JP6763569B2 - 光検査装置及び光検査システム - Google Patents

光検査装置及び光検査システム Download PDF

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Publication number
JP6763569B2
JP6763569B2 JP2016183278A JP2016183278A JP6763569B2 JP 6763569 B2 JP6763569 B2 JP 6763569B2 JP 2016183278 A JP2016183278 A JP 2016183278A JP 2016183278 A JP2016183278 A JP 2016183278A JP 6763569 B2 JP6763569 B2 JP 6763569B2
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Japan
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image processing
unit
processing algorithm
optical inspection
article
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JP2016183278A
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Japanese (ja)
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JP2018048844A (ja
Inventor
厚司 岩井
厚司 岩井
栖原　一浩
一浩 栖原
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Ishida Co Ltd
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Ishida Co Ltd
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Priority to JP2016183278A priority Critical patent/JP6763569B2/ja
Priority to PCT/JP2017/033693 priority patent/WO2018056257A1/fr
Publication of JP2018048844A publication Critical patent/JP2018048844A/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/18—Investigating the presence of flaws defects or foreign matter

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  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Toxicology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2016183278A 2016-09-20 2016-09-20 光検査装置及び光検査システム Active JP6763569B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2016183278A JP6763569B2 (ja) 2016-09-20 2016-09-20 光検査装置及び光検査システム
PCT/JP2017/033693 WO2018056257A1 (fr) 2016-09-20 2017-09-19 Dispositif d'inspection optique et système d'inspection optique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016183278A JP6763569B2 (ja) 2016-09-20 2016-09-20 光検査装置及び光検査システム

Publications (2)

Publication Number Publication Date
JP2018048844A JP2018048844A (ja) 2018-03-29
JP6763569B2 true JP6763569B2 (ja) 2020-09-30

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ID=61691046

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JP2016183278A Active JP6763569B2 (ja) 2016-09-20 2016-09-20 光検査装置及び光検査システム

Country Status (2)

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JP (1) JP6763569B2 (fr)
WO (1) WO2018056257A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7177721B2 (ja) * 2019-02-15 2022-11-24 日本信号株式会社 検査システム

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4902170B2 (ja) * 2005-10-21 2012-03-21 株式会社イシダ 検査システム
JP5635903B2 (ja) * 2010-12-27 2014-12-03 アンリツ産機システム株式会社 Ｘ線検査装置
JP6022860B2 (ja) * 2012-08-31 2016-11-09 株式会社イシダ 物品検査装置及び物品検査方法
JP6068060B2 (ja) * 2012-08-31 2017-01-25 株式会社イシダ Ｘ線検査装置
JP6177649B2 (ja) * 2013-10-07 2017-08-09 株式会社日立ハイテクノロジーズ データ処理装置、測長システム、欠陥検査システム、画像トラッキングシステム、及びデータ処理方法
JP2015141029A (ja) * 2014-01-27 2015-08-03 独立行政法人 国立印刷局 印刷機の排紙装置
WO2016136670A1 (fr) * 2015-02-24 2016-09-01 ナブテスコ株式会社 Dispositif de mesure et système de mesure

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JP2018048844A (ja) 2018-03-29
WO2018056257A1 (fr) 2018-03-29

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