JP6737193B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
- Publication number
- JP6737193B2 JP6737193B2 JP2017011592A JP2017011592A JP6737193B2 JP 6737193 B2 JP6737193 B2 JP 6737193B2 JP 2017011592 A JP2017011592 A JP 2017011592A JP 2017011592 A JP2017011592 A JP 2017011592A JP 6737193 B2 JP6737193 B2 JP 6737193B2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- semiconductor device
- temperature
- current
- defective product
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 49
- 238000004519 manufacturing process Methods 0.000 title claims description 26
- 230000002950 deficient Effects 0.000 claims description 129
- 238000000034 method Methods 0.000 claims description 14
- 230000008014 freezing Effects 0.000 claims description 4
- 238000007710 freezing Methods 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 25
- 238000007689 inspection Methods 0.000 description 21
- 238000005259 measurement Methods 0.000 description 12
- 238000009826 distribution Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 11
- 239000012535 impurity Substances 0.000 description 10
- 239000000758 substrate Substances 0.000 description 9
- 230000008859 change Effects 0.000 description 6
- 229910002808 Si–O–Si Inorganic materials 0.000 description 5
- 239000002344 surface layer Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2608—Circuits therefor for testing bipolar transistors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2608—Circuits therefor for testing bipolar transistors
- G01R31/2619—Circuits therefor for testing bipolar transistors for measuring thermal properties thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42372—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out
- H01L29/42376—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out characterised by the length or the sectional shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66325—Bipolar junction transistors [BJT] controlled by field-effect, e.g. insulated gate bipolar transistors [IGBT]
- H01L29/66333—Vertical insulated gate bipolar transistors
- H01L29/66348—Vertical insulated gate bipolar transistors with a recessed gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/66712—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/66734—Vertical DMOS transistors, i.e. VDMOS transistors with a step of recessing the gate electrode, e.g. to form a trench gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
- H01L29/7396—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions
- H01L29/7397—Vertical transistors, e.g. vertical IGBT with a non planar surface, e.g. with a non planar gate or with a trench or recess or pillar in the surface of the emitter, base or collector region for improving current density or short circuiting the emitter and base regions and a gate structure lying on a slanted or vertical surface or formed in a groove, e.g. trench gate IGBT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/402—Field plates
- H01L29/407—Recessed field plates, e.g. trench field plates, buried field plates
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Description
第1実施形態について説明する。ここでは、本実施形態にかかる製造方法によって製造される半導体装置として、トレンチゲート構造を有するIGBTを備えた半導体装置を例に挙げて説明する。
第2実施形態について説明する。本実施形態は、第1実施形態に対してトレンチゲート構造を変更したものであり、その他については第1実施形態と同様であるため、第1実施形態と異なる部分についてのみ説明する。
本発明は上記した実施形態に限定されるものではなく、特許請求の範囲に記載した範囲内において適宜変更が可能である。
2 FS層
3 コレクタ領域
5 p型領域
6 トレンチ
7 エミッタ領域
8 ゲート絶縁膜
9 ゲート電極
11 第1電極
12 第2電極
Claims (7)
- 第1導電型のドリフト層(1)と、
前記ドリフト層の一面側に形成された第2導電型のチャネル層(5)と、
前記チャネル層の上に形成された第1導電型層(7)と、
前記第1導電型層および前記チャネル層を貫通して前記ドリフト層に至るトレンチ(6)内に、ゲート絶縁膜(8)を介してゲート電極(9)が配置されたトレンチゲート構造と、
前記第1導電型層に電気的に接続される第1電極(11)と、
前記ドリフト層の前記一面と反対側となる他面側に設けられた第2電極(12)とを有し、前記ゲート電極に対してゲート電圧(Vg)を印加することで、前記第1電極と前記第2電極との間に主電流(Ic)を流す半導体装置の製造方法であって、
第1温度下において、前記主電流と前記ゲート電圧との関係を示す第1の電圧電流特性を測定することと、
前記第1の電圧電流特性に基づいて、前記ゲート電圧が前記半導体装置のオンするときの閾値以下の際にコレクタ電流が流れる電流領域である微小電流領域において、前記主電流が所定値となるときの前記ゲート電圧を第1電圧(Vth1)として算出することと、
前記第1温度と異なる第2温度下において、前記主電流と前記ゲート電圧との関係を示す第2の電圧電流特性を測定することと、
前記第2の電圧電流特性に基づいて、前記微小電流領域において、前記主電流が所定値となるときの前記ゲート電圧を第2電圧(Vth2)として算出することと、
前記第2電圧と前記第1電圧との差が判定閾値よりも大きければ良品と判定し、該判定閾値以下であれば不良品と判定することと、を含む半導体装置の製造方法。 - 前記トレンチゲート構造として、前記トレンチの底部が該トレンチの開口入口よりも幅広とされている前記半導体装置に対して適用される請求項1に記載の半導体装置の製造方法。
- 前記トレンチゲート構造として、前記トレンチの間の間隔が1.5μm以下とされている前記半導体装置に対して適用される請求項1または2に記載の半導体装置の製造方法。
- 前記トレンチゲート構造として、前記トレンチの間の間隔が1.0μm以下とされている前記半導体装置に対して適用される請求項1または2に記載の半導体装置の製造方法。
- 前記第1の電圧電流特性を測定することでは、前記第1温度となる室温下において前記第1の電圧電流特性を測定する請求項1ないし4のいずれか1つに記載の半導体装置の製造方法。
- 前記第2の電圧電流特性を測定することでは、前記第2温度となる氷点下の温度下において前記第2の電圧電流特性を測定する請求項1ないし5のいずれか1つに記載の半導体装置の製造方法。
- 前記第2の電圧電流特性を測定することでは、前記氷点下の温度として−30℃以下の温度下において前記第2の電圧電流特性を測定する請求項6に記載の半導体装置の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017011592A JP6737193B2 (ja) | 2017-01-25 | 2017-01-25 | 半導体装置の製造方法 |
PCT/JP2018/002277 WO2018139532A1 (ja) | 2017-01-25 | 2018-01-25 | 半導体装置の製造方法 |
US16/507,132 US10748822B2 (en) | 2017-01-25 | 2019-07-10 | Method for manufacturing semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017011592A JP6737193B2 (ja) | 2017-01-25 | 2017-01-25 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018119862A JP2018119862A (ja) | 2018-08-02 |
JP6737193B2 true JP6737193B2 (ja) | 2020-08-05 |
Family
ID=62979441
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017011592A Active JP6737193B2 (ja) | 2017-01-25 | 2017-01-25 | 半導体装置の製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10748822B2 (ja) |
JP (1) | JP6737193B2 (ja) |
WO (1) | WO2018139532A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7453063B2 (ja) | 2020-06-02 | 2024-03-19 | 株式会社 日立パワーデバイス | 半導体装置の製造方法および半導体装置の検査方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6476597B1 (en) * | 2000-01-18 | 2002-11-05 | Full Circle Research, Inc. | Ionizing dose hardness assurance technique for CMOS integrated circuits |
JP4967476B2 (ja) * | 2005-07-04 | 2012-07-04 | 株式会社デンソー | 半導体装置の検査方法 |
JP5045325B2 (ja) * | 2007-09-14 | 2012-10-10 | トヨタ自動車株式会社 | トランジスタの検査方法と検査装置 |
JP2009147015A (ja) | 2007-12-12 | 2009-07-02 | Hitachi Ulsi Systems Co Ltd | 半導体装置の検査方法、検査システム及び製造方法 |
JP5825201B2 (ja) * | 2012-03-05 | 2015-12-02 | 株式会社デンソー | 半導体装置およびその製造方法 |
JP6348755B2 (ja) * | 2014-04-03 | 2018-06-27 | シャープ株式会社 | 半導体トランジスタのテスト方法 |
-
2017
- 2017-01-25 JP JP2017011592A patent/JP6737193B2/ja active Active
-
2018
- 2018-01-25 WO PCT/JP2018/002277 patent/WO2018139532A1/ja active Application Filing
-
2019
- 2019-07-10 US US16/507,132 patent/US10748822B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
WO2018139532A1 (ja) | 2018-08-02 |
US10748822B2 (en) | 2020-08-18 |
JP2018119862A (ja) | 2018-08-02 |
US20190333827A1 (en) | 2019-10-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9429616B2 (en) | Test method and test arrangement | |
CN107078061B (zh) | 半导体装置的制造方法 | |
US8878258B2 (en) | Detector of biological or chemical material and corresponding array of detectors | |
US9343381B2 (en) | Semiconductor component with integrated crack sensor and method for detecting a crack in a semiconductor component | |
US11262399B2 (en) | Method of determining whether a silicon-carbide semiconductor device is a conforming product | |
CN111354779A (zh) | 半导体装置及半导体装置的制造方法 | |
JP6737193B2 (ja) | 半導体装置の製造方法 | |
JP2019161079A (ja) | 炭化珪素半導体装置および炭化珪素半導体回路装置 | |
JP4815861B2 (ja) | 半導体装置のpn接合面とトレンチの底部との位置関係を評価する評価方法 | |
US8097918B2 (en) | Semiconductor arrangement including a load transistor and sense transistor | |
JP5719182B2 (ja) | 絶縁ゲートバイポーラトランジスタの検査方法、製造方法、及びテスト回路 | |
JP2017050331A (ja) | 半導体装置および半導体装置の製造方法 | |
WO2021261521A1 (ja) | 半導体装置およびその製造方法 | |
JP4593526B2 (ja) | 半導体装置のスクリーニング方法および半導体装置 | |
US8674352B2 (en) | Overvoltage testing apparatus | |
JP2022186274A (ja) | 半導体装置の製造方法 | |
US20230236239A1 (en) | Gate voltage determination apparatus, gate voltage determination method, gate driving circuit and semiconductor circuit | |
JP7355082B2 (ja) | 試験方法および製造方法 | |
US11693044B2 (en) | Method of inspecting silicon carbide semiconductor device | |
JP7047734B2 (ja) | トレンチゲート型半導体装置の製造方法 | |
JP2019087548A (ja) | 炭化珪素半導体装置の製造方法 | |
US20240145467A1 (en) | Semiconductor device, method of manufacturing semiconductor device, and method of replacing semiconductor device | |
JP2020013822A (ja) | 半導体装置 | |
CN114843343A (zh) | 基于集成pin的碳化硅mos结构智能测热芯片及其版图结构 | |
JP2020047671A (ja) | 炭化珪素半導体装置の選別方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190116 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20191105 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191226 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200616 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200629 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 6737193 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |