JP6879424B2 - 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体 - Google Patents
物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体 Download PDFInfo
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- JP6879424B2 JP6879424B2 JP2020175886A JP2020175886A JP6879424B2 JP 6879424 B2 JP6879424 B2 JP 6879424B2 JP 2020175886 A JP2020175886 A JP 2020175886A JP 2020175886 A JP2020175886 A JP 2020175886A JP 6879424 B2 JP6879424 B2 JP 6879424B2
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- 238000005259 measurement Methods 0.000 title claims description 26
- 239000002131 composite material Substances 0.000 title claims description 17
- 238000001514 detection method Methods 0.000 claims description 72
- 239000000758 substrate Substances 0.000 claims description 45
- 230000001133 acceleration Effects 0.000 claims description 28
- 238000012545 processing Methods 0.000 claims description 21
- 238000005530 etching Methods 0.000 description 32
- 238000000034 method Methods 0.000 description 15
- 238000001312 dry etching Methods 0.000 description 13
- 230000000694 effects Effects 0.000 description 12
- 230000006870 function Effects 0.000 description 12
- 238000004891 communication Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 238000005304 joining Methods 0.000 description 9
- 210000000707 wrist Anatomy 0.000 description 7
- 244000126211 Hericium coralloides Species 0.000 description 6
- 238000009623 Bosch process Methods 0.000 description 5
- 239000000470 constituent Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 230000006399 behavior Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000003416 augmentation Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000002585 base Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000012447 hatching Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 210000002381 plasma Anatomy 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 241000251468 Actinopterygii Species 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- 235000015842 Hesperis Nutrition 0.000 description 1
- 235000012633 Iberis amara Nutrition 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910001413 alkali metal ion Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 230000036772 blood pressure Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000708 deep reactive-ion etching Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000012549 training Methods 0.000 description 1
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Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020175886A JP6879424B2 (ja) | 2020-10-20 | 2020-10-20 | 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体 |
| JP2021075754A JP6969696B2 (ja) | 2020-10-20 | 2021-04-28 | 物理量センサー、慣性計測ユニット、電子機器、および移動体 |
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| JP2020175886A JP6879424B2 (ja) | 2020-10-20 | 2020-10-20 | 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017242453A Division JP6787304B2 (ja) | 2017-12-19 | 2017-12-19 | 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体 |
Related Child Applications (1)
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| JP2021075754A Division JP6969696B2 (ja) | 2020-10-20 | 2021-04-28 | 物理量センサー、慣性計測ユニット、電子機器、および移動体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021006827A JP2021006827A (ja) | 2021-01-21 |
| JP2021006827A5 JP2021006827A5 (enExample) | 2021-03-04 |
| JP6879424B2 true JP6879424B2 (ja) | 2021-06-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2020175886A Active JP6879424B2 (ja) | 2020-10-20 | 2020-10-20 | 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体 |
| JP2021075754A Active JP6969696B2 (ja) | 2020-10-20 | 2021-04-28 | 物理量センサー、慣性計測ユニット、電子機器、および移動体 |
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| JP2021075754A Active JP6969696B2 (ja) | 2020-10-20 | 2021-04-28 | 物理量センサー、慣性計測ユニット、電子機器、および移動体 |
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|---|---|
| JP (2) | JP6879424B2 (enExample) |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09127151A (ja) * | 1995-11-01 | 1997-05-16 | Murata Mfg Co Ltd | 加速度センサ |
| JP2000077681A (ja) * | 1998-09-03 | 2000-03-14 | Murata Mfg Co Ltd | 電子部品の製造方法 |
| JP2002318244A (ja) * | 2001-04-24 | 2002-10-31 | Denso Corp | 半導体力学量センサとその製造方法 |
| FR2828185A1 (fr) * | 2001-07-31 | 2003-02-07 | Memscap | Procede de fabrication d'un composant optique microelectromecanique |
| US7637160B2 (en) * | 2006-06-30 | 2009-12-29 | Freescale Semiconductor, Inc. | MEMS suspension and anchoring design |
| JP2014181922A (ja) * | 2013-03-18 | 2014-09-29 | Seiko Epson Corp | 物理量センサー、電子機器、及び移動体 |
| JP6206651B2 (ja) * | 2013-07-17 | 2017-10-04 | セイコーエプソン株式会社 | 機能素子、電子機器、および移動体 |
| JP2015161640A (ja) * | 2014-02-28 | 2015-09-07 | セイコーエプソン株式会社 | 電子デバイス、電子機器、および移動体 |
| JP2016042074A (ja) * | 2014-08-13 | 2016-03-31 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
| JP6787304B2 (ja) * | 2017-12-19 | 2020-11-18 | セイコーエプソン株式会社 | 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器、および移動体 |
-
2020
- 2020-10-20 JP JP2020175886A patent/JP6879424B2/ja active Active
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2021
- 2021-04-28 JP JP2021075754A patent/JP6969696B2/ja active Active
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| Publication number | Publication date |
|---|---|
| JP6969696B2 (ja) | 2021-11-24 |
| JP2021006827A (ja) | 2021-01-21 |
| JP2021107831A (ja) | 2021-07-29 |
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