JP6767559B2 - ひずみゲージ及び多軸力センサ - Google Patents

ひずみゲージ及び多軸力センサ Download PDF

Info

Publication number
JP6767559B2
JP6767559B2 JP2019195921A JP2019195921A JP6767559B2 JP 6767559 B2 JP6767559 B2 JP 6767559B2 JP 2019195921 A JP2019195921 A JP 2019195921A JP 2019195921 A JP2019195921 A JP 2019195921A JP 6767559 B2 JP6767559 B2 JP 6767559B2
Authority
JP
Japan
Prior art keywords
strain
fixed resistance
region
sensitive
bridge circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019195921A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020024218A (ja
JP2020024218A5 (enExample
Inventor
道伯 稲森
道伯 稲森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MinebeaMitsumi Inc
Original Assignee
MinebeaMitsumi Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MinebeaMitsumi Inc filed Critical MinebeaMitsumi Inc
Priority to JP2019195921A priority Critical patent/JP6767559B2/ja
Publication of JP2020024218A publication Critical patent/JP2020024218A/ja
Publication of JP2020024218A5 publication Critical patent/JP2020024218A5/ja
Application granted granted Critical
Publication of JP6767559B2 publication Critical patent/JP6767559B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Measurement Of Force In General (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP2019195921A 2019-10-29 2019-10-29 ひずみゲージ及び多軸力センサ Active JP6767559B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2019195921A JP6767559B2 (ja) 2019-10-29 2019-10-29 ひずみゲージ及び多軸力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019195921A JP6767559B2 (ja) 2019-10-29 2019-10-29 ひずみゲージ及び多軸力センサ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2017132793A Division JP6611762B2 (ja) 2017-07-06 2017-07-06 ひずみゲージ及び多軸力センサ

Publications (3)

Publication Number Publication Date
JP2020024218A JP2020024218A (ja) 2020-02-13
JP2020024218A5 JP2020024218A5 (enExample) 2020-10-01
JP6767559B2 true JP6767559B2 (ja) 2020-10-14

Family

ID=69618590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019195921A Active JP6767559B2 (ja) 2019-10-29 2019-10-29 ひずみゲージ及び多軸力センサ

Country Status (1)

Country Link
JP (1) JP6767559B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113916416B (zh) * 2021-09-23 2023-05-16 北京科技大学 一种高渗透性应变非敏感型电子皮肤及其制备方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0943069A (ja) * 1995-07-28 1997-02-14 Matsushita Refrig Co Ltd 3軸力覚センサ
JP5008188B2 (ja) * 2007-05-31 2012-08-22 ミネベア株式会社 3軸力センサ及び3軸力検出方法
JP2010164495A (ja) * 2009-01-19 2010-07-29 Minebea Co Ltd 3軸力センサ
JP6611761B2 (ja) * 2017-07-06 2019-11-27 ミネベアミツミ株式会社 ひずみゲージ及び多軸力センサ
JP6611762B2 (ja) * 2017-07-06 2019-11-27 ミネベアミツミ株式会社 ひずみゲージ及び多軸力センサ
JP6616806B2 (ja) * 2017-07-06 2019-12-04 ミネベアミツミ株式会社 ひずみゲージ、及び、3軸力センサ

Also Published As

Publication number Publication date
JP2020024218A (ja) 2020-02-13

Similar Documents

Publication Publication Date Title
US11293818B2 (en) Strain gauge and multi-axis force sensor
JP6616806B2 (ja) ひずみゲージ、及び、3軸力センサ
JP5008188B2 (ja) 3軸力センサ及び3軸力検出方法
JP6611762B2 (ja) ひずみゲージ及び多軸力センサ
JP6428982B1 (ja) トルクセンサ
US6378381B1 (en) Sensor using capacitance element
US8966996B2 (en) Force sensor
US6512364B1 (en) Testing sensor
US7500406B2 (en) Multiaxial sensor
JP5007083B2 (ja) 力覚センサ用チップ
US20130126249A1 (en) Load cell and applications thereof
JP2010164495A (ja) 3軸力センサ
JP6611761B2 (ja) ひずみゲージ及び多軸力センサ
JP5174343B2 (ja) 力覚センサ用チップ
JP6767559B2 (ja) ひずみゲージ及び多軸力センサ
JP6836641B2 (ja) ひずみゲージ、及び、3軸力センサ
JP6837113B2 (ja) ひずみゲージ及び多軸力センサ
CN119984615A (zh) 多维力传感器及加工方法
JP5046321B2 (ja) 3軸力センサ
JPH03249530A (ja) 分布型触覚センサ
JP2008224406A (ja) 物理量センサ
JP6058858B1 (ja) 加速度センサ
JP6010678B1 (ja) 加速度センサ
JPH0627089U (ja) 3次元半導体力覚センサー
JPH02203229A (ja) 力検出装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200703

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200703

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200821

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20200908

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20200917

R150 Certificate of patent or registration of utility model

Ref document number: 6767559

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150