JP6820660B2 - 荷電粒子線装置 - Google Patents
荷電粒子線装置 Download PDFInfo
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- JP6820660B2 JP6820660B2 JP2016015028A JP2016015028A JP6820660B2 JP 6820660 B2 JP6820660 B2 JP 6820660B2 JP 2016015028 A JP2016015028 A JP 2016015028A JP 2016015028 A JP2016015028 A JP 2016015028A JP 6820660 B2 JP6820660 B2 JP 6820660B2
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- charged particle
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24475—Scattered electron detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2448—Secondary particle detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24592—Inspection and quality control of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2803—Scanning microscopes characterised by the imaging method
- H01J2237/2806—Secondary charged particle
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2813—Scanning microscopes characterised by the application
- H01J2237/2814—Measurement of surface topography
- H01J2237/2815—Depth profile
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
以下に、溝状パターンのような特定方向に長いパターンのコントラストの向上を目的とする荷電粒子線装置を提案する。
Claims (10)
- 試料に対する荷電粒子ビームの照射に基づいて得られる荷電粒子を検出する検出器を備えた荷電粒子線装置において、
弧状の開口、複数の異なる方向に長手方向を持つ複数の開口、及び放射状に複数の方向に延びる長手方向を持つ開口の少なくとも一つを有する荷電粒子通過制限部材と、
前記開口に向かって前記試料から放出された荷電粒子を偏向する偏向器と、
前記開口の一つの部分と当該一つの部分の周囲の前記荷電粒子通過制限部材に、前記試料から放出された荷電粒子を選択的に到達させ、且つ前記開口の他の一部には前記試料から放出された荷電粒子を到達させないように前記偏向器を制御する制御装置を備えたことを特徴とする荷電粒子線装置。 - 請求項1において、
前記制御装置は、前記開口の複数の位置に、前記試料から放出された荷電粒子を偏向するように前記偏向器を制御することを特徴とする荷電粒子線装置。 - 請求項2において、
前記複数の位置は、前記開口の長手方向の方向が異なる位置であることを特徴とする荷電粒子線装置。 - 請求項3において、
前記制御装置は、前記試料から放出された荷電粒子の検出に基づいて、前記複数の位置毎の画像及び信号波形の少なくとも一方を生成することを特徴とする荷電粒子線装置。 - 請求項4において、
前記制御装置は、前記複数の位置毎の信号に基づいて、上層のパターンと下層のパターンとの間の重ね合わせ誤差を求めることを特徴とする荷電粒子線装置。 - 請求項4において、
前記制御装置は、前記画像或いは信号波形の評価に基づいて、前記偏向器の偏向条件を選択することを特徴とする荷電粒子線装置。 - 請求項1において、
前記弧状の開口を備えた荷電粒子通過制限部材は、荷電粒子ビームの通過開口を有する内側部材と、当該内側部材と前記弧状の開口を介して配置される外側部材を含むことを特徴とする荷電粒子線装置。 - 請求項7において、
当該外側部材に調整可能な電圧が印加する電源を接続したことを特徴とする荷電粒子線装置。 - 請求項1において、
前記複数方向に長手方向を持つ開口は、当該開口が放射状に配列されていることを特徴とする荷電粒子線装置。 - 請求項1において、
前記制御装置は、前記試料から放出され、前記開口を通過した荷電粒子に基づいて得られる信号を処理する演算装置を備えたことを特徴とする荷電粒子線装置。
Priority Applications (2)
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JP2016015028A JP6820660B2 (ja) | 2016-01-29 | 2016-01-29 | 荷電粒子線装置 |
US15/417,887 US10020160B2 (en) | 2016-01-29 | 2017-01-27 | Charged particle beam device |
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JP2016015028A JP6820660B2 (ja) | 2016-01-29 | 2016-01-29 | 荷電粒子線装置 |
Publications (2)
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JP2017135040A JP2017135040A (ja) | 2017-08-03 |
JP6820660B2 true JP6820660B2 (ja) | 2021-01-27 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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US10770262B1 (en) * | 2018-05-30 | 2020-09-08 | National Technology & Engineering Solutions Of Sandia, Llc | Apparatus, method and system for imaging and utilization of SEM charged particles |
JP2020187876A (ja) * | 2019-05-13 | 2020-11-19 | 株式会社日立ハイテク | 荷電粒子線装置 |
JP2022162802A (ja) * | 2021-04-13 | 2022-10-25 | 株式会社ニューフレアテクノロジー | 荷電粒子ビーム描画装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS61190839A (ja) * | 1985-02-19 | 1986-08-25 | Canon Inc | 荷電粒子線装置 |
JPH02294016A (ja) * | 1989-05-08 | 1990-12-05 | Nippon Telegr & Teleph Corp <Ntt> | 荷電ビーム描画装置用ビームブランキング構造体 |
JP2006278028A (ja) * | 2005-03-28 | 2006-10-12 | Ebara Corp | 電子線装置及び該装置を用いたデバイス製造方法 |
US7462828B2 (en) * | 2005-04-28 | 2008-12-09 | Hitachi High-Technologies Corporation | Inspection method and inspection system using charged particle beam |
JP5425601B2 (ja) * | 2009-12-03 | 2014-02-26 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置およびその画質改善方法 |
JP2012033369A (ja) * | 2010-07-30 | 2012-02-16 | Topcon Corp | 荷電ビーム装置及びパターンの傾斜角度測定方法 |
JP5542650B2 (ja) * | 2010-12-28 | 2014-07-09 | 株式会社日立ハイテクノロジーズ | 校正用標準部材およびその作製方法並びにそれを用いた走査電子顕微鏡 |
EP2654068B1 (en) * | 2012-04-16 | 2017-05-17 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Switchable multi perspective detector, optics therefore and method of operating thereof |
JP6035928B2 (ja) * | 2012-07-12 | 2016-11-30 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
JP2014035962A (ja) * | 2012-08-10 | 2014-02-24 | Hitachi High-Technologies Corp | ステージ装置及び荷電粒子線装置 |
KR101748515B1 (ko) * | 2013-05-09 | 2017-06-16 | 가부시키가이샤 히다치 하이테크놀로지즈 | 중첩 계측 장치, 중첩 계측 방법 및 중첩 계측 시스템 |
JP5669896B2 (ja) | 2013-07-24 | 2015-02-18 | 株式会社日立ハイテクノロジーズ | 走査型荷電粒子顕微鏡の画質改善方法および走査型荷電粒子顕微鏡装置 |
JP6316578B2 (ja) * | 2013-12-02 | 2018-04-25 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡システム及びそれを用いたパターン計測方法並びに走査電子顕微鏡 |
US9330881B2 (en) * | 2014-09-01 | 2016-05-03 | Nuflare Technology, Inc. | Blanking device for multi charged particle beams, and multi charged particle beam writing apparatus |
JP2017016755A (ja) * | 2015-06-29 | 2017-01-19 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
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US20170221672A1 (en) | 2017-08-03 |
US10020160B2 (en) | 2018-07-10 |
JP2017135040A (ja) | 2017-08-03 |
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