装置の構成
図1は、第1実施形態の欠陥検出装置10の概略構成図である。この欠陥検出装置10は、励振源11、信号発生器12、パルスレーザ光源13、照明光レンズ14、スペックル・シェアリング干渉計15、反射波・散乱波検出部16、制御部17、及び記憶部18を備える。
以下、図3〜図6を用いて、欠陥検出装置10の動作を説明する。図3は欠陥検出装置10の動作を示すフローチャート、図4A及び図4Bは励振源11及び11Aの動作を示す概略図、図5は欠陥検出装置10で行う欠陥検査の原理を説明するためのグラフ、図6は照明領域L内で観察される弾性波の一例を示す概略図である。
図7Aは第2実施形態の欠陥検出装置10Bの概略構成図である。この欠陥検出装置10Bは、励振源11Bが励振源11、11Aとは異なる構成を有する点を除いて、第1実施形態の欠陥検出装置10と同じ構成を有する。
11、11A、11B…励振源
111、111A、111B…接触子
1111…接触部
1112…第2接触部
1113…基部
112、112B…振動付与部
1131、1131B、1132…接触面
1133B…受信面
12…信号発生器
13…パルスレーザ光源
14…照明光レンズ
15…スペックル・シェアリング干渉計
151…ビームスプリッタ
1521…第1反射鏡
1522…第2反射鏡
153…位相シフタ
154…集光レンズ
155…イメージセンサ
16…反射波・散乱波検出部
17…制御部
18…記憶部
20…画像
21…発振波
22…端部反射波
23…欠陥反射・散乱波
B…障害物
D…欠陥
L…照明領域
S…被検査物体
Claims (6)
- 被検査物体の表面の任意の箇所に配置可能であり、該被検査物体内に、ある一つの振動モードが優勢的であって所定の方向に指向して進行する弾性波を励起する励振源と、
レーザ光源を用いて、前記被検査物体の表面の照明領域にストロボ照明を行う照明部と、
スペックル干渉法又はスペックル・シェアリング干渉法により、前記弾性波の互いに異なる少なくとも3つの位相において前記照明領域内における各点の前後方向の変位を一括測定する変位測定部と、
前記変位測定部で測定された変位に基づいて、前記弾性波の反射波及び散乱波のいずれか一方又は両方を検出する反射波・散乱波検出部と
を備えることを特徴とする欠陥検出装置。 - 前記励振源が、
被検査物体の表面に接触させる接触部が複数、等間隔に並ぶ接触子と、
該間隔と同じ長さの波長の弾性波が被検査物体に生成される場合における該弾性波の周波数と同じ周波数の振動を該接触部に付与する振動付与部と
を備えることを特徴とする請求項1に記載の欠陥検出装置。 - 前記接触部が前記振動付与部よりも被検査物体との音響インピーダンスの差異が小さい材料から成ることを特徴とする請求項2に記載の欠陥検出装置。
- 前記複数の接触部のうち隣接する2個の接触部の間に第2接触部を備え、
前記振動付与部が前記接触部と前記第2接触部の間で互いに180°異なる位相で振動を付与するものである
ことを特徴とする請求項2に記載の欠陥検出装置。 - 前記励振源が、
被検査物体の表面に接触する接触面を有する接触部と、
該接触面に対して傾斜した方向に伝播し、被検査物体中で発生し得る振動モードの波長と一致する波長の弾性波を該接触部内に励起する振動を該接触部に付与する振動付与部と
を備えることを特徴とする請求項1に記載の欠陥検出装置。 - 前記接触部が前記振動付与部よりも被検査物体との音響インピーダンスの差異が小さい材料から成ることを特徴とする請求項5に記載の欠陥検出装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018127257 | 2018-07-04 | ||
JP2018127257 | 2018-07-04 | ||
PCT/JP2019/020086 WO2020008745A1 (ja) | 2018-07-04 | 2019-05-21 | 欠陥検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020008745A1 JPWO2020008745A1 (ja) | 2021-05-20 |
JP6958737B2 true JP6958737B2 (ja) | 2021-11-02 |
Family
ID=69059294
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020528709A Active JP6958737B2 (ja) | 2018-07-04 | 2019-05-21 | 欠陥検出装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US11391700B2 (ja) |
EP (1) | EP3819633A4 (ja) |
JP (1) | JP6958737B2 (ja) |
CN (1) | CN112313510A (ja) |
WO (1) | WO2020008745A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020217448A1 (ja) * | 2019-04-26 | 2020-10-29 | 株式会社島津製作所 | 干渉画像撮像装置 |
US11585789B2 (en) * | 2019-06-17 | 2023-02-21 | Halfwave As | Method for detecting faults in plates |
CN111445441B (zh) * | 2020-03-03 | 2023-02-17 | 首钢京唐钢铁联合有限责任公司 | 一种带钢头部缺陷处理方法及装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5353393A (en) * | 1976-10-25 | 1978-05-15 | Matsushita Electric Ind Co Ltd | Ultrasonic probe |
US6081481A (en) * | 1987-04-17 | 2000-06-27 | Institute For Technology Development | Method for detecting buried objects by measuring seismic vibrations induced by acoustical coupling with a remote source of sound |
US5146289A (en) * | 1990-12-21 | 1992-09-08 | Laser Technology, Inc. | Nondestructive testing using air-coupled acoustic excitation |
US5638396A (en) * | 1994-09-19 | 1997-06-10 | Textron Systems Corporation | Laser ultrasonics-based material analysis system and method |
JP2000065802A (ja) * | 1998-08-25 | 2000-03-03 | Nippon Steel Corp | レーザー超音波検査装置及びレーザー超音波検査方法 |
JP2002529691A (ja) * | 1998-11-04 | 2002-09-10 | ナショナル リサーチ カウンシル オブ カナダ | 薄いシートの弾性特性およびそれに印加される張力のレーザー超音波測定 |
JP4059418B2 (ja) * | 1999-10-26 | 2008-03-12 | 新日本製鐵株式会社 | レーザー超音波検査方法 |
JP2005517177A (ja) * | 2002-02-05 | 2005-06-09 | ミリポア・コーポレーシヨン | 組立デバイスにおける欠陥を検出するためのスペックル干渉計の使用 |
JP3955513B2 (ja) | 2002-09-04 | 2007-08-08 | 株式会社日立製作所 | 欠陥検査装置及び欠陥検査方法 |
JP5095289B2 (ja) * | 2007-07-24 | 2012-12-12 | 公益財団法人レーザー技術総合研究所 | 干渉縞安定化装置およびそれを用いた非破壊検査装置 |
US8234924B2 (en) * | 2008-07-17 | 2012-08-07 | Optech Ventures, Llc | Apparatus and method for damage location and identification in structures |
CN108565205B (zh) * | 2013-03-15 | 2022-09-27 | 鲁道夫技术公司 | 光声基底评估系统和方法 |
JP6451695B2 (ja) | 2016-06-02 | 2019-01-16 | 株式会社島津製作所 | 欠陥検査方法及び欠陥検査装置 |
JP6638810B2 (ja) * | 2016-06-21 | 2020-01-29 | 株式会社島津製作所 | 欠陥検査装置及び方法 |
JP6791029B2 (ja) * | 2017-06-12 | 2020-11-25 | 株式会社島津製作所 | 欠陥検出方法及び欠陥検出装置 |
-
2019
- 2019-05-21 JP JP2020528709A patent/JP6958737B2/ja active Active
- 2019-05-21 EP EP19830852.0A patent/EP3819633A4/en not_active Withdrawn
- 2019-05-21 WO PCT/JP2019/020086 patent/WO2020008745A1/ja active Application Filing
- 2019-05-21 CN CN201980040370.9A patent/CN112313510A/zh active Pending
- 2019-05-21 US US17/255,975 patent/US11391700B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP3819633A4 (en) | 2021-08-11 |
JPWO2020008745A1 (ja) | 2021-05-20 |
US11391700B2 (en) | 2022-07-19 |
US20210270777A1 (en) | 2021-09-02 |
WO2020008745A1 (ja) | 2020-01-09 |
EP3819633A1 (en) | 2021-05-12 |
CN112313510A (zh) | 2021-02-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6791029B2 (ja) | 欠陥検出方法及び欠陥検出装置 | |
JP6958737B2 (ja) | 欠陥検出装置 | |
CN108760878A (zh) | 振动测定装置 | |
US11692810B2 (en) | Photoacoustic excitation sensing enhanced by cross-correlated unfocused speckle images | |
JP6267659B2 (ja) | 構造物変状検出装置 | |
JP2006234701A (ja) | 超音波探傷装置及び超音波探傷装置方法 | |
RU2308027C1 (ru) | Способ ультразвукового контроля головки рельса | |
KR100817615B1 (ko) | 물체의 결함을 측정하기 위한 레이저 유도 초음파 검사장치 및 그 구현 방법 | |
JP2000065803A (ja) | レーザー超音波検査装置及びレーザー超音波検査方法 | |
KR102448312B1 (ko) | 계측 장치 및 계측 방법 | |
US8596128B2 (en) | Directed acoustic shearography | |
JP7315535B2 (ja) | 振動計測装置 | |
JP3212536B2 (ja) | アレイ式電磁超音波探傷装置 | |
RU2274859C1 (ru) | Нелинейный акустический способ обнаружения трещин и их местоположений в конструкции и устройство для его реализации | |
JP2003215111A (ja) | レーザ計測用プローブおよびレーザ計測装置 | |
US20230236111A1 (en) | Defect detection device and defect detection method | |
JP2000065804A (ja) | レーザー超音波検査装置及びレーザー超音波検査方法 | |
JP4059418B2 (ja) | レーザー超音波検査方法 | |
JP2023143100A (ja) | 欠陥検出装置及び欠陥検出方法 | |
JP2000065802A (ja) | レーザー超音波検査装置及びレーザー超音波検査方法 | |
JPH0658348B2 (ja) | 超音波の振動モ−ド判定装置 | |
WO2021160808A1 (en) | System and method for analysing an object | |
JPH071254B2 (ja) | 超音波検出装置 | |
JPH03120459A (ja) | 欠陥検出方法 | |
JPS6358117A (ja) | 振動検出方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201029 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20201029 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210907 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210920 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 6958737 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |