JP2019210931A5 - - Google Patents
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- Publication number
- JP2019210931A5 JP2019210931A5 JP2019056559A JP2019056559A JP2019210931A5 JP 2019210931 A5 JP2019210931 A5 JP 2019210931A5 JP 2019056559 A JP2019056559 A JP 2019056559A JP 2019056559 A JP2019056559 A JP 2019056559A JP 2019210931 A5 JP2019210931 A5 JP 2019210931A5
- Authority
- JP
- Japan
- Prior art keywords
- working medium
- vacuum pump
- materials
- felt
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 98
- 238000003860 storage Methods 0.000 claims description 29
- 230000007704 transition Effects 0.000 claims description 16
- 239000000835 fiber Substances 0.000 claims description 13
- 239000011232 storage material Substances 0.000 claims description 12
- 239000011347 resin Substances 0.000 claims description 6
- 229920005989 resin Polymers 0.000 claims description 6
- 229920000728 polyester Polymers 0.000 claims description 5
- 239000004642 Polyimide Substances 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 3
- 238000009950 felting Methods 0.000 claims description 2
- 229920003253 poly(benzobisoxazole) Polymers 0.000 claims description 2
- 229920001187 thermosetting polymer Polymers 0.000 claims description 2
- 229920003235 aromatic polyamide Polymers 0.000 claims 1
- 239000004033 plastic Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 16
- 239000002826 coolant Substances 0.000 description 10
- 230000032258 transport Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005086 pumping Methods 0.000 description 4
- 241000238634 Libellulidae Species 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000004381 surface treatment Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000001050 lubricating effect Effects 0.000 description 2
- 239000010687 lubricating oil Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- -1 Polyethylene Polymers 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 235000013312 flour Nutrition 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229920000785 ultra high molecular weight polyethylene Polymers 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP18175114.0 | 2018-05-30 | ||
| EP18175114.0A EP3575610B1 (de) | 2018-05-30 | 2018-05-30 | Vakuumpumpe mit betriebsmittelspeicher |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019210931A JP2019210931A (ja) | 2019-12-12 |
| JP2019210931A5 true JP2019210931A5 (enExample) | 2020-10-08 |
| JP6831413B2 JP6831413B2 (ja) | 2021-02-17 |
Family
ID=62492476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019056559A Active JP6831413B2 (ja) | 2018-05-30 | 2019-03-25 | 真空ポンプ |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP3575610B1 (enExample) |
| JP (1) | JP6831413B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2602958B (en) * | 2020-11-02 | 2023-08-16 | Edwards Ltd | Oil feed nut and oil reservoir for a vacuum pump |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2555902B2 (de) * | 1975-12-12 | 1977-10-06 | Arthur Pfeiffer-Vakuumtechnik Wetzlar GmbH, 6334 Aßlar | Oelschmierungseinrichtung fuer die waelzlager einer turbomolekularpumpe |
| DE102006053237A1 (de) * | 2006-11-11 | 2008-05-29 | Pfeiffer Vacuum Gmbh | Lagermodul für eine Vakuumpumpe |
| GB0712777D0 (en) * | 2007-07-02 | 2007-08-08 | Edwards Ltd | Vacuum Pump |
| DE102012220040A1 (de) * | 2012-11-02 | 2014-05-08 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
| JP6623964B2 (ja) * | 2015-10-13 | 2019-12-25 | 株式会社島津製作所 | 油潤滑軸受装置および真空ポンプ |
| GB2553766A (en) * | 2016-09-07 | 2018-03-21 | Edwards Ltd | Turbomolecular pump lubricant supply systems |
-
2018
- 2018-05-30 EP EP18175114.0A patent/EP3575610B1/de active Active
-
2019
- 2019-03-25 JP JP2019056559A patent/JP6831413B2/ja active Active
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