JP6714468B2 - ダイアフラム弁 - Google Patents

ダイアフラム弁 Download PDF

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Publication number
JP6714468B2
JP6714468B2 JP2016163996A JP2016163996A JP6714468B2 JP 6714468 B2 JP6714468 B2 JP 6714468B2 JP 2016163996 A JP2016163996 A JP 2016163996A JP 2016163996 A JP2016163996 A JP 2016163996A JP 6714468 B2 JP6714468 B2 JP 6714468B2
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JP
Japan
Prior art keywords
valve seat
reciprocating member
diaphragm
valve
reciprocating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016163996A
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English (en)
Japanese (ja)
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JP2018031428A5 (enExample
JP2018031428A (ja
Inventor
板藤　寛
寛 板藤
雅之 纐纈
雅之 纐纈
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Corp
Original Assignee
CKD Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CKD Corp filed Critical CKD Corp
Priority to JP2016163996A priority Critical patent/JP6714468B2/ja
Priority to PCT/JP2017/026365 priority patent/WO2018037786A1/ja
Priority to TW106125483A priority patent/TWI732912B/zh
Publication of JP2018031428A publication Critical patent/JP2018031428A/ja
Publication of JP2018031428A5 publication Critical patent/JP2018031428A5/ja
Application granted granted Critical
Publication of JP6714468B2 publication Critical patent/JP6714468B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)
JP2016163996A 2016-08-24 2016-08-24 ダイアフラム弁 Active JP6714468B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016163996A JP6714468B2 (ja) 2016-08-24 2016-08-24 ダイアフラム弁
PCT/JP2017/026365 WO2018037786A1 (ja) 2016-08-24 2017-07-20 ダイアフラム弁
TW106125483A TWI732912B (zh) 2016-08-24 2017-07-28 隔膜閥

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016163996A JP6714468B2 (ja) 2016-08-24 2016-08-24 ダイアフラム弁

Publications (3)

Publication Number Publication Date
JP2018031428A JP2018031428A (ja) 2018-03-01
JP2018031428A5 JP2018031428A5 (enExample) 2019-06-20
JP6714468B2 true JP6714468B2 (ja) 2020-06-24

Family

ID=61246635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016163996A Active JP6714468B2 (ja) 2016-08-24 2016-08-24 ダイアフラム弁

Country Status (3)

Country Link
JP (1) JP6714468B2 (enExample)
TW (1) TWI732912B (enExample)
WO (1) WO2018037786A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102337975B1 (ko) * 2018-03-09 2021-12-10 가부시키가이샤 후지킨 밸브 장치
JP7187011B2 (ja) * 2018-09-07 2022-12-12 株式会社フジキン アクチュエータ、バルブ、流体供給システム、および半導体製造装置
DE102022003518A1 (de) * 2022-09-23 2024-03-28 Vat Holding Ag Pneumatisches gaseinlassventil mit verstellbarem anschlag
WO2025115395A1 (ja) * 2023-11-28 2025-06-05 株式会社コガネイ 流体バルブ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4499012B2 (ja) * 2005-09-30 2010-07-07 シーケーディ株式会社 複合流体制御ユニット
JP5226059B2 (ja) * 2010-11-17 2013-07-03 アドバンス電気工業株式会社 エア操作弁

Also Published As

Publication number Publication date
TWI732912B (zh) 2021-07-11
JP2018031428A (ja) 2018-03-01
TW201807337A (zh) 2018-03-01
WO2018037786A1 (ja) 2018-03-01

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