JP6723298B2 - 集積されたmems直線および角加速度計 - Google Patents
集積されたmems直線および角加速度計 Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0888—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values for indicating angular acceleration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0857—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a particular shape of the suspension spring
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
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Description
200 プルーフマス
201、211、221 マス部分
215 ビーム
216 角z感知ビーム
226 直線x感知ビーム
228 直線y感知ビーム
230 中央部分
232 テザー
235 固定構造体
236 ビーム
Claims (10)
- 角および直線加速度計であって、
基板に接続された少なくとも1つのアンカーと、
複数のテザーを介して前記少なくとも1つのアンカーに連結されたプルーフマスと、
前記プルーフマスの回転運動に応答して第1の感知信号を発生するように構成された第1のキャパシタと、
前記プルーフマスの直線運動に応答して第2の感知信号を発生するように構成された第2のキャパシタと、を備え、
前記第1のキャパシタは、前記基板に接続された固定電極と、前記プルーフマスに連結された自由端ビームと、を備え、
前記プルーフマスは、中央部分、および外周を有するマス部分を備え、前記自由端ビームは、前記外周に近接した固定端および前記中央部分に近接した自由端を有し、
前記第2のキャパシタは、直線加速度に応答して前記プルーフマスの平面外運動を感知するように構成され、かつ、
前記第2のキャパシタは、前記基板上に配置された電極および前記プルーフマスの一部から形成され、
固定構造体を介して前記基板に接続された基準ビームと、前記基板上に配置された基準電極および前記基準ビームから形成された基準キャパシタと、をさらに備え、
前記基準ビームは、前記中央部分に向かって延在する自由端を有していて、
複数の基準ビームが前記中央部分に関して対称な位置に配置され、かつ複数の自由端ビームが前記中央部分に関して対称な位置に配置されている、
角および直線加速度計。 - 前記固定電極は第1の固定電極であり、かつ前記自由端ビームは第1の自由端ビームであり、前記第2のキャパシタは、前記基板に接続された第2の固定電極と、前記プルーフマスに連結された第2の自由端ビームと、を備える、請求項1に記載の角および直線加速度計。
- 前記第2の自由端ビームは固定端および自由端を有し、前記第2の自由端ビームの前記固定端は、前記プルーフマスの前記中央部分に対して前記第2の自由端ビームの前記自由端より近い、請求項2に記載の角および直線加速度計。
- 前記第1のキャパシタは、角加速度に応答して前記プルーフマスの平面外運動を感知するように構成され、前記第1のキャパシタは、前記基板上に配置された電極および前記プルーフマスの一部から形成される、請求項1に記載の角および直線加速度計。
- 角および直線加速度を感知する方法であって、
第1の感知キャパシタを通して、第1の回転軸周りの角加速度に応答して第1の感知信号を発生することによって、少なくとも1つのアンカーを介して基板に接続されたプルーフマスの回転運動を感知することと、
第2の感知キャパシタを通して、第1の軸に沿った直線加速度に応答して第2の感知信号を発生するすることによって、前記プルーフマスの直線運動を感知することと、を含み、
前記第2の感知キャパシタは、直線加速度に応答して前記プルーフマスの平面外運動を感知するように構成され、かつ、
前記第2の感知キャパシタは、前記基板上に配置された電極および前記プルーフマスの一部から形成され、
前記角および直線加速度を感知する角および直線加速度計は、固定構造体を介して前記基板に接続された基準ビームと、前記基板上に配置された基準電極および前記基準ビームから形成された基準キャパシタと、を備え、
前記基準ビームは、前記プルーフマスの中央部分に向かって延在する自由端を有していて、
複数の基準ビームが前記中央部分に関して対称な位置に配置され、かつ複数の自由端ビームが前記中央部分に関して対称な位置に配置されている、
方法。 - 前記第1の回転軸と前記第1の軸とは互いに平行である、請求項5に記載の方法。
- 前記第1の回転軸と前記第1の軸とは互いに垂直である、請求項5に記載の方法。
- 第3の感知キャパシタを通して、前記第1の軸とは異なる第2の軸に沿った直線加速度に応答して第3の感知信号を発生することによって、前記プルーフマスの直線運動を感知することをさらに含む、請求項5に記載の方法。
- 第3の感知キャパシタを通して、前記第1の回転軸とは異なる第2の回転軸に沿った角加速度に応答して第3の感知信号を発生することによって、前記プルーフマスの角運動を感知することをさらに含む、請求項5に記載の方法。
- 第4の感知キャパシタを通して、前記第1および第2の回転軸とは異なる第3の回転軸に沿った角加速度に応答して第4の感知信号を発生することによって、前記プルーフマスの角運動を感知することをさらに含む、請求項9に記載の方法。
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