JP2019000759A - ガス溶解液製造装置 - Google Patents
ガス溶解液製造装置 Download PDFInfo
- Publication number
- JP2019000759A JP2019000759A JP2017115005A JP2017115005A JP2019000759A JP 2019000759 A JP2019000759 A JP 2019000759A JP 2017115005 A JP2017115005 A JP 2017115005A JP 2017115005 A JP2017115005 A JP 2017115005A JP 2019000759 A JP2019000759 A JP 2019000759A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- liquid
- raw material
- mixing unit
- mist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/232—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles
- B01F23/2321—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles by moving liquid and gas in counter current
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/234—Surface aerating
- B01F23/2341—Surface aerating by cascading, spraying or projecting a liquid into a gaseous atmosphere
- B01F23/23413—Surface aerating by cascading, spraying or projecting a liquid into a gaseous atmosphere using nozzles for projecting the liquid into the gas atmosphere
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/232—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/232—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles
- B01F23/2323—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles by circulating the flow in guiding constructions or conduits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
- B01F23/2376—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media characterised by the gas being introduced
- B01F23/23761—Aerating, i.e. introducing oxygen containing gas in liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
- B01F23/2376—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media characterised by the gas being introduced
- B01F23/23761—Aerating, i.e. introducing oxygen containing gas in liquids
- B01F23/237613—Ozone
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/40—Mixing liquids with liquids; Emulsifying
- B01F23/45—Mixing liquids with liquids; Emulsifying using flow mixing
- B01F23/454—Mixing liquids with liquids; Emulsifying using flow mixing by injecting a mixture of liquid and gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/80—After-treatment of the mixture
- B01F23/803—Venting, degassing or ventilating of gases, fumes or toxic vapours from the mixture
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/20—Jet mixers, i.e. mixers using high-speed fluid streams
- B01F25/23—Mixing by intersecting jets
- B01F25/231—Mixing by intersecting jets the intersecting jets having the configuration of sheets, cylinders or cones
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/30—Injector mixers
- B01F25/31—Injector mixers in conduits or tubes through which the main component flows
- B01F25/314—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/30—Injector mixers
- B01F25/32—Injector mixers wherein the additional components are added in a by-pass of the main flow
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/181—Preventing generation of dust or dirt; Sieves; Filters
- B01F35/189—Venting, degassing or ventilating of gases, fumes or toxic vapours during mixing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/712—Feed mechanisms for feeding fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/716—Feed mechanisms characterised by the relative arrangement of the containers for feeding or mixing the components
- B01F35/7163—Feed mechanisms characterised by the relative arrangement of the containers for feeding or mixing the components the containers being connected in a mouth-to-mouth, end-to-end disposition, i.e. the openings are juxtaposed before contacting the contents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/717—Feed mechanisms characterised by the means for feeding the components to the mixer
- B01F35/7179—Feed mechanisms characterised by the means for feeding the components to the mixer using sprayers, nozzles or jets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
- B01F2101/48—Mixing water in water-taps with other ingredients, e.g. air, detergents or disinfectants
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
- B01F2101/58—Mixing semiconducting materials, e.g. during semiconductor or wafer manufacturing processes
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Accessories For Mixers (AREA)
Abstract
Description
を備えている。
2 ミスト水供給部
3 メイン水供給部
4 オゾンガス供給部
5 気体溶解部
6 ユースポイント
7 排気口
8 気液分離部
9 第1ノズル
10 第2ノズル
11 ミスト混合部
12 液体混合部
13 接続部
14 開口
Claims (7)
- 第1原料の液体に第2原料の気体に溶解させて所定濃度のガス溶解液を生成する気体溶解部と、
前記気体溶解部により生成された前記ガス溶解液を、ユースポイントに供給される供給液体と、排気口から排出される排出気体とに気液分離する気液分離部と、
を備え、
前記気体溶解部は、
前記第1原料の液体をミスト化する第1ノズルと、
前記第1ノズルでミスト化された前記第1原料の液体と前記第2原料の気体とを混合して、前記所定濃度より高濃度のガス溶解液を生成するミスト混合部と、
前記ミスト混合部で生成された高濃度のガス溶解液と第1原料の液体とを混合して、前記所定濃度のガス溶解液を生成する液体混合部と、
を備えることを特徴とするガス溶解液製造装置。 - 前記気体溶解部は、前記第2原料の気体を整流して前記ミスト混合部に供給する第2ノズルを備え、
前記ミスト混合部では、前記第1ノズルでミスト化された前記第1原料の液体と前記第2ノズルで整流された前記第2原料の気体とが混合され、前記高濃度のガス溶解液が生成される、請求項1に記載のガス溶解液製造装置。 - 前記ミスト混合部において、前記第1ノズルと前記第2ノズルが対向して配置されている、請求項2に記載のガス溶解液製造装置。
- 前記ミスト混合部は、開口を有する接続部を備え、
前記ミスト混合部で生成されたガス溶解液は、前記開口を介して前記液体混合部へ供給され、
前記開口の径は、10mm以下である、請求項1〜請求項3のいずれか一項に記載のガス溶解液製造装置。 - 前記接続部は、前記開口に向けて徐々に径が小さくなる形状を有している、請求項4に記載のガス溶解液製造装置。
- 前記ミスト混合部に供給される前記第1原料の液体と前記第2原料の気体の圧力は、前記液体混合部に供給される前記第1原料の液体の圧力より高く設定されている、請求項1〜請求項5のいずれか一項に記載のガス溶解液製造装置。
- 前記第1原料の液体は、純水または硫酸であり、前記第2原料の気体は、オゾン、水素、窒素、二酸化炭素、酸素、アルゴン、キセノンのいずれかまたはこれらの組み合わせからなる気体である、請求項1〜請求項6のいずれか一項に記載のガス溶解液製造装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017115005A JP6917790B2 (ja) | 2017-06-12 | 2017-06-12 | ガス溶解液製造装置 |
TW107114686A TWI749221B (zh) | 2017-06-12 | 2018-04-30 | 氣體溶解液製造裝置 |
KR1020180065354A KR102635710B1 (ko) | 2017-06-12 | 2018-06-07 | 가스 용해액 제조 장치 |
US16/003,215 US20180353911A1 (en) | 2017-06-12 | 2018-06-08 | Gas solution production apparatus |
CN201810593733.9A CN109012250A (zh) | 2017-06-12 | 2018-06-11 | 气体溶解液制造装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017115005A JP6917790B2 (ja) | 2017-06-12 | 2017-06-12 | ガス溶解液製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019000759A true JP2019000759A (ja) | 2019-01-10 |
JP6917790B2 JP6917790B2 (ja) | 2021-08-11 |
Family
ID=64562701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017115005A Active JP6917790B2 (ja) | 2017-06-12 | 2017-06-12 | ガス溶解液製造装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20180353911A1 (ja) |
JP (1) | JP6917790B2 (ja) |
KR (1) | KR102635710B1 (ja) |
CN (1) | CN109012250A (ja) |
TW (1) | TWI749221B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6970007B2 (ja) * | 2017-12-25 | 2021-11-24 | 株式会社荏原製作所 | ガス溶解液製造装置 |
JP7059040B2 (ja) * | 2018-02-23 | 2022-04-25 | 株式会社荏原製作所 | ガス溶解液製造装置 |
JP7260429B2 (ja) * | 2019-07-19 | 2023-04-18 | 株式会社荏原製作所 | ガス溶解液製造装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5735741U (ja) * | 1980-07-30 | 1982-02-25 | ||
JPH11300183A (ja) * | 1998-04-16 | 1999-11-02 | Mayekawa Mfg Co Ltd | 気液分散ガス吸収装置 |
JP2005177266A (ja) * | 2003-12-22 | 2005-07-07 | Mitsubishi Rayon Co Ltd | 炭酸泉製造方法と炭酸泉製造装置 |
JP2016064386A (ja) * | 2014-09-18 | 2016-04-28 | 株式会社荏原製作所 | ガス溶解水製造装置および製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1197410A (zh) * | 1996-10-25 | 1998-10-28 | 和泉电气株式会社 | 气体与液体的溶解混合方法及装置 |
JP2001314740A (ja) * | 2000-05-12 | 2001-11-13 | Kurita Water Ind Ltd | ガス溶解洗浄水供給装置 |
WO2005115598A2 (en) * | 2004-05-25 | 2005-12-08 | The Board Of Trustees Of The University Of Arkansas | System and method for dissolving gases in liquids |
JP5854668B2 (ja) * | 2011-07-07 | 2016-02-09 | 芝浦メカトロニクス株式会社 | 気液混合流体生成装置、気液混合流体生成方法、処理装置及び処理方法 |
CN204034578U (zh) * | 2014-09-01 | 2014-12-24 | 武汉工程大学 | 一种气液二相混合器 |
-
2017
- 2017-06-12 JP JP2017115005A patent/JP6917790B2/ja active Active
-
2018
- 2018-04-30 TW TW107114686A patent/TWI749221B/zh active
- 2018-06-07 KR KR1020180065354A patent/KR102635710B1/ko active IP Right Grant
- 2018-06-08 US US16/003,215 patent/US20180353911A1/en not_active Abandoned
- 2018-06-11 CN CN201810593733.9A patent/CN109012250A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5735741U (ja) * | 1980-07-30 | 1982-02-25 | ||
JPH11300183A (ja) * | 1998-04-16 | 1999-11-02 | Mayekawa Mfg Co Ltd | 気液分散ガス吸収装置 |
JP2005177266A (ja) * | 2003-12-22 | 2005-07-07 | Mitsubishi Rayon Co Ltd | 炭酸泉製造方法と炭酸泉製造装置 |
JP2016064386A (ja) * | 2014-09-18 | 2016-04-28 | 株式会社荏原製作所 | ガス溶解水製造装置および製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN109012250A (zh) | 2018-12-18 |
KR20180135410A (ko) | 2018-12-20 |
JP6917790B2 (ja) | 2021-08-11 |
US20180353911A1 (en) | 2018-12-13 |
TW201902565A (zh) | 2019-01-16 |
TWI749221B (zh) | 2021-12-11 |
KR102635710B1 (ko) | 2024-02-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR102635710B1 (ko) | 가스 용해액 제조 장치 | |
JP2016064386A (ja) | ガス溶解水製造装置および製造方法 | |
KR102571000B1 (ko) | 공급 액체 제조 방법 | |
JP6917775B2 (ja) | ガス溶解液製造装置 | |
JP2008300429A (ja) | 半導体基板洗浄方法、半導体基板洗浄装置、及び液中気泡混合装置 | |
TWI601695B (zh) | Method for producing ozone gas dissolved water and washing method of electronic material | |
CN109954414B (zh) | 气体溶解液制造装置及气体溶解液的制造方法 | |
WO2017122771A1 (ja) | 供給液体製造装置および供給液体製造方法 | |
TWI815010B (zh) | 氣體溶解液供給裝置及氣體溶解液供給方法 | |
JP5912603B2 (ja) | 飽和ガス含有ナノバブル水の製造方法 | |
JP4108798B2 (ja) | オゾン含有超純水供給方法及びオゾン含有超純水供給装置 | |
JP2005186067A (ja) | オゾン含有超純水供給方法及び装置 | |
CN112237856A (zh) | 气体溶解液制造装置 | |
JP7412200B2 (ja) | ガス溶解液製造装置 | |
JP2022185727A (ja) | 供給液体製造装置 | |
US20240075410A1 (en) | Gas solution supply apparatus | |
TWI840578B (zh) | 氣體溶解液製造裝置 | |
CN216677763U (zh) | 一种臭氧水制备装置 | |
WO2016042740A1 (ja) | ガス溶解水製造装置および製造方法 | |
KR20150048451A (ko) | 반도체 제조 장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190927 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200708 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200714 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200831 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210202 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210217 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210629 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210720 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6917790 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |