JP6753859B2 - ハロシランをサンプリングするための装置と方法 - Google Patents
ハロシランをサンプリングするための装置と方法 Download PDFInfo
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- JP6753859B2 JP6753859B2 JP2017541274A JP2017541274A JP6753859B2 JP 6753859 B2 JP6753859 B2 JP 6753859B2 JP 2017541274 A JP2017541274 A JP 2017541274A JP 2017541274 A JP2017541274 A JP 2017541274A JP 6753859 B2 JP6753859 B2 JP 6753859B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
- G01N1/2214—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling by sorption
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J10/00—Chemical processes in general for reacting liquid with gaseous media other than in the presence of solid particles, or apparatus specially adapted therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/18—Stationary reactors having moving elements inside
- B01J19/1806—Stationary reactors having moving elements inside resulting in a turbulent flow of the reactants, such as in centrifugal-type reactors, or having a high Reynolds-number
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/281—Sorbents specially adapted for preparative, analytical or investigative chromatography
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/38—Diluting, dispersing or mixing samples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/40—Concentrating samples
- G01N1/4044—Concentrating samples by chemical techniques; Digestion; Chemical decomposition
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
- G01N1/2214—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling by sorption
- G01N2001/2217—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling by sorption using a liquid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/38—Diluting, dispersing or mixing samples
- G01N2001/386—Other diluting or mixing processes
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Sampling And Sample Adjustment (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562112691P | 2015-02-06 | 2015-02-06 | |
| US62/112,691 | 2015-02-06 | ||
| PCT/US2016/017026 WO2016127180A1 (en) | 2015-02-06 | 2016-02-08 | System and method for sampling halosilanes |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018508772A JP2018508772A (ja) | 2018-03-29 |
| JP2018508772A5 JP2018508772A5 (https=) | 2019-03-28 |
| JP6753859B2 true JP6753859B2 (ja) | 2020-09-09 |
Family
ID=56564821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017541274A Active JP6753859B2 (ja) | 2015-02-06 | 2016-02-08 | ハロシランをサンプリングするための装置と方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10809168B2 (https=) |
| JP (1) | JP6753859B2 (https=) |
| KR (1) | KR102541889B1 (https=) |
| CN (1) | CN107407619B (https=) |
| WO (1) | WO2016127180A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11333589B2 (en) * | 2018-03-21 | 2022-05-17 | Smithsonian Institution | Gas-liquid falling film equilibration system and methods of use |
| CN116272819B (zh) * | 2023-05-24 | 2023-08-25 | 福建省德尚电子材料有限公司 | 一种光刻胶生产用酯化反应釜 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS599382B2 (ja) | 1977-02-18 | 1984-03-02 | 株式会社ナブコ | 2系統ブレ−キ用液圧制御弁 |
| JPS53134175U (https=) * | 1977-03-30 | 1978-10-24 | ||
| JPS543673A (en) | 1977-06-09 | 1979-01-11 | Toshiba Corp | Sequence control system |
| JPS5713154Y2 (https=) * | 1977-06-11 | 1982-03-16 | ||
| DE3327014A1 (de) | 1983-07-27 | 1985-02-14 | Hoechst Ag, 6230 Frankfurt | Neue terpenether und verfahren zu ihrer herstellung |
| JPS6042344U (ja) * | 1983-08-30 | 1985-03-25 | 三菱重工業株式会社 | 水スラリの撹拌装置 |
| JPH0682119B2 (ja) * | 1988-05-31 | 1994-10-19 | 宇部興産株式会社 | 高純度のケイ素又はホウ素塩化物の分析法 |
| US20020198230A1 (en) | 1993-09-24 | 2002-12-26 | Howard M. Kingston | Method and apparatus for microwave assisted chemical reactions |
| WO2000013761A1 (en) * | 1998-09-04 | 2000-03-16 | Vertex Pharmaceuticals Incorporated | Vortex evaporator |
| FR2848561B1 (fr) * | 2002-12-16 | 2005-03-04 | Rhodia Chimie Sa | Procede d'hydrolyse/condensation d'halogenosilanes pour synthetiser des polyorganosiloxanes hydroxyles, dispositif pour la mise en oeuvre de ce procede |
| ES2220227B1 (es) * | 2003-05-30 | 2006-02-16 | INSTITUTO NACIONAL DE TECNICA AEROESPACIAL "ESTEBAN TERRADAS" | Metodo y aparato para la deteccion de sustancias o analitos a partir del analisis de una o varias muestras. |
| US7273588B1 (en) * | 2003-07-17 | 2007-09-25 | Air Liquide America L.P. | Methods of sampling halosilanes for metal analytes |
| JP4144582B2 (ja) * | 2004-10-04 | 2008-09-03 | ダイキン工業株式会社 | 混合装置ならびにこれを用いるフッ素濃度測定システムおよび方法 |
| TWI331775B (en) | 2005-05-17 | 2010-10-11 | Apprecia Technology Inc | Equipment and method for measuring silicon concentration in phosphoric acid solution |
| JP2007252992A (ja) * | 2006-03-20 | 2007-10-04 | Nippon Steel Corp | 汚泥からの可燃性ガス及びスラグの回収方法、及び汚泥のガス化溶融炉 |
| WO2009090189A1 (en) * | 2008-01-15 | 2009-07-23 | Abbott Gmbh & Co.Kg | Powdered protein compositions and methods of making same |
| JP4837687B2 (ja) * | 2008-02-04 | 2011-12-14 | 電気化学工業株式会社 | クロロシラン類の化学処理方法 |
| JP2010066251A (ja) * | 2008-08-12 | 2010-03-25 | Mitsubishi Materials Corp | クロロシラン類の分析装置および分析方法 |
| SE532906C2 (sv) | 2008-09-23 | 2010-05-04 | Scania Cv Abp | Hydrolyskatalysator med större kanaltvärsnitt i den perifera delen än i den centrala delen samt sätt för hydrolys av ett urinämne |
| KR101076359B1 (ko) * | 2009-05-29 | 2011-10-25 | 주식회사 에이에스피 | 실란 또는 할로겐화실란 미량원소 분석 전처리 장치 |
| CN201669104U (zh) * | 2010-04-20 | 2010-12-15 | 安徽八一化工股份有限公司 | 水解反应釜 |
| CN102515454B (zh) * | 2011-12-22 | 2013-09-25 | 湖北国新天汇能源有限公司 | 采用旋转方式实现热水解发酵处理的装置与方法 |
-
2016
- 2016-02-08 JP JP2017541274A patent/JP6753859B2/ja active Active
- 2016-02-08 US US15/547,669 patent/US10809168B2/en active Active
- 2016-02-08 KR KR1020177024632A patent/KR102541889B1/ko active Active
- 2016-02-08 WO PCT/US2016/017026 patent/WO2016127180A1/en not_active Ceased
- 2016-02-08 CN CN201680009165.2A patent/CN107407619B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR102541889B1 (ko) | 2023-06-08 |
| WO2016127180A8 (en) | 2017-08-31 |
| CN107407619B (zh) | 2022-08-23 |
| US10809168B2 (en) | 2020-10-20 |
| WO2016127180A1 (en) | 2016-08-11 |
| JP2018508772A (ja) | 2018-03-29 |
| CN107407619A (zh) | 2017-11-28 |
| US20180017472A1 (en) | 2018-01-18 |
| KR20170110677A (ko) | 2017-10-11 |
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