JP6849137B1 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP6849137B1 JP6849137B1 JP2020116687A JP2020116687A JP6849137B1 JP 6849137 B1 JP6849137 B1 JP 6849137B1 JP 2020116687 A JP2020116687 A JP 2020116687A JP 2020116687 A JP2020116687 A JP 2020116687A JP 6849137 B1 JP6849137 B1 JP 6849137B1
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- Prior art keywords
- semiconductor
- semiconductor module
- heat conductive
- conductive sheet
- recess
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 251
- 239000000758 substrate Substances 0.000 claims abstract description 81
- 238000007789 sealing Methods 0.000 claims abstract description 23
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 25
- 230000000712 assembly Effects 0.000 claims description 24
- 238000000429 assembly Methods 0.000 claims description 24
- 229910052799 carbon Inorganic materials 0.000 claims description 23
- 230000007423 decrease Effects 0.000 claims description 3
- 230000017525 heat dissipation Effects 0.000 abstract description 12
- 238000010586 diagram Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 12
- 239000010949 copper Substances 0.000 description 11
- 229910052802 copper Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 239000004519 grease Substances 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical class C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 239000004917 carbon fiber Substances 0.000 description 2
- 239000002134 carbon nanofiber Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- -1 Al N Inorganic materials 0.000 description 1
- PEEHTFAAVSWFBL-UHFFFAOYSA-N Maleimide Chemical compound O=C1NC(=O)C=C1 PEEHTFAAVSWFBL-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 229910021397 glassy carbon Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L23/367—Cooling facilitated by shape of device
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- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
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Abstract
Description
2 配線基板
4 ピン
5A〜5C 積層基板
6A,6B 半導体アセンブリ
8 ケース
9 ねじ
10 半導体モジュール
11 封止部
20,22,40,60 熱伝導シート
20a,20b,26a〜28b’,31a〜39c,40a〜40c,60a,60b 凹部
20s,20t スロープ部
24 空気層
25a,25b,45a,45b,65a,65b ねじ穴
30 冷却器
30a 放熱フィン
30b 載置板
61a〜61c カーボンシート
100,200,300 半導体装置
Claims (14)
- 絶縁基板の底面側に設けられた導電性板を有する積層基板と前記積層基板上に実装された半導体素子とからなる少なくとも1つの半導体アセンブリと、前記導電性板の底部を除いて前記少なくとも1つの半導体アセンブリを封止する封止部とを有する半導体モジュールと、
前記半導体モジュールを載置する載置面を有する冷却器と、
前記半導体モジュールと前記冷却器の前記載置面との間に配置され、前記積層基板の底面に接する熱伝導シートと、
を備え、
前記熱伝導シートは、前記導電性板の底部の外縁の少なくとも一部に対応した凹部を有していることを特徴とする半導体装置。 - 前記半導体モジュールは、M個(M:偶数)の前記半導体アセンブリを有し、
前記M個の半導体アセンブリが有する前記導電性板の各々は、前記半導体モジュールの短手方向に延在する縁部を有し、
前記凹部は、前記半導体アセンブリが有する前記導電性板の、互いに対向する前記縁部に対応した形状を有していることを特徴とする請求項1に記載の半導体装置。 - 前記互いに対向する前記縁部は、前記半導体モジュールの中央部において互いに隣接する前記半導体アセンブリが有する前記導電性板の、互いに隣接する2つの縁部であることを特徴とする請求項2に記載の半導体装置。
- 前記M個の半導体アセンブリが有する前記導電性板の各々は、前記半導体モジュールの長手方向に延在する縁部をさらに有し、
前記凹部は、前記長手方向の前記縁部に対応した形状を有していることを特徴とする請求項2又は3に記載の半導体装置。 - 前記半導体モジュールは、前記半導体モジュールの長手方向に配置されたN個(N:奇数)の前記半導体アセンブリを有し、
前記N個の半導体アセンブリのうち1個は、前記長手方向の中央領域上に配置され、
前記熱伝導シートは、前記半導体モジュールの短手方向に延在する中心線に対応した凹部を有していることを特徴とする請求項1に記載の半導体装置。 - 前記半導体モジュールは、N個(N:奇数)の前記半導体アセンブリを有し、
前記N個の半導体アセンブリが有する前記導電性板の各々は、前記半導体モジュールの短手方向に延在する縁部を有し、
前記凹部は、前記半導体アセンブリが有する前記導電性板の、互いに対向する前記縁部に対応した形状を有していることを特徴とする請求項1又は5に記載の半導体装置。 - 前記互いに対向する前記縁部は、互いに隣接する前記半導体アセンブリが有する前記導電性板の、互いに隣接する2つの縁部であることを特徴とする請求項6に記載の半導体装置。
- 前記N個の半導体アセンブリが有する前記導電性板の各々は、前記半導体モジュールの長手方向に延在する縁部をさらに有し、
前記凹部は、前記長手方向の前記縁部に対応した形状を有していることを特徴とする請求項6又は7の何れか1項に記載の半導体装置。 - 前記互いに隣接する2つの縁部の各々に対応する凹部を統合して共通の凹部としたことを特徴とする請求項3又は7に記載の半導体装置。
- 前記熱伝導シートは、前記凹部に向かって前記熱伝導シートの厚さが減じるスロープ部を有していることを特徴とする請求項1から9の何れか1項に記載の半導体装置。
- 前記熱伝導シートのヤング率Yは、1Pa≦Y≦200Paの条件を満たすことを特徴とする請求項1から10の何れか1項に記載の半導体装置。
- 前記熱伝導シートは、カーボンシートからなることを特徴とする請求項1から11の何れか1項に記載の半導体装置。
- 前記熱伝導シートは、前記積層基板が配置される中央部よりも、長手方向の両端部の板厚が厚いことを特徴とする請求項1から12の何れか1項に記載の半導体装置。
- 前記両端部の板厚をx、前記中央部の板厚をyとしたとき、2y<x<3yの関係が成立することを特徴とする請求項13に記載の半導体装置。
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