TWI732912B - 隔膜閥 - Google Patents

隔膜閥 Download PDF

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Publication number
TWI732912B
TWI732912B TW106125483A TW106125483A TWI732912B TW I732912 B TWI732912 B TW I732912B TW 106125483 A TW106125483 A TW 106125483A TW 106125483 A TW106125483 A TW 106125483A TW I732912 B TWI732912 B TW I732912B
Authority
TW
Taiwan
Prior art keywords
reciprocating member
valve seat
reciprocating
diaphragm
valve
Prior art date
Application number
TW106125483A
Other languages
English (en)
Chinese (zh)
Other versions
TW201807337A (zh
Inventor
板藤寬
纐纈雅之
Original Assignee
日商Ｃｋｄ股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商Ｃｋｄ股份有限公司 filed Critical 日商Ｃｋｄ股份有限公司
Publication of TW201807337A publication Critical patent/TW201807337A/zh
Application granted granted Critical
Publication of TWI732912B publication Critical patent/TWI732912B/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)
TW106125483A 2016-08-24 2017-07-28 隔膜閥 TWI732912B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016163996A JP6714468B2 (ja) 2016-08-24 2016-08-24 ダイアフラム弁
JP2016-163996 2016-08-24

Publications (2)

Publication Number Publication Date
TW201807337A TW201807337A (zh) 2018-03-01
TWI732912B true TWI732912B (zh) 2021-07-11

Family

ID=61246635

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106125483A TWI732912B (zh) 2016-08-24 2017-07-28 隔膜閥

Country Status (3)

Country Link
JP (1) JP6714468B2 (enExample)
TW (1) TWI732912B (enExample)
WO (1) WO2018037786A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102337975B1 (ko) * 2018-03-09 2021-12-10 가부시키가이샤 후지킨 밸브 장치
JP7187011B2 (ja) * 2018-09-07 2022-12-12 株式会社フジキン アクチュエータ、バルブ、流体供給システム、および半導体製造装置
DE102022003518A1 (de) * 2022-09-23 2024-03-28 Vat Holding Ag Pneumatisches gaseinlassventil mit verstellbarem anschlag
WO2025115395A1 (ja) * 2023-11-28 2025-06-05 株式会社コガネイ 流体バルブ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007092959A (ja) * 2005-09-30 2007-04-12 Ckd Corp 複合流体制御ユニット
JP2012107695A (ja) * 2010-11-17 2012-06-07 Advance Denki Kogyo Kk エア操作弁

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007092959A (ja) * 2005-09-30 2007-04-12 Ckd Corp 複合流体制御ユニット
JP2012107695A (ja) * 2010-11-17 2012-06-07 Advance Denki Kogyo Kk エア操作弁

Also Published As

Publication number Publication date
JP2018031428A (ja) 2018-03-01
TW201807337A (zh) 2018-03-01
WO2018037786A1 (ja) 2018-03-01
JP6714468B2 (ja) 2020-06-24

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