WO2018037786A1 - ダイアフラム弁 - Google Patents

ダイアフラム弁 Download PDF

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Publication number
WO2018037786A1
WO2018037786A1 PCT/JP2017/026365 JP2017026365W WO2018037786A1 WO 2018037786 A1 WO2018037786 A1 WO 2018037786A1 JP 2017026365 W JP2017026365 W JP 2017026365W WO 2018037786 A1 WO2018037786 A1 WO 2018037786A1
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WO
WIPO (PCT)
Prior art keywords
valve seat
diaphragm
reciprocating member
valve
diaphragm valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2017/026365
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English (en)
French (fr)
Japanese (ja)
Inventor
板藤　寛
雅之 纐纈
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Corp
Original Assignee
CKD Corp
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Filing date
Publication date
Application filed by CKD Corp filed Critical CKD Corp
Publication of WO2018037786A1 publication Critical patent/WO2018037786A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm

Definitions

  • the present disclosure relates to a diaphragm valve that connects a diaphragm valve body to a reciprocating member and opens and closes a flow path by the diaphragm valve body by reciprocating the reciprocating member.
  • a first piston portion urged in a direction approaching the valve seat by a first spring, and a slidably accommodated in the housing body the first piston portion is accommodated inside.
  • Patent Document 1 has suppressed generation
  • the one described in Patent Document 1 is the generation of particles due to the rubbing of the valve body and the valve seat due to the swing of the central axes of the first piston and the second piston (reciprocating member), and the valve body. It is impossible to suppress the generation of particles due to the slanting and hitting the valve seat.
  • the present disclosure has been made to solve these problems, and provides a diaphragm valve capable of suppressing the generation of particles due to the swing of the central axis of a reciprocating member connected to the diaphragm valve body. There is.
  • the first means for solving the above problem is a diaphragm valve, A housing in which a fluid flow path and a valve chamber are formed; In the housing, a valve seat provided annularly around the opening of the flow path with respect to the valve chamber; A resin diaphragm valve body that divides the valve chamber into a flow path and a non-flow path of the fluid, and contacts and separates from the valve seat; A reciprocating member connected to the diaphragm valve body and reciprocating in a predetermined direction which is a direction approaching and separating from the valve seat; A pressing portion that applies a force to the reciprocating member to press the diaphragm valve body against the valve seat; A direction that is formed in a thin plate shape with metal and is attached to the outer edge of the reciprocating member that penetrates in the predetermined direction, deforms and permits the reciprocating motion of the reciprocating member in the predetermined direction, and is perpendicular to the predetermined direction A regulating member for regulating the movement of the reciprocating member to Is provided.
  • the fluid flow path and the valve chamber are formed in the housing.
  • an annular valve seat is provided around the opening of the flow path with respect to the valve chamber.
  • the valve chamber is partitioned into a fluid flow path and a non-flow path by a resin diaphragm valve body, and the diaphragm valve body is brought into contact with and separated from the valve seat.
  • a reciprocating member is connected to the diaphragm valve body, and the reciprocating member is reciprocated in a predetermined direction which is a direction approaching and separating from the valve seat.
  • a force is applied to the reciprocating member by the pressing portion, and the diaphragm valve body is pressed against the valve seat.
  • the diaphragm valve body is made of resin and the diaphragm portion needs to be flexible, it can be deformed in a direction other than the direction in which the valve seat comes into contact with or separates from the valve seat. For this reason, when the reciprocating member is reciprocated in a predetermined direction, the effect that the diaphragm valve body regulates that the central axis of the reciprocating member swings is small. When the center axis of the reciprocating member is shaken, particles may be generated by rubbing the diaphragm valve body and the valve seat, or by tilting the diaphragm valve body and hitting the valve seat.
  • the reciprocating member passes through the regulating member formed in a thin plate shape with metal in the predetermined direction, and the regulating member is attached to the outer edge of the reciprocating member. Since the regulating member is formed in a thin plate shape with metal, the strength is higher than that of the diaphragm portion of the resin diaphragm valve body.
  • the restricting member deforms and allows the reciprocating motion of the reciprocating member in a predetermined direction and restricts the movement of the reciprocating member in a direction perpendicular to the predetermined direction.
  • the movement of the reciprocating member in the direction perpendicular to the predetermined direction can be regulated at the position of the regulating member.
  • the central axis of the reciprocating member may be inclined with the position of the restricting member as a fulcrum.
  • the restriction member includes a first restriction member, a second restriction member attached to an outer edge of the reciprocating member at a position farther from the valve seat than the first restriction member, and Is included. Therefore, the position of the first restricting member and the position of the second restricting member attached to the outer edge of the reciprocating member at a position away from the valve seat from the first restricting member in a direction perpendicular to the predetermined direction. The movement of the reciprocating member can be restricted. Therefore, the central axis of the reciprocating member can be prevented from being inclined, and the generation of particles can be further suppressed.
  • the first restricting member is attached to the end of the valve seat in the reciprocating member, and the second restricting member is in the reciprocating member.
  • a configuration in which the valve seat is attached to an end opposite to the valve seat can be employed. According to such a structure, the space
  • the rotation of the regulating member relative to the housing around the reciprocating member is regulated.
  • the rotation of the regulating member relative to the housing around the reciprocating member is regulated, the rotation of the reciprocating member and the diaphragm valve body can be regulated. For this reason, while being able to make the location of the diaphragm valve body which contact
  • the restricting member is a metal diaphragm formed of metal.
  • the restricting member is a metal diaphragm formed of metal, it can function as a diaphragm that suppresses the swing of the central axis of the reciprocating member and prevents fluid from entering.
  • the metal diaphragm is a corrugated metal diaphragm having a corrugated cross section in the thickness direction passing through the center.
  • the metal diaphragm is a corrugated metal diaphragm having a wavy cross-sectional shape passing through the center. For this reason, the metal diaphragm has a characteristic that it is easily deformed in the predetermined direction and is not easily deformed in a direction perpendicular to the predetermined direction. Therefore, it is possible to effectively suppress the center axis of the reciprocating member from swinging while appropriately allowing the reciprocating member to reciprocate in a predetermined direction.
  • the reciprocating member includes a first reciprocating member that reciprocates in the predetermined direction with respect to the housing, and the first reciprocating member supported by the first reciprocating member.
  • a second reciprocating member that reciprocates in a predetermined direction, and the pressing portion reciprocates the first reciprocating member in the predetermined direction with respect to the housing; and the valve seat;
  • a stopper for stopping movement of the first reciprocating member in a direction approaching the valve seat with a predetermined gap between the diaphragm valve body and the first reciprocating member in the predetermined direction with respect to the first reciprocating member;
  • a second actuator that reciprocates the two reciprocating members.
  • the first reciprocating member is moved toward the valve seat by the first actuator, and the movement is stopped by the stopper, so that there is a predetermined gap between the valve seat and the diaphragm valve body. can do.
  • the second actuator moves the second reciprocating member toward the valve seat with respect to the first reciprocating member, thereby reducing the collision between the valve seat and the diaphragm valve element.
  • a diaphragm valve body can be brought into contact with the seat.
  • the first actuator includes a first urging member that urges the first reciprocating member in a direction approaching the valve seat, and the first reciprocating member is moved by the first gas pressure.
  • a gas pressure actuator that moves in a direction away from the valve seat, wherein the second actuator includes a second biasing member that biases the second reciprocating member in a direction away from the valve seat;
  • a gas pressure actuator that moves the second reciprocating member in a direction to approach the valve seat.
  • the first urging member urges the first reciprocating member toward the valve seat. Then, the first reciprocating member is moved in a direction away from the valve seat by the first gas pressure. For this reason, by reducing the first gas pressure, the first reciprocating member can be moved in the direction approaching the valve seat, and the state in which the movement of the first reciprocating member is stopped by the stopper can be easily realized. Can do.
  • the second urging member urges the second reciprocating member in a direction away from the valve seat. Then, the second reciprocating member is moved in the direction approaching the valve seat by the second gas pressure. Therefore, by adjusting the second gas pressure, the speed at which the diaphragm valve body approaches the valve seat and the force with which the diaphragm valve body is pressed against the valve seat can be adjusted.
  • the ninth means comprises a diaphragm valve of the eighth means, and is a control device for controlling the diaphragm valve,
  • the first reciprocating member is moved closer to the valve seat by lowering the first gas pressure from the state in which the first actuator is moved away from the valve seat by the first actuator. After moving until stopped by the stopper, By raising the second gas pressure by the second actuator, the second reciprocating member is moved in a direction approaching the valve seat, and the diaphragm valve body is pressed against the valve seat.
  • the first reciprocating member is moved closer to the valve seat by reducing the first gas pressure from the state in which the first actuator is moved in the direction away from the valve seat by the first actuator. It is moved until it is stopped by the stopper. For this reason, the state in which the movement of the first reciprocating member is stopped by the stopper can be easily realized.
  • the second reciprocating member is moved in the direction approaching the valve seat, and the diaphragm valve body is pressed against the valve seat. Therefore, by adjusting the second gas pressure from a state where there is a predetermined gap between the valve seat and the diaphragm valve body, the speed at which the diaphragm valve body approaches the valve seat, and the diaphragm valve body is pressed against the valve seat. The power can be adjusted.
  • the speed at which the first actuator moves the first reciprocating member in the direction approaching the valve seat is moved in the direction in which the second actuator moves the second reciprocating member closer to the valve seat.
  • the speed is set higher than
  • the diaphragm valve body after moving the first reciprocating member in the direction approaching the valve seat until it is stopped by the stopper, the diaphragm valve body can be pressed against the valve seat at a slower speed. Therefore, the collision between the valve seat and the diaphragm valve body can be alleviated while suppressing the time required for closing the flow path by the diaphragm valve body from being increased.
  • the rising speed of the second gas pressure before the second reciprocating member starts moving in the direction approaching the valve seat is such that the second reciprocating member approaches the valve seat. It is set higher than the rising speed of the second gas pressure after the movement is started.
  • the second reciprocating member is urged by the second urging member in a direction away from the valve seat. For this reason, even when the second gas pressure is increased, while the force with which the second reciprocating member is pushed by the second gas pressure is smaller than the force with which the second urging member urges the second reciprocating member. The second reciprocating member does not start moving in the direction approaching the valve seat.
  • the second gas pressure is increased before the second reciprocating member starts moving in the direction approaching the valve seat, and the second reciprocating member starts moving in the direction approaching the valve seat. After that, the second gas pressure can be increased at a slower rate. Therefore, it is possible to prevent a collision between the valve seat and the diaphragm valve body while suppressing an increase in the time required to close the flow path by the diaphragm valve body from a state where there is a predetermined gap between the valve seat and the diaphragm valve body. Can be relaxed.
  • Sectional drawing which shows the control apparatus of a diaphragm valve in a neutral state.
  • the expanded sectional view which shows the valve seat and diaphragm valve body in a neutral state.
  • the graph which shows the relationship between 2nd port pressurization pressure and valve seat pressing force.
  • the expanded sectional view which shows the valve seat and diaphragm valve body in a closed state.
  • the time chart which shows the operating state of a diaphragm valve.
  • Sectional drawing which shows the control apparatus of a diaphragm valve in an open state.
  • a semiconductor manufacturing apparatus or the like is embodied as a control device that controls a diaphragm valve that opens and closes a flow path of a chemical solution (fluid).
  • the control device 10 includes a diaphragm valve 18, a first pressure increasing / decreasing unit 11, a second pressure increasing / decreasing unit 12, and a controller 13.
  • a chemical solution inflow passage is connected to the A port 25 of the diaphragm valve 18.
  • a chemical liquid outflow passage is connected to the B port 26 of the diaphragm valve 18.
  • Diaphragm valve 18 opens and closes the flow path of the chemical solution connected from A port 25 to B port 26. That is, the diaphragm valve 18 switches between a state in which the chemical liquid is circulated and a state in which it is blocked.
  • the controller 13 is an electronic control unit mainly composed of a microcomputer including a CPU, various memories, an input / output interface, and the like.
  • a command signal for opening and closing the diaphragm valve 18 is input to the controller 13 from a management computer (host computer) that manages the control device 10 in an integrated manner.
  • the controller 13 controls the open / close state of the diaphragm valve 18 based on these inputs.
  • the diaphragm valve 18 includes a first housing 20, a diaphragm valve body 40, a second housing 30, a first piston 62, a first compression spring 71, a rod 61, a third housing 50, a second piston 82, a second compression spring 83, A first metal diaphragm 91, a second metal diaphragm 94, and the like are provided.
  • the first housing 20 houses an A port 25 into which a chemical solution (fluid) flows and a B port 26 from which the chemical solution flows out are formed.
  • the first housing 20 is made of a fluorine resin having chemical resistance, such as PTFE (Poly-Tetra-Fluoro-Ethylene).
  • PTFE Poly-Tetra-Fluoro-Ethylene
  • the valve chamber 22 is formed as a columnar space and opens on the upper surface (predetermined surface) of the first housing 20.
  • An annular valve seat 24 is provided at the connection between the valve chamber 22 and the first flow path 21, that is, around the opening of the first flow path 21 with respect to the valve chamber 22.
  • the valve chamber 22 is divided into a flow path (flow paths 21 and 23 side) and a non-flow path (second housing 30 side) by the diaphragm valve element 40.
  • the diaphragm valve body 40 is made of a fluorine resin having chemical resistance, such as PTFE.
  • the diaphragm valve body 40 includes a valve body portion 41 and a diaphragm portion 42.
  • the valve body 41 is formed in a cylindrical shape.
  • the outer edge portion 42 a of the diaphragm portion 42 is sandwiched between the first housing 20 and the pressing member 28.
  • the pressing member 28 is formed in a cylindrical shape with a fluorine resin having chemical resistance, for example, PTFE.
  • the diaphragm valve body 40 is accommodated in the valve chamber 22, and is disposed so that the valve body portion 41 faces the valve seat 24. When the valve body 41 is pressed against the valve seat 24, the flow of the chemical solution from the first flow path 21 to the valve chamber 22 is blocked.
  • the second housing 30 is attached to the top of the first housing 20.
  • the second housing 30 is formed of stainless steel or a fluorine resin having chemical resistance.
  • the valve chamber 32 communicates with the valve chamber 22.
  • One end of the first accommodating portion 31 communicates with the valve chamber 32, and the other end of the first accommodating portion 31 communicates with the second accommodating portion 33.
  • the second housing portion 33 is open on the upper surface (predetermined surface) of the second housing 30.
  • the valve chamber 22, the valve chamber 32, the first storage portion 31, and the second storage portion 33 have the same center axis.
  • the first piston 62 is housed in the space formed by the first housing portion 31 and the second housing portion 33.
  • the first piston 62 (first reciprocating member) is formed in a cylindrical shape from metal, resin, or the like, and includes a small diameter portion 62a and a large diameter portion 62b.
  • the small-diameter portion 62a and the large-diameter portion 62b have the same center axis.
  • the small diameter portion 62 a is inserted into the first accommodating portion 31, and the large diameter portion 62 b is inserted into the second accommodating portion 33.
  • the space between the first housing portion 31 and the small diameter portion 62a is sealed by a seal member 63, and the space between the second housing portion 33 and the large diameter portion 62b is sealed by a seal member 65.
  • the central axis of the second housing part 33 and the central axis of the large-diameter part 62b coincide, and the central axis of the first housing part 31 and the central axis of the small-diameter part 62a coincide.
  • the pressure chamber 35 is connected to the first pressure increasing / decreasing unit 11 through the first port 36.
  • the first pressure increasing / decreasing unit 11 (first actuator, gas pressure actuator) is constituted by a pneumatic circuit including a compressed air supply source, an electromagnetic valve, and the like.
  • the first pressure increasing / decreasing unit 11 adjusts the pressure in the pressure chamber 35 by controlling the supply of compressed air to the pressure chamber 35 and the opening of the pressure chamber 35 to the atmosphere. Then, based on the pressure adjustment in the pressure chamber 35, a static load in the central axis direction (reciprocating direction, predetermined direction) is applied to the large diameter portion 62b (first piston 62).
  • the first pressure increasing / decreasing unit 11 urges the first piston 62 in the direction away from the valve seat 24 by the pressure of the compressed air.
  • the first pressure increasing / decreasing unit 11 is controlled by the controller 13.
  • the third housing 50 is attached to the upper part of the second housing 30.
  • the third housing 50 is formed of stainless steel or a fluorine resin having chemical resistance, such as PVDF (Poly Vinylidene Di Fluoride).
  • a third accommodating portion 55 which is a cylindrical space, is formed inside the third housing 50.
  • One end of the third accommodating portion 55 communicates with the second accommodating portion 33, and the other end of the third accommodating portion 55 communicates with the second port 56.
  • the second piston 82 is accommodated in the third accommodating portion 55.
  • the second piston 82 is formed in a cylindrical shape from metal, resin, or the like. A space between the third accommodating portion 55 and the second piston 82 is sealed by a seal member 67.
  • the portion on the second housing 30 side of the seal member 67 is connected to a breathing passage 68 that is open to the atmosphere.
  • a stopper 70 is attached between the second housing 30 and the third housing 50.
  • the stopper 70 is formed in a cylindrical shape from metal, resin, or the like, and includes an inner projecting portion 70a projecting inward and an outer projecting portion 70b projecting outward.
  • the outer overhanging portion 70 b is sandwiched between the second housing 30 and the third housing 50. That is, the stopper 70 is fixed to the second housing 30 and the third housing 50.
  • a first compression spring 71 (first urging member) is provided between the outer overhanging portion 70b and the large diameter portion 62b.
  • the first compression spring 71 urges the large-diameter portion 62b (first piston 62) in a direction to approach the valve seat 24.
  • the first housing 20, the second housing 30, and the third housing 50 constitute a housing.
  • the end of the diaphragm valve body 40 opposite to the valve seat 24 is connected to the rod 61 via a connecting member 61a.
  • the rod 61 is formed in a cylindrical shape from stainless steel, chemical-resistant fluorine resin, or the like, and is inserted into the first piston 62.
  • An intermediate member 73 is attached to the intermediate portion of the rod 61.
  • the intermediate member 73 is formed in a cylindrical shape from a metal, resin, or the like, and includes an overhanging portion 73a that projects outward.
  • the rod 61 is inserted into the intermediate member 73.
  • a second piston 82 is connected to the end of the rod 61 opposite to the diaphragm valve body 40.
  • the intermediate member 73 is sandwiched between the rod 61 and the second piston 82. That is, the intermediate member 73 is fixed to the rod 61 and the second piston 82.
  • a second compression spring 83 (second urging member) is provided between the step on the inner peripheral side of the first piston 62 and the protruding portion 73a of the intermediate member 73.
  • the second compression spring 83 urges the intermediate member 73 (rod 61, second piston 82) in a direction away from the valve seat 24. That is, the rod 61 and the second piston 82 are supported by the first piston 62 via the second compression spring 83.
  • a contact member 75 is attached to the upper part of the first piston 62 (the end opposite to the valve seat 24).
  • the contact member 75 is formed in a cylindrical shape, and includes an inner projecting portion 75a projecting inward and an outer projecting portion 75b projecting outward.
  • the inner overhang 75 a is opposed to the overhang 73 a of the intermediate member 73, and the outer overhang 75 b is opposed to the inner overhang 70 a of the stopper 70.
  • the portion inside the first piston 62 and the portion above the first piston 62 are opened to the atmosphere by the breathing hole 77.
  • the outer overhanging portion 75b of the abutting member 75 abuts on the inner overhanging portion 70a of the stopper 70 and the movement is stopped.
  • the first piston 62 is moved away from the valve seat 24 by the first pressure increasing / decreasing unit 11
  • the first piston 62 comes into contact with the inner projecting portion 70a of the stopper 70 and the movement is stopped.
  • the intermediate member 73 is moved away from the valve seat 24 by the second compression spring 83, the extension 73a of the intermediate member 73 comes into contact with the inner extension 75a of the contact member 75 and the movement is stopped. It is done.
  • the rod 61, the intermediate member 73, and the second piston 82 constitute a second reciprocating member.
  • the first reciprocating member and the second reciprocating member constitute a reciprocating member.
  • the first compression spring 71 and the second pressurizing / decreasing unit 12 constitute a pressing portion.
  • the second pressure increasing / decreasing unit 12 (second actuator, gas pressure actuator) is constituted by an electropneumatic regulator including a compressed air supply source, a solenoid valve, a vacuum source, and the like.
  • the second pressurizing / depressurizing unit 12 adjusts the pressure in the third accommodating portion 55 by controlling the supply of compressed air to the third accommodating portion 55 through the second port 56 and the release of the third accommodating portion 55 to the atmosphere. To do.
  • the static load of a center axis line direction (reciprocating direction, predetermined direction) is made to act on the 2nd piston 82 (intermediate member 73, rod 61).
  • the second pressure increasing / decreasing unit 12 urges the second piston 82 in the direction of approaching the valve seat 24 by the pressure of the compressed air.
  • the second pressure increasing / decreasing unit 12 is controlled by the controller 13.
  • a valve opening load from the first flow path 21 to the valve chamber 22 (second housing 30) acts on the diaphragm valve body 40 by a chemical solution.
  • the magnitude of the load (valve closing load) that urges the first piston 62 (rod 61, diaphragm valve body 40) in the direction in which the first compression spring 71 brings the diaphragm valve body 40 closer to the valve seat 24 is as described above. It is set larger than the valve opening load. For this reason, the rod 61 and the diaphragm valve body 40 are moved in the direction approaching the valve seat 24, and the movement is stopped by the stopper 70. In this state, as shown in FIG.
  • a predetermined gap G is formed between the valve seat 24 and the valve body portion 41 of the diaphragm valve body 40.
  • the predetermined gap G is exaggerated.
  • the predetermined gap G is set to 50 to 200 ⁇ m, preferably 50 to 100 ⁇ m.
  • the diaphragm valve body 40 is made of a fluororesin and the diaphragm portion 42 needs to be flexible, it can be deformed in directions other than the direction (predetermined direction) in contact with and away from the valve seat 24. For this reason, when the rod 61 is reciprocated in a predetermined direction, the effect that the diaphragm valve body 40 regulates that the central axis of the rod 61 swings is small. When the central axis of the rod 61 is swung, particles are generated by rubbing the valve body portion 41 and the valve seat 24 of the diaphragm valve body 40 or by tilting the valve body portion 41 against the valve seat 24. There is a fear.
  • the first metal is applied to the rod 61.
  • a diaphragm 91 and a second metal diaphragm 94 are attached.
  • the first metal diaphragm 91 (first restricting member, restricting member) and the second metal diaphragm 94 (second restricting member, restricting member) are metal diaphragms formed in a thin disc shape with a metal such as stainless steel.
  • the thickness of the metal diaphragms 91 and 94 is set to 30 to 100 ⁇ m, preferably 50 to 80 ⁇ m.
  • the metal diaphragms 91 and 94 are corrugated metal diaphragms having a corrugated shape (cross section shown in FIG. 1) in the thickness direction passing through the center thereof.
  • the rigidity (strength) of the metal diaphragms 91 and 94 is higher than that of the diaphragm portion 42 of the diaphragm valve body 40.
  • the metal diaphragms 91 and 94 are corrugated metal diaphragms, the inner peripheral side portion and the outer peripheral side portion are easily deformed relative to each other in the predetermined direction, but are not easily deformed otherwise.
  • the force by which the second compression spring 83 urges the intermediate member 73 (rod 61) away from the valve seat 24 is set to be larger than the reaction force generated by the metal diaphragms 91 and 94.
  • the first metal diaphragm 91 is attached to the end of the rod 61 on the valve seat 24 side.
  • the inner edge portion of the first metal diaphragm 91 is fixed to the outer edge of the rod 61 penetrating the first metal diaphragm 91 in the predetermined direction by a fixing member 93.
  • the outer edge portion of the first metal diaphragm 91 is fixed to the first housing 20 and the second housing 30 via the spacer 92, the pressing member 28, and the outer edge portion 42 a of the diaphragm portion 42. For this reason, the rotation of the first metal diaphragm 91 relative to the second housing 30 around the rod 61 is restricted.
  • the first metal diaphragm 91 hardly twists (is difficult to deform) in the circumferential direction. For this reason, the first metal diaphragm 91 restricts the rotation of the rod 61 around the central axis of the rod 61.
  • the first metal diaphragm 91 divides the valve chamber 32 into a portion on the diaphragm valve body 40 side and a portion on the first piston 62 side. In other words, the first metal diaphragm 91 also functions as a diaphragm that prevents fluid from entering.
  • the second metal diaphragm 94 is attached to the end of the rod 61 opposite to the valve seat 24, that is, at a position farther from the valve seat 24 than the first metal diaphragm 91. Thereby, the space
  • the inner edge portion of the second metal diaphragm 94 is fixed to the outer edge of the rod 61 penetrating the second metal diaphragm 94 in the predetermined direction via the intermediate member 73 and the second piston 82.
  • the outer edge portion of the second metal diaphragm 94 is fixed to the second housing 30 and the third housing 50 via a stopper 70.
  • the second metal diaphragm 94 partitions the second housing portion 33 into a portion on the first piston 62 side and a portion on the second piston 82 side. That is, the second metal diaphragm 94 also functions as a diaphragm that prevents fluid from entering.
  • the metal diaphragms 91, 94 move in the direction toward the valve seat 24 and the valve seat.
  • the natural state (neutral state) is not deformed in any direction away from 24.
  • the metal diaphragms 91 and 94 allow the rod 61 to reciprocate by being elastically deformed (deformed) in a direction (predetermined direction) toward and away from the valve seat 24. That is, the metal diaphragms 91 and 94 are easily elastically deformed in the direction perpendicular to the surface of the thin plate (the main surface having the largest area).
  • the metal diaphragms 91 and 94 restrict the movement of the rod 61 in the direction perpendicular to the central axis direction (predetermined direction) of the rod 61, respectively. That is, the metal diaphragms 91 and 94 hardly elastically deform (deform) (i.e., hardly deform) in the direction (radial direction) along the surface of the thin plate.
  • FIG. 3 is a graph showing the relationship between the second port pressurizing pressure and the valve seat pressing force.
  • a state where the pressurization pressure by the compressed air supplied from the second port 56 is 0 (atmospheric release state) a predetermined distance is provided between the valve seat 24 and the valve body portion 41 of the diaphragm valve body 40 as shown in FIG. A gap G is formed.
  • the pressurizing pressure is increased, the force acting on the second piston 82 becomes larger than the urging force of the second compression spring 83, and the rod 61 and the diaphragm valve body 40 move in a direction approaching the valve seat 24. Begin to.
  • the force for pressing the valve body portion 41 of the diaphragm valve body 40 against the valve seat 24 is not generated.
  • the valve body portion 41 comes into contact with the valve seat 24 as shown in FIG.
  • the pressurizing pressure is increased, the force for pressing the valve element 41 against the valve seat 24 increases as shown in FIG. Specifically, the pressing force increases in proportion to the increase in the applied pressure. For this reason, the force which presses the valve body part 41 to the valve seat 24 can be adjusted by adjusting the pressurization pressure.
  • FIG. 5 is a time chart showing the operating state of the diaphragm valve 18. The operation of bringing the diaphragm valve 18 from the fully open state to the fully closed state and then bringing the diaphragm valve 18 back to the fully open state will be described.
  • a command signal for opening the diaphragm valve 18 is transmitted from the management computer to the controller 13.
  • the operation pressure (first gas pressure) by the compressed air supplied from the first pressure increasing / decreasing unit 11 to the first port 36 by the controller 13 is set to the operation pressure P1.
  • the operating pressure P1 is a pressure that can move the first piston 62 in a direction away from the valve seat 24 against the urging force of the first compression spring 71.
  • the operation pressure (second gas pressure) by the compressed air supplied from the second pressurization / decompression unit 12 to the second port 56 by the controller 13 is set to 0 (open atmospheric pressure). For this reason, the stroke position of the valve body 41 of the diaphragm valve body 40 is a fully open position.
  • the first piston 62 is moved away from the valve seat 24.
  • the upper end portion (end portion on the stopper 70 side) of the large diameter portion 62b of the first piston 62 is in contact with the lower end portion (end portion on the first piston 62 side) of the inner overhang portion 70a of the stopper 70.
  • the intermediate member 73 is urged away from the valve seat 24 by the second compression spring 83, and the pressure of the chemical liquid acts on the diaphragm valve body 40, whereby the rod 61 and the diaphragm valve body 40 are removed from the valve seat 24. It has been moved away.
  • a gap wider than the predetermined gap G is formed between the valve seat 24 and the valve body portion 41 of the diaphragm valve body 40.
  • the metal diaphragms 91 and 94 are elastically deformed in a direction away from the valve seat 24, and restrict the movement of the rod 61 in the radial direction of the rod 61.
  • Time t1 is a time at which the operation pressure of the first pressure increasing / decreasing unit 11 is set to 0 and the valve closing operation is started, and a valve closing command is transmitted slightly before time t1 in consideration of a response delay or the like.
  • the controller 13 sets the operating pressure of the first pressure increasing / decreasing unit 11 to 0 (open atmospheric pressure). As a result, the pressure in the pressure chamber 35 decreases, and the first piston 62 and the contact member 75 are moved in the direction approaching the valve seat 24 by the biasing force of the first compression spring 71.
  • the outer projecting portion 75b of the contact member 75 contacts the inner projecting portion 70a of the stopper 70 and approaches the valve seat 24 of the first piston 62 and the contact member 75.
  • the movement to is stopped.
  • the rod 61 and the diaphragm valve body 40 are urged away from the valve seat 24 by the urging force of the second compression spring 83 and the pressure of the chemical solution.
  • the overhang portion 73 a of the intermediate member 73 is in contact with the inner overhang portion 75 a of the contact member 75.
  • a predetermined gap G is formed between the valve seat 24 and the valve body portion 41 of the diaphragm valve body 40.
  • the metal diaphragms 91 and 94 are in a natural state (neutral state) that is not deformed in either the direction approaching the valve seat 24 or the direction away from the valve seat 24.
  • the controller 13 sets the operation pressure of the second pressurization / decompression unit 12 to the operation pressure P21.
  • the second piston 82, the rod 61, and the diaphragm valve body 40 begin to move in the direction approaching the valve seat 24 against the urging force of the second compression spring 83 and the pressure of the chemical solution.
  • the controller 13 gradually increases the operating pressure of the second pressure increasing / decreasing unit 12 from P21. That is, the rising speed of the operating pressure before the second piston 82 and the rod 61 start moving in the direction approaching the valve seat 24 is after the second piston 82 and the rod 61 start moving in the direction approaching the valve seat 24.
  • the operating pressure is set higher than the rate of increase.
  • the stroke position of the valve body portion 41 of the diaphragm valve body 40 is such that the predetermined gap G becomes 0 from the position before the valve is closed where the predetermined gap G is formed between the valve seat 24 and the valve body portion 41.
  • the portion 41 gradually changes to the fully closed position where it is pressed against the valve seat. That is, the speed at which the first piston 62 is moved toward the valve seat 24 by the first compression spring 71 is the speed at which the second piston 82 and the rod 61 are moved toward the valve seat 24 by the second pressure-reducing unit 12. Is set higher than. At this time, the movement of the central axis of the rod 61 is suppressed by the metal diaphragms 91 and 94 restricting the movement of the rod 61 in the direction perpendicular to the predetermined direction.
  • the controller 13 sets the operating pressure of the second pressure increasing / decreasing unit 12 to the operating pressure P22.
  • the operating pressure P22 is set to a pressurizing pressure that can press the valve body 41 against the valve seat 24 with an optimum force in accordance with the characteristics shown in FIG.
  • Time t5 is the time when the operation pressure of the second pressure increasing / decreasing unit 12 is decreased and the valve opening operation is started, and the valve opening command is transmitted slightly before time t5 in consideration of response delay and the like.
  • the controller 13 gradually decreases the operating pressure of the second pressure-increasing / decreasing unit 12 from the operating pressure P22.
  • the pressure in the pressure chamber 57 decreases, and the second piston 82, the rod 61, and the diaphragm valve body 40 are moved away from the valve seat 24 by the urging force of the second compression spring 83 and the pressure of the chemical solution. It is done.
  • the deflection of the central axis of the rod 61 is suppressed by the metal diaphragms 91 and 94.
  • the stroke position of the valve body portion 41 of the diaphragm valve body 40 is a position before the valve is closed where a predetermined gap G is formed between the valve seat 24 and the valve body portion 41.
  • the controller 13 sets the operating pressure of the second pressure increasing / decreasing unit 12 to 0 and the operating pressure of the first pressure increasing / decreasing unit 11 to the operating pressure P1.
  • the pressure in the pressure chamber 35 rises and the first piston 62 and the contact member 75 are moved away from the valve seat 24 against the urging force of the first compression spring 71.
  • the intermediate member 73, the rod 61, and the diaphragm valve body 40 are moved in a direction away from the valve seat 24. Also at this time, the deflection of the central axis of the rod 61 is suppressed by the metal diaphragms 91 and 94.
  • a metal diaphragm 91, 94 as a regulating member formed in a thin plate shape with metal is penetrated in a predetermined direction in which the rod 61 approaches and separates from the valve seat 24, and the regulating member is attached to the outer edge of the rod 61. Yes. Since the regulating member is formed in a thin plate shape with metal, the strength is higher than that of the diaphragm portion 42 of the resin diaphragm valve body 40. The restricting member deforms and allows the rod 61 to reciprocate in a predetermined direction and restricts the movement of the rod 61 in a direction perpendicular to the predetermined direction.
  • the restriction member includes a first metal diaphragm 91 as the first restriction member, and a second as the second restriction member attached to the outer edge of the rod 61 at a position farther from the valve seat 24 than the first restriction member.
  • a metal diaphragm 94 is
  • the movement of the rod 61 can be restricted. Therefore, the center axis of the rod 61 can be prevented from being inclined, and the generation of particles can be further suppressed.
  • the first restricting member is attached to the end of the rod 61 on the valve seat 24 side, and the second restricting member is attached to the end of the rod 61 opposite to the valve seat 24.
  • interval of a 1st control member and a 2nd control member can be enlarged, and it can suppress effectively that the central axis of the rod 61 inclines.
  • the regulating member is a metal diaphragm formed of metal, it can function as a diaphragm that suppresses the swing of the central axis of the rod 61 and prevents the ingress of fluid.
  • Metal diaphragms 91 and 94 are corrugated metal diaphragms having a corrugated cross-sectional shape passing through the center. For this reason, the metal diaphragms 91 and 94 have a characteristic that they are easily deformed in the predetermined direction and are not easily deformed in a direction perpendicular to the predetermined direction. Therefore, it is possible to effectively prevent the central axis of the rod 61 from swinging while appropriately allowing the rod 61 to reciprocate in a predetermined direction.
  • the diaphragm valve body 40 After moving the first piston 62 in the direction approaching the valve seat 24 until it is stopped by the stopper 70, the diaphragm valve body 40 can be pressed against the valve seat 24 at a slower speed. Therefore, the collision between the valve seat 24 and the diaphragm valve body 40 can be alleviated while suppressing the time required to close the first flow path 21 by the diaphragm valve body 40 from being increased.
  • the rod 61 is urged in the direction away from the valve seat 24 by the urging force of the second compression spring 83 and the pressure of the chemical solution. For this reason, even if the operating pressure of the second port 56 is increased, the force by which the rod 61 is pushed by the operating pressure of the second port 56 is smaller than the force of the biasing force of the second compression spring 83 and the pressure of the chemical liquid. The rod 61 does not start moving in the direction approaching the valve seat 24. In this regard, the operating pressure of the second port 56 is increased before the rod 61 starts moving in the direction approaching the valve seat 24, and the speed slower than that after the rod 61 starts moving in the direction approaching the valve seat 24. The operating pressure is increased.
  • valve seat 24 is prevented from increasing the time required to close the first flow path 21 by the diaphragm valve body 40 from the state where the predetermined gap G is between the valve seat 24 and the diaphragm valve body 40. And the diaphragm valve body 40 can be mitigated.
  • the operating pressure of the second port 56 can be gradually increased at the same speed before and after the rod 61 starts moving in the direction approaching the valve seat 24.
  • the increase in the operation pressure of the second port 56 can be started slightly before the operation pressure of the first port 36 becomes 0 (predetermined time).
  • the metal diaphragms 91 and 94 are not limited to corrugated metal diaphragms but may be flat metal diaphragms formed in a flat plate shape.
  • the material of the metal diaphragms 91 and 94 is not limited to stainless steel, and Ti, Al, Cu, or the like can also be employed.
  • the metal diaphragms 91 and 94 may not have the diaphragm function, but may have only the function of the regulating member.
  • the metal diaphragms 91 and 94 can be attached not only to both ends in the central axis direction of the rod 61 but also to an intermediate portion of the rod 61 or the like. Even in that case, it is desirable that the distance between the first metal diaphragm 91 and the second metal diaphragm 94 is wide. In addition to the first metal diaphragm 91 and the second metal diaphragm 94, a similar third metal diaphragm or fourth metal diaphragm can be provided.
  • the fluid that switches between the flow state and the shut-off state by the diaphragm valve 18 is not limited to a chemical solution, and other liquids such as pure water or gas can also be employed. And according to the kind of fluid, as a material of the diaphragm valve body 40, not only a fluororesin but other resin can also be employ
  • the gas pressure is not limited to the pressure by compressed air, and the pressure by compressed nitrogen or the like can also be adopted.
  • the actuator for reciprocating the pistons 62 and 82 in the direction of approaching and separating from the valve seat 24 is not limited to a gas pressure actuator, and an electromagnetic actuator, a piezo element actuator, or the like can also be employed.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Fluid-Driven Valves (AREA)
PCT/JP2017/026365 2016-08-24 2017-07-20 ダイアフラム弁 Ceased WO2018037786A1 (ja)

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WO2025115395A1 (ja) * 2023-11-28 2025-06-05 株式会社コガネイ 流体バルブ

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WO2019171604A1 (ja) * 2018-03-09 2019-09-12 株式会社フジキン バルブ装置
JP7187011B2 (ja) * 2018-09-07 2022-12-12 株式会社フジキン アクチュエータ、バルブ、流体供給システム、および半導体製造装置
DE102022003518A1 (de) * 2022-09-23 2024-03-28 Vat Holding Ag Pneumatisches gaseinlassventil mit verstellbarem anschlag

Citations (1)

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JP2007092959A (ja) * 2005-09-30 2007-04-12 Ckd Corp 複合流体制御ユニット

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JP5226059B2 (ja) * 2010-11-17 2013-07-03 アドバンス電気工業株式会社 エア操作弁

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
JP2007092959A (ja) * 2005-09-30 2007-04-12 Ckd Corp 複合流体制御ユニット

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025115395A1 (ja) * 2023-11-28 2025-06-05 株式会社コガネイ 流体バルブ

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