JP2015023176A - Part mount device and part mount method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide part mount device and method that investigate parts held by plural nozzles of a transfer head with a small number of members.SOLUTION: A transfer head 12 of a part mount device 10 has a rotary unit 22A for revolving plural nozzles 20A for sucking and holding parts P from the upper side, a rotary unit 22B for revolving plural nozzles 20B for sucking and holding parts P from the upper side, and one camera 30 for successively imaging sideward-view and downward-view images of parts P held by the nozzles 20A located at imaging positions Qa2, Qa4 on a revolution track Ra of the nozzles 20A and sideward-view and downward-view images of parts P held by the nozzles 20B located at imaging positions Qb2, Qb4. The camera 30 takes the sideward-view and downward-view images of the parts P held by the nozzles 20A and 20B one by one, or simultaneously takes at least some of the sideward-view and downward-view images.

Description

  The present invention relates to a component mounting apparatus and a component mounting method for mounting a component on a substrate.

  Conventionally, a component mounting apparatus having a transfer head provided with a plurality of nozzles that suck and hold a plurality of components is known. By moving the transfer head with the plurality of nozzles holding the plurality of components, the plurality of components are transported and mounted on the substrate. In addition, there is a possibility that the component mounting device may have a defective part in the part that is sucked and held by the nozzle, and that the nozzle may suck the part in a posture inclined from a normal posture. In consideration, the component itself held by the nozzle and the suction posture of the component are inspected.

  For example, in the case of the component mounting apparatus described in Patent Document 1, the transfer head includes a plurality of nozzles arranged in a line for attracting components from above. The transfer head also includes a first camera that captures a downward-view image of the component, and a second camera that captures a lateral-view image of the component. The first and second cameras are incorporated in the scan unit, and the scan unit is supported by the transfer head so as to be movable in the nozzle row direction. While the transfer head is moving, the scanning unit is moved relative to the transfer head, so that the two-view images and the side-view images of the parts held by the plurality of nozzles of the transfer head can be Take pictures with the camera. Then, based on the photographed image of the first camera that captures the image of the component viewed from the bottom and the captured image of the second camera that captures the image of the component viewed from the side, the component itself held by the nozzle is inspected. Check the suction posture.

JP 2008-294072 A

  However, in the case of the component mounting apparatus described in Patent Document 1, two cameras are used to capture a downward view image and a side view image of the component held by the nozzle. Further, for each of the two cameras mounted on the transfer head, a signal cable and a power supply cable for exchanging signals with the component inspection apparatus provided in the main body of the component mounting apparatus are required. As a result, the apparatus becomes complicated and a lot of equipment is required for inspection of parts.

  Therefore, an object of the present invention is to inspect the parts held by each of the plurality of nozzles of the transfer head from below and from the side with a small amount of equipment.

In order to solve the above-mentioned problem, according to the first aspect of the present invention,
It has a transfer head that can move horizontally,
The transfer head
A first rotary unit that supports and circulates a plurality of first nozzles for adsorbing and holding components from above;
A second rotary unit that supports and circulates a plurality of second nozzles for adsorbing and holding components from above;
The downward view image and the side view image of the component held by the first nozzle located at a predetermined photographing position on the first circulation path of the first nozzle, and the second turn of the second nozzle A camera that sequentially captures a downward-viewed image and a side-viewed image of a component held by the second nozzle located at a predetermined shooting position on the orbit, and
One camera performs a photographing operation of photographing one side view image and one side view image of a part held by each of the first and second nozzles one by one or simultaneously photographing at least a part thereof. A component mounting apparatus is provided.

According to a second aspect of the invention,
There is a first lateral shooting position and a first lower shooting position on the first orbit,
There is a second lateral shooting position and a second lower shooting position on the second orbit,
The camera captures a side-view image of a component held by the nozzles located at the first and second lateral photographing positions, and the lower part held by the nozzles located at the first and second lower photographing positions. The component mounting apparatus according to the first aspect for capturing a visual image is provided.

According to a third aspect of the invention,
The camera
A first simultaneous photographing operation for simultaneously photographing a side view image of the component held by the first nozzle and a bottom view image of the component held by the second nozzle in different photographing regions;
At least a second simultaneous photographing operation for simultaneously photographing a downward view image of the component held by the first nozzle and a side view image of the component held by the second nozzle in different photographing regions. A component mounting apparatus according to the first or second aspect is provided that executes one.

According to a fourth aspect of the invention,
The component mounting apparatus according to the third aspect is provided in which the camera repeatedly executes the first simultaneous photographing operation and the second simultaneous photographing operation in order.

According to a fifth aspect of the present invention,
The transfer head
A first optical system that guides a downward-view image of the component held by the first nozzle to an imaging region of the camera;
A second optical system for guiding a side-view image of the component held by the first nozzle to an imaging region of the camera;
A third optical system for guiding a downward-viewed image of the component held by the second nozzle to the imaging region of the camera;
A fourth optical system for guiding a side view image of the component held by the second nozzle to the imaging region of the camera,
The component mounting apparatus according to any one of the first to fourth aspects is provided, wherein the first, second, third, and fourth optical systems include a half mirror as a common optical element. The

According to a sixth aspect of the present invention,
The transfer head
A first light source that emits light when the camera captures an image of a downward view of the component held by the first nozzle;
A second light source that emits light when the camera captures an image of the side view of the component held by the first nozzle;
A third light source that emits light to the component held by the second nozzle when the camera takes an image of the lower view;
Any one of the first to fifth aspects, comprising: a fourth light source that emits light to the component held by the second nozzle when the camera takes an image of the side view. The component mounting apparatus described in 1 is provided.

According to a seventh aspect of the present invention,
The first and second rotary units are configured to support the first and second nozzles movably in the vertical direction;
The first and second rotary units rotate the first and second nozzles while changing the height position,
The component mounting apparatus according to the second aspect, in which at least the first and second lower photographing positions are set to the highest positions in the orbits of the first and second nozzles, is provided.

According to an eighth aspect of the present invention,
It has a transfer head that can move horizontally,
The transfer head
A plurality of rotary units that respectively support and circulate a plurality of nozzles for adsorbing and holding components from above; and
A single camera that sequentially captures a downward-viewed image and a side-viewed image of a component held by a nozzle located at each of the predetermined shooting positions on the circular orbit of the nozzle of each rotary unit;
One camera is a component that performs a photographing operation of photographing one side view image and one side view image of a component held by each nozzle of each rotary unit one by one or at least a part of the image at the same time. A mounting device is provided.

According to a ninth aspect of the present invention,
A lateral shooting position and a lower shooting position exist at different positions on the orbit of the nozzle of the rotary unit,
The camera shoots a side view image of a component held by a nozzle located at a side shooting position, and a bottom view image held by a nozzle located at a lower shooting position,
On the circular orbit of one rotary unit, a side view image of a component held by a nozzle located at a side shooting position and a bottom view image of a component held by a nozzle located at a lower shooting position, The component mounting apparatus according to the eighth aspect is provided, in which images are taken sequentially or simultaneously by a single camera.

According to a tenth aspect of the present invention,
A component mounting method for performing component mounting using a transfer head including a first rotary unit that supports a plurality of first nozzles and a second rotary unit that supports a plurality of second nozzles. ,
A plurality of first nozzles orbiting along a first orbit by a first rotary unit;
A plurality of second nozzles orbiting along a second orbit by the second rotary unit;
A downward view image and a side view image of a component held by the first nozzle located at a predetermined shooting position on the first orbit, and a predetermined shooting position on the second orbit. Taking a downward view image and a side view image of the parts held by the second nozzle sequentially with one camera,
One camera has a component mounting method in which a lateral view image and a downward view image of a component held by each of the first and second nozzles are photographed one by one or at least a part is photographed simultaneously. Provided.

According to an eleventh aspect of the present invention,
A first lateral shooting position and a first lower shooting position on the first orbit,
A second lateral shooting position and a second lower shooting position exist on the second orbit,
The camera captures a side view image of the component held by the nozzles located at the first and second lateral photographing positions, and the lower part held by the nozzles located at the first and second lower photographing positions. The component mounting method according to the tenth aspect is provided for capturing a visual image.

According to a twelfth aspect of the present invention,
A component mounting method for performing component mounting using a transfer head including a plurality of rotary units each supporting a plurality of nozzles,
Each rotary unit circulates the corresponding nozzles,
The images of the parts viewed from the bottom and side of the parts held by the nozzles located at the predetermined photographing positions on the circular orbits of the nozzles of the rotary units are sequentially photographed by one camera,
There is provided a component mounting method in which one camera captures a side-view image and a bottom-view image of a component held by each nozzle of each rotary unit one by one or at least a part of the image simultaneously. The

According to a thirteenth aspect of the present invention,
There are a lateral shooting position and a lower shooting position at different positions on the circular orbit of the nozzle of each rotary unit,
The camera shoots a side view image of a component held by a nozzle located at a side shooting position, and a bottom view image held by a nozzle located at a lower shooting position,
On the circular orbit of one rotary unit, a side view image of a component held by a nozzle located at a side shooting position and a bottom view image of a component held by a nozzle located at a lower shooting position, The component mounting method according to the twelfth aspect is provided, in which images are taken sequentially or simultaneously by a single camera.

  According to the present invention, it is possible to take a downward view image and a side view image of a component held by suction on each of the plurality of nozzles of the transfer head with a single camera. Accordingly, the parts can be inspected from below and from the side with a small amount of equipment.

1 is a schematic configuration diagram of a component mounting apparatus according to an embodiment of the present invention. Schematic perspective view of a transfer head for explaining simultaneous photographing of a side view image of a component held by a nozzle of one rotary unit and a bottom view image of a component held by a nozzle of the other rotary unit Schematic upper view of the transfer head corresponding to FIG. The figure which shows the height position of the nozzle which depends on the position on the orbit Schematic perspective view of a transfer head for explaining simultaneous photographing of a downward view image of a component held by a nozzle of one rotary unit and a side view image of a component held by a nozzle of the other rotary unit Schematic top view of the transfer head corresponding to FIG. Timing chart showing the timing of component simultaneous shooting of an example The figure which shows the imaging region of the camera in the part simultaneous imaging of an example Timing chart showing the timing of simultaneous shooting of other parts Schematic perspective view of a transfer head for explaining simultaneous photographing of a side view image of a component held by one nozzle in one rotary unit and a lower view image of a component held by another one nozzle Figure Schematic perspective view of a transfer head for explaining simultaneous photographing of a side view image of a component held by one nozzle and a lower view image of a component held by another nozzle in the other rotary unit Figure The figure which shows the imaging region of the camera in another example simultaneous imaging of parts Schematic perspective view of a transfer head according to another embodiment Schematic perspective view of a transfer head according to still another embodiment Furthermore, a schematic top view of a transfer head according to another embodiment

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 schematically shows a component mounting apparatus according to an embodiment.

  As shown in FIG. 1, the component mounting apparatus 10 includes a transfer head 12 for mounting the component P on the substrate W, an X-axis beam 14 that moves the transfer head 12 in the X-axis direction (reference direction), And a Y-axis beam 16 for moving the X-axis beam 14 in the Y-axis direction. The transfer head 12 can move in the horizontal direction by the X-axis beam 14 and the Y-axis beam 16.

  The transfer head 12 includes a plurality of nozzles 20A and 20B that suck and hold the component P from above. Each of the plurality of nozzles 20A and 20B is mounted on the transfer head 12 so as to be movable in the vertical direction (Z-axis direction). Each of the nozzles 12 descends, sucks and holds the component P supplied to a predetermined component supply position by a component supply unit (not shown) of the component mounting apparatus 10, and then rises while holding the component P. Return to the original height position (part suction operation). The nozzle 12 holding the component P is disposed above a predetermined component mounting position on the substrate W by the horizontal movement of the transfer head 12 and then lowered to mount the component at the component mounting position (component mounting operation). .

  FIG. 2 is a schematic perspective view showing a plurality of components mounted on the transfer head 12, particularly a plurality of components for photographing the part P. FIG. 3 is a schematic top view of the transfer head 12 showing a plurality of components for photographing the part P. FIG.

  As shown in FIG. 3, the transfer head 12 has a plurality of rotary units 22A and 22B. Specifically, the transfer head 12 includes a rotary unit 22A that supports and rotates the plurality of nozzles 20A, and a rotary unit 22B that supports and rotates the plurality of nozzles 20B.

  In the case of the present embodiment, the rotary units 22A and 22B are mounted on the transfer head 12 so as to face each other in the X-axis direction. Each of the rotary units 22A and 22B supports, for example, 12 nozzles 20A and 20B so as to be movable in the Z-axis direction.

  Further, a plurality of rotary units 22A and 22B are provided along the circular orbits Ra and Rb (corresponding to “first and second orbits” in the claims) in the Z direction and at equal intervals. The nozzles 20A and 20B are configured to circulate. Furthermore, the rotary units 22A and 22B are configured to circulate each of the plurality of nozzles 20A and 20B along the orbits Ra and Rb while changing their height positions (Z-axis direction positions).

  Specifically, as shown in FIG. 3, component suction / mounting positions Qa1 and Qb1 are set on the orbiting track Ra of the nozzle 22A and the orbiting track Rb of the nozzle 22B. In the case of the present embodiment, the position on the front surface 12a side of the transfer head 12 (the surface side in the Y-axis direction opposite to the X-axis beam 14) on the orbits Ra and Rb is the component pickup / mounting position Qa1, Qb1 is set. The nozzles 20A and 20B will be described in detail later, but when the nozzles 20A and 20B are arranged at the component suction / mounting positions Qa1 and Qb1 on the circulation tracks Ra and Rb, the components P are newly suctioned and held from the component supply unit. The component picking / removing operation or the component mounting operation for mounting the component P held by suction on the substrate W is performed.

  The rotary unit 22A has a plurality of rotation directions D (clockwise in FIG. 3) in which the nozzle 20A located at the component pickup / mounting position Qa1 rotates in the direction of approaching the nozzle 20B of the rotary unit 22B. Nozzle 20A is made to circulate along the orbit Ra. On the other hand, the rotary unit 22B causes the plurality of nozzles 20B to circulate along the circulation path Rb in a rotation direction D ′ (counterclockwise in FIG. 3) that is the reverse direction of the rotation direction D of the nozzle 20A of the rotary unit 22A. .

  FIG. 4 shows the rotation of the nozzle 22A that moves in the rotation direction D along the circular rotation path Ra by the rotary unit 22A, that is, moves in the rotation direction D about the rotation center line Ca that is the rotation center of the rotary unit 22A. The relationship between the angular position around the center line Ca and the height is shown. In the present specification, the component suction / mounting position Qa1 corresponds to the angular position 0 °.

  As shown in FIGS. 3 and 4, the rotary unit 22A causes the nozzle 20A to move from the component suction / mounting position Qa1 (angular position 0 °) toward the position Qa2 in the circumferential direction D, and at the height position H1. To a height position H2 ′. The position Qa2 is the position of the nozzle 20A after the nozzle 20A located at the component picking / mounting position Qa1 circulates in the circulation direction D at an angle of 90 ° around the rotation center line Ca. Further, the nozzle 20A moves from the position Qa2 toward the position Qa4 and rises from the height position H2 'to the height position H2. The position Qa4 is a position (angular position 120 °) of the nozzle 20A after the nozzle 20A located at the position Qa2 (angular position 90 °) further circulates in the rotating direction D around the rotating center line Ca.

  In addition, the rotary unit 22A causes the nozzle 20A to move on the circular orbit Ra from the position Qa4 (angle position 120 °) to Qa5 (angle position 240 °) while maintaining the height position H2. The position Qa5 is the position of the nozzle 20A after the nozzle A located at the position Qa4 circulates in the circulation direction D at an angle of 120 ° around the rotation center line Ca.

  Further, the rotary unit 22A causes the nozzle 20A to move from the height position H2 to the height position H1 while moving from the position Qa5 (angle position 240 °) toward the component suction / mounting position Qa1 (angle position 0 °). Descend.

  Similarly to the nozzle 20A of the rotary unit 22A, the height position of the nozzle 20B of the rotary unit 22B changes while moving in the rotation direction D ', except that the rotation direction is different.

  That is, the rotary unit 22B causes the nozzle 20B to move from the component pickup / mounting position Qb1 (angular position 0 °) to the position Qb2 (angular position 90 °) in the circumferential direction D ′ while moving the height position H1. To a height position H2 ′. Further, the nozzle 20B moves upward from the height position H2 'to the height position H2 while moving from the position Qb2 toward the position Qb4 (angular position 120 °). Further, the nozzle 20B moves from the position Qb4 (angular position 120 °) toward the position Qb5 (angular position 240 °) in the rotation direction D ′ while maintaining the height of the height position H2. The nozzle 20B moves from the position Qb5 (angle position 240 °) toward the component picking / mounting position Qb1 (angle position 0 °), and descends from the height position H2 to the height H1.

  The reason why the rotary units 22A and 22B change the height position while rotating the nozzles 20A and 20B will be described later.

  Further, as described above, the rotary units 22A and 22B cause the nozzles 20A and 20B to perform the component suction / extraction operation for newly sucking and holding the component P at the component suction / mounting / mounting positions Qa1 and Qb2, or the component holding and holding the suction. The component mounting operation for mounting P on the substrate W is performed.

  Specifically, as shown in FIG. 4, when the nozzles 20A and 20B are located at the component pickup / mounting positions Qa1 and Qb2, from the height position H1 as the preliminary lowering height position (that is, the circular orbit Ra, Rb), when a component supplied to a predetermined component supply position by a component supply unit (not shown) of the component mounting apparatus 10 is newly sucked and held or the component P held by suction is held on the substrate W. It descends toward the height position H1 ′ when mounting at a predetermined component mounting position. After reaching the height position H1 ′, the nozzles 20A and 20B newly suck and hold the component P supplied to the predetermined component supply position or mount the predetermined component P on the substrate W. Implement in position. After the component P is sucked and held at the height position H1 'or after the component P is mounted, the nozzles 20A and 20B return to the height position H1, that is, the orbits Ra and Rb.

  In order to photograph the component P held by the nozzles 20A and 20B of the rotary units 22A and 22B, the transfer head 12 has a single camera 30 for photographing the component P, as shown in FIGS. And a plurality of optical elements 32, 34, 36, 38, 40A, 40B, 42 for guiding the image of the component P to the camera 30, and illuminations 50A, 50B, 52A, 52B for photographing.

  As shown in FIG. 2, in the case of this embodiment, the camera 30 is mounted on the transfer head 12 with its optical axis Cc facing downward. The camera 30 includes an imaging region 30a on which an image of the component P is projected. For example, the imaging region 30a of the camera 30 is configured by a light receiving surface of an imaging element of an area image sensor such as a CCD image sensor or a CMOS image sensor. The camera 30 includes an imaging region 30a on the optical axis Cc.

  Specifically, the camera 30 will be described in detail later, but the side view image of the component P held by the nozzle 20A of the rotary unit 22A (in the present embodiment, the X axis direction view image) and the lower side A visual image (an image viewed in the Z-axis direction), a side-view image (an image viewed in the X-axis direction) of the component P held by the nozzle 20B of the rotary unit 22B, and an image viewed in the downward direction (an image viewed in the Z-axis direction) Image).

  Further, the camera 30 converts an image (light) projected onto the imaging region 30a into image data (electrical signal), and the image data is transferred to the main body of the component mounting apparatus 10 (outside the transfer head 12). It is configured to transfer to a provided component inspection unit (not shown).

  A component inspection unit (not shown) performs image processing on the image data of the component P transmitted from the camera 30. The component inspection unit inspects the component P itself held by the nozzles 20A and 20B and the suction posture of the component P based on the result of the image processing.

  The plurality of optical elements 32, 34, 36, 38, 40A, 40B, and 42 are respectively viewed from below the parts P held by the nozzles 20A, 20B that circulate along the circular trajectories Ra, Rb by the rotary units 22A, 22B. This is an optical element for guiding the image and the side view image to the imaging region 30a of the camera 30.

  First, photographing of the component P held by the nozzle 20A of the rotary unit 22A will be described.

  In the case of the present embodiment, on the circular orbit Ra of the rotary unit 22A, as shown in FIGS. 2 and 3, the side of the component P held by the nozzle 20A located at the position Qa2 (angular position 90 °) A square image is captured by the camera 30. Hereinafter, this position Qa2 is referred to as a side photographing position Qa2 (corresponding to “first side photographing position” in the claims).

  Further, as shown in FIGS. 5 and 6, the nozzle 20A is held at a position Qa4 (angular position 120 °), which is a position rotated from the side photographing position Qa2 in the rotation direction D at an angle of 30 °. A downward view image of the component P is taken by the camera 30. Hereinafter, this position Qa4 is referred to as a lower photographing position Qa4 (corresponding to “first lower photographing position” in the claims).

  On the other hand, on the orbit Rb of the rotary unit 22B, as shown in FIG. 5 and FIG. 6, the side view image of the component P held by the nozzle 20A located at the position Qb2 (angular position 90 °) is obtained. Photographed by the camera 30. Hereinafter, the position Qb2 is referred to as a side photographing position Qb2 (corresponding to “second side photographing position” in the claims).

  Further, as shown in FIGS. 2 and 3, the nozzle 20B is held at a position Qb4 (angular position 120 °), which is a position rotated from the side photographing position Qb2 in the rotation direction D ′ at an angle of 30 °. The camera 30 captures an image of the component P viewed from below. Hereinafter, this position Qb4 is referred to as a lower shooting position Qb4 (corresponding to “second lower shooting position” in the claims).

  As shown in FIGS. 2 and 3, the side photographing position Qa2 on the circular orbit Ra of the nozzle 20A and the side photographing position Qb2 on the circular orbit Rb of the nozzle 20B are the same height position H2 ′ as described above. And face each other in the X-axis direction. A mirror 32 is disposed between these two side photographing positions Qa2 and Qb2.

  The mirror 32 is a triangular prism-shaped mirror that extends in the Z-axis direction and has a right-angled triangular cross section. Further, the mirror 32 reflects the side-view image of the component P held by the nozzle 20A located at the side photographing position Qa2 in the Y-axis negative direction and is held by the nozzle 20B located at the side photographing position Qb2. The image of the part P viewed from the side is reflected in the negative Y-axis direction. In this specification, the arrow side of the XYZ coordinate system in the figure is defined as the positive direction, and the opposite arrow side is defined as the negative direction.

  As shown in FIG. 3, the side-view image of the component P, which is reflected by the mirror 32 in the negative Y-axis direction and is held by the nozzle 20 </ b> A located at the side photographing position Qa <b> 2, passes above the mirror 42. And enters the mirror 34. The mirror 34 is a mirror 34 that reflects light incident in the negative Y-axis direction in the positive X-axis direction.

  The side-view image of the component P, which is reflected by the mirror 34 in the X-axis positive direction and is held by the nozzle 20A located at the side photographing position Qa2, passes through the half mirror 36 (beam splitter). The half mirror 36 is configured to transmit light in the X-axis positive direction as it is, but reflect light in the Y-axis negative direction in the X-axis positive direction.

  A side view image of the component P that is passed through the half mirror 36 in the X-axis positive direction and is held by the nozzle 20A located at the side photographing position Qa2 is below the camera 30 (on the optical axis 30Cc of the camera 30). Reflected by the arranged mirror 38 is reflected toward the one side 30a1 in the longitudinal direction L of the imaging region 30a of the camera 30 in the positive direction of the Z-axis.

  As described above, the side-view image of the component P held by the nozzle 20A located at the side photographing position Qa2 on the circular trajectory Ra includes the mirror 32, the mirror 34, the half mirror 36, and the mirror 38. The light is guided to the imaging region 30a of the camera 30 through the optical system.

  On the other hand, as shown in FIGS. 5 and 6, the side view image of the component P held by the nozzle 20 </ b> B located at the side photographing position Qb <b> 2 reflected by the mirror 32 in the negative Y-axis direction is the mirror 42. Is reflected by the half mirror 36 in the positive direction of the X axis.

  A side-view image of the component P reflected by the half mirror 36 in the X-axis positive direction and held by the nozzle 20B located at the side imaging position Qb2 is captured by the mirror 38 in the Z-axis positive direction. Reflected toward one side 30a1 in the longitudinal direction L of 30a.

  As described above, the side-view image of the component P held by the nozzle 20B located at the side photographing position Qb2 on the circular orbit Rb is obtained from the optical system including the mirror 32, the half mirror 36, and the mirror 38. Through the imaging region 30a of the camera 30.

  As shown in FIGS. 2 and 3, the lower shooting position Qa4 on the orbiting track Ra of the nozzle 20A and the lower shooting position Qb4 on the orbiting track Rb of the nozzle 20B are located at the same height position H2 as described above. Also facing each other in the X-axis direction. Mirrors 40A and 40B are arranged below the lower photographing positions Qa4 and Qb4, respectively.

  One mirror 40A reflects a downward-viewed image (image viewed in the Z-axis positive direction) of the component P held by the nozzle 20A on the lower shooting position Qa4 in the X-axis positive direction. The other mirror 40B reflects a downward view image (image seen in the Z-axis direction) of the component P held by the nozzle 20B on the lower photographing position Qb4 in the X-axis negative direction (see FIG. 5).

  As shown in FIG. 4, the mirrors 40A and 40B have a position H1 (a height at the component pickup / mounting positions Qa1 and Qb1) as a preliminary lowering height position of the nozzles 20A and 20B and a rising end height position. As a height position H2. In other words, at the lower shooting positions Qa4 and Qb4, the nozzles 20A and 20B are raised by the rotary units 22A and 22B in order to secure a space for arranging the mirrors 40A and 40B that need to be disposed below the nozzles 20A and 20B. Circulate while changing the position. Thereby, the transfer head 12 can be made compact compared with the case where the mirrors 40A and 40B are arranged below the nozzles 20A and 20B that circulate at a constant height.

  A downward view image of the component P held by the nozzle 20A on the lower shooting position Qa4 reflected by the mirror 40A in the X-axis positive direction, and the lower shooting position Qb4 reflected by the mirror 40B in the X-axis negative direction. The image of the part P held by the nozzle 20B viewed from below enters the mirror 42 disposed between the mirrors 40A and 40B.

  Like the mirror 32, the mirror 42 is a triangular prism-shaped mirror that extends in the Z-axis direction and has a right-angled triangular cross section. In addition, the mirror 42 reflects a downward-view image of the component P held by the nozzle 20A positioned at the lower shooting position Qa4 in the Y-axis negative direction, and is also held by the nozzle 20B positioned at the lower shooting position Qb4. An image of P viewed from below is reflected in the negative Y-axis direction.

  As shown in FIG. 5 and FIG. 6, the image of the part P, which is reflected by the mirror 40 in the negative Y-axis direction and is held by the nozzle 20A on the lower photographing position Qa4, is viewed in the positive X-axis direction by the mirror 34. Reflected in.

  The downward-view image of the component P, which is reflected by the mirror 34 in the X-axis positive direction and is held by the nozzle 20A on the lower shooting position Qa4, passes through the half mirror 36, and then is reflected by the mirror 38 in the Z-axis positive direction Reflected toward the other side 30a2 in the longitudinal direction L of the 30 imaging regions 30a.

  As described above, the downward-view image of the component P held by the nozzle 20A located at the lower photographing position Qa4 on the orbit Ra is composed of the mirror 40A, the mirror 42, the mirror 34, the half mirror 36, and the mirror 38. To the imaging region 30a of the camera 30 through the optical system.

  On the other hand, as shown in FIGS. 2 and 3, the image of the part P, which is reflected by the mirror 32 in the negative Y-axis direction and is held by the nozzle 20 </ b> B on the lower photographing position Qb <b> 4, is X Reflected in the axial positive direction, and subsequently reflected by the mirror 38 in the positive Z-axis direction toward the other side 30a2 in the longitudinal direction L of the imaging region 30a of the camera 30.

  As described above, the image of the part P held by the nozzle 20B located at the lower photographing position Qb4 of the orbit Rb is an optical system including the mirror 40B, the mirror 42, the half mirror 36, and the mirror 38. Through the imaging region 30a of the camera 30.

  As described above, when the camera 30 captures a side-view image of the component P held by the nozzles 20A and 20B on the lateral imaging positions Qa2 and Qb2, for example, illumination 50A and 50B such as LEDs are components to be imaged. P is irradiated with light (see FIGS. 3 and 6).

  As shown in FIG. 3, one illumination 50A is arranged at a position where light can be irradiated in the X-axis positive direction with respect to the component P held by the nozzle 20A located at the side photographing position Qa2. Yes. That is, the part P to be imaged is disposed between the illumination 50 </ b> A and the mirror 32. As a result, the camera 30 captures the shadow of the component P as a side-view image of the component P held by the nozzle 20A located at the lateral imaging position Qa2.

  The other illumination 50B is arranged at a position where light can be irradiated in the negative X-axis direction with respect to the component P held by the nozzle 20B located at the side-viewing photographing position Qb2. That is, the part P to be imaged is disposed between the illumination 50B and the mirror 32. As a result, the camera 30 captures the shadow of the component P as a side-view image of the component P held by the nozzle 20B located at the lateral imaging position Qb2.

  In addition, when the camera 30 captures a downward view image of the component P held by the nozzles 20A and 20B on the lower photographing positions Qa4 and Qb4, for example, illuminations 52A and 52B such as LEDs emit light to the component P to be photographed. Irradiate.

  As shown in FIG. 3, one illumination 52A is arranged obliquely below the component P held by the nozzle 20A located at the lower photographing position Qa4, and irradiates light obliquely upward toward the component P. As a result, the camera 30 can satisfactorily capture the downward-view image of the component P held by the nozzle 20A located at the downward imaging position Qa4.

  As shown in FIG. 3, the other illumination 52 </ b> B is arranged obliquely downward with respect to the component P held by the nozzle 20 </ b> B located at the lower photographing position Qb <b> 4, and irradiates light obliquely upward toward the component P. As a result, the camera 30 can satisfactorily capture a downward view image of the component P held by the nozzle 20B located at the downward capturing position Qb4.

  The illumination 50A, 50B, 52A, 52B also has a height position H1 as the preliminary lowering height position of the nozzles 20A, 20B (the height of the component suction / mounting positions Qa1, Qb1), similarly to the mirrors 40A, 40B. And a height position H2 as the upper end height position. Further, when the camera 30 can take an image of the component P with high accuracy even if the lights 50A, 50B, 52A, 52B are not mounted on the transfer head 12, these lights are applied to the transfer head 12. It does not have to be installed.

  From here, imaging of the parts P held by the nozzles 20A and 20B of the rotary units 22A and 22B will be described.

  First, in the case of the component mounting apparatus 10 of the present embodiment, as shown in FIGS. 2, 3, 5, and 6, a side view image of the component P is taken in each of the orbits Ra and Rb. The lateral shooting positions Qa2 and Qb2 of the nozzles 20A and 20B at the time and the lower shooting positions Qa4 and Qb4 of the nozzles 20A and 20B when shooting the image viewed from below are different positions. Further, the side-view image of the component P held by the nozzle 20A and the side-view image of the component P held by the nozzle 20B are the same in the imaging region (one of the longitudinal directions L of the imaging region 30a). The image of the part P projected onto the side 30a1) and held by the nozzle 20A and the image of the part P held by the nozzle 20B are the same imaging region (the longitudinal direction of the imaging region 30a). Projected to the other side 30a2) of L.

  Therefore, in the component mounting apparatus 10 of the present embodiment, the side view image and the downward view image of the component P held by the nozzle 20A, the side view image of the component P held by the nozzle 20B, and It is possible to sequentially capture the images of the downward view one by one, and the side view image and the downward view image of the component P held by the nozzle 20A and the component P held by the nozzle 20B. It is possible to photograph at least a part of the side view image and the downward view image at the same time. There are four combinations of images of the part P that can be simultaneously photographed as follows.

  First, as a first combination of simultaneous shooting, a side view image of the component P held by the nozzle 20A of the rotary unit 22A and a lower view image of the component P held by the nozzle 20B of the rotary unit 22B. Combinations are listed.

  Further, as a second combination of simultaneous photographing, an image of a part P held by the nozzle 20A of the rotary unit 22A and a side view of the part P held by the nozzle 20B of the rotary unit 22B are obtained. Combinations are listed.

  Further, as a third combination of simultaneous photographing, an image of the part P held by one nozzle 20A in the rotary unit 22A as viewed from the side and an image of the part P held by the other nozzle 20A viewed from below. And the combination.

  As a fourth combination of simultaneous photographing, an image of the part P held by one nozzle 20B in the rotary unit 22B as viewed from the side and an image of the part P held by the other nozzle 22B viewed from below. And the combination.

  Here, the simultaneous shooting of the side-view image of the component P held by the nozzle 20A of the rotary unit 22A and the lower-view image of the component P held by the nozzle 20B of the rotary unit 22B (first combination shooting). ) (First simultaneous photographing operation), and simultaneous photographing (second combination photographing) of the downward-view image of the component P held by the nozzle 20A and the side-view image of the component P held by the nozzle 20B. ) (Second simultaneous photographing operation) are executed alternately.

  First, as a premise, in consideration of the mounting efficiency of the component P on the substrate W, the component mounting apparatus 10 includes all the nozzles 20A and 20B of the rotary units 22A and 22B mounted on the transfer head 12 as components P. Then, the mounting of the component P on the substrate W is started.

  In the case of the present embodiment, the component suction / extraction operation by the nozzles 20A, 20B of the rotary units 22A, 22B and the component photographing operation of the camera 30 for the component P held by the nozzles 20A, 20B are executed in parallel. The

  FIG. 7 is a timing chart illustrating an example of a component suction period in which the component suction / extraction operation by the nozzles 20A and 20B of the rotary units 22A and 22B is executed and the timing of the component photographing operation by the camera 30.

  As shown in FIG. 7, the component suction / extraction operation by the nozzle 20A of the rotary unit 22A and the component suction / extraction operation by the nozzle 20B of the rotary unit 22B are executed within the same component suction / extraction period.

  Specifically, within the same component suction / extraction period shown in FIG. 7, as shown in FIGS. 2, 4, and 5, the nozzle located at the component suction / mounting position Qa1 on one of the circular tracks Ra. 20A descends and newly picks up and holds the component P, and the nozzle 20B located at the component picking / mounting position Qb1 on the other circular track Rb descends and picks up and holds the component P anew. . In the same component suction and extraction period, the nozzles 20A and 20B of the plurality of rotary units 22A and 22B may perform the operation of simultaneously suctioning and holding the corresponding components P, respectively. Further, after the nozzle 20A of the rotary unit 22A newly sucks and holds the component P, the transfer head heads above the component P so that the nozzle 20B of the rotary unit 22B newly sucks and holds the component P. There may be an action in which 12 moves horizontally.

  When the component suction / extraction operation of each of the nozzles 20A and 20B on the component suction / mounting positions Qa1 and Qb1 is completed, the rotary units 22A and 22B center the plurality of nozzles 20A and 20B around the rotation center lines Ca and Cb. Let it go around.

  In the case of the present embodiment, each of the rotary units 22A and 22B supports, for example, 12 nozzles 20A and 20B at equal intervals. Therefore, one rotary unit 22A rotates each of the plurality of nozzles 20A around the rotation center line Ca in the rotation direction D at an angle of 30 °. At the same time, the other rotary unit 22B rotates each of the plurality of nozzles 20B around the rotation center line Cb at an angle of 30 ° in the rotation direction D ′. As a result, the nozzles 20A and 20B that do not hold the component P are sequentially arranged at the component suction extraction / mounting positions Qa1 and Qb1 on the circulation tracks Ra and Rb.

  As shown in FIG. 7, the component suction / take-out operation by the nozzles 20A, 20B located at the component suction / mounting positions Qa1, Qb1 and the revolving operation of the nozzles 20A, 20B by the rotary units 22A, 22B are spaced apart by a predetermined interval. Are executed alternately. As a result, all of the plurality of nozzles 20A and 20B suck and hold the component P.

  As shown in FIG. 7, by the camera 30 between the component suction / extraction operation by the nozzles 20A and 20B located at the component suction / mounting positions Qa1 and Qb1 and the revolving operation of the nozzles 20A and 20B by the rotary units 22A and 22B. The photographing operation of the part P is executed.

  The reason is that when the camera 30 captures the part P, the nozzles 20A and 20B that hold the part P to be imaged need to be stopped at the lateral capturing positions Qa2 and Qb2 and the downward capturing positions Qa4 and Qb4. It is. Further, the vibration of the transfer head 12 and the like generated during the component suction / extraction operation of the nozzles 20A, 20B located at the component suction / mounting positions Qa1, Qb1 affects the photographing quality of the camera 30, that is, the inspection quality of the component P. Because there is a possibility. If there is no adverse effect on the photographing operation of the camera 30, the component suction / extraction operation of the nozzles 20A, 20B located at the component suction / mounting positions Qa1, Qb1 is changed to the side photographing positions Qa2, Qb2 and the lower photographing positions Qa4, Qb4. It is possible to execute in parallel with the photographing operation of the camera 30 with respect to the component P held by the nozzles 20A and 20B located at the same position.

  As shown in FIG. 7, the camera 30 generates a side view image of the component P held by the nozzle 20A of the rotary unit 22A and a lower view image of the component P held by the nozzle 20B of the rotary unit 22B. Shoot simultaneously (first simultaneous shooting operation). Further, the camera 30 simultaneously captures a downward-view image of the component P held by the nozzle 20A of the rotary unit 22A and a side-view image of the component P held by the nozzle 20B of the rotary unit 22B (first). 2 simultaneous shooting operation).

  Specifically, as shown in FIG. 2, the camera 30 displays a side-view image of the component P held by the nozzle 20 </ b> A of the rotary unit 22 </ b> A located at the side photographing position Qa <b> 2 in the longitudinal direction L of the imaging region 30 a. The first side 30a1 of the image pickup device 30 and a lower-view image of the component P held by the nozzle 20B of the rotary unit 22B located at the lower image pickup position Qb4 is taken on the other side 30a2 of the image pickup region 30a in the longitudinal direction L. 1 simultaneous photographing operation is executed.

  Further, as shown in FIG. 5, the camera 30 displays a downward view image of the component P held by the nozzle 20A of the rotary unit 22A located at the lower photographing position Qa4 on the other side 30a2 in the longitudinal direction L of the imaging region 30a. A second simultaneous photographing operation is performed in which the image is taken and a side view image of the part P held by the nozzle 20B located at the side photographing position Qb2 is photographed on one side 30a1 in the longitudinal direction of the imaging region 30a. .

  FIG. 8 shows a captured image A obtained by the first simultaneous photographing operation and a photographed image B obtained by the second simultaneous photographing operation.

  As shown in FIG. 8, the first simultaneous photographing operation of the camera 30 is held by the nozzle 20A of the rotary unit 22A located at the side photographing position Qa2 on one side 30a1 in the longitudinal direction L of the photographing region 30a of the camera 30. A side view image of the component P (in addition to that, an image of the tip of the nozzle 20A) is captured, and the component held by the nozzle 20B of the rotary unit 22B located at the lower photographing position Qb4 on the other side 30a2 in the longitudinal direction L. A captured image A in which an image of P viewed downward can be obtained.

  Further, by the second simultaneous photographing operation of the camera 30, the side of the component P held by the nozzle 20B of the rotary unit 22B located at the side photographing position Qb2 on one side 30a1 in the longitudinal direction L of the photographing region 30a of the camera 30. A square view image (in addition to that, an image of the tip of the nozzle 20B) is taken, and the part P held by the nozzle 20A of the rotary unit 22A located at the lower photographing position Qa4 on the other side 30a2 in the longitudinal direction L is shown. A captured image B in which an image is captured can be obtained.

  As shown in FIG. 7, the camera 30 alternately executes the first simultaneous photographing operation and the second simultaneous photographing operation at a predetermined interval.

  More specifically, once the camera 30 performs imaging, it cannot perform the next imaging until the transfer of the image data to the component inspection unit (not shown) of the component mounting apparatus 10 is completed. Therefore, the camera 30 executes the second imaging operation after the completion of the transfer of the image data obtained by the first imaging operation, and after the completion of the transfer of the image data obtained by the second imaging operation. Execute the shooting operation.

  As described above, the first photographing operation for simultaneously photographing the side-view image of the component P held by the nozzle 20A and the downward-view image of the component P held by the nozzle 20B, and the nozzle 20A The second shooting operation for simultaneously shooting the image of the part P viewed from the lower side and the image of the side view of the part P held by the nozzle 20B is executed alternately. Thereby, the total photographing time required for photographing all the parts P held by the nozzles 20A and 20B of the rotary units 22A and 22B can be shortened. That is, the side view image and the downward view image of the component P held by the nozzle 20A, and the side view image and the downward view image of the component P held by the nozzle 20B, respectively, that is, four images respectively. Compared with the case of shooting one by one, the total shooting time of the camera 30 can be shortened. As a result, the transfer head 12 can start mounting the component P on the substrate W in a short time after each of the nozzles 20A and 20B of the rotary units 22A and 22B sucks and holds the component P.

  From another point of view, as shown in FIG. 7, during the transfer of the image of the camera 30, the component suction operation of the component P by the nozzles 20A and 20B and the circulation of the nozzles 20A and 20B by the rotary units 22A and 22B. Action is performed. As a result, the time from when the nozzles 20A and 20B of the rotary units 22A and 22B start sucking the parts P until the imaging (inspection) of all the parts P held by the nozzles 20A and 20B is completed is shortened. Is done.

  As shown in FIG. 7, when the camera 30 captures a side view image of the component P held by the nozzles 20 </ b> A and 20 </ b> B, the side photographing illuminations 50 </ b> A and 50 </ b> B irradiate the component P with light. (Turns on). On the other hand, when the camera 30 captures a downward view image of the component P held by the nozzles 20A, 20B, the illumination 52A, 52B for downward photographing irradiates the component P with light (becomes ON). .

  From another point of view, in each of the rotary units 22A and 22B, the illumination for side photographing 50A and 50B and the illumination for lower photography 52A and 52B irradiate light alternately. The reason for this will be described.

  For example, in the rotary unit 22 </ b> A, when the side illumination 50 </ b> A and the downward illumination 52 </ b> A emit light at the same time, the lights may interfere with each other. When the light interferes with each other, there is a possibility that the camera 30 cannot properly capture the side view image or the downward view image of the component P held by the nozzle 20A. As a result, there is a possibility that the inspection accuracy of the component P itself and the suction posture of the component P held by the nozzle 20A may be lowered.

  As a countermeasure, as shown in FIG. 7, illuminations 50 </ b> A and 50 </ b> B for side photographing and illuminations 52 </ b> A and 52 </ b> B for downward view irradiation alternately emit light in the rotary units 22 </ b> A and 22 </ b> B, respectively.

  If the illumination lights for side photographing 50A and 50B and the illuminations for lower photography 52A and 52B do not interfere with each other because of different wavelengths, for example, the lights are emitted at the same timing. Also good. Further, even when the illumination for side photographing 50A and 50B and the illumination for lower photography 52A and 52B irradiate light at the same timing, the irradiation destination of each light is the circular orbit Ra of each rotary unit 22A and 22B. , Rb is different from the lateral shooting positions Qa2 and Qb2 and the lower shooting positions Qa4 and Qb4. Therefore, the camera 30 does not affect the shooting of the parts P by the camera 30 and the It is possible to satisfactorily take a downward view and a side view image of the component P at different positions on the circulation mechanisms Ra and Rb.

  Next, simultaneous photographing of a side view image of the component P held by one nozzle 20A and a lower view image of the component P held by the other nozzle 20A in the rotary unit 22A (third combination) (Third simultaneous photographing operation), an image of the part P held by one nozzle 20B of the rotary unit 22B and a side view of the part P held by the other nozzle 20B. A brief description will be given of a case where simultaneous photographing with an image (fourth combination photographing) (fourth simultaneous photographing operation) is alternately performed.

  FIG. 9 shows a simultaneous photographing of a side view image of a component P held by one nozzle 20A and a lower view image of the component P held by another nozzle 20A in the rotary unit 22A (third (Combination shooting) (third simultaneous shooting operation), a side view image of the component P held by one nozzle 20B in the rotary unit 22B, and a lower view of the component P held by the other nozzle 20B 10 is a timing chart of another example when alternately performing simultaneous shooting (fourth combination shooting) (fourth simultaneous shooting operation) with the first image.

  As shown in FIG. 9, the camera 30 includes a side-view image of a component P held by one nozzle 20A in the rotary unit 22A and a lower-view image of the component P held by another nozzle 20A. Are simultaneously photographed (third simultaneous photographing operation). Further, the camera 30 simultaneously captures a downward-view image of the component P held by the nozzle 20A of the rotary unit 22A and a side-view image of the component P held by the nozzle 20B of the rotary unit 22B (first). 4 simultaneous shooting operation).

  Specifically, as shown in FIG. 10, the camera 30 displays a side-view image of the component P held by the nozzle 20 </ b> A of the rotary unit 22 </ b> A located at the side photographing position Qa <b> 2 in the longitudinal direction L of the imaging region 30 a. The first side 30a1 of the imaging unit 30a1 and a lower-view image of the component P held by the nozzle 20A of the rotary unit 22A positioned at the lower imaging position Qa4 is captured on the other side 30a2 of the imaging region 30a in the longitudinal direction L. 3 simultaneous photographing operations are executed.

  Further, as shown in FIG. 11, the camera 30 displays a side-view image of the component P held by the nozzle 20B of the rotary unit 22B located at the side photographing position Qb2 on one side in the longitudinal direction L of the imaging region 30a. A fourth simultaneous photographing operation is performed in which the image is taken at 30a1 and the side view image of the part P held by the nozzle 20B located at the lower photographing position Qb4 is photographed at the other side 30a2 in the longitudinal direction L of the imaging region 30a. Run.

  FIG. 12 shows a captured image A ′ obtained by the third simultaneous photographing operation and a photographed image B ′ obtained by the fourth simultaneous photographing operation.

  As shown in FIG. 12, the third simultaneous photographing operation of the camera 30 holds the nozzle 20A of the rotary unit 22A located at the side photographing position Qa2 on one side 30a1 in the longitudinal direction L of the photographing region 30a of the camera 30. A side view image of the component P (in addition to that, an image of the tip of the nozzle 20A) is captured, and the component held by the nozzle 20A of the rotary unit 22A located at the lower photographing position Qa4 on the other side 30a2 in the longitudinal direction L. A photographed image A ′ in which an image of P viewed downward can be obtained.

  Further, by the fourth photographing operation of the camera 30, the side of the component P held by the nozzle 20B of the rotary unit 22B located at the side photographing position Qb2 on the one side 30a1 in the longitudinal direction L of the photographing region 30a of the camera 30. A visual image (in addition to that, an image of the tip of the nozzle 20B) is taken, and a downward-view image of the component P held by the nozzle 20B of the rotary unit 22B located at the lower photographing position Qb4 on the other side 30a2 in the longitudinal direction L. Can be obtained.

  As described above, according to the present embodiment, the camera 30 captures the downward-viewed image and the side-viewed image of the component P attracted and held by each of the plurality of nozzles 20 </ b> A, 20 </ b> B of the transfer head 12. be able to. Therefore, the component P can be inspected from below and from the side with a small amount of equipment.

  Although the present invention has been described with reference to the above-described embodiment, the present invention is not limited to the above-described embodiment.

  For example, in the case of the above-described embodiment, when the component P held by the nozzle 20A of the rotary unit 22A is located at the side photographing position Qa2 on the circular trajectory Ra, the side view image is photographed. Is done. Further, when the nozzle 20A is positioned at the lower shooting position Qa4 on the orbital track Ra, a lower-view image of the component P held by the nozzle 20A is shot. That is, the side-view image and the downward-view image of the component P held by the nozzle 20A are taken sequentially or simultaneously at different positions on the orbit Ra. Similarly, the side view image and the downward view image of the component P held by the nozzle 20B of the rotary unit 22B are also taken sequentially or simultaneously at different positions on the orbit Rb.

  Instead of this, the side view image and the downward view image of the component P held by the nozzle 20A are photographed at the same position, and the side view image and the downward view of the component P held by the nozzle 20B are taken. The visual image may be taken at the same position.

  FIG. 13 is a schematic perspective view of a transfer head of a component mounting apparatus according to another embodiment.

  The transfer head 112 shown in FIG. 13 includes the same components as the transfer head 12 of the above-described embodiment shown in FIG. However, the mirror 42 is disposed below the mirror 32, the mirror 40A is disposed below the nozzle 20A located at the side photographing position Qa2 on the circular trajectory Ra, and the mirror 40B is disposed on the side photographing position Qb2 on the circular trajectory Rb. The transfer head 112 shown in FIG. 13 is different from the transfer head 12 shown in FIG. Thereby, the side view image and the downward view image of the component P held by the nozzles 20A and 20B located at the side photographing positions Qa2 and Qb2 on the circular orbits Ra and Rb are obtained by one camera 30. You can shoot.

  Specifically, as shown in FIG. 13, in the rotary unit 22A, a side-view image of the component P held by the nozzle 20A located at the side photographing position Qa2 on the circular trajectory Ra is represented by a mirror 32, The light is guided to one side 30 a 1 in the longitudinal direction L of the imaging region 30 a of the camera 30 through an optical system including the mirror 34, the half mirror 36, and the mirror 38. At the same time, an image of the part P held by the nozzle 20A located at the side photographing position Qa2 is viewed through an optical system including the mirror 40A, the mirror 42, the mirror 34, the half mirror 36, and the mirror 38. Then, it is guided to the other side 30a2 in the longitudinal direction L of the imaging region 30a of the camera 30.

  On the other hand, in the rotary unit 22B, a side-view image of the component P held by the nozzle 20B located at the side photographing position Qb2 on the orbit Rb is composed of a mirror 32, a half mirror 36, and a mirror 38. Is guided to one side 30a1 in the longitudinal direction L of the imaging region 30a of the camera 30. At the same time, an image of the part P held by the nozzle 20B positioned at the side photographing position Qb2 is viewed from the camera 30 via an optical system including the mirror 40B, the mirror 42, the half mirror 36, and the mirror 38. To the other side 30a2 in the longitudinal direction L of the imaging region 30a.

  As a result, the side view image and the downward view image of the same component P can be taken in the imaging region 30 of the camera 30 at one shooting position on the orbit. That is, it is possible to obtain a captured image in which a side view image and a downward view image of the same component P are taken as a pair.

  In this way, the shooting positions on the circular trajectories Ra and Rb of the nozzles 20A and 20B where the side view image and the downward view image of the component P held by the nozzles 20A and 20B are shot by the single camera 30 are taken. May be the same or different.

  Speaking in relation, for example, the shooting positions in each of the circular orbits Ra and Rb are not necessarily the same as in the lateral shooting position Qa2 on the circular orbit Ra and the side shooting position Qb2 on the circular orbit Rb shown in FIG. It is not necessary to have plane symmetry (YZ plane symmetry) perpendicular to the parallel direction (X-axis direction) of the rotary units 22A and 22B. For example, the side photographing position Qa2 is at an angular position of 60 ° with respect to the component picking / mounting position Qa1 on one of the circular orbits Ra, and the side photographing position Qb2 is on the part picking / extracting on the other circular orbit Rb. / An angle position of 120 ° with respect to the mounting position Qb1 may be present.

  That is, in one aspect of the present invention, in a broad sense, a predetermined imaging position is defined on a first orbit around which a plurality of first nozzles supported by the first rotary unit circulate, and the first A predetermined imaging position is defined on a second orbit around which a plurality of second nozzles supported by a second rotary unit different from one rotary unit orbits. Then, a side view image and a downward view image of each of the components held by the first and second nozzles located at predetermined imaging positions of the first and second orbits are sequentially obtained by one camera. In photographing, images of a plurality of parts are photographed one by one or at least a part is photographed simultaneously.

  In the case of the above-described embodiment, as shown in FIG. 7, the camera 30 is held by the side view image of the component P held by the nozzle 20A of the rotary unit 22A and the nozzle 20B of the rotary unit 22B. A first simultaneous photographing operation is performed in which a lower-view image of the component P is simultaneously photographed in different imaging regions (different portions of the imaging region 30a of the camera 30). In addition, the camera 30 performs a second simultaneous photographing operation in which a downward-view image of the component P held by the nozzle 20A and a side-view image of the component P held by the nozzle 20B are simultaneously photographed in different imaging regions. Execute. Then, the camera 30 alternately performs the first simultaneous photographing operation and the second simultaneous photographing operation.

  Alternatively, the camera 30 may execute at least one of the first simultaneous photographing operation and the second simultaneous photographing operation. For example, the camera 30 performs a first simultaneous photographing operation for simultaneously photographing a side view image of the component P held by the nozzle 20A and a downward view image of the component P held by the nozzle 20B, and thereafter The image of the part P held by the nozzle 20A and the image of the part P held by the nozzle 20B are taken at different timings.

  As described above, the side view image and the downward view image of the component P held by the nozzle 20A, and the side view image and the downward view image of the component P held by the nozzle 20B are, that is, four types. As shown in FIG. 7, the image may be taken by two shooting operations (two simultaneous shootings) of the camera 30, or by three shooting operations (including one simultaneous shooting) of the camera 30. The images may be taken, or may be taken by four times of shooting operations (not including simultaneous shooting) of the camera 30.

  That is, in one aspect of the present invention, in a broad sense, a downward-view image and a side-view image of a component held by each of the plurality of first nozzles of the first rotary unit, the first rotary unit, A downward view image and a side view image of the parts held by each of the plurality of second nozzles of the different second rotary units are sequentially photographed by one camera, and the one camera has the first and second images. A photographing operation is performed in which a side view image and a downward view image of the component held by the second nozzle are sequentially photographed one by one or at least a part is photographed simultaneously.

  Furthermore, in the case of the above-described embodiment, as shown in FIGS. 2 and 5, the half mirror 36 is used as an optical element constituting an optical system that guides the image of the component P to the imaging region 30 a of the camera 30. Without using the half mirror 36, the image of the component P held by the nozzle 20A of one rotary unit 22A and the image of the component P held by the nozzle 20B of the other rotary unit 22B can be obtained from one camera 30. It is also possible to lead to the imaging region 30a.

  FIG. 14 is a schematic perspective view of a transfer head of a component mounting apparatus according to still another embodiment.

  As shown in FIG. 14, the transfer head 212 according to another embodiment is located at the side photographing position Qa2 of one of the circular orbits Ra, similarly to the transfer head 112 of the embodiment shown in FIG. A side view image and a downward view image of the component P held by the nozzle 20 </ b> A are captured by the camera 30. In addition, the camera 30 captures a side view image and a downward view image of the component P held by the nozzle 20B located at the side shooting position Qb2 of the other orbit Rb.

  Specifically, the side-view image of the component P held by the nozzle 20A located at the side photographing position Qa2 on one of the circular orbits Ra is reflected by the mirror 32 in the negative Y-axis direction. The side-view image of the component P held by the nozzle 20 </ b> A reflected by the mirror 32 in the Y-axis direction is corrected by the mirror 244 mounted on the transfer head 212 so as to be positioned below the camera 30. Reflected in the direction toward the region 30a4 on the other side in the longitudinal direction L and the other side in the lateral direction S in the imaging region 30a of the camera 30.

  In addition, the downward-view image of the component P held by the nozzle 20A located at the side photographing position Qa2 on one of the circular orbits Ra passes through an optical system including the mirror 40A, the mirror 42, and the mirror 244. In the imaging region 30a of the camera 30, the light is guided to a region 30a3 on the other side in the longitudinal direction L and one side in the lateral direction S.

  Further, the side-view image of the component P held by the nozzle 20B located at the side photographing position Qb2 on the other orbit Rb is obtained by the camera 30 via an optical system including the mirror 32 and the mirror 244. It is led to a region 30a2 on the one side in the longitudinal direction L and the other side in the short direction S in the imaging region 30a.

  Furthermore, the downward-view image of the component P held by the nozzle 20B located at the side photographing position Qb2 on the other orbit Rb passes through an optical system including the mirror 40B, the mirror 42, and the mirror 244. Then, it is guided to a region 30a1 on one side in the longitudinal direction L and one side in the lateral direction S in the imaging region 30a of the camera 30.

  When the half mirror is not used as in the transfer head 212 shown in FIG. 14, the side view image and the downward view image of the component P held by the nozzle 20A, and the side of the component P held by the nozzle 20B The square view image and the downward view image, that is, each of the four types of images are led to different regions 30a1 to 30a4 in the imaging region 30a of the camera 30.

  However, when the component P itself or the suction posture of the component P is inspected with high accuracy or when the resolution of the camera 30 is low, it is preferable to use the half mirror 36 as shown in FIGS.

  As shown in FIGS. 2 and 5, by using the half mirror 36, the side view image of the component P held by the nozzle 20A of the rotary unit 22A and the nozzle 20B of the second rotary unit 22B are used. The side-view image of the held component P can be guided to one side 30a1 in the longitudinal direction of the imaging region 30a of the camera 30, that is, the same region in the imaging region 30a of the camera 30. In addition, the downward-view image of the component P held by the nozzle 20A and the downward-view image of the component P held by the nozzle 20B can be guided to the other side 30a2 in the longitudinal direction of the imaging region 30a of the camera 30. . Thereby, each of the four images can have a relatively high resolution as compared with the case where each of the four images is projected onto a different region in the imaging region 30a of the camera 30, as shown in FIG. As a result, the component P itself or the suction posture of the component P sucked and held by the nozzles 20A and 20B of the rotary units 22A and 22B can be inspected with high accuracy based on an image having high resolution.

  In addition, the transfer head of the component mounting apparatus may include three or more rotary units.

  FIG. 15 schematically shows a transfer head according to a further different embodiment having three rotary units.

  As shown in FIG. 15, the transfer head 312 includes three rotary units 22A, 22B, and 22C. Lateral images for side-view images of the parts P held by the nozzles 20A, 20B, and 20C are arranged on the circular orbits Ra, Rb, and Rc of the nozzles 20A, 20B, and 20C of the rotary units 22A, 22B, and 22C. Shooting positions Qa2, Qb2, and Qc2 are set. In addition, lower orbiting positions Qa4, Qb4, and Qc4 are set on the orbits Ra, Rb, and Rc to capture a downward view image of the component P held by the nozzles 20A, 20B, and 20C.

  In the rotary unit 22A, the side-view image of the component P held by the nozzle 20A located at the side photographing position Qa2 is guided to the imaging region of the camera 30 by the mirror 32, the mirror 34, the half mirror 36, and the mirror 338. It is burned. In addition, the downward-view image of the component P held by the nozzle 20A located at the lower shooting position Qa4 is guided to the imaging area of the camera 30 by the mirror 40A, the mirror 42, the mirror 34, the half mirror 36, and the mirror 338.

  In the rotary unit 22B, the side-view image of the component P held by the nozzle 20B located at the side photographing position Qb2 is guided to the imaging region of the camera 30 by the mirror 32, the half mirror 36, and the mirror 338. Further, the downward-view image of the component P held by the nozzle 20B located at the lower shooting position Qb4 is guided to the imaging region of the camera 30 by the mirror 40B, the mirror 42, the half mirror 36, and the mirror 338.

  In the rotary unit 22C, the side-view image of the component P held by the nozzle 20C located at the side photographing position Qc2 is guided to the imaging region of the camera 30 by the mirror 332, the mirror 334, and the mirror 338. In addition, the downward-view image of the component P held by the nozzle 20C located at the lower photographing position Qc4 is guided to the imaging region of the camera 30 by the mirror 40C, the mirror 342, the mirror 334, and the mirror 338.

  The mirror 338 located on the optical axis Cc of the camera 30 and below the imaging area of the camera 30 reflects light in the X-axis positive direction toward the imaging area of the camera 30 in the Z-axis positive direction. And a mirror that can reflect light in the negative X-axis direction toward the imaging region of the camera 30 in the positive Z-axis direction, for example, a triangular mirror.

  As shown in FIG. 15, also in the transfer head 312 having three or more rotary units 22A, 22B, and 22C, each of the parts P held by the nozzles 20A, 20B, and 20C of the rotary units 22A, 22B, and 22C. A downward view image and a side view image can be sequentially taken by one camera 30, and the side view image and the downward view image of the component P held by the nozzles 20A, 20B, and 20C, respectively. Images can be taken one by one with one camera 30, or at least a portion can be taken simultaneously.

  That is, in one aspect of the present invention, in a broad sense, the component mounting apparatus has a transfer head that can move in the horizontal direction, and the transfer head sucks and holds a component from above. A plurality of rotary units that respectively support and circulate the nozzles, and a lower-view image of the components held by the nozzles that are located at predetermined photographing positions at different positions on the respective orbits of the nozzles of each rotary unit And a single camera that sequentially captures images viewed from the side, and the single camera is a downward view of the components held by the nozzles located at the predetermined photographing positions on the circular orbit of the nozzles of each rotary unit. The images and the side-view images are taken one by one or at least a part is taken simultaneously.

  In addition, in order to inspect parts with high accuracy, a single camera focuses the side-view image and the bottom-view image of the parts sucked and held by the nozzles of each of the multiple rotary units. It is preferable to shoot with For this purpose, it is necessary to make the optical path lengths from the lateral photographing position and the lower photographing position as different positions on the circular orbit of the nozzle of each rotary unit to the imaging region of the camera substantially equal.

  For example, in the case of the transfer head 312 shown in FIG. 15, the side photographing positions Qa2, Qb2, Qc2 as photographing positions at different positions on the respective orbits Ra, Rb, Rc of the plurality of rotary units 20A, 20B, 20C. The optical path lengths from the components P held by the nozzles 20A, 20B, and 20C located at the lower photographing positions Qa4, Qb4, and Qc4 to the imaging region of the camera 30 (that is, six optical path lengths) are made substantially equal. A plurality of mirrors 32, 34, 36 for guiding a side view image and a bottom view image of the camera 30 and the part P to the imaging region of the camera 30 so that these six optical path lengths are substantially equal. 40A, 40B, 40C, 332, 334, 342, and 338 are arranged at appropriate positions on the transfer head 312. As a result, the nozzles 20A, 20B, and 20C that are positioned at the lateral shooting positions Qa2, Qb2, and Qc2 and the lower shooting positions Qa4, Qb4, and Qc4, respectively, which are different imaging positions on the orbits Ra, Rb, and Rc, are held. Taking a side view image and a downward view image of the component P in a focused state with a single camera 30 while reducing the influence of illumination when shooting the component at each shooting position. Can do.

  Note that the position of the camera relative to the transfer head that determines the optical path length from each of the lateral shooting position and the lower shooting position on the circular orbit of each nozzle of the plurality of rotary units to the camera imaging area is determined by the nozzle of each rotary unit. It is preferable to make the determination in consideration of the maintainability and the downsizing of the transfer head.

  For example, as shown in FIGS. 3 and 6, in the case of the transfer head 12 on which two rotary units 22A and 22B are mounted, the camera 30 moves relative to the two rotary units 22A and 22B arranged in the X-axis direction. It is arranged on the X-axis beam 14 side for supporting the mounting head 12 and moving it in the X-axis direction. Further, for example, as shown in FIG. 15, in the transfer head 312 in which three rotary units 22A, 22B, and 22C are mounted in the X-axis direction, the camera 30 is mounted on the rotary units 22A, 22B, and 22C. On the other hand, it is arranged on the X-axis beam 14 side.

  Thus, by arranging the cameras on the X-axis beam side with respect to the plurality of rotary units, the front side of the transfer head (for example, the front 12a side of the transfer head 12 shown in FIG. 3 or the transfer shown in FIG. 15). An operator located on the front surface 312a side of the mounting head 312 can check and perform maintenance of the nozzles of the rotary unit, for example, replacement of the nozzles without being disturbed by the camera.

  Further, for example, as shown in FIGS. 3 and 6, the lateral photographing positions Qa2, Qb2 and the lower photographing positions Qa4, Qb4 on the circular orbits Ra, Rb of the nozzles 20A, 20B of the two rotary units 22A, 22B, respectively. While the optical path length from the camera 30 to the imaging region 30a of the camera 30 is substantially equal, the camera 30 is between the two rotary units 22A and 22B and the two rotary units 22A and 22B arranged in the X-axis direction. It is disposed on the X-axis beam 14 side for supporting the transfer head 12 and moving it in the X-axis direction. As a result, the size of the transfer head 12 in the X-axis direction can be reduced as compared with the case where the rotary units 22A and 22B and the camera 30 are arranged linearly in the X-axis direction, that is, the transfer head 12 is made compact. can do.

  In addition, the side photographing position and the bottom photographing position, which are positions for photographing the parts sucked and held by the nozzles on the circular orbit of each of the plurality of rotary units, and the side view of the component P corresponding to the photographing positions Since the plurality of mirrors 32, 34, 36, 40A, 40B, and 40C for guiding the image and the downward-viewed image to the imaging region of the camera 30 are disposed between the plurality of adjacent rotary heads, the optical path And the mirror can be shared, and the transfer head 12 can be made compact.

  Further, regarding the arrangement of the camera with respect to the transfer head, for example, the camera 30 shown in FIG. 2 is mounted on the transfer head 12 with the optical axis Cc facing downward (Z-axis negative direction). Alternatively, in order to reduce the size of the transfer head 12 in the Z-axis direction, the camera 30 can be mounted on the transfer head 12 with the optical axis Cc inclined with respect to the Z-axis. In other words, it is sufficient that the camera is located at a position on the transfer head where the side view image and the downward view image of the parts held by the nozzles of the plurality of rotary units mounted on the transfer head can be taken. The extending direction of the optical axis is not limited to the vertical direction.

  In addition, the circulation path of the nozzles circulated by the rotary unit may not be circular. For example, the orbit of the nozzle may be elliptical.

  The present invention is applicable to any transfer head that includes at least two rotary units that support and rotate a plurality of nozzles that adsorb components.

DESCRIPTION OF SYMBOLS 10 Component mounting apparatus 12 Transfer head 20A 1st nozzle (nozzle)
20B Second nozzle (nozzle)
22A First rotary unit (rotary unit)
22B Second rotary unit (rotary unit)
30 Camera P Parts Qa2 First side photographing position (side photographing position)
Qa4 First lower shooting position (lower shooting position)
Qb2 Second side shooting position (side shooting position)
Qb4 Second lateral shooting position (downward shooting position)
Ra 1st orbit (orbit)
Rb Second orbit (orbit)

Claims (13)

It has a transfer head that can move horizontally,
The transfer head
A first rotary unit that supports and circulates a plurality of first nozzles for adsorbing and holding components from above;
A second rotary unit that supports and circulates a plurality of second nozzles for adsorbing and holding components from above;
The downward view image and the side view image of the component held by the first nozzle located at a predetermined photographing position on the first circulation path of the first nozzle, and the second turn of the second nozzle A camera that sequentially captures a downward-viewed image and a side-viewed image of a component held by the second nozzle located at a predetermined shooting position on the orbit, and
One camera performs a photographing operation of photographing one side view image and one side view image of a part held by each of the first and second nozzles one by one or simultaneously photographing at least a part thereof. , Component mounting equipment. There is a first lateral shooting position and a first lower shooting position on the first orbit,
There is a second lateral shooting position and a second lower shooting position on the second orbit,
The camera captures a side-view image of a component held by the nozzles located at the first and second lateral photographing positions, and the lower part held by the nozzles located at the first and second lower photographing positions. The component mounting apparatus according to claim 1, wherein a visual image is taken. The camera
A first simultaneous photographing operation for simultaneously photographing a side view image of the component held by the first nozzle and a bottom view image of the component held by the second nozzle in different photographing regions;
At least a second simultaneous photographing operation for simultaneously photographing a downward view image of the component held by the first nozzle and a side view image of the component held by the second nozzle in different photographing regions. The component mounting apparatus according to claim 1, wherein one of the components is executed.   The component mounting apparatus according to claim 3, wherein the camera repeatedly performs a first simultaneous photographing operation and a second simultaneous photographing operation in order. The transfer head
A first optical system that guides a downward-view image of the component held by the first nozzle to an imaging region of the camera;
A second optical system for guiding a side-view image of the component held by the first nozzle to an imaging region of the camera;
A third optical system for guiding a downward-viewed image of the component held by the second nozzle to the imaging region of the camera;
A fourth optical system for guiding a side view image of the component held by the second nozzle to the imaging region of the camera,
The component mounting apparatus according to any one of claims 1 to 4, wherein the first, second, third, and fourth optical systems include a half mirror as a common optical element. The transfer head
A first light source that emits light when the camera captures an image of a downward view of the component held by the first nozzle;
A second light source that emits light when the camera captures an image of the side view of the component held by the first nozzle;
A third light source that emits light to the component held by the second nozzle when the camera takes an image of the lower view;
A fourth light source that irradiates light to the component held by the second nozzle when the camera captures an image of the side view thereof, according to any one of claims 1 to 5. The component mounting apparatus described. The first and second rotary units are configured to support the first and second nozzles movably in the vertical direction;
The first and second rotary units rotate the first and second nozzles while changing the height position,
The component mounting apparatus according to claim 2, wherein at least the first and second lower imaging positions are set to the highest positions in the orbits of the first and second nozzles. It has a transfer head that can move horizontally,
The transfer head
A plurality of rotary units that respectively support and circulate a plurality of nozzles for adsorbing and holding components from above; and
A single camera that sequentially captures a downward-viewed image and a side-viewed image of a component held by a nozzle located at each of the predetermined shooting positions on the circular orbit of the nozzle of each rotary unit;
One camera is a component that performs a photographing operation of photographing one side view image and one side view image of a component held by each nozzle of each rotary unit one by one or at least a part of the image at the same time. Mounting device. There are a lateral shooting position and a lower shooting position at different positions on the circular orbit of the nozzle of each rotary unit,
The camera shoots a side view image of a component held by a nozzle located at a side shooting position, and a bottom view image held by a nozzle located at a lower shooting position,
On the circular orbit of one rotary unit, a side view image of a component held by a nozzle located at a side shooting position and a bottom view image of a component held by a nozzle located at a lower shooting position, The component mounting apparatus according to claim 8, wherein images are taken sequentially or simultaneously by a single camera. A component mounting method for performing component mounting using a transfer head including a first rotary unit that supports a plurality of first nozzles and a second rotary unit that supports a plurality of second nozzles. ,
A plurality of first nozzles orbiting along a first orbit by a first rotary unit;
A plurality of second nozzles orbiting along a second orbit by the second rotary unit;
A downward view image and a side view image of a component held by the first nozzle located at a predetermined shooting position on the first orbit, and a predetermined shooting position on the second orbit. Taking a downward view image and a side view image of the parts held by the second nozzle sequentially with one camera,
A component mounting method in which one camera captures a side view image and a bottom view image of a component held by each of the first and second nozzles one by one or at least a part of the image. A first lateral shooting position and a first lower shooting position on the first orbit,
A second lateral shooting position and a second lower shooting position exist on the second orbit,
The camera captures a side view image of the component held by the nozzles located at the first and second lateral photographing positions, and the lower part held by the nozzles located at the first and second lower photographing positions. The component mounting method according to claim 10, wherein a visual image is taken. A component mounting method for performing component mounting using a transfer head including a plurality of rotary units each supporting a plurality of nozzles,
Each rotary unit circulates the corresponding nozzles,
The images of the parts viewed from the bottom and side of the parts held by the nozzles located at the predetermined photographing positions on the circular orbits of the nozzles of the rotary units are sequentially photographed by one camera,
A component mounting method in which a single camera captures a side view image and a downward view image of a component held by each nozzle of each rotary unit one by one or at least a part of the image. There are a lateral shooting position and a lower shooting position at different positions on the circular orbit of the nozzle of each rotary unit,
The camera shoots a side view image of a component held by a nozzle located at a side shooting position, and a bottom view image held by a nozzle located at a lower shooting position,
On the circular orbit of one rotary unit, a side view image of a component held by a nozzle located at a side shooting position and a bottom view image of a component held by a nozzle located at a lower shooting position, The component mounting method according to claim 12, wherein shooting is performed sequentially or simultaneously by a single camera.

Images