JP6796078B2 - 発光素子及び発光素子パッケージ - Google Patents
発光素子及び発光素子パッケージ Download PDFInfo
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- JP6796078B2 JP6796078B2 JP2017549603A JP2017549603A JP6796078B2 JP 6796078 B2 JP6796078 B2 JP 6796078B2 JP 2017549603 A JP2017549603 A JP 2017549603A JP 2017549603 A JP2017549603 A JP 2017549603A JP 6796078 B2 JP6796078 B2 JP 6796078B2
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- 239000004065 semiconductor Substances 0.000 claims description 93
- 239000000758 substrate Substances 0.000 claims description 47
- 229910000679 solder Inorganic materials 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 17
- 230000008569 process Effects 0.000 claims description 14
- 239000010410 layer Substances 0.000 description 191
- 239000000126 substance Substances 0.000 description 28
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 15
- 239000002019 doping agent Substances 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- 229910052782 aluminium Inorganic materials 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 11
- 239000010931 gold Substances 0.000 description 11
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 9
- 229910052759 nickel Inorganic materials 0.000 description 9
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 8
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 8
- 239000010948 rhodium Substances 0.000 description 8
- 239000010936 titanium Substances 0.000 description 8
- 230000004888 barrier function Effects 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 7
- 229910052733 gallium Inorganic materials 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- VRIVJOXICYMTAG-IYEMJOQQSA-L iron(ii) gluconate Chemical compound [Fe+2].OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O VRIVJOXICYMTAG-IYEMJOQQSA-L 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 229910002704 AlGaN Inorganic materials 0.000 description 6
- 229910052791 calcium Inorganic materials 0.000 description 6
- 239000011651 chromium Substances 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 229910052697 platinum Inorganic materials 0.000 description 6
- 229910052703 rhodium Inorganic materials 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 229910052712 strontium Inorganic materials 0.000 description 6
- 229910052719 titanium Inorganic materials 0.000 description 6
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 6
- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 229910052725 zinc Inorganic materials 0.000 description 5
- 239000011701 zinc Substances 0.000 description 5
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- 229910019897 RuOx Inorganic materials 0.000 description 4
- 229910052788 barium Inorganic materials 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000002096 quantum dot Substances 0.000 description 4
- 229910052594 sapphire Inorganic materials 0.000 description 4
- 239000010980 sapphire Substances 0.000 description 4
- 239000010944 silver (metal) Substances 0.000 description 4
- SKRWFPLZQAAQSU-UHFFFAOYSA-N stibanylidynetin;hydrate Chemical compound O.[Sn].[Sb] SKRWFPLZQAAQSU-UHFFFAOYSA-N 0.000 description 4
- 229910052718 tin Inorganic materials 0.000 description 4
- 239000011135 tin Substances 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 3
- 229910010413 TiO 2 Inorganic materials 0.000 description 3
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 229910052749 magnesium Inorganic materials 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000012466 permeate Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910052771 Terbium Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910003564 SiAlON Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- DZLPZFLXRVRDAE-UHFFFAOYSA-N [O--].[O--].[O--].[O--].[Al+3].[Zn++].[In+3] Chemical compound [O--].[O--].[O--].[O--].[Al+3].[Zn++].[In+3] DZLPZFLXRVRDAE-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000011162 core material Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
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- H01L33/36—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
-
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- H01L33/387—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape with a plurality of electrode regions in direct contact with the semiconductor body and being electrically interconnected by another electrode layer
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16245—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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Description
1上面は少なくとも一つの第1リセスを有することができる。前記絶縁層は前記第1電極
上に配置される第2上面を含み、前記絶縁層の前記第2上面は少なくとも一つの第2リセ
スを含むことができる。前記第1電極の第1厚さは前記第1電極が前記第1リセスを有し
ないときより前記第1リセスを有するときにもっと厚くてもよい。
グパッドとそれぞれ連結された第1及び第2半田部;及び前記第1及び第2半田部とそれ
ぞれ電気的に連結された第1及び第2リードフレームを含むことができる。
2の中で少なくとも1種を含むことができる。若しくは、絶縁層140は分布ブラッグ反
射層(DBR:Distributed Bragg Reflector)であっても
よい。
ranparent Conductive Oxide)であってもよい。例えば、透
光電極層は、ITO(indium tin oxide)、IZO(indium z
inc oxide)、IZTO(indium zinc tin oxide)、I
AZO(indium aluminum zinc oxide)、IGZO(ind
ium gallium zinc oxide)、IGTO(indium gall
ium tin oxide)、AZO(aluminum zinc oxide)、
ATO(antimony tin oxide)、GZO(gallium zinc
oxide)、IrOx、RuOx、RuOx/ITO、Ni/IrOx/Au、及び
Ni/IrOx/Au/ITOの中で少なくとも1種で形成でき、このような材料に限定
しない。
発明の実施のための形態
Claims (14)
- 基板と、
前記基板に配置され、第1導電型半導体層、活性層及び第2導電型半導体層を含み、前記第2導電型半導体層と前記活性層を貫通して前記第1導電型半導体層を露出させるコンタクトホールを含む発光構造物と、
前記コンタクトホールに埋め込まれ、前記第1導電型半導体層と電気的に連結される第1電極と、
前記第2導電型半導体層と連結される第2電極と、
前記第1及び第2電極とそれぞれ連結された第1及び第2ボンディングパッドと、
前記第1ボンディングパッドと前記第2電極の間及び前記第2ボンディングパッドと前記第1電極の間にそれぞれ配置された絶縁層と、を含み、
前記第1電極は、
前記第1及び第2ボンディングパッドの下側に配置された分岐電極と、
前記第1ボンディングパッドの下側に配置されたコンタクト電極と、を含み、
前記分岐電極は、
前記第2ボンディングパッドの下側に配置され、前記絶縁層によって前記第2ボンディングパッドから電気的に離隔した第1セグメントと、
前記第1ボンディングパッドの下側に配置された第2セグメントと、を含み、
前記第1電極の前記第1セグメントは、前記コンタクトホールに埋め込まれた前記絶縁層と対向し、前記第2ボンディングパッドと向き合う第1上面を含み、
前記第1電極の前記第1上面は前記絶縁層が満たされる少なくとも1つの第1リセスを有し、
前記発光構造物の厚さ方向に、前記第1上面において前記第1リセスが形成されていない部分と前記コンタクトホールの底面との間の前記第1電極の第1厚さは、前記第2ボンディングパッドの底面と前記第1電極の前記第1上面において前記第1リセスが形成されていない部分との間に配置された前記絶縁層の第2厚さの1/3以下である、発光素子。 - 前記発光構造物の前記厚さ方向に垂直な第1方向に前記基板の第1長さと前記分岐電極の第2長さは下記の式のような関係を有し、
前記第1及び第2ボンディングパッドは前記第1方向に互いに離隔する、請求項1に記載の発光素子。
L1×0.7>L2
(ここで、L1は前記第1長さを示し、L2は前記第2長さを示す) - 前記第1セグメントは、
前記基板と向き合う前記第1上面の反対側下面を含み、
前記下面は前記コンタクトホールの底面より前記基板に近い、請求項1に記載の発光素子。 - 前記第1厚さは1μm以下であり、前記第2厚さは3.3μm以下である、請求項1から請求項3のいずれか一項に記載の発光素子。
- 前記分岐電極は、前記第1セグメントと前記第2セグメントとの間に配置された第3セグメントをさらに含む、請求項1から請求項4のいずれか一項に記載の発光素子。
- 前記第1電極の前記第1上面及び第2ボンディングパッドと前記第1方向に重畳する前記絶縁層は前記第2ボンディングパッドと対向する第2上面を含み、
前記絶縁層の前記第2上面は少なくとも1つの第2リセスを含む、請求項1から請求項5のいずれか一項に記載の発光素子。 - 基板と、
前記基板に配置され、第1導電型半導体層、活性層及び第2導電型半導体層を含み、前記第2導電型半導体層と前記活性層を貫通して前記第1導電型半導体層を露出させるコンタクトホールを含む発光構造物と、
前記コンタクトホールに埋め込まれ、前記第1導電型半導体層と電気的に連結される第1電極と、
前記第2導電型半導体層と連結される第2電極と、
前記第1及び第2電極とそれぞれ連結された第1及び第2ボンディングパッドと、
前記第1ボンディングパッドと前記第2電極との間及び前記第2ボンディングパッドと前記第1電極との間にそれぞれ配置された絶縁層と、を含み、
前記第1電極は、
前記第1及び第2ボンディングパッドの下側に配置された分岐電極と、
前記第1ボンディングパッドの下側に配置されたコンタクト電極と、を含み、
前記分岐電極は、
前記第2ボンディングパッドの下側に配置され、前記絶縁層によって前記第2ボンディングパッドから電気的に離隔した第1セグメントと、
前記第1ボンディングパッドの下側に配置された第2セグメントと、を含み、
前記第1電極の前記第1セグメントは、前記コンタクトホールに埋め込まれた前記絶縁層と対向し、前記第2ボンディングパッドと向き合う第1上面を含み、
前記第1電極の前記第1セグメントは、前記発光構造物の厚さ方向に垂直な第1方向に互いに離隔して配置された複数のサブ電極を含み、
前記発光構造物の厚さ方向に、前記第1電極の前記第1上面と前記コンタクトホールの底面との間の第1厚さは、前記第2ボンディングパッドの底面と前記第1電極の前記第1上面との間に配置された前記絶縁層の第2厚さの1/3以下であり、
前記絶縁層は前記複数のサブ電極の間に埋め込まれた、発光素子。 - 前記複数のサブ電極の厚さは互いに異なる、請求項7に記載の発光素子。
- 前記複数のサブ電極の厚さは互いに同一である、請求項7に記載の発光素子。
- 前記複数のサブ電極が離隔した距離は前記絶縁層が埋め込まれることができる工程誤差を考慮して決定された、請求項7から請求項9のいずれか一項に記載の発光素子。
- 前記発光構造物の前記厚さ方向に垂直な第1方向に前記第1ボンディングパッドと前記第2ボンディングパッドとは互いに対向し、
前記第1ボンディングパッドの前記第1方向への長さは前記基板の前記第1方向への長さより小さく、
前記第2ボンディングパッドの前記第1方向への長さは前記基板の前記第1方向への長さより小さい、請求項1から請求項10のいずれか一項に記載の発光素子。 - 前記発光構造物の前記厚さ方向に垂直な第1方向に前記第1ボンディングパッドと前記第2ボンディングパッドとは互いに対向し、
前記第1ボンディングパッドの前記第1方向への長さは前記分岐電極の前記第1方向への長さより小さく、
前記第2ボンディングパッドの前記第1方向への長さは前記分岐電極の前記第1方向への長さより小さい、請求項1から請求項10のいずれか一項に記載の発光素子。 - 前記絶縁層は分布ブラッグ反射層を含む、請求項1から請求項12のいずれか一項に記載の発光素子。
- 請求項1から請求項13のいずれか一項に記載の発光素子と、
前記第1及び第2ボンディングパッドとそれぞれ連結された第1及び第2半田部と、
前記第1及び第2半田部とそれぞれ電気的に連結された第1及び第2リードフレームと、を含む、発光素子パッケージ。
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