JP6895768B2 - 欠陥検査装置、および欠陥検査方法 - Google Patents

欠陥検査装置、および欠陥検査方法 Download PDF

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JP6895768B2
JP6895768B2 JP2017037988A JP2017037988A JP6895768B2 JP 6895768 B2 JP6895768 B2 JP 6895768B2 JP 2017037988 A JP2017037988 A JP 2017037988A JP 2017037988 A JP2017037988 A JP 2017037988A JP 6895768 B2 JP6895768 B2 JP 6895768B2
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defect inspection
optical system
inspected
ring illumination
illumination
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JP2018146239A (ja
JP2018146239A5 (enrdf_load_stackoverflow
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勝 田辺
勝 田辺
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Hoya Corp
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Hoya Corp
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JP2017037988A 2017-03-01 2017-03-01 欠陥検査装置、および欠陥検査方法 Active JP6895768B2 (ja)

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JP2018146239A JP2018146239A (ja) 2018-09-20
JP2018146239A5 JP2018146239A5 (enrdf_load_stackoverflow) 2020-02-13
JP6895768B2 true JP6895768B2 (ja) 2021-06-30

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111351794B (zh) * 2018-12-20 2021-12-10 上海微电子装备（集团）股份有限公司 一种物体表面检测装置及检测方法
TWI676797B (zh) * 2019-03-12 2019-11-11 住華科技股份有限公司 光學膜檢測裝置及光學膜的檢測方法
WO2021090827A1 (ja) * 2019-11-05 2021-05-14 株式会社小糸製作所 検査装置
CN111337518A (zh) * 2020-03-19 2020-06-26 东莞市瑞图新智科技有限公司 一种透镜缺陷检测系统
JP7679706B2 (ja) * 2021-06-21 2025-05-20 住友ゴム工業株式会社 外観検査装置
CN114354627B (zh) * 2022-01-04 2022-11-22 浙江大学 一种用于表面缺陷检测的环形均匀准直照明装置及方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05297262A (ja) * 1992-04-23 1993-11-12 Toshiba Corp オートフォーカス装置
JPH11132748A (ja) * 1997-10-24 1999-05-21 Hitachi Ltd 多焦点同時検出装置および立体形状検出装置および外観検査装置、並びにその方法
JP2000009591A (ja) * 1998-06-25 2000-01-14 Omron Corp 検査装置
JP3330089B2 (ja) * 1998-09-30 2002-09-30 株式会社大協精工 ゴム製品の検査方法及び装置
JP2008209726A (ja) * 2007-02-27 2008-09-11 Olympus Corp 照明装置
JP2009162492A (ja) * 2007-12-28 2009-07-23 Daishinku Corp 検査装置
JP2010123824A (ja) * 2008-11-21 2010-06-03 Hitachi High-Tech Control Systems Corp アライメントユニット及びウェハ搬送装置
JP2010151479A (ja) * 2008-12-24 2010-07-08 Ushio Inc 配線パターン検査装置
JP2010223613A (ja) * 2009-03-19 2010-10-07 Futec Inc 光学検査装置
JP5158552B1 (ja) * 2012-01-19 2013-03-06 レーザーテック株式会社 顕微鏡及び検査装置
JP6212843B2 (ja) * 2012-09-05 2017-10-18 大日本印刷株式会社 異物検査装置、異物検査方法
JP6142996B2 (ja) * 2013-06-26 2017-06-07 レーザーテック株式会社 ビア形状測定装置及びビア検査装置

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