JP6917790B2 - ガス溶解液製造装置 - Google Patents
ガス溶解液製造装置 Download PDFInfo
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- JP6917790B2 JP6917790B2 JP2017115005A JP2017115005A JP6917790B2 JP 6917790 B2 JP6917790 B2 JP 6917790B2 JP 2017115005 A JP2017115005 A JP 2017115005A JP 2017115005 A JP2017115005 A JP 2017115005A JP 6917790 B2 JP6917790 B2 JP 6917790B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 44
- 239000007789 gas Substances 0.000 claims description 159
- 239000007788 liquid Substances 0.000 claims description 126
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 107
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 87
- 239000002994 raw material Substances 0.000 claims description 74
- 239000003595 mist Substances 0.000 claims description 64
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 6
- 230000007423 decrease Effects 0.000 claims description 5
- 238000000926 separation method Methods 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 239000001569 carbon dioxide Substances 0.000 claims description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000004090 dissolution Methods 0.000 description 35
- 238000004140 cleaning Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 4
- 238000003672 processing method Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910021642 ultra pure water Inorganic materials 0.000 description 3
- 239000012498 ultrapure water Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000003643 water by type Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/232—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles
- B01F23/2321—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles by moving liquid and gas in counter current
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/232—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/234—Surface aerating
- B01F23/2341—Surface aerating by cascading, spraying or projecting a liquid into a gaseous atmosphere
- B01F23/23413—Surface aerating by cascading, spraying or projecting a liquid into a gaseous atmosphere using nozzles for projecting the liquid into the gas atmosphere
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/232—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles
- B01F23/2323—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles by circulating the flow in guiding constructions or conduits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
- B01F23/2376—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media characterised by the gas being introduced
- B01F23/23761—Aerating, i.e. introducing oxygen containing gas in liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
- B01F23/2376—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media characterised by the gas being introduced
- B01F23/23761—Aerating, i.e. introducing oxygen containing gas in liquids
- B01F23/237613—Ozone
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/45—Mixing liquids with liquids; Emulsifying using flow mixing
- B01F23/454—Mixing liquids with liquids; Emulsifying using flow mixing by injecting a mixture of liquid and gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/80—After-treatment of the mixture
- B01F23/803—Venting, degassing or ventilating of gases, fumes or toxic vapours from the mixture
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/20—Jet mixers, i.e. mixers using high-speed fluid streams
- B01F25/23—Mixing by intersecting jets
- B01F25/231—Mixing by intersecting jets the intersecting jets having the configuration of sheets, cylinders or cones
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/30—Injector mixers
- B01F25/31—Injector mixers in conduits or tubes through which the main component flows
- B01F25/314—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/30—Injector mixers
- B01F25/32—Injector mixers wherein the additional components are added in a by-pass of the main flow
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/181—Preventing generation of dust or dirt; Sieves; Filters
- B01F35/189—Venting, degassing or ventilating of gases, fumes or toxic vapours during mixing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/712—Feed mechanisms for feeding fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/716—Feed mechanisms characterised by the relative arrangement of the containers for feeding or mixing the components
- B01F35/7163—Feed mechanisms characterised by the relative arrangement of the containers for feeding or mixing the components the containers being connected in a mouth-to-mouth, end-to-end disposition, i.e. the openings are juxtaposed before contacting the contents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/717—Feed mechanisms characterised by the means for feeding the components to the mixer
- B01F35/7179—Feed mechanisms characterised by the means for feeding the components to the mixer using sprayers, nozzles or jets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
- B01F2101/48—Mixing water in water-taps with other ingredients, e.g. air, detergents or disinfectants
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
- B01F2101/58—Mixing semiconducting materials, e.g. during semiconductor or wafer manufacturing processes
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Accessories For Mixers (AREA)
Description
を備えている。
2 ミスト水供給部
3 メイン水供給部
4 オゾンガス供給部
5 気体溶解部
6 ユースポイント
7 排気口
8 気液分離部
9 第1ノズル
10 第2ノズル
11 ミスト混合部
12 液体混合部
13 接続部
14 開口
Claims (7)
- 第1原料の液体に第2原料の気体を溶解させて所定濃度のガス溶解液を生成する気体溶解部と、
前記気体溶解部により生成された前記ガス溶解液を、ユースポイントに供給される供給液体と、排気口から排出される排出気体とに気液分離する気液分離部と、
を備え、
前記気体溶解部は、
前記第1原料の液体をミスト化する第1ノズルと、
前記第1ノズルでミスト化された前記第1原料の液体と前記第2原料の気体とを混合して、前記所定濃度より高濃度のガス溶解液を生成するミスト混合部と、
前記ミスト混合部で生成された高濃度のガス溶解液と第1原料の液体とを混合して、前記所定濃度のガス溶解液を生成する液体混合部と、
を備え、
前記ガス溶解液の生成を開始するときには、
前記ミスト混合部への前記第1原料の液体の供給が所定の圧力P1で開始されるとともに、前記ミスト混合部への前記第2原料の気体の供給が所定の圧力P2で開始され、
その後、前記液体混合部への前記第1原料の液体の供給が所定の圧力P0で開始され、
前記ガス溶解液の生成を停止するときには、
前記液体混合部への前記第1原料の液体の供給が停止され、
その後、前記ミスト混合部への前記第1原料の液体の供給が停止されるとともに、前記ミスト混合部への前記第2原料の気体の供給が停止される、
ことを特徴とするガス溶解液製造装置。 - 前記気体溶解部は、前記第2原料の気体を整流して前記ミスト混合部に供給する第2ノズルを備え、
前記ミスト混合部では、前記第1ノズルでミスト化された前記第1原料の液体と前記第2ノズルで整流された前記第2原料の気体とが混合され、前記高濃度のガス溶解液が生成される、請求項1に記載のガス溶解液製造装置。 - 前記ミスト混合部において、前記第1ノズルと前記第2ノズルが対向して配置されている、請求項2に記載のガス溶解液製造装置。
- 前記ミスト混合部は、開口を有する接続部を備え、
前記ミスト混合部で生成されたガス溶解液は、前記開口を介して前記液体混合部へ供給され、
前記開口の径は、10mm以下である、請求項1〜請求項3のいずれか一項に記載のガス溶解液製造装置。 - 前記接続部は、前記開口に向けて徐々に径が小さくなる形状を有している、請求項4に記載のガス溶解液製造装置。
- 前記ミスト混合部に供給される前記第1原料の液体の圧力P1と前記第2原料の気体の圧力P2は、前記液体混合部に供給される前記第1原料の液体の圧力P0より高く設定されている、請求項1〜請求項5のいずれか一項に記載のガス溶解液製造装置。
- 前記第1原料の液体は、純水または硫酸であり、前記第2原料の気体は、オゾン、水素、窒素、二酸化炭素、酸素、アルゴン、キセノンのいずれかまたはこれらの組み合わせからなる気体である、請求項1〜請求項6のいずれか一項に記載のガス溶解液製造装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017115005A JP6917790B2 (ja) | 2017-06-12 | 2017-06-12 | ガス溶解液製造装置 |
TW107114686A TWI749221B (zh) | 2017-06-12 | 2018-04-30 | 氣體溶解液製造裝置 |
KR1020180065354A KR102635710B1 (ko) | 2017-06-12 | 2018-06-07 | 가스 용해액 제조 장치 |
US16/003,215 US20180353911A1 (en) | 2017-06-12 | 2018-06-08 | Gas solution production apparatus |
CN201810593733.9A CN109012250A (zh) | 2017-06-12 | 2018-06-11 | 气体溶解液制造装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017115005A JP6917790B2 (ja) | 2017-06-12 | 2017-06-12 | ガス溶解液製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019000759A JP2019000759A (ja) | 2019-01-10 |
JP6917790B2 true JP6917790B2 (ja) | 2021-08-11 |
Family
ID=64562701
Family Applications (1)
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---|---|---|---|
JP2017115005A Active JP6917790B2 (ja) | 2017-06-12 | 2017-06-12 | ガス溶解液製造装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20180353911A1 (ja) |
JP (1) | JP6917790B2 (ja) |
KR (1) | KR102635710B1 (ja) |
CN (1) | CN109012250A (ja) |
TW (1) | TWI749221B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6970007B2 (ja) * | 2017-12-25 | 2021-11-24 | 株式会社荏原製作所 | ガス溶解液製造装置 |
JP7059040B2 (ja) * | 2018-02-23 | 2022-04-25 | 株式会社荏原製作所 | ガス溶解液製造装置 |
JP7260429B2 (ja) * | 2019-07-19 | 2023-04-18 | 株式会社荏原製作所 | ガス溶解液製造装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5924356Y2 (ja) * | 1980-07-30 | 1984-07-19 | 三菱重工業株式会社 | 気体と液状体とを接触させる装置 |
EP0906780A4 (en) * | 1996-10-25 | 2003-03-19 | Idec Izumi Corp | METHOD AND DEVICE FOR SOLVING / MIXING GAS IN LIQUID |
JP3775708B2 (ja) * | 1998-04-16 | 2006-05-17 | 株式会社前川製作所 | 気液分散ガス吸収装置 |
JP2001314740A (ja) * | 2000-05-12 | 2001-11-13 | Kurita Water Ind Ltd | ガス溶解洗浄水供給装置 |
JP2005177266A (ja) * | 2003-12-22 | 2005-07-07 | Mitsubishi Rayon Co Ltd | 炭酸泉製造方法と炭酸泉製造装置 |
WO2005115598A2 (en) * | 2004-05-25 | 2005-12-08 | The Board Of Trustees Of The University Of Arkansas | System and method for dissolving gases in liquids |
JP5854668B2 (ja) * | 2011-07-07 | 2016-02-09 | 芝浦メカトロニクス株式会社 | 気液混合流体生成装置、気液混合流体生成方法、処理装置及び処理方法 |
CN204034578U (zh) * | 2014-09-01 | 2014-12-24 | 武汉工程大学 | 一种气液二相混合器 |
JP2016064386A (ja) * | 2014-09-18 | 2016-04-28 | 株式会社荏原製作所 | ガス溶解水製造装置および製造方法 |
-
2017
- 2017-06-12 JP JP2017115005A patent/JP6917790B2/ja active Active
-
2018
- 2018-04-30 TW TW107114686A patent/TWI749221B/zh active
- 2018-06-07 KR KR1020180065354A patent/KR102635710B1/ko active IP Right Grant
- 2018-06-08 US US16/003,215 patent/US20180353911A1/en not_active Abandoned
- 2018-06-11 CN CN201810593733.9A patent/CN109012250A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2019000759A (ja) | 2019-01-10 |
KR102635710B1 (ko) | 2024-02-14 |
US20180353911A1 (en) | 2018-12-13 |
CN109012250A (zh) | 2018-12-18 |
TW201902565A (zh) | 2019-01-16 |
KR20180135410A (ko) | 2018-12-20 |
TWI749221B (zh) | 2021-12-11 |
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