JP6766101B2 - MoSi2製の発熱体からなるヒーター及び該ヒーターの製造方法 - Google Patents

MoSi2製の発熱体からなるヒーター及び該ヒーターの製造方法 Download PDF

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JP6766101B2
JP6766101B2 JP2018128771A JP2018128771A JP6766101B2 JP 6766101 B2 JP6766101 B2 JP 6766101B2 JP 2018128771 A JP2018128771 A JP 2018128771A JP 2018128771 A JP2018128771 A JP 2018128771A JP 6766101 B2 JP6766101 B2 JP 6766101B2
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plate
heating element
heat generating
mosi
shaped
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JP2018174151A (ja
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高村 博
博 高村
里安 成田
里安 成田
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JX Nippon Mining and Metals Corp
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JP2018128771A 2018-07-06 2018-07-06 MoSi2製の発熱体からなるヒーター及び該ヒーターの製造方法 Active JP6766101B2 (ja)

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JP2018128771A JP6766101B2 (ja) 2018-07-06 2018-07-06 MoSi2製の発熱体からなるヒーター及び該ヒーターの製造方法

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JP2016013085A Division JP6590319B2 (ja) 2016-01-27 2016-01-27 MoSi2製の発熱体及び同発熱体の製造方法

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JP2018174151A JP2018174151A (ja) 2018-11-08
JP2018174151A5 JP2018174151A5 (https=) 2019-03-07
JP6766101B2 true JP6766101B2 (ja) 2020-10-07

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