JP2020052049A - 集積されたmems直線および角加速度計 - Google Patents
集積されたmems直線および角加速度計 Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0888—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values for indicating angular acceleration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0857—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a particular shape of the suspension spring
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
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Abstract
Description
200 プルーフマス
201、211、221 マス部分
215 ビーム
216 角z感知ビーム
226 直線x感知ビーム
228 直線y感知ビーム
230 中央部分
232 テザー
235 固定構造体
236 ビーム
Claims (12)
- 角および直線加速度計であって、
基板に接続された少なくとも1つのアンカーと、
第1の複数のテザーを介して前記少なくとも1つのアンカーに連結されたプルーフマスと、
第2の複数のテザーを介して前記プルーフマスに連結されたシャトルマスと、
前記プルーフマスから少なくとも部分的に形成された第1の感知キャパシタであって、前記第1の感知キャパシタは、前記プルーフマスの角運動に応答して第1の感知信号を発生するように構成されている、第1の感知キャパシタと、
前記シャトルマスから少なくとも部分的に形成された第2の感知キャパシタであって、前記第2の感知キャパシタは、前記シャトルマスの運動に応答して第2の感知信号を発生するように構成されている、第2の感知キャパシタと、を備える、角および直線加速度計。 - 前記第2の感知キャパシタは、前記シャトルマスの角運動に応答して前記第2の感知信号を発生するように構成され、
前記第2の複数のテザーは、前記シャトルマスの回転軸を画定し、前記シャトルマスは、前記回転軸に対してオフセットされた重心を有する、請求項1に記載の角および直線加速度計。 - 前記シャトルマスは、前記回転軸に対して前記シャトルマスの両端部に配置された第1および第2のマス部分を備え、前記第1および第2のマス部分は異なる重量を有し、
前記第2の感知キャパシタは、前記第1のマス部分および前記基板上に配置された第1の電極から形成され、
前記第2のマス部分および前記基板上に配置された第2の電極から形成された第3の感知キャパシタをさらに備える、請求項2に記載の角および直線加速度計。 - 前記第2の感知キャパシタは、前記シャトルマスの直線運動に応答して前記第2の感知信号を発生するように構成され、
前記第2の感知キャパシタは、前記シャトルマスに接続された自由端ビームおよび前記基板に据えつけられた固定電極から形成される、請求項1に記載の角および直線加速度計。 - 前記第1の感知キャパシタは、前記プルーフマスに接続された自由端ビームおよび前記基板に据えつけられた固定電極から形成される、請求項1に記載の角および直線加速度計。
- 前記プルーフマスは前記シャトルマスよりも重い、請求項1に記載の角および直線加速度計。
- 角および直線加速度を感知する方法であって、
第1の複数のテザーを介して、基板に接続された少なくとも1つのアンカーに連結されたプルーフマスから少なくとも部分的に形成された第1の感知キャパシタを通して、前記プルーフマスの角運動に応答して第1の感知信号を発生することによって、前記プルーフマスの角運動を感知することと、
第2の複数のテザーを介して前記プルーフマスに連結されたシャトルマスから少なくとも部分的に形成された第2の感知キャパシタを通して、前記シャトルマスの運動に応答して第2の感知信号を発生することによって、前記シャトルマスの運動を感知することと、を含む、方法。 - 前記第2の感知キャパシタは、前記シャトルマスの角運動に応答して前記第2の感知信号を発生するように構成され、
前記第2の複数のテザーは、前記シャトルマスの回転軸を画定し、前記シャトルマスは、前記回転軸に対してオフセットされた重心を有する、請求項7に記載の方法。 - 前記シャトルマスは、前記回転軸に対して前記シャトルマスの両端部に配置された第1および第2のマス部分を備え、前記第1および第2のマス部分は異なる重量を有し、
前記第2の感知キャパシタは、前記第1のマス部分および前記基板上に配置された第1の電極から形成され、
前記第2のマス部分および前記基板上に配置された第2の電極から形成された第3の感知キャパシタを通して、前記シャトルマスの角運動に応答して第3の感知信号を発生することによって、前記シャトルマスの角運動を感知することをさらに含む、請求項8に記載の方法。 - 前記第2の感知キャパシタは、前記シャトルマスの直線運動に応答して前記第2の感知信号を発生するように構成され、
前記第2の感知キャパシタは、前記シャトルマスに接続された自由端ビームおよび前記基板に据えつけられた固定電極から形成される、請求項7に記載の方法。 - 前記第1の感知キャパシタは、前記プルーフマスに接続された自由端ビームおよび前記基板に据えつけられた固定電極から形成される、請求項7に記載の方法。
- 前記プルーフマスは前記シャトルマスよりも重い、請求項7に記載の方法。
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Also Published As
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DE102018118583A1 (de) | 2019-02-14 |
JP6723298B2 (ja) | 2020-07-15 |
JP2019032324A (ja) | 2019-02-28 |
US20190049481A1 (en) | 2019-02-14 |
JP6773870B2 (ja) | 2020-10-21 |
CN109387668A (zh) | 2019-02-26 |
CN109387668B (zh) | 2021-08-13 |
DE102018118583B4 (de) | 2024-04-25 |
US10732198B2 (en) | 2020-08-04 |
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