JP6936714B2 - 被処理対象物の内壁面の処理方法 - Google Patents
被処理対象物の内壁面の処理方法 Download PDFInfo
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- JP6936714B2 JP6936714B2 JP2017230351A JP2017230351A JP6936714B2 JP 6936714 B2 JP6936714 B2 JP 6936714B2 JP 2017230351 A JP2017230351 A JP 2017230351A JP 2017230351 A JP2017230351 A JP 2017230351A JP 6936714 B2 JP6936714 B2 JP 6936714B2
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- treated
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- 238000000034 method Methods 0.000 title claims description 44
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 159
- 239000007789 gas Substances 0.000 claims description 124
- 230000002159 abnormal effect Effects 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 5
- 229910001882 dioxygen Inorganic materials 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims description 3
- 238000012790 confirmation Methods 0.000 claims 1
- 230000020169 heat generation Effects 0.000 description 6
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000002161 passivation Methods 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000002238 attenuated effect Effects 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 230000014759 maintenance of location Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- 239000005416 organic matter Substances 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000003463 adsorbent Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000008213 purified water Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/10—Oxidising
- C23C8/12—Oxidising using elemental oxygen or ozone
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/10—Oxidising
- C23C8/12—Oxidising using elemental oxygen or ozone
- C23C8/14—Oxidising of ferrous surfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/04—Treatment of selected surface areas, e.g. using masks
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Cleaning In General (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
内壁面に油脂等の有機物や樹脂等の異物が付着している箇所や、被処理対象物の内壁面に存在する損傷箇所をいう。このような前処理を行うことで、後述の本処理を行った際に異常箇所における急激な発熱の発生を抑制し、配管等にダメージを与えることを抑制することができる。
10 オゾン発生器
20 オゾンガス濃縮器
30 処理容器
31 上壁
32 下壁
33 側壁
35 内壁面
41,42,43,44 配管
45,46 分岐点
41A,42A,43A 開閉弁
431 供給口
441 排出口
Claims (5)
- オゾンガスを収容し、内壁が金属製の収容容器、前記オゾンガスを用いて表面処理を行う物体を収容し、内壁が金属製の処理容器、および前記オゾンガスを供給し、内壁が金属製の配管のうちの少なくともいずれかを被処理対象物として、前記被処理対象物の内壁面を処理する被処理対象物の内壁面の処理方法であって、
前記被処理対象物の前記内壁面に接触するように濃度が5体積%以上10体積%未満であるオゾンガスを流通させることを含む、前記被処理対象物の前記内壁面における異常箇所の有無を確認する工程と、
前記異常箇所の有無を確認する工程の後に、前記被処理対象物の前記内壁面に接触するように濃度が10体積%以上30体積%以下であって、温度が60℃以下であるオゾンガスを流通させる工程と、を備える、被処理対象物の内壁面の処理方法。 - 前記オゾンガスを流通させる工程では、温度が室温以上である前記オゾンガスを流通させる、請求項1に記載の被処理対象物の内壁面の処理方法。
- 前記オゾンガスを流通させる工程は、6時間以上48時間以下の時間の範囲で行う、請求項1または請求項2に記載の被処理対象物の内壁面の処理方法。
- 前記被処理対象物は、第1の壁と、前記第1の壁に対向して配置される第2の壁と、を含み、
前記第1の壁の近傍には、前記オゾンガスを被処理対象物内に供給するための供給口が設けられ、
前記第2の壁の近傍には、前記オゾンガスを被処理対象物外に排出するための排出口が設けられている、請求項1〜請求項3のいずれか1項に記載の被処理対象物の内壁面の処理方法。 - 濃度が10体積%以上30体積%以下であって、温度が60℃以下である前記オゾンガスを流通させる工程を開始した後、前記被処理対象物の少なくとも一部の領域の温度上昇の有無を確認する工程により、前記被処理対象物の少なくとも一部の領域の温度上昇の有無が確認されれば、濃度が5体積%以上10体積%未満であるオゾンガスまたは酸素ガスに切り替えて流通させる工程をさらに備える、請求項1〜請求項4のいずれか1項に記載の被処理対象物の内壁面の処理方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017230351A JP6936714B2 (ja) | 2017-11-30 | 2017-11-30 | 被処理対象物の内壁面の処理方法 |
PCT/JP2018/028178 WO2019106880A1 (ja) | 2017-11-30 | 2018-07-27 | 被処理対象物の内壁面の処理方法 |
KR1020207005663A KR102478015B1 (ko) | 2017-11-30 | 2018-07-27 | 피처리 대상물의 내벽면의 처리 방법 |
US16/652,982 US11542585B2 (en) | 2017-11-30 | 2018-07-27 | Method for treating inner wall surface of treatment object |
CN201880058177.3A CN111094617B (zh) | 2017-11-30 | 2018-07-27 | 被处理对象物的内壁面的处理方法 |
TW107127625A TWI775915B (zh) | 2017-11-30 | 2018-08-08 | 被處理對象物之內壁面的處理方法 |
Applications Claiming Priority (1)
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JP2017230351A JP6936714B2 (ja) | 2017-11-30 | 2017-11-30 | 被処理対象物の内壁面の処理方法 |
Publications (2)
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JP2019099853A JP2019099853A (ja) | 2019-06-24 |
JP6936714B2 true JP6936714B2 (ja) | 2021-09-22 |
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JP2017230351A Active JP6936714B2 (ja) | 2017-11-30 | 2017-11-30 | 被処理対象物の内壁面の処理方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11542585B2 (ja) |
JP (1) | JP6936714B2 (ja) |
KR (1) | KR102478015B1 (ja) |
CN (1) | CN111094617B (ja) |
TW (1) | TWI775915B (ja) |
WO (1) | WO2019106880A1 (ja) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2987754B2 (ja) * | 1996-01-17 | 1999-12-06 | 岩谷産業株式会社 | 高純度ガスの配管路での不動態化処理方法 |
EP1109210A1 (en) * | 1999-05-28 | 2001-06-20 | Tokyo Electron Limited | Ozone treatment device of semiconductor process system |
JP2003201554A (ja) * | 2002-01-08 | 2003-07-18 | Iwatani Internatl Corp | 施工済み配管系の内面を不動態化処理する方法 |
JP3837523B2 (ja) * | 2002-10-09 | 2006-10-25 | 独立行政法人産業技術総合研究所 | 配管内面処理監視方法 |
JP5260012B2 (ja) * | 2007-09-28 | 2013-08-14 | 岩谷産業株式会社 | ステンレス鋼での表面酸化膜形成方法 |
JP5537957B2 (ja) * | 2010-01-07 | 2014-07-02 | 岩谷産業株式会社 | アルミニウムの表面処理方法 |
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- 2017-11-30 JP JP2017230351A patent/JP6936714B2/ja active Active
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2018
- 2018-07-27 KR KR1020207005663A patent/KR102478015B1/ko active IP Right Grant
- 2018-07-27 CN CN201880058177.3A patent/CN111094617B/zh active Active
- 2018-07-27 US US16/652,982 patent/US11542585B2/en active Active
- 2018-07-27 WO PCT/JP2018/028178 patent/WO2019106880A1/ja active Application Filing
- 2018-08-08 TW TW107127625A patent/TWI775915B/zh active
Also Published As
Publication number | Publication date |
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JP2019099853A (ja) | 2019-06-24 |
US11542585B2 (en) | 2023-01-03 |
WO2019106880A1 (ja) | 2019-06-06 |
TW201925497A (zh) | 2019-07-01 |
KR102478015B1 (ko) | 2022-12-15 |
CN111094617B (zh) | 2022-08-30 |
TWI775915B (zh) | 2022-09-01 |
US20200239995A1 (en) | 2020-07-30 |
CN111094617A (zh) | 2020-05-01 |
KR20200093519A (ko) | 2020-08-05 |
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