JP6753859B2 - ハロシランをサンプリングするための装置と方法 - Google Patents

ハロシランをサンプリングするための装置と方法 Download PDF

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JP6753859B2
JP6753859B2 JP2017541274A JP2017541274A JP6753859B2 JP 6753859 B2 JP6753859 B2 JP 6753859B2 JP 2017541274 A JP2017541274 A JP 2017541274A JP 2017541274 A JP2017541274 A JP 2017541274A JP 6753859 B2 JP6753859 B2 JP 6753859B2
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swirling
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JP2018508772A5 (https=
JP2018508772A (ja
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ダニエル・アール・ウィーデリン
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Elemental Scientific Inc
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Elemental Scientific Inc
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • G01N1/2202Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2214Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling by sorption
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J10/00Chemical processes in general for reacting liquid with gaseous media other than in the presence of solid particles, or apparatus specially adapted therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/18Stationary reactors having moving elements inside
    • B01J19/1806Stationary reactors having moving elements inside resulting in a turbulent flow of the reactants, such as in centrifugal-type reactors, or having a high Reynolds-number
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/281Sorbents specially adapted for preparative, analytical or investigative chromatography
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/38Diluting, dispersing or mixing samples
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/40Concentrating samples
    • G01N1/4044Concentrating samples by chemical techniques; Digestion; Chemical decomposition
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • G01N1/2202Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2214Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling by sorption
    • G01N2001/2217Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling by sorption using a liquid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/38Diluting, dispersing or mixing samples
    • G01N2001/386Other diluting or mixing processes

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2017541274A 2015-02-06 2016-02-08 ハロシランをサンプリングするための装置と方法 Active JP6753859B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562112691P 2015-02-06 2015-02-06
US62/112,691 2015-02-06
PCT/US2016/017026 WO2016127180A1 (en) 2015-02-06 2016-02-08 System and method for sampling halosilanes

Publications (3)

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JP2018508772A JP2018508772A (ja) 2018-03-29
JP2018508772A5 JP2018508772A5 (https=) 2019-03-28
JP6753859B2 true JP6753859B2 (ja) 2020-09-09

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JP2017541274A Active JP6753859B2 (ja) 2015-02-06 2016-02-08 ハロシランをサンプリングするための装置と方法

Country Status (5)

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US (1) US10809168B2 (https=)
JP (1) JP6753859B2 (https=)
KR (1) KR102541889B1 (https=)
CN (1) CN107407619B (https=)
WO (1) WO2016127180A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11333589B2 (en) * 2018-03-21 2022-05-17 Smithsonian Institution Gas-liquid falling film equilibration system and methods of use
CN116272819B (zh) * 2023-05-24 2023-08-25 福建省德尚电子材料有限公司 一种光刻胶生产用酯化反应釜

Family Cites Families (22)

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JPS599382B2 (ja) 1977-02-18 1984-03-02 株式会社ナブコ 2系統ブレ−キ用液圧制御弁
JPS53134175U (https=) * 1977-03-30 1978-10-24
JPS543673A (en) 1977-06-09 1979-01-11 Toshiba Corp Sequence control system
JPS5713154Y2 (https=) * 1977-06-11 1982-03-16
DE3327014A1 (de) 1983-07-27 1985-02-14 Hoechst Ag, 6230 Frankfurt Neue terpenether und verfahren zu ihrer herstellung
JPS6042344U (ja) * 1983-08-30 1985-03-25 三菱重工業株式会社 水スラリの撹拌装置
JPH0682119B2 (ja) * 1988-05-31 1994-10-19 宇部興産株式会社 高純度のケイ素又はホウ素塩化物の分析法
US20020198230A1 (en) 1993-09-24 2002-12-26 Howard M. Kingston Method and apparatus for microwave assisted chemical reactions
WO2000013761A1 (en) * 1998-09-04 2000-03-16 Vertex Pharmaceuticals Incorporated Vortex evaporator
FR2848561B1 (fr) * 2002-12-16 2005-03-04 Rhodia Chimie Sa Procede d'hydrolyse/condensation d'halogenosilanes pour synthetiser des polyorganosiloxanes hydroxyles, dispositif pour la mise en oeuvre de ce procede
ES2220227B1 (es) * 2003-05-30 2006-02-16 INSTITUTO NACIONAL DE TECNICA AEROESPACIAL "ESTEBAN TERRADAS" Metodo y aparato para la deteccion de sustancias o analitos a partir del analisis de una o varias muestras.
US7273588B1 (en) * 2003-07-17 2007-09-25 Air Liquide America L.P. Methods of sampling halosilanes for metal analytes
JP4144582B2 (ja) * 2004-10-04 2008-09-03 ダイキン工業株式会社 混合装置ならびにこれを用いるフッ素濃度測定システムおよび方法
TWI331775B (en) 2005-05-17 2010-10-11 Apprecia Technology Inc Equipment and method for measuring silicon concentration in phosphoric acid solution
JP2007252992A (ja) * 2006-03-20 2007-10-04 Nippon Steel Corp 汚泥からの可燃性ガス及びスラグの回収方法、及び汚泥のガス化溶融炉
WO2009090189A1 (en) * 2008-01-15 2009-07-23 Abbott Gmbh & Co.Kg Powdered protein compositions and methods of making same
JP4837687B2 (ja) * 2008-02-04 2011-12-14 電気化学工業株式会社 クロロシラン類の化学処理方法
JP2010066251A (ja) * 2008-08-12 2010-03-25 Mitsubishi Materials Corp クロロシラン類の分析装置および分析方法
SE532906C2 (sv) 2008-09-23 2010-05-04 Scania Cv Abp Hydrolyskatalysator med större kanaltvärsnitt i den perifera delen än i den centrala delen samt sätt för hydrolys av ett urinämne
KR101076359B1 (ko) * 2009-05-29 2011-10-25 주식회사 에이에스피 실란 또는 할로겐화실란 미량원소 분석 전처리 장치
CN201669104U (zh) * 2010-04-20 2010-12-15 安徽八一化工股份有限公司 水解反应釜
CN102515454B (zh) * 2011-12-22 2013-09-25 湖北国新天汇能源有限公司 采用旋转方式实现热水解发酵处理的装置与方法

Also Published As

Publication number Publication date
KR102541889B1 (ko) 2023-06-08
WO2016127180A8 (en) 2017-08-31
CN107407619B (zh) 2022-08-23
US10809168B2 (en) 2020-10-20
WO2016127180A1 (en) 2016-08-11
JP2018508772A (ja) 2018-03-29
CN107407619A (zh) 2017-11-28
US20180017472A1 (en) 2018-01-18
KR20170110677A (ko) 2017-10-11

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