JP6737983B2 - 応力を緩和するアモルファスSiO2中間層 - Google Patents
応力を緩和するアモルファスSiO2中間層 Download PDFInfo
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- 229910021486 amorphous silicon dioxide Inorganic materials 0.000 title description 6
- 229910001404 rare earth metal oxide Inorganic materials 0.000 claims description 97
- 239000013078 crystal Substances 0.000 claims description 54
- 239000000758 substrate Substances 0.000 claims description 52
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 49
- 229910052710 silicon Inorganic materials 0.000 claims description 49
- 239000010703 silicon Substances 0.000 claims description 49
- 239000000463 material Substances 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 44
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 41
- 239000004065 semiconductor Substances 0.000 claims description 33
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 29
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 27
- 238000000151 deposition Methods 0.000 claims description 18
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 230000001590 oxidative effect Effects 0.000 claims 3
- 239000010410 layer Substances 0.000 description 148
- 230000035882 stress Effects 0.000 description 13
- 230000003647 oxidation Effects 0.000 description 11
- 238000007254 oxidation reaction Methods 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 229910052761 rare earth metal Inorganic materials 0.000 description 7
- 150000002910 rare earth metals Chemical class 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000000576 coating method Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000002602 lanthanoids Chemical group 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
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- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
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- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
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Description
この実施の形態では、「滑らか」という用語は、層が全体に実質的に同一の厚みを有することを意味するために用いられる。層14の厚みは、好ましくは1ナノメートルから10ナノメートルの間にある。この実施例では、Siの界面エネルギーがREOのそれより高く、Siはエピタキシャル成長のための典型的な温度ではアイランドを形成するので、アモルファスSi層14を滑らかに保つために、アモルファスシリコンの低温堆積法が使われる。
Claims (14)
- 半導体材料の層と結晶性のシリコン基板との間に希土類酸化物の各誘電体層およびアモルファス酸化シリコンの層を形成する方法であって、次の各ステップを含む方法:
結晶性のシリコン基板を用意するステップ;
単結晶希土類酸化物の第1層を前記結晶性のシリコン基板に堆積させるステップ;
アモルファスシリコンの均一層を前記希土類酸化物の第1層に堆積させるステップ;
基板の温度をエピタキシャル成長のために必要とする温度まで上昇させ希土類酸化物をエピタキシャルに成長させることにより、単結晶希土類酸化物の第2層を前記アモルファスシリコンの層の表面上に堆積させるステップであって、前記エピタキシャル成長のための温度は、前記アモルファスシリコンの層を結晶化させて結晶シリコンの層を形成する温度であり、その結果前記単結晶希土類酸化物の第2層は前記結晶シリコンの層の上に形成される、ステップ;ならびに
前記結晶シリコンをアモルファス酸化シリコンに変えるために前記結晶シリコンを酸化させるステップ。 - 前記単結晶希土類酸化物の第2層上に、前記半導体材料の単結晶層をエピタキシャルに成長させるステップをさらに含む、請求項1に記載の方法。
- 前記結晶シリコンを酸化させるステップが、前記単結晶希土類酸化物の第2層上に、前記半導体材料の単結晶層をエピタキシャルに成長させることを含む、請求項1または請求項2に記載の方法。
- 前記結晶シリコンを酸化させるステップは、
基板の温度をエピタキシャル成長のために必要とされる温度より高い温度まで上昇させること、および、酸素雰囲気で前記上昇を実行することを含む、請求項1〜請求項3のいずれか1項に記載の方法。 - 前記アモルファスシリコンの均一層を堆積させるステップは、20℃から100℃までの範囲の温度で前記均一層を堆積させることを含む、請求項1に記載の方法。
- 前記アモルファスシリコンの均一層を堆積させるステップは、前記均一層を1ナノメートル〜10ナノメートルの範囲に堆積させることを含む、請求項1に記載の方法。
- 前記単結晶希土類酸化物の第1層を堆積させるステップは、前記結晶性のシリコン基板に隣接して前記結晶性のシリコン基板の格子定数に一致する第1の格子定数を有する単結晶希土類酸化物の層を堆積させることを含む、請求項1に記載の方法。
- 前記単結晶希土類酸化物の第2層を堆積させるステップは、上面において前記半導体材料の格子定数に一致する第2の格子定数を有する前記単結晶希土類酸化物の層を堆積させることを含む、請求項1に記載の方法。
- 半導体材料と結晶性のシリコン基板との間に希土類酸化物の各誘電体層およびアモルファス酸化シリコン層を含む層構造であって、
前記結晶性のシリコン基板と、
前記結晶性のシリコン基板上に形成された単結晶希土類酸化物の第1層と、
前記単結晶希土類酸化物の第1層上の前記アモルファス酸化シリコン層と、
前記アモルファス酸化シリコン層上に形成された単結晶希土類酸化物の第2層と、
前記単結晶希土類酸化物の第2層上の半導体材料とを含む、
層構造。 - 前記単結晶希土類酸化物の第1層は前記結晶性のシリコン基板に隣接して、前記結晶性のシリコン基板の格子定数と一致する第1の格子定数を有する、請求項9に記載の層構造。
- 前記単結晶希土類酸化物の第2層は上面において、前記半導体材料の格子定数を有している、請求項9に記載の層構造。
- 前記アモルファス酸化シリコン層は、1ナノメートル〜10ナノメートルの範囲の厚みを有する、請求項9に記載の層構造。
- 前記半導体材料は、前記単結晶希土類酸化物の第2層上の半導体材料の単結晶層を含む、請求項9に記載の層構造。
- 前記半導体材料の単結晶層は、III-V材料を含む、請求項13に記載の層構造。
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US14/083,672 | 2013-11-19 | ||
US14/083,672 US8796121B1 (en) | 2013-11-19 | 2013-11-19 | Stress mitigating amorphous SiO2 interlayer |
PCT/US2014/062439 WO2015076982A2 (en) | 2013-11-19 | 2014-10-27 | Stress mitigating amorphous sio2 interlayer |
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JP6737983B2 true JP6737983B2 (ja) | 2020-08-12 |
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US (2) | US8796121B1 (ja) |
EP (1) | EP3080834B1 (ja) |
JP (1) | JP6737983B2 (ja) |
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WO (1) | WO2015076982A2 (ja) |
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US8796121B1 (en) * | 2013-11-19 | 2014-08-05 | Translucent, Inc. | Stress mitigating amorphous SiO2 interlayer |
US9613803B2 (en) | 2015-04-30 | 2017-04-04 | International Business Machines Corporation | Low defect relaxed SiGe/strained Si structures on implant anneal buffer/strain relaxed buffer layers with epitaxial rare earth oxide interlayers and methods to fabricate same |
JP6571389B2 (ja) * | 2015-05-20 | 2019-09-04 | シャープ株式会社 | 窒化物半導体発光素子およびその製造方法 |
WO2017083150A1 (en) | 2015-11-13 | 2017-05-18 | IQE, plc | Layer structures for rf filters fabricated using rare earth oxides and epitaxial aluminum nitride |
WO2017165197A1 (en) * | 2016-03-23 | 2017-09-28 | IQE, plc | Epitaxial metal oxide as buffer for epitaxial iii-v layers |
WO2017192312A1 (en) * | 2016-05-05 | 2017-11-09 | IQE, plc | Parasitic charge control for iii-n materials on silicon |
CN106057643A (zh) * | 2016-05-27 | 2016-10-26 | 清华大学 | 半导体结构以及制备半导体结构的方法 |
US10332857B2 (en) * | 2016-06-02 | 2019-06-25 | Iqe Plc | Rare earth pnictides for strain management |
US11495670B2 (en) * | 2016-09-22 | 2022-11-08 | Iqe Plc | Integrated epitaxial metal electrodes |
US10128350B2 (en) | 2016-09-22 | 2018-11-13 | Iqe Plc | Integrated epitaxial metal electrodes |
US10418457B2 (en) | 2016-09-22 | 2019-09-17 | Iqe Plc | Metal electrode with tunable work functions |
CN109524627B (zh) * | 2017-09-18 | 2021-11-05 | 上海杉杉科技有限公司 | 氧含量可控的SiOx负极材料及制备方法和锂离子电池 |
US11742416B2 (en) * | 2021-05-27 | 2023-08-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor structure and method for manufacturing the same |
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US6852575B2 (en) * | 2001-07-05 | 2005-02-08 | International Business Machines Corporation | Method of forming lattice-matched structure on silicon and structure formed thereby |
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US8039736B2 (en) * | 2008-08-18 | 2011-10-18 | Andrew Clark | Photovoltaic up conversion and down conversion using rare earths |
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US20130062610A1 (en) * | 2011-09-14 | 2013-03-14 | Andrew Clark | Lattice matched crystalline reflector |
US20130099357A1 (en) * | 2011-10-21 | 2013-04-25 | Rytis Dargis | Strain compensated reo buffer for iii-n on silicon |
US8394194B1 (en) * | 2012-06-13 | 2013-03-12 | Rytis Dargis | Single crystal reo buffer on amorphous SiOx |
US8796121B1 (en) * | 2013-11-19 | 2014-08-05 | Translucent, Inc. | Stress mitigating amorphous SiO2 interlayer |
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