JP6890740B1 - 炭化珪素半導体装置および炭化珪素半導体装置の製造方法 - Google Patents
炭化珪素半導体装置および炭化珪素半導体装置の製造方法 Download PDFInfo
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- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 82
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 82
- 239000004065 semiconductor Substances 0.000 title claims abstract description 33
- 238000000034 method Methods 0.000 title claims description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000000969 carrier Substances 0.000 claims abstract description 47
- 239000000758 substrate Substances 0.000 claims abstract description 46
- 230000002093 peripheral effect Effects 0.000 claims abstract description 11
- 239000010410 layer Substances 0.000 claims description 94
- 239000012535 impurity Substances 0.000 claims description 32
- 150000002500 ions Chemical class 0.000 claims description 20
- 239000002344 surface layer Substances 0.000 claims description 17
- 230000006798 recombination Effects 0.000 claims description 14
- 229910052799 carbon Inorganic materials 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 230000006866 deterioration Effects 0.000 abstract description 3
- 230000007547 defect Effects 0.000 description 19
- 238000002347 injection Methods 0.000 description 18
- 239000007924 injection Substances 0.000 description 18
- 230000000694 effects Effects 0.000 description 13
- 239000013078 crystal Substances 0.000 description 9
- 239000011229 interlayer Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 238000009826 distribution Methods 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 6
- 238000004088 simulation Methods 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000005215 recombination Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 125000004432 carbon atom Chemical group C* 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- 229910021332 silicide Inorganic materials 0.000 description 3
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 150000001721 carbon Chemical group 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005424 photoluminescence Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Abstract
Description
<A−1.構成>
図1は、実施の形態1の炭化珪素半導体装置であるSiC−MOSFET101の上面図である。図2は、図1のa−a´線に沿ったSiC−MOSFET101の断面図である。本明細書では、炭化珪素(SiC)基板を基材とするMOSFETをSiC−MOSFETと称する。
次に、SiC−MOSFET101の製造方法を説明する。図3は、SiC−MOSFET101の製造工程を示す断面図である。以下の説明では、第1導電型をn型、第2導電型をp型とするが、逆の導電型であっても良い。
耐圧保持領域14、第1活性領域15および第2活性領域16における少数キャリアのライフタイムは、マイクロ波光導電減衰法(Microwave Photo Conductivity Decay、以下、μ−PCD法)により測定可能である。μ−PCD法は、マイクロ波の反射率の時間変化からキャリアのライフタイムを非接触かつ非破壊で測定する方法である。SiCエピタキシャル基板1にレーザをパルス照射することにより過剰キャリア(多数キャリアと少数キャリア)を生成させる。過剰キャリアは、SiCエピタキシャル基板1の欠陥密度または不純物濃度などの物理的特定により定まるライフタイムの後、再結合して消滅する。その時間をマイクロ波の反射率変化によって測定する。ここで、少数キャリアのライフタイムは、生成された過剰キャリアを1としたとき、過剰キャリアが1/eとなる時間である。
<B−1.構成>
実施の形態2の炭化珪素半導体装置であるSiC−MOSFET102の構成は、図1および図2に示した通りであり、実施の形態1のSiC−MOSFET101と同様である。SiC−MOSFET101では、第2活性領域16に不活性元素イオンを注入することによって第2活性領域16における少数キャリアのライフタイムτ2を低下させ、τ1>τ2を実現した。SiC−MOSFET102は、上記のSiC−MOSFET101の特徴に加えて、第1活性領域15における少数キャリアのライフタイムτ1を長くすることにより、SiC−MOSFET101の効果に加えて、ボディダイオードの素子抵抗を改善する効果を奏する。
SiC−MOSFET102の製造方法について説明する。SiC−MOSFET102の製造方法は、ソース領域21の形成まではSiC−MOSFET101の製造方法と同様である。
実施の形態2のSiC−MOSFET102では、第1活性領域15における炭素濃度が第2活性領域16および耐圧保持領域14における炭素濃度より高いことから、第1活性領域15において少数キャリアのライフタイムτ1が長くなりドリフト層12における伝導度変調の効果が高まる。従って、実施の形態1の効果に加えて、ボディダイオードの素子抵抗が小さくなるという効果が得られる。
Claims (10)
- 第1導電型の炭化珪素基板と、
前記炭化珪素基板上に形成された第1導電型のバッファ層と、
前記バッファ層上に形成された第1導電型のドリフト層と、
前記ドリフト層の表層に形成された第2導電型のウェル領域と、
前記ウェル領域の表層に形成された第1導電型の不純物領域であるソース領域と、
前記ソース領域と電気的に接続されたソースパッドと、を備える炭化珪素半導体装置であって、
前記炭化珪素基板、前記バッファ層、および前記ドリフト層を含む構造体は、平面視において、前記炭化珪素半導体装置に電圧を印加したときに電流が流れる活性領域と、前記活性領域より外周側の耐圧保持領域と、に区分され、
前記活性領域は、平面視において、中央部の第1活性領域と、前記第1活性領域と前記耐圧保持領域の間の第2活性領域とに区分され、
前記第1活性領域および前記第2活性領域は、前記ソースパッドに覆われ、
前記第2活性領域および前記耐圧保持領域における少数キャリアのライフタイムは、前記第1活性領域における少数キャリアのライフタイムより短い、
炭化珪素半導体装置。 - 前記耐圧保持領域の一部は、前記ソースパッドに覆われる、
請求項1に記載の炭化珪素半導体装置。 - 前記第2活性領域および前記耐圧保持領域における少数キャリアのライフタイムは、1ns以上500ns以下である、
請求項1または請求項2に記載の炭化珪素半導体装置。 - 前記第2活性領域および前記耐圧保持領域における少数キャリアのライフタイムは、前記第1活性領域における少数キャリアのライフタイムの1/1000以上1/10以下である、
請求項1から請求項3のいずれか1項に記載の炭化珪素半導体装置。 - 前記第2活性領域の幅は10μm以上である、
請求項1から請求項4のいずれか1項に記載の炭化珪素半導体装置。 - 前記バッファ層の不純物濃度は、1×1018cm−3以上1×1019cm−3以下である、
請求項1から請求項5のいずれか1項に記載の炭化珪素半導体装置。 - 前記ドリフト層の不純物濃度は、5×1016cm−3以下である、
請求項1から請求項6のいずれか1項に記載の炭化珪素半導体装置。 - 前記第1活性領域における炭素濃度は、前記第2活性領域および前記耐圧保持領域における炭素濃度より高い、
請求項1から請求項7のいずれか1項に記載の炭化珪素半導体装置。 - 第1導電型の炭化珪素基板と、
前記炭化珪素基板上に形成された第1導電型のバッファ層と、
前記バッファ層上に形成された第1導電型のドリフト層と、
前記ドリフト層の表層に形成された第2導電型のウェル領域と、
前記ウェル領域の表層に形成された第1導電型の不純物領域であるソース領域と、
前記ソース領域と電気的に接続されたソースパッドと、を備える炭化珪素半導体装置であって、
前記炭化珪素基板、前記バッファ層、および前記ドリフト層を含む構造体は、平面視において、前記炭化珪素半導体装置に電圧を印加したときに電流が流れる活性領域と、前記活性領域より外周側の耐圧保持領域と、に区分され、
前記活性領域は、平面視において、中央部の第1活性領域と、前記第1活性領域と前記耐圧保持領域の間の第2活性領域とに区分され、
前記第1活性領域および前記第2活性領域は、前記ソースパッドに覆われ、
前記第1活性領域、前記第2活性領域および前記耐圧保持領域のうち、少なくとも前記第2活性領域および前記耐圧保持領域は不活性元素を含み、
前記第2活性領域および前記耐圧保持領域における前記不活性元素のイオン濃度は、前記第1活性領域における前記不活性元素のイオン濃度より高い、
炭化珪素半導体装置。 - 第1導電型の炭化珪素基板上に第1導電型のバッファ層を形成し、
前記バッファ層上に第1導電型のドリフト層を形成し、
前記ドリフト層の表層に、互いに離間した複数の第2導電型のウェル領域を形成し、
前記ウェル領域の表層に、第1導電型の不純物領域であるソース領域を形成し、
前記ソース領域と電気的に接続されたソースパッドを形成し、
前記炭化珪素基板、前記バッファ層、および前記ドリフト層を含む構造体は、平面視において、活性領域と、前記活性領域の外周側にある耐圧保持領域とに区分され、
前記活性領域は、平面視において、中央部の第1活性領域と、前記第1活性領域と前記耐圧保持領域の間の第2活性領域とに区分され、
前記第1活性領域および前記第2活性領域は、前記ソースパッドに覆われ、
前記第2活性領域と前記耐圧保持領域に不活性元素をイオン注入して再結合中心を導入する、
炭化珪素半導体装置の製造方法。
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