JP6775791B1 - Parts delivery device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a component delivery device capable of accurately arranging a member to be approached at a predetermined position when delivering an electronic component. SOLUTION: At least one of members A1 and B1 arranged to face each other is moved in parallel with a virtual straight line L1, the members A1 and B1 are brought close to each other, and an electronic component W between the members A1 and B1 is attached to the member B1. In the parts delivery device 10 to be handed over, in a state where the members A1 and B1 are arranged non-opposing, the first image obtained by capturing the member A1 or the member B1 from the opposite position in the direction parallel to the virtual straight line L1 and the members are arranged facing each other. An imaging means 19 for obtaining a second image obtained by capturing both of the members A1 and B1 in a direction orthogonal to the virtual straight line L1 and an optical path from each object to be imaged to the imaging means 19 of the first and second images. The image pickup means 19 is provided with an optical path adjusting means 20 for capturing the first and second images by one or both of light reflection and reflection. [Selection diagram] Fig. 1

Description

The present invention relates to a component delivery device that moves an electronic component to a predetermined member.

A device that moves electronic components from the suction nozzle of one unit that sucks electronic components to the suction nozzles of another unit, or the back side of a wafer sheet with electronic components attached to the front surface is pushed by a needle-shaped member to generate electrons. One member (hereinafter referred to as "member A") and another member (hereinafter referred to as "member A") such as a device (see Patent Document 1) for moving a component to the surface side and passing it to a collet arranged on the surface side of the wafer sheet. There are various devices that bring (referred to as "member B") closer to each other and deliver electronic components between members A and B to member B.

In such a device, it is important to bring the member A and the member B close to each other from the state where the member A and the member B are arranged at predetermined positions for stable delivery of the electronic parts, and it is important for each member to be delivered. The members A and B have been arranged at predetermined positions by adjustment at the time of assembly or the like.

JP-A-11-186298

However, as the miniaturization of electronic components progresses, it is necessary to improve the accuracy of arranging the members A and B at predetermined positions. The electronic components referred to here are, for example, diodes, transistors, capacitors, inductors, and ICs (Integrated Circuits).
The present invention has been made in view of such circumstances, and an object of the present invention is to provide a parts delivery device capable of accurately arranging members to be approached at a predetermined position when delivering electronic parts.

In the component delivery device according to the first invention according to the above object, at least one of the members A and B arranged to face each other is moved in parallel with the virtual straight line L to bring the members A and B close to each other, and the members are brought close to each other. In a component delivery device that passes an electronic component between A and B to the member B, the member A or the member B is arranged in a non-opposing state and is arranged in a direction parallel to the virtual straight line L. A first imaging means for obtaining a first image captured from a facing position, and a second image obtained by capturing both of the members A and B arranged opposite to each other in a direction orthogonal to the virtual straight line L. Rotating together with the image pickup means of 2 and one of the members A and B, one of the states in which the members A and B are arranged non-opposite and the state in which the members A and B are arranged facing each other become the other. It has a rotating body to switch .

In the component delivery device according to the second invention according to the above object, at least one of the members A and B arranged to face each other is moved in parallel with the virtual straight line L to bring the members A and B close to each other, and the members are brought close to each other. In a component delivery device that passes an electronic component between A and B to the member B, the member A or the member B is arranged in a direction parallel to the virtual straight line L with the members A and B arranged in a non-opposing manner. An imaging means for obtaining a first image obtained by capturing images from opposite positions and a second image obtained by capturing both of the members A and B arranged to face each other in a direction orthogonal to the virtual straight line L, and the first image. , Which is provided on the optical path from each object to be imaged in the second image to the imaging means, and causes the imaging means to capture the first and second images by one or both of light reflection and refraction. Rotating together with the optical path adjusting means and one of the members A and B, the members A and B are switched from one of the non-opposed states and the members A and B to the other. It is equipped with a rotating body .

In the parts delivery device according to the first and second inventions, the first member A or member B is imaged from the opposite position in a direction parallel to the virtual straight line L in a state where the members A and B are arranged non-opposing. Since the image and the second image obtained by capturing both the images and the members A and B arranged opposite to each other in the direction orthogonal to the virtual straight line L are obtained, the position of the member A or the member B is detected from the first image. The position of the member A or the member B can be adjusted, the distance between the members A and B can be detected from the second image, and the distance between the members A and B can be adjusted, and the electronic parts can be approached when the electronic parts are delivered. It is possible to accurately arrange the members A and B to be made to be in a predetermined position.

It is explanatory drawing of the parts delivery apparatus which concerns on 1st Embodiment of this invention. It is explanatory drawing of the 1st image in the component delivery apparatus. It is explanatory drawing of the 2nd image in the component delivery apparatus. It is explanatory drawing of the parts delivery apparatus which concerns on 2nd Embodiment of this invention. It is explanatory drawing of the parts delivery apparatus which concerns on 3rd Embodiment of this invention. It is explanatory drawing of the parts delivery apparatus which concerns on 4th Embodiment of this invention.

Subsequently, an embodiment embodying the present invention will be described with reference to the attached drawings, and the present invention will be understood.
As shown in FIG. 1, the component delivery device 10 according to the first embodiment of the present invention has at least one of a member A1 (an example of a member A) and a member B1 (an example of a member B) arranged to face each other. Is a device that moves the members A1 and B1 in parallel with the virtual straight line L1 (an example of the virtual straight line L) to bring the members A1 and B1 close to each other, and passes the electronic component W between the members A1 and B1 to the member B1. The details will be described below.

As shown in FIG. 1, the component delivery device 10 includes a horizontally arranged disk-shaped rotating body 11, a plurality of movable rods 12 movably attached to the rotating body 11, and a motor 13 for rotating the rotating body 11. It has. The movable rods 12 are arranged at equal intervals on the outer peripheral portion of the rotating body 11, and each vertically penetrates the rotating body 11. A coil spring 14 is attached to a portion of each movable rod 12 projecting upward from the rotating body 11, and one end of an arm 15 is fixed to a portion projecting downward from the rotating body 11. The arm 15 is long in the radial direction of the rotating body 11, and the other end thereof is arranged at a position away from the rotating body 11.

The member A1 is a suction nozzle that is long in the vertical direction and penetrates the other end of the arm 15. The member A1 attracts the electronic component W by vacuum pressure at the center of the lower end portion, and releases the attracted electronic component W by vacuum breaking or opening to the atmosphere. The motor 13 operates intermittently, and the movable rod 12, the arm 15, and the member A1 are repeatedly moved (rotationally moved with reference to the center of the rotating body 11) and paused by the intermittent operation of the motor 13. By operating the motor 13 once, each movable rod 12 moves by the arrangement pitch of the movable rod 12.

At some of the positions where the movable rod 12 is temporarily stopped, pressing means 16 for pushing down the movable rod 12 to lower the movable rod 12, the arm 15, and the member A1 is provided directly above. The distance at which the pressing means 16 lowers the movable rod 12, the arm 15, and the member A1 can be adjusted. The movable rod 12, the arm 15, and the member A1 are pushed up by the restoring force of the coil spring 14 acting on the movable rod 12 in a state where the movable rod 12 is not applied a downward force by the pushing means 16. Hereinafter, the height position where the member A1 is not lowered is referred to as an "elevation position", and the height position where the member A1 is lowered is referred to as a "descending position".

With the pressing means 16 arranged directly above the movable rod 12, a calibration unit 17 for adjusting the position of the electronic component W is installed directly below the member A1 corresponding to the movable rod 12. The calibration unit 17 includes a member B1 (in this embodiment, a suction collet) that sucks the electronic component W at the center of the upper end portion by vacuum pressure and releases the sucked electronic component W by vacuum breaking or opening to the atmosphere. It is provided with a position adjusting mechanism 18 capable of horizontally moving B1 and turning around a virtual vertical axis of member B1.

The electronic component W adsorbed on the member A1 arranged in the ascending position above the member B1 is arranged at a position having a distance to the member B1 between the members A1 and B1. Hereinafter, unless otherwise specified, the member A1 is assumed to be arranged above the calibration unit 17. In the present embodiment, the virtual straight line L1 is arranged vertically, and the electronic component W approaches the member B1 as the member A1 moves (descends) in parallel with the virtual straight line L1 from the ascending position, and the member A1 moves. It is arranged in the descending position and comes into contact with the member B1.

The member A1 may move (descend) at a constant speed when approaching the member B1, or may decelerate from a preset position as it approaches the member B1. Further, when the member A1 moves and the electronic component W comes into contact with the member B1, the load generated in the pressing means 16 is measured and measured based on the current value flowing through the motor of the pressing means 16 and the like. Load control can be performed so that the load does not exceed the set value.

After the member B1 attracts the electronic component W, the member A1 releases the electronic component W, passes the electronic component W to the member B1, and ascends.
Next, the position of the electronic component W obtained by the member B1 from the member A1 is calibrated and returned to the member A1. Specifically, the position adjusting mechanism 18 appropriately moves or turns the member B1 based on the relative position of the electronic component W with respect to the member A1 detected when the electronic component W is attracted to the member A1. The position is adjusted so that the electronic component W is arranged at a predetermined position with respect to the member A1. The member B1 lowers the electronic component W whose position adjustment has been completed and returns it to the member A1 arranged in the descending position, and the member A1 adsorbing the electronic component W rises to the ascending position. When the electronic component W is adsorbed and ascended, the member A1 may ascend at a constant speed, or may accelerate or decelerate according to a preset speed control pattern.

Here, in order to stably transfer the electronic component W between the members A1 and B1, the center of the lower end portion of the member A1 at the raised position (the portion that attracts the electronic component W) and the center of the upper end portion of the member B1 (electronics). The portion that attracts the component W) is arranged parallel to the virtual straight line L1, and the member A1 is arranged at the descending position, and the distance from the center of the lower end of the member A1 to the center of the upper end of the member B1 is an electronic component. It is important that it is the thickness of W.

Therefore, the component delivery device 10 includes the imaging means 19 and the optical path adjusting means 20 described below, and adjusts the positions of the members A1 and B1 as a preparatory step before the electronic component W is delivered between the members A1 and B1. It is designed to be able to do.
The imaging means 19 is installed so that the imaging direction is vertical (direction parallel to the virtual straight line L1). In a plan view, the movable rod 12, the member A1 (the same applies to the member B1), and the imaging means 19 are arranged linearly. The optical path adjusting means 20 has the same height as the beam splitter 21 arranged directly under the imaging means 19, the mirror 22 arranged at a height position between the members A1 and B1 directly under the beam splitter 21, and the beam splitter 21. The mirror 23 is provided directly above the members A1 and B1. Here, instead of the beam splitter 21, an optical component having a coating surface that reflects or transmits light according to the angle of incident light, such as a half mirror, may be used.

The mirror 22 advances horizontally toward the mirror 22 from a position where the members A1 and B1 are arranged to face each other (hereinafter, also referred to as “opposite positions of the members A1 and B1”), and the light incident on the mirror 22 is transferred to the beam splitter 21. It reflects directly above. The beam splitter 21 travels directly upward from the mirror 22 to transmit the light incident on the beam splitter 21 and directs the light to the imaging means 19.

The mirror 23 advances directly upward toward the mirror 23 from the opposite positions of the members A1 and B1 and horizontally reflects the light incident on the mirror 23 toward the beam splitter 21. The beam splitter 21 travels horizontally from the mirror 23 and reflects substantially half of the light incident on the beam splitter 21 directly upward to direct it to the imaging means 19.

The position adjustment of the members A1 and B1 in the preparatory step is performed as follows.
In a state where the member A1 is not arranged directly above the member B1 (a state in which the members A1 and B1 are arranged in a non-opposing manner), the imaging means 19 is in a direction parallel to the virtual straight line L1 as shown in FIG. A first image P obtained by imaging the member B1 from directly above (the position facing the member B1) is obtained. The first image P has a region P2 in which the member B1 is horizontally imaged in addition to the region P1 in which the member B1 is imaged from directly above. To prevent the member A1 from being arranged directly above the member B1, for example, the angle at which the rotating body 11 hits half of the arrangement pitch of the movable rod 12 from the state where the movable rod 12 is arranged directly under the pressing means 16. You only have to rotate it.

Then, from the region P1 of the first image P, the relative position of the center of the upper end portion of the member B1 with respect to the predetermined position R (in the present embodiment, the center of the region P1) in the first image P is detected. This detection may be performed by a person viewing the first image P on a screen, or may be performed by an information processing terminal (not shown) connected to the imaging means 19. In the present embodiment, the position is placed on the optical member (for example, a lens) of the imaging means 19 so that a person can easily confirm the relative position of the center of the upper end portion of the member B1 with respect to the position R by looking at the first image P. A glass plate (not shown) with straight lines J and K orthogonal to each other at R is attached.

The glass plate is formed with respect to the lens of the imaging means 19 so that the straight line J passes through the position R in the region P1 and follows the x-axis direction, and the straight line K passes through the position R and follows the regions P1 and P2 along the y-axis direction. Is positioned. Instead of using the glass plate, software attaches two straight lines similar to the straight lines J and K to the first image P (the same applies to the second image Q described later) obtained by the imaging means 19. May be good.
In the region P1 of the first image P, the positions of the imaging means 19 and the member B1 are adjusted so that the center of the upper end portion of the member B1 is arranged at the position R. As a result, in the first image P captured after the position adjustment, the center of the upper end portion of the member B1 is arranged on the position R in the region P1, and the center of the upper end portion of the member B1 is arranged on the straight line K in the region P2. It will be.

Next, with the members A1 and B1 facing each other, the image pickup means 19 horizontally arranges both the members A1 and B1 facing each other (direction orthogonal to the virtual straight line L1) as shown in FIG. The captured second image Q is obtained. In the present embodiment, when the second image Q is imaged, the member A1 does not adsorb the electronic component W and is arranged in the ascending position, but the member A1 adsorbs the electronic component W. It may be arranged at a descending position or a position where it comes into contact with the member B1.
The second image Q has a region Q1 in which the members A1 and B1 are imaged from directly above in addition to the region Q2 in which the members A1 and B1 are imaged horizontally. The regions Q1 and Q2 correspond to the regions P1 and P2, respectively, and the straight lines J and K are captured in the second image Q as in the first image P.

Therefore, the optical path adjusting means 20 is the light from the members B1 which are the objects to be imaged in the region P1 of the first image P and the members A1 and B1 which are the objects to be imaged in the region Q2 of the second image Q to the imaging means 19. It is provided on the road and causes the image pickup means 19 to capture the first image P and the second image Q by reflecting light. It should be noted that an optical path adjusting means for causing the imaging means 19 to capture the first image P and the second image Q by refraction of light alone or by reflection and refraction of light may be adopted.

The distance between the lower end of the member A1 and the upper end of the member B1 is detected based on the region Q2 of the second image Q. When the members A1 and B1 are in contact with each other, the distance between the members A1 and B1 is detected as zero.
Here, by adjusting the positions of the imaging means 19 and the member B1 performed using the first image P, the center of the upper end portion of the member B1 is arranged on the straight line K in the region Q2 of the second image Q. ..

That is, in the image pickup means 19, the portion of the object to be imaged (here, the center of the upper end portion of the member B1) located at the center in the x-axis direction of the region P1 of the first image P in the first image P is (second). A second image Q located at the center of the region Q2 (of the image Q) in the x-axis direction is obtained. Therefore, based on the region Q2 of the second image Q, the center of the lower end portion of the member A1 is arranged directly above the center of the upper end portion of the member B1 (parallel to the center of the upper end portion of the member B1 and parallel to the virtual straight line L1). Therefore, it can be detected that the center of the lower end portion of the member A1 is arranged on the straight line K.

Further, the upper end portion of the member A1 is imaged in the region Q1 of the second image Q. Therefore, in the present embodiment, it is assumed that the center of the upper end portion of the member A1 and the center of the lower end portion of the member A1 are arranged parallel to the virtual straight line L1, and the upper end of the member A1 is arranged in the region Q1 of the second image Q. Since the center of the portion coincides with the position R (the position orthogonal to the straight lines K and J), it is detected that the center of the lower end of the member A1 is directly above the center of the upper end of the member B1. There is.
Each detection using the second image Q may also be performed by a person looking at the second image Q on the screen, or by the information processing terminal using software.

In the second image Q, the distance from the center of the lower end of the member A1 to the center of the upper end of the member B1 is a predetermined value, and the center of the lower end of the member A1 is arranged directly above the center of the upper end of the member B1. As described above, the position of the member A1 is adjusted. When the member A1 is arranged in the ascending position to obtain the second image Q, the descending position can be determined with reference to the ascending position of the member A1, and the member A1 is arranged in the descending position to obtain the second image Q. In this case, the ascending position can be determined with reference to the descending position of the member A1, and when the members A1 and B1 are brought into contact with each other and the second image Q is imaged, the position where the member A1 contacts the member B1 is used as a reference. The ascending position and the descending position of the member A1 can be determined.
Each detection using the second image Q and the position adjustment of the member A1 based on the detection result are performed for all the members A1.

In the present embodiment, the imaging means 19 is a single focus type. The position adjusting mechanism 18 is first because the imaging means 19 is designed to image the imaged object of the first image P and the imaged object of the second image Q in a focused state. Each detection based on the image P and the second image Q of the above can be stably performed.
An imaging means having a variable focal length may be adopted. In that case, if the focal length of the imaging means is changed at the timing of capturing the first image and the timing of capturing the second image, the first image is taken. Since the imaged object of the image and the imaged object of the second image can be imaged in a focused state, the optical path length for obtaining the first image and the optical path length for obtaining the second image by the position adjustment mechanism. No adjustment is required to match.

The component delivery device 10 obtains the first image P and the second image Q with one image pickup means 19, but the image pickup means for obtaining the second image separately from the image pickup means for obtaining the first image. May be provided. In this case, it is not necessary to provide the optical path adjusting means, and the component delivery device moves at least one of the members A and B arranged opposite to each other in parallel with the virtual straight line L to bring the members A and B closer to each other. A device that passes an electronic component between A and B to a member B, and images the member A or the member B from a facing position in a direction parallel to a virtual straight line L in a state where the members A and B are arranged non-opposing. The present invention includes a first imaging means for obtaining the first image, and a second imaging means for obtaining a second image in which both of the members A and B arranged opposite to each other are imaged in a direction orthogonal to the virtual straight line L. It will be.

In addition, in order to prevent objects other than members B from being reflected in the first image and objects other than members A and B from being reflected in the second image, illumination that irradiates light having a wavelength in a specific range. And an optical filter may be provided.
Hereinafter, with reference to FIG. 4, the parts delivery device 30 according to the second embodiment of the present invention in which the illuminations 31, 32 and the optical filters 33, 34 are added to the parts delivery device 10 will be described. In the parts delivery device 30, the same components as those of the parts delivery device 10 are designated by the same reference numerals, and detailed description thereof will be omitted.

As shown in FIG. 4, the component delivery device 30 includes an illumination 31 that irradiates blue light from between the mirror 23 and the facing positions of the members A1 and B1 toward the facing positions of the members A1 and B1, and the member A1. An illumination 32 that irradiates red light from the opposite side of the mirror 22 toward the facing positions of the members A1 and B1 with reference to the facing position of B1 is provided. The illuminations 31 and 32 are both ring-shaped coaxial illuminations, and the imaging means 19 obtains an image obtained by imaging the members A1 and B1 from directly above through the inner circumference of the illumination 31.

An optical filter 33 is provided on the optical path (between the mirror 23 and the beam splitter 21 in this embodiment) from the opposite positions of the members A1 and B1 to the imaging means 19 via the mirror 23 and the beam splitter 21. There is. An optical filter 34 is provided on the optical path (between the mirror 22 and the beam splitter 21 in the present embodiment) from the opposite positions of the members A1 and B1 to the imaging means 19 via the mirror 22 and the beam splitter 21. There is.

The optical filter 33 corresponds to the illumination 31 and transmits only blue light, and the optical filter 34 corresponds to the illumination 32 and transmits only red light.
The imaging means 19 captures the first image in a state where the member A1 is not arranged directly above the member B1 and the illumination 31 irradiates blue light and the illumination 32 does not irradiate red light. .. As a result, the member B1 irradiated with blue light is emphasized and captured in the first image more than the others.

Then, the imaging means 19 has 1) a state in which the members A1 and B1 are arranged to face each other, and a state in which the illumination 31 irradiates blue light and the illumination 32 does not irradiate red light, and 2) the members A1 and B1. A second image is obtained in a state where the lights 31 are arranged to face each other and the light 31 is not irradiating blue light and the light 32 is shining red light. The members A1 and B1 are emphasized and captured in the region where the members A1 and B1 of the second image obtained in the state of 1) above are imaged from directly above (parallel to the virtual straight line L1). The members A1 and B1 are emphasized and captured in the region where the members A1 and B1 of the second image obtained in the state of 2) above are horizontally imaged.
The combination of blue light and red light is an example, and it goes without saying that other combinations may be used.

The component delivery devices 10 and 30 described so far are devices in which the member A passes the electronic component W to the member B, and the member B calibrates the position of the electronic component W acquired from the member A and returns the electronic component W to the member A. , Not limited to this.
Hereinafter, the parts delivery devices 40 and 60 in which the roles of the members A and B are different from those of the parts delivery devices 10 and 30 will be described with reference to FIGS. 5 and 6.

As shown in FIG. 5, the component delivery device 40 according to the third embodiment of the present invention includes a rotary unit 41 having a plurality of members A2 (an example of a member A) and a plurality of members B2 (an example of a member B). ) Is provided. Each member A2, which is a long suction nozzle, is arranged radially with reference to the rotation center of the rotation unit 41, and can move forward and backward in the longitudinal direction of the member A2. The rotation unit 41 repeatedly rotates and pauses, and each member A2 moves intermittently.

Each member B2, which is a long suction nozzle, is arranged radially with reference to the rotation center of the rotation unit 42, and can move forward and backward in the longitudinal direction of the member B2. The rotation unit 42 repeatedly rotates and pauses, and each member B2 moves intermittently.
The rotating units 41 and 42 are temporarily stopped at the same timing, and when the rotating units 41 and 42 are temporarily stopped, one member A2 and one member B2 are arranged so as to face each other with a distance. The members A2 and B2 arranged to face each other move in parallel with the virtual straight line L2 (an example of the virtual straight line L) in which at least one of the members A2 and B2 is horizontally arranged to bring the members A2 and B2 closer to each other, and the members A2 An electronic component (not shown) adsorbed on the member B2 is passed to the member B2. When the members A2 and B2 approach each other, the deceleration operation may be performed according to a preset pattern. Further, when the electronic component adsorbed on the member A2 comes into contact with the member B2, the load may be controlled so that a load exceeding the set value is not applied to the electronic component.

In order to stably deliver the electronic component from the member A2 to the member B2, the component delivery device 40 sets the member B2 in a direction parallel to the virtual straight line L2 in a state where the members A2 and B2 are arranged non-opposing to each other. The first image taken from the opposite position of B2 (the position where the member A2 temporarily stops) and the second image of both the members A2 and B2 arranged facing each other in the direction orthogonal to the virtual straight line L2 (vertical). The imaging means 43 for obtaining the image of the above, and on the optical path from the member B2 which is the object to be imaged in the first image to the imaging means 43, and from the members A2 and B2 which are the objects to be imaged in the second image to the imaging means 43. It is provided on the optical path and includes an optical path adjusting means 44 that causes the imaging means 43 to capture the first and second images by one or both of light reflection and refraction.

The optical path adjusting means 44 includes mirrors 45 and 46 and a beam splitter 47. In the mirrors 45, 46 and the beam splitter 47, the imaging means 43 obtains a first image in which the member B2 is imaged from the opposite positions via the beam splitter 47 and the mirror 46, and the beam splitter 47 and the mirror 45 are used. The members A2 and B2 are arranged so as to be able to obtain a second image captured in a direction orthogonal to the virtual straight line L2.
By changing the arrangement of the image pickup means 43, the mirrors 45, 46, and the beam splitter 47 with respect to the component delivery device 40, it is possible to obtain a first image in which the member A2 is imaged from the opposite position instead of the member B2. Can be done.

Further, as shown in FIG. 6, the parts delivery device 60 according to the fourth embodiment of the present invention includes a member A3 (an example of a member A) which is a pepper pot and a plurality of members B3 (an example of a member B). It is provided with a rotating unit 61 having the above. The member A3 includes a columnar housing 63 in which the push-up needle 62 is housed. The push-up needle 62 horizontally arranged together with the accommodating body 63 can advance and retreat in parallel (horizontally) with the horizontally arranged virtual straight line L3, and moves forward so that one end is formed at one end of the accommodating body 63. It protrudes from the hole and recedes so that the entire body fits in the housing 63. The member A3 is arranged on the back surface side of the wafer sheet S attached to the ring holder 64 and having a large number of electronic components attached to the front surface.

Each member B3, which is a long suction nozzle, is arranged radially with reference to the rotation center of the rotation unit 61, and can move forward and backward in the longitudinal direction of the member B3. Each member B3 moves intermittently in the rotating unit 61 by repeating rotation and pausing.
When the rotating unit 61 is temporarily stopped, one member B3 is a distance from the electronic component (wafer sheet S) attached to the front surface of the area of the wafer sheet S in which one end of the housing 63 is close to the back surface side. Are placed facing each other.

In this state, the push-up needle 62 advances in parallel with the virtual straight line L3, pushes the back surface of the wafer sheet S toward the front surface side, brings the electronic component closer to the member B3 together with the push-up needle 62 (member A3), and the member B3 moves. Adsorb electronic components. As a result, the electronic component is passed from the wafer sheet S to the member B3. When the push-up needle 62 moves forward, the push-up needle 62 decelerates as the electronic component approaches the member B3 according to a preset control pattern, or stops in the middle and moves forward again in two stages. You can perform operations.

In order to stably pass the electronic component from the wafer sheet S to the member B3, the member A3 must be arranged at a predetermined position, and the members A3 and B3 arranged to face each other with the electronic component in between have a predetermined distance. is important. Therefore, the component delivery device 60 is arranged in a first image in which the member A3 is imaged from a position facing the member A3 in a direction (horizontal) parallel to the virtual straight line L3 in a state where the member B3 is not opposed to the member A3. An imaging means 65 for obtaining a second image obtained by capturing both of the members A3 and B3 in a direction (vertical) orthogonal to the virtual straight line L3, and a member A3 to the imaging means 65 which is an imaged object of the first image. It is provided on the optical path and on the optical path from the members A3 and B3 which are the objects to be imaged of the second image to the imaging means 65, and the first and first images are provided to the imaging means 65 by either one or both of light reflection and refraction. It is provided with an optical path adjusting means 66 for capturing the image of 2. In the present embodiment, the first and second images are imaged with the wafer ring 64 removed from the component delivery device 60.

The optical path adjusting means 66 includes mirrors 67 and 68 and a beam splitter 69. The mirrors 67, 68 and the beam splitter 69 allow the imaging means 65 to obtain a first image in which the member A3 is imaged from opposite positions via the beam splitter 69 and the mirror 68, and the imaging means 65 passes through the beam splitter 69 and the mirror 67. The members A3 and B3 are arranged so as to obtain a second image captured in a direction orthogonal to the virtual straight line L3.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and all changes in conditions that do not deviate from the gist are within the scope of the present invention.
For example, the straight lines J and K need not be present in the first and second images.
Further, even if the portion of the object to be imaged located at the center of the first image in the x-axis direction in the first image is captured at a position other than the center in the x-axis direction of the second image in the second image. Good.

10: Parts delivery device, 11: Rotating body, 12: Movable rod, 13: Motor, 14: Coil spring, 15: Arm, 16: Pushing means, 17: Calibration unit, 18: Position adjustment mechanism, 19: Imaging means, 20: Optical path adjusting means, 21: Beam splitter, 22, 23: Mirror, 30: Parts delivery device, 31, 32: Lighting, 33, 34: Optical filter, 40: Parts delivery device, 41, 42: Rotating unit, 43 : Imaging means, 44: Optical path adjusting means, 45, 46: Mirror, 47: Beam splitter, 60: Parts delivery device, 61: Rotating unit, 62: Push-up needle, 63: Accommodator, 64: Ring holder, 65: Imaging means, 66: Optical path adjusting means, 67, 68: Mirror, 69: Beam splitter, A1 to A3: Member A, B1 to B3: Member B, L1 to L3: Virtual straight line L, P: First image, Q : Second image, S: Wafer sheet, W: Electronic component

Claims (5)

A component that moves at least one of the members A and B arranged to face each other in parallel with the virtual straight line L to bring the members A and B closer to each other and passes an electronic component between the members A and B to the member B. In the delivery device
A first imaging means for obtaining a first image obtained by imaging the member A or the member B from a facing position in a direction parallel to the virtual straight line L in a state where the members A and B are arranged non-opposing.
A second imaging means for obtaining a second image captured the member A, which is opposed, both B in a direction perpendicular to the virtual straight line L,
A rotating body that rotates together with any one of the members A and B to switch from one of the members A and B in a non-opposed state and a state in which the members A and B are arranged to face each other. A parts delivery device characterized by this. A component that moves at least one of the members A and B arranged to face each other in parallel with the virtual straight line L to bring the members A and B closer to each other and passes an electronic component between the members A and B to the member B. In the delivery device
A first image obtained by capturing the member A or the member B from a facing position in a direction parallel to the virtual straight line L in a state where the members A and B are arranged non-opposing, and the above-mentioned arranged facing each other. An imaging means for obtaining a second image in which both members A and B are imaged in a direction orthogonal to the virtual straight line L.
The first and second images are provided on the optical path from each object to be imaged of the first and second images to the image pickup means, and the first and second images are provided to the image pickup means by one or both of light reflection and refraction. an optical path adjusting means for creating caught,
A rotating body that rotates together with any one of the members A and B to switch from one of the members A and B in a non-opposed state and a state in which the members A and B are arranged to face each other. A parts delivery device characterized by this. In the component delivery device according to claim 2, in the image pickup means, the portion of the object to be imaged located at the center of the first image in the x-axis direction of the first image is in the x-axis direction of the second image. A parts delivery device characterized by obtaining the second image located at the center. In the component delivery device according to claim 2 or 3, the image pickup means takes an image of the member A or the member B imaged in the first image in a focused state, and images the member A or the member B in the second image. A component delivery device, characterized in that the member A and the member B are imaged in a focused state. In the component delivery device according to any one of claims 2 to 4, the illumination D that irradiates the light of the color C toward the opposite positions of the members A and B, and the color provided on the optical path. An optical filter E that transmits only the light of C, an illumination K that irradiates light of color J having a wavelength different from that of the light of color C toward the opposite positions of the members A and B, and an illumination K provided on the optical path. Further, an optical filter L that transmits only the light of the color J is provided.
The imaging means is a state in which the members A and B are arranged non-opposite, and the illumination D irradiates the light of the color C and the illumination K does not irradiate the light of the color J. , The members A and B are arranged to face each other, and the illumination D is not irradiating the light of the color C, and the illumination K is irradiating the light of the color J. A parts delivery device characterized by

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