JP6926735B2 - 導波路型受光素子の製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 claims description 157
- 238000005530 etching Methods 0.000 claims description 133
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- 150000001875 compounds Chemical class 0.000 claims description 44
- 230000031700 light absorption Effects 0.000 claims description 38
- 239000012792 core layer Substances 0.000 claims description 37
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- 238000000926 separation method Methods 0.000 description 7
- 210000001503 joint Anatomy 0.000 description 6
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- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
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- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 239000000969 carrier Substances 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
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- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/184—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP
- H01L31/1844—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP comprising ternary or quaternary compounds, e.g. Ga Al As, In Ga As P
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- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
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Description
最初に、本発明の実施形態の内容を列記して説明する。一実施形態に係る導波路型受光素子の製造方法は、第1領域及び第1領域と隣接する第2領域を含む半絶縁性もしくは絶縁性の基板上に、第1導電型の第1半導体層、光吸収層、及び第2導電型の第2半導体層を順に形成する工程と、第1領域上の第2半導体層及び光吸収層をエッチングにより除去したのち、第1領域上の第1半導体層上にコア層及びクラッド層を順に形成する工程と、メサ構造を形成するための第1エッチングマスクを第1領域上から第2領域上にかけて形成する第1エッチングマスク形成工程と、第1半導体層に達するドライエッチングを行い、クラッド層及びコア層を含む第1メサ構造を形成するとともに、第2半導体層および光吸収層を含む複数の第2メサ構造を形成する第1エッチング工程と、複数の第2メサ構造を覆う第2エッチングマスクを、第1エッチングマスクが残存した状態で形成する第2エッチングマスク形成工程と、基板に達するドライエッチングを行い、第1メサ構造に第1半導体層を含める第2エッチング工程と、第1エッチングマスクを残しつつ第2エッチングマスクを選択的に除去する工程と、を備える。
本発明の実施形態に係る導波路型受光素子の製造方法及び導波路型受光素子の具体例を、以下に図面を参照しつつ説明する。なお、本発明はこれらの例示に限定されるものではなく、特許請求の範囲によって示され、特許請求の範囲と均等の意味及び範囲内でのすべての変更が含まれることが意図される。以下の説明では、図面の説明において同一の要素には同一の符号を付し、重複する説明を省略する。なお、以下の説明においてアンドープとは、例えばドーパント濃度が1×1013cm−3以下であることをいう。
Claims (4)
- 第1領域及び第1領域と隣接する第2領域を含む半絶縁性若しくは絶縁性の基板上に、第1導電型の第1半導体層、光吸収層、及び第2導電型の第2半導体層を順に形成する工程と、
前記第1領域上の前記第2半導体層及び前記光吸収層をエッチングにより除去したのち、前記第1領域上の前記第1半導体層上にコア層及びクラッド層を順に形成する工程と、
メサ構造を形成するための第1エッチングマスクを第1領域上から第2領域上にかけて形成する第1エッチングマスク形成工程と、
前記第1半導体層に達するドライエッチングを行い、前記クラッド層及び前記コア層を含む第1メサ構造を形成するとともに、前記第2半導体層および前記光吸収層を含む複数の第2メサ構造を形成する第1エッチング工程と、
前記複数の第2メサ構造を覆う第2エッチングマスクを、前記第1エッチングマスクが残存した状態で形成する第2エッチングマスク形成工程と、
前記基板に達するドライエッチングを行い、前記第1メサ構造に前記第1半導体層を含める第2エッチング工程と、
前記第1エッチングマスクを残しつつ前記第2エッチングマスクを選択的に除去する工程と、
を備える、導波路型受光素子の製造方法。 - 前記第1エッチングマスクにSiを含む材料を用い、
前記第1エッチング工程において、ドライエッチングの進行中に、前記第1メサ構造及び前記第2メサ構造の各側面にSi化合物膜を形成し、
前記第2エッチング工程において、ドライエッチングの進行中に、前記第1メサ構造の側面にSi化合物膜を更に形成する、請求項1に記載の導波路型受光素子の製造方法。 - 前記第1エッチング工程において、Siを含むエッチングガスを用い、ドライエッチングの進行中に、前記第1メサ構造及び前記第2メサ構造の各側面にSi化合物膜を形成し、
前記第2エッチング工程において、Siを含むエッチングガスを用い、ドライエッチングの進行中に、前記第1メサ構造の側面にSi化合物膜を更に形成する、請求項1に記載の導波路型受光素子の製造方法。 - 前記第2エッチングマスクは感光性材料を含む、請求項1〜3のいずれか一項に記載の導波路型受光素子の製造方法。
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US16/026,476 US10823610B2 (en) | 2017-07-03 | 2018-07-03 | Light receiving device, method for fabricating light receiving device |
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US20100054761A1 (en) * | 2008-08-28 | 2010-03-04 | Young-Kai Chen | Monolithic coherent optical detectors |
JP6364830B2 (ja) * | 2014-03-11 | 2018-08-01 | 住友電気工業株式会社 | 半導体光集積素子 |
CN107925484B (zh) | 2015-03-23 | 2021-04-16 | 昂纳信息技术(深圳)有限公司 | 一种单片集成相干光接收器芯片 |
JP2016184680A (ja) * | 2015-03-26 | 2016-10-20 | 住友電気工業株式会社 | 半導体光素子 |
JP6421708B2 (ja) * | 2015-06-29 | 2018-11-14 | 住友電気工業株式会社 | 半導体光素子を作製する方法及び半導体光素子 |
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