JP6831413B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP6831413B2
JP6831413B2 JP2019056559A JP2019056559A JP6831413B2 JP 6831413 B2 JP6831413 B2 JP 6831413B2 JP 2019056559 A JP2019056559 A JP 2019056559A JP 2019056559 A JP2019056559 A JP 2019056559A JP 6831413 B2 JP6831413 B2 JP 6831413B2
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JP
Japan
Prior art keywords
working medium
vacuum pump
materials
felt
pump
Prior art date
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Application number
JP2019056559A
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English (en)
Japanese (ja)
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JP2019210931A5 (enExample
JP2019210931A (ja
Inventor
ウーヴェ・ライプ
トルステン・ゴーゴル
ベルンハルト・コッホ
Original Assignee
プファイファー・ヴァキューム・ゲーエムベーハー
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Publication of JP2019210931A publication Critical patent/JP2019210931A/ja
Publication of JP2019210931A5 publication Critical patent/JP2019210931A5/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16N—LUBRICATING
    • F16N7/00—Arrangements for supplying oil or unspecified lubricant from a stationary reservoir or the equivalent in or on the machine or member to be lubricated
    • F16N7/12—Arrangements for supplying oil or unspecified lubricant from a stationary reservoir or the equivalent in or on the machine or member to be lubricated with feed by capillary action, e.g. by wicks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/40—Organic materials
    • F05D2300/43—Synthetic polymers, e.g. plastics; Rubber
    • F05D2300/434—Polyimides, e.g. AURUM
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/50—Intrinsic material properties or characteristics
    • F05D2300/514—Porosity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/613—Felt
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/614—Fibres or filaments
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2208/00—Plastics; Synthetic resins, e.g. rubbers
    • F16C2208/20—Thermoplastic resins
    • F16C2208/40—Imides, e.g. polyimide [PI], polyetherimide [PEI]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2208/00—Plastics; Synthetic resins, e.g. rubbers
    • F16C2208/20—Thermoplastic resins
    • F16C2208/70—Polyesters, e.g. polyethylene-terephthlate [PET], polybutylene-terephthlate [PBT]
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2220/00—Shaping
    • F16C2220/20—Shaping by sintering pulverised material, e.g. powder metallurgy
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/66—Special parts or details in view of lubrication
    • F16C33/6637—Special parts or details in view of lubrication with liquid lubricant
    • F16C33/664—Retaining the liquid in or near the bearing
    • F16C33/6648—Retaining the liquid in or near the bearing in a porous or resinous body, e.g. a cage impregnated with the liquid

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2019056559A 2018-05-30 2019-03-25 真空ポンプ Active JP6831413B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP18175114.0 2018-05-30
EP18175114.0A EP3575610B1 (de) 2018-05-30 2018-05-30 Vakuumpumpe mit betriebsmittelspeicher

Publications (3)

Publication Number Publication Date
JP2019210931A JP2019210931A (ja) 2019-12-12
JP2019210931A5 JP2019210931A5 (enExample) 2020-10-08
JP6831413B2 true JP6831413B2 (ja) 2021-02-17

Family

ID=62492476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019056559A Active JP6831413B2 (ja) 2018-05-30 2019-03-25 真空ポンプ

Country Status (2)

Country Link
EP (1) EP3575610B1 (enExample)
JP (1) JP6831413B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2602958B (en) * 2020-11-02 2023-08-16 Edwards Ltd Oil feed nut and oil reservoir for a vacuum pump

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2555902B2 (de) * 1975-12-12 1977-10-06 Arthur Pfeiffer-Vakuumtechnik Wetzlar GmbH, 6334 Aßlar Oelschmierungseinrichtung fuer die waelzlager einer turbomolekularpumpe
DE102006053237A1 (de) * 2006-11-11 2008-05-29 Pfeiffer Vacuum Gmbh Lagermodul für eine Vakuumpumpe
GB0712777D0 (en) * 2007-07-02 2007-08-08 Edwards Ltd Vacuum Pump
DE102012220040A1 (de) * 2012-11-02 2014-05-08 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6623964B2 (ja) * 2015-10-13 2019-12-25 株式会社島津製作所 油潤滑軸受装置および真空ポンプ
GB2553766A (en) * 2016-09-07 2018-03-21 Edwards Ltd Turbomolecular pump lubricant supply systems

Also Published As

Publication number Publication date
JP2019210931A (ja) 2019-12-12
EP3575610B1 (de) 2022-01-19
EP3575610A1 (de) 2019-12-04

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