JP6915044B2 - 撮像装置およびx線撮像装置 - Google Patents
撮像装置およびx線撮像装置 Download PDFInfo
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- 238000003384 imaging method Methods 0.000 title claims description 41
- 239000004065 semiconductor Substances 0.000 claims description 103
- 239000010409 thin film Substances 0.000 claims description 35
- 238000006243 chemical reaction Methods 0.000 claims description 27
- 229910007541 Zn O Inorganic materials 0.000 claims description 22
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 14
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 11
- 230000002093 peripheral effect Effects 0.000 claims description 10
- 239000011159 matrix material Substances 0.000 claims description 7
- 230000001154 acute effect Effects 0.000 claims description 4
- 230000001131 transforming effect Effects 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 229
- 239000011229 interlayer Substances 0.000 description 41
- 239000010408 film Substances 0.000 description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 26
- 229910052710 silicon Inorganic materials 0.000 description 26
- 239000010703 silicon Substances 0.000 description 26
- 239000010936 titanium Substances 0.000 description 12
- 229910052581 Si3N4 Inorganic materials 0.000 description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical class N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 11
- 239000011701 zinc Substances 0.000 description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 6
- 229910052719 titanium Inorganic materials 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 229910052738 indium Inorganic materials 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 229910052733 gallium Inorganic materials 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 description 2
- CFEAAQFZALKQPA-UHFFFAOYSA-N cadmium(2+);oxygen(2-) Chemical compound [O-2].[Cd+2] CFEAAQFZALKQPA-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910020923 Sn-O Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 101100268333 Solanum lycopersicum TFT8 gene Proteins 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 229910003077 Ti−O Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- -1 structures Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
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- A61B6/4208—Arrangements for detecting radiation specially adapted for radiation diagnosis characterised by using a particular type of detector
- A61B6/4233—Arrangements for detecting radiation specially adapted for radiation diagnosis characterised by using a particular type of detector using matrix detectors
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- G01T1/16—Measuring radiation intensity
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
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- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/30—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from X-rays
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- H—ELECTRICITY
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- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
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- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
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- H01L27/144—Devices controlled by radiation
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Description
本願は、2017年3月16日に日本に出願された特願2017−051166号について優先権を主張し、その内容をここに援用する。
以下、本発明の第1実施形態について、図1〜図4を用いて説明する。
本実施形態のX線撮像装置は、間接変換方式のX線撮像装置の一例である。
図1は、本実施形態のX線撮像装置の概略構成図である。
なお、以下の各図面においては各構成要素を見やすくするため、構成要素によって寸法の縮尺を異ならせて示すことがある。
図2に示すように、基板13の第1面13aに、TFT8とフォトダイオード7とが設けられている。TFT8は、ゲート電極15と、ゲート絶縁膜16と、酸化物半導体層17と、ソース電極18と、ドレイン電極19と、を備えている。本実施形態において、TFT8は、ボトムゲート方式のチャネルエッチ型TFTで構成されている。
図3に示すように、フォトダイオード7は、カソード電極23(下部電極)と、半導体層24と、アノード電極25(上部電極)と、を備えている。半導体層24は、下層側から順にn+型シリコン層27、i型シリコン層28、およびp+型シリコン層29を含んでいる。すなわち、これらの層は、n+型シリコン層27がカソード電極23に接し、p+型シリコン層29がアノード電極25に接するように配置されている。カソード電極23は、例えばTi(チタン)/Al(アルミニウム)/Ti(チタン)の3層の積層金属膜で構成されている。アノード電極25は、例えばITO(インジウムスズ酸化物)等の透明導電膜で構成されている。
図4に示すように、比較例の撮像装置において、フォトダイオード107のアノード電極125と、半導体層124を構成するn+型シリコン層127、i型シリコン層128、およびp+型シリコン層129とは、各層の端面が全て同一平面上に揃うようにパターニングされている。半導体層124およびアノード電極125は、絶縁膜135により覆われている。カソード電極123は、本実施形態と同様、TFTのドレイン電極と接続される接続部を構成するために側方に延びている。
すなわち、第2層間絶縁層33によってカソード電極23の表面がエッチャントから保護されるため、カソード電極23からのエッチング残渣の発生が抑えられる。
以下、本発明の第2実施形態について、図5、図6Aおよび図6Bを用いて説明する。
本実施形態のX線撮像装置の基本構成は第1実施形態と同一であり、フォトダイオードの構成が第1実施形態と異なる。
図5は、第2実施形態の撮像装置の断面図である。図6Aは、撮像装置の製造プロセスでの問題点を説明するための図である。図6Bは、問題点を解消する方法を説明するための図である。
図5、図6Aおよび図6Bにおいて、第1実施形態で用いた図面と共通の構成要素には同一の符号を付し、説明を省略する。
その他の構成は、第1実施形態と同様である。
以下、本発明の第3実施形態について、図7を用いて説明する。
本実施形態のX線撮像装置の基本構成は第1実施形態と同一であり、フォトダイオードの構成が第1実施形態と異なる。
図7は、第3実施形態の撮像装置の断面図である。
図7において、第1実施形態で用いた図面と共通の構成要素には同一の符号を付し、説明を省略する。
その他の構成は、第1実施形態と同様である。
例えば上記実施形態では、フォトダイオードとして、PIN型ダイオードの例を挙げたが、例えばPN接合型ダイオードが用いられてもよい。また、TFTとして、ボトムゲート方式のチャネルエッチ型TFTの例を挙げたが、例えばチャネルストップ型TFTが用いられてもよいし、トップゲート方式のTFTが用いられてもよい。その他、撮像装置を構成する各構成要素の数、形状、寸法、配置、材料等の具体的な記載については、上記実施形態で例示したものに限らず、適宜変更が可能である。
Claims (5)
- 入射した光を電荷に変換する光電変換部と、
前記光電変換部で発生した前記電荷を検出する検出部と、を備え、
前記光電変換部は、マトリクス状に配列された複数のフォトダイオードを備え、
前記検出部は、前記複数のフォトダイオードに対応して設けられ、マトリクス状に配列された複数の薄膜トランジスタを備え、
前記複数のフォトダイオードは、下部電極と半導体層と上部電極とを備え、
前記半導体層の周縁部において、前記下部電極の厚さ方向の少なくとも一部と前記半導体層との間に絶縁層が設けられ、
前記絶縁層の端部は、当該絶縁層の下面と側面とが鋭角をなすテーパ形状を有し、
前記下部電極は、第1電極層と第2電極層との2層構造を有し、
前記半導体層の周縁部において、前記第1電極層と前記第2電極層との間に前記絶縁層が設けられ、
前記半導体層の下面が前記第2電極層に接触している、撮像装置。 - 前記絶縁層の下面と側面とのなすテーパ角度θがθ≦30°を満たす、請求項1に記載の撮像装置。
- 前記絶縁層は、酸化シリコン層である、請求項1に記載の撮像装置。
- 前記薄膜トランジスタは、In−Ga−Zn−O系の酸化物半導体からなる半導体層を備える、請求項1に記載の撮像装置。
- X線が照射された際に前記X線の強度に応じて光を発生するX線変換部と、
請求項1から請求項4までのいずれか一項に記載の撮像装置と、を備え、
前記光電変換部は、前記X線変換部から射出された光を前記電荷に変換する、X線撮像装置。
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JP2017051166 | 2017-03-16 | ||
JP2017051166 | 2017-03-16 | ||
PCT/JP2018/010251 WO2018169009A1 (ja) | 2017-03-16 | 2018-03-15 | 撮像装置およびx線撮像装置 |
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JP6915044B2 true JP6915044B2 (ja) | 2021-08-04 |
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JP (1) | JP6915044B2 (ja) |
CN (1) | CN110392927B (ja) |
WO (1) | WO2018169009A1 (ja) |
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CN107968100A (zh) * | 2017-11-30 | 2018-04-27 | 京东方科技集团股份有限公司 | 光电转换基板及其制作方法、显示面板、显示装置 |
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JPH09261671A (ja) * | 1996-03-27 | 1997-10-03 | Toshiba Corp | 積層型固体撮像装置及びそれを用いたカラーカメラ |
JPH11274524A (ja) * | 1998-03-20 | 1999-10-08 | Toshiba Corp | X線撮像装置 |
JP3901893B2 (ja) * | 1998-11-25 | 2007-04-04 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
US6501098B2 (en) | 1998-11-25 | 2002-12-31 | Semiconductor Energy Laboratory Co, Ltd. | Semiconductor device |
JP4463373B2 (ja) * | 1999-03-23 | 2010-05-19 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
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