JP6836104B2 - 駆動装置、超音波モーター、ロボット、ハンド、及びポンプ - Google Patents

駆動装置、超音波モーター、ロボット、ハンド、及びポンプ Download PDF

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JP6836104B2
JP6836104B2 JP2016056605A JP2016056605A JP6836104B2 JP 6836104 B2 JP6836104 B2 JP 6836104B2 JP 2016056605 A JP2016056605 A JP 2016056605A JP 2016056605 A JP2016056605 A JP 2016056605A JP 6836104 B2 JP6836104 B2 JP 6836104B2
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vibrating
vibrating body
drive device
power
ultrasonic motor
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Japanese (ja)
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JP2017175697A5 (enrdf_load_stackoverflow
JP2017175697A (ja
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宮澤 修
修 宮澤
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Seiko Epson Corp
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Seiko Epson Corp
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2016056605A 2016-03-22 2016-03-22 駆動装置、超音波モーター、ロボット、ハンド、及びポンプ Active JP6836104B2 (ja)

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JP2016056605A JP6836104B2 (ja) 2016-03-22 2016-03-22 駆動装置、超音波モーター、ロボット、ハンド、及びポンプ

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JP2016056605A JP6836104B2 (ja) 2016-03-22 2016-03-22 駆動装置、超音波モーター、ロボット、ハンド、及びポンプ

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JP2017175697A JP2017175697A (ja) 2017-09-28
JP2017175697A5 JP2017175697A5 (enrdf_load_stackoverflow) 2019-04-04
JP6836104B2 true JP6836104B2 (ja) 2021-02-24

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Publication number Priority date Publication date Assignee Title
JP2019213255A (ja) * 2018-05-31 2019-12-12 セイコーエプソン株式会社 回転直動変換装置

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JP2017175697A (ja) 2017-09-28

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