JP6822151B2 - 光検知器及び撮像装置 - Google Patents
光検知器及び撮像装置 Download PDFInfo
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- 238000003384 imaging method Methods 0.000 title description 12
- 238000006243 chemical reaction Methods 0.000 claims description 96
- 229910052751 metal Inorganic materials 0.000 claims description 93
- 239000002184 metal Substances 0.000 claims description 93
- 239000004065 semiconductor Substances 0.000 claims description 75
- 239000000758 substrate Substances 0.000 claims description 48
- 239000002096 quantum dot Substances 0.000 claims description 28
- 230000003287 optical effect Effects 0.000 claims description 21
- 230000004888 barrier function Effects 0.000 claims description 12
- 230000005684 electric field Effects 0.000 description 44
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 30
- 238000000034 method Methods 0.000 description 30
- 238000004519 manufacturing process Methods 0.000 description 24
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 19
- 229910052737 gold Inorganic materials 0.000 description 19
- 239000010931 gold Substances 0.000 description 19
- 230000010287 polarization Effects 0.000 description 18
- 239000013078 crystal Substances 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 229910052814 silicon oxide Inorganic materials 0.000 description 13
- 238000005530 etching Methods 0.000 description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 238000001312 dry etching Methods 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 238000000059 patterning Methods 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 230000007704 transition Effects 0.000 description 6
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052732 germanium Inorganic materials 0.000 description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 4
- 238000001451 molecular beam epitaxy Methods 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 238000010030 laminating Methods 0.000 description 3
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 2
- 229910000673 Indium arsenide Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000005610 quantum mechanics Effects 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
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Description
本実施形態に係る光検知器について、その製造工程を追いながら説明する。
本実施形態に係る光検知器について、その製造工程を追いながら説明する。
本実施形態では、第1の回折格子49と第2の回折格子62を太陽電池に適用することにより、太陽電池における光電変換効率を高める。
本実施形態では、第1実施形態と第2実施形態で説明した各光検知器を利用した撮像装置について説明する。
前記第2の主面側に形成され、第1の方向にストライプ状に延びる第1の面と、前記第1の面と高低差があり、かつ前記第1の方向にストライプ状に延びる第2の面とが交互に複数設けられた第1の回折格子と、
前記第1の面と前記第2の面の各々に間隔をおいて複数設けられ、かつ、前記第1の方向と、前記第1の方向に直交する第2の方向のいずれかに沿って延びる金属線と、
前記第1の回折格子の上に形成され、前記第2の方向に延びる複数の溝が間隔をおいて形成された第2の回折格子と、
を有する光検知器。
前記金属線は、前記第2の方向に沿って延びることを特徴とする付記1に記載の光検知器。
前記金属線は、前記第1の方向に沿って延びることを特徴とする付記1に記載の光検知器。
前記第1の半導体層の上に形成された第2の半導体層とを有し、
前記第2の回折格子が前記第2の半導体層の上に形成されたことを特徴とする付記2又は付記3に記載の光検知器。
前記第2の半導体層が前記酸化シリコン層の上に形成されたことを特徴とする付記4に記載の光検知器。
前記金属線は、前記第1の方向に沿って延びることを特徴とする付記1に記載の光検知器。
前記光電流を読み出す読み出し回路とを有し、
前記画素は、
前記光が入射する第1の主面と、前記第1の主面に相対する第2の主面とを有し、前記光に対して光電変換を行う光電変換層と、
前記第2の主面側に形成され、第1の方向にストライプ状に延びる第1の面と、前記第1の面と高低差があり、かつ前記第1の方向にストライプ状に延びる第2の面とが交互に複数設けられた第1の回折格子と、
前記第1の面と前記第2の面の各々に間隔をおいて複数設けられ、かつ、前記第1の方向と、前記第1の方向に直交する第2の方向のいずれかに沿って延びる金属線と、
前記第1の回折格子の上に形成され、前記第2の方向に延びる複数の溝が間隔をおいて形成された第2の回折格子と、
を有することを特徴とする撮像装置。
Claims (5)
- 光が入射する第1の主面と、前記第1の主面に相対する第2の主面とを有し、前記光に対して光電変換を行う光電変換層と、
前記第2の主面側に形成され、第1の方向にストライプ状に延びる第1の面と、前記第1の面と高低差があり、かつ前記第1の方向にストライプ状に延びる第2の面とが交互に複数設けられた第1の回折格子と、
前記第1の面と前記第2の面の各々に間隔をおいて複数設けられ、かつ、前記第1の方向と、前記第1の方向に直交する第2の方向のいずれかに沿って延びる金属線と、
前記第1の回折格子の上に形成され、前記第2の方向に延びる複数の溝が間隔をおいて形成された第2の回折格子と、
を有し、
前記光電変換層は、交互に積層された量子井戸層と障壁層とを有し、
前記金属線は、前記第2の方向に沿って延びることを特徴とする光検知器。 - 光が入射する第1の主面と、前記第1の主面に相対する第2の主面とを有し、前記光に対して光電変換を行う光電変換層と、
前記第2の主面側に形成され、第1の方向にストライプ状に延びる第1の面と、前記第1の面と高低差があり、かつ前記第1の方向にストライプ状に延びる第2の面とが交互に複数設けられた第1の回折格子と、
前記第1の面と前記第2の面の各々に間隔をおいて複数設けられ、かつ、前記第1の方向と、前記第1の方向に直交する第2の方向のいずれかに沿って延びる金属線と、
前記第1の回折格子の上に形成され、前記第2の方向に延びる複数の溝が間隔をおいて形成された第2の回折格子と、
を有し、
前記光電変換層は、交互に積層された量子ドットと中間層とを有し、
前記金属線は、前記第1の方向に沿って延びることを特徴とする光検知器。 - 光が入射する第1の主面と、前記第1の主面に相対する第2の主面とを有し、前記光に対して光電変換を行う光電変換層と、
前記第2の主面側に形成され、第1の方向にストライプ状に延びる第1の面と、前記第1の面と高低差があり、かつ前記第1の方向にストライプ状に延びる第2の面とが交互に複数設けられた第1の回折格子と、
前記第1の面と前記第2の面の各々に間隔をおいて複数設けられ、かつ、前記第1の方向と、前記第1の方向に直交する第2の方向のいずれかに沿って延びる金属線と、
前記第1の回折格子の上に形成され、前記第2の方向に延びる複数の溝が間隔をおいて形成された第2の回折格子と、
を有し、
前記光電変換層は、第1の導電型の半導体基板と、前記半導体基板の上に形成された第2の導電型の半導体層とを有し、
前記金属線は、前記第1の方向に沿って延びることを特徴とする光検知器。 - 平面内にアレイ状に配列され、受光した光の強度に応じた光電流を出力する複数の画素と、
前記光電流を読み出す読み出し回路とを有し、
前記画素は、
前記光が入射する第1の主面と、前記第1の主面に相対する第2の主面とを有し、前記光に対して光電変換を行う光電変換層と、
前記第2の主面側に形成され、第1の方向にストライプ状に延びる第1の面と、前記第1の面と高低差があり、かつ前記第1の方向にストライプ状に延びる第2の面とが交互に複数設けられた第1の回折格子と、
前記第1の面と前記第2の面の各々に間隔をおいて複数設けられ、かつ、前記第1の方向と、前記第1の方向に直交する第2の方向のいずれかに沿って延びる金属線と、
前記第1の回折格子の上に形成され、前記第2の方向に延びる複数の溝が間隔をおいて形成された第2の回折格子と、
を有し、
前記光電変換層は、交互に積層された量子井戸層と障壁層とを有し、
前記金属線は、前記第2の方向に沿って延びることを特徴とする撮像装置。 - 平面内にアレイ状に配列され、受光した光の強度に応じた光電流を出力する複数の画素と、
前記光電流を読み出す読み出し回路とを有し、
前記画素は、
前記光が入射する第1の主面と、前記第1の主面に相対する第2の主面とを有し、前記光に対して光電変換を行う光電変換層と、
前記第2の主面側に形成され、第1の方向にストライプ状に延びる第1の面と、前記第1の面と高低差があり、かつ前記第1の方向にストライプ状に延びる第2の面とが交互に複数設けられた第1の回折格子と、
前記第1の面と前記第2の面の各々に間隔をおいて複数設けられ、かつ、前記第1の方向と、前記第1の方向に直交する第2の方向のいずれかに沿って延びる金属線と、
前記第1の回折格子の上に形成され、前記第2の方向に延びる複数の溝が間隔をおいて形成された第2の回折格子と、
を有し、
前記光電変換層は、交互に積層された量子ドットと中間層とを有し、
前記金属線は、前記第1の方向に沿って延びることを特徴とする撮像装置。
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